A conveying device for a coating machine and a conveying method thereof

By using a transfer robot unit in conjunction with a Z-axis lifting mechanism and a ceramic toothed fork, along with RFID scanning and ion wind static elimination, the compatibility issues of the coating machine's transfer device and the protection of the coating surface were resolved, achieving efficient and clean transfer of the coating process.

CN122784367APending Publication Date: 2026-09-18SHANGHAI JIUYING INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202611182903.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-08-05
Publication Date
2026-09-18

AI Technical Summary

Technical Problem

Existing coating machines suffer from poor workpiece compatibility, easy damage to the coating surface, lack of effective cleaning and static electricity removal measures, and insufficient automation, resulting in low transmission efficiency and failing to meet the stringent requirements of modern coating processes for high yield and high production lines.

Method used

The system employs a transfer robot unit and a Z-axis lifting mechanism in conjunction with a ceramic toothed fork to enable rapid switching between 8-inch square glass substrates and 12-inch round wafers. It combines an RFID scanning module and an environmental sensing sensor for precise detection, and sets up an ion wind static elimination unit to eliminate static electricity. A pre-alignment unit performs non-contact optical detection to ensure protection of the coated surface.

Benefits of technology

It enables a single device to be compatible with multiple workpieces, improves coating yield, reduces equipment procurement costs and floor space, maintains a Class 100 clean environment, improves transmission efficiency and automation, and prevents coating surface damage and electrostatic contamination.

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Abstract

The application discloses a transmission device for a coating machine and a transmission method thereof, and relates to the field of semiconductors.The transmission device comprises a transmission robot unit located inside a frame unit, the transmission robot unit comprises at least a wafer transmission manipulator arranged inside the frame unit, the wafer transmission manipulator is provided with two output ends, the end portions of the two output ends are provided with ceramic prongs with different sizes, the wafer transmission manipulator is used for driving the ceramic prongs to perform active operation, and the transmission device further comprises a loading port unit arranged through the front end of the frame unit.The application is suitable for 8-inch square glass substrates and 8-inch or 12-inch circular wafer single-table equipment, covers three types of mainstream coating workpieces, does not need multiple equipment to perform size specification operation, reduces factory occupancy and equipment procurement cost, can be quickly switched, has high switching speed, does not need to replace tooling when changing types, is suitable for photovoltaic, semiconductor and display panel multi-category coating flexible production.
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