Back leaning distance measuring device of clamping type optical system with focus

Abstract

The utility model provides a focus card type optical system rear leaning distance measuring device, which comprises a collimator with an optical axis arranged along the X direction, an XY sliding table, an electron microscope and a first measuring assembly used for measuring the X-direction position of the X-axis sliding table, and is characterized in that the optical axis of the electron microscope is arranged along the X direction; and the electron microscope is arranged at the output end of the XY sliding table. According to the utility model, the measurement precision of the back leaning distance of the focus card type optical system can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of back distance measurement of a card-type optical system with a focus, in particular to a back distance measurement device of a card-type optical system with a focus. Background Art

[0002] refer to Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the three-dimensional structure of the card-type optical system. Figure 2 It is a cross-sectional view of a card-type optical system. The card-type optical system generally has a support surface position for installation and an optical focal plane. The distance between the optical focal plane and the support surface is the back support distance of the card-type optical system.

[0003] In the existing card-type optical system, during the installation and adjustment process, after the system wave aberration is debugged, the interferometer is directly moved so that the laser spot of the interferometer hits the installation end face. When the laser spot is the smallest on the installation end face, it is determined as the surface position of the measured system. When the interferometer measures the best position of the card-type optical system wave aberration, it is determined as the focal position. The back distance of the card-type optical system can be obtained by measuring the difference between the surface position and the focal position. However, the back distance obtained by such measurement has a certain subjective judgment error because it requires the human eye to judge the size of the laser spot on the installation end face. At the same time, the laser light intensity also affects the judgment of the spot size, resulting in a large measurement error of the back distance. In addition, the frequent movement of the interferometer will have a certain impact on the measurement accuracy of the interferometer, resulting in a large measurement error of the back distance.

[0004] Therefore, it is necessary to develop a new back distance measuring device for a focused card-type optical system to improve the measurement accuracy of the back distance of the focused card-type optical system. Utility Model Content

[0005] The utility model aims to provide a device for measuring the back distance of a focus card type optical system, so as to solve the problem of poor measurement accuracy of the back distance of the focus card type optical system.

[0006] In order to solve the above technical problems, the utility model provides a back distance measuring device for a focused card-type optical system, including a parallel light tube whose optical axis is arranged along the X direction, and also including an XY slide, an electron microscope and a first measuring component for measuring the X-direction position of the X-axis slide, wherein the optical axis of the electron microscope is arranged along the X direction, and the electron microscope is arranged on the output end of the XY slide.

[0007] Optionally, a second measuring component for measuring the Y-axis position of the Y-axis slide is also included.

[0008] Optionally, the X-axis slide is a servo transmission assembly, including a base plate, a first rotation driver, a first coupling, a first transmission screw and a first slide, the first rotation driver drives the first transmission screw to rotate through the first coupling, the first transmission screw drives the first slide to move, the Y-axis slide is arranged on the first slide, the first rotation driver is arranged on the base plate, and the first transmission screw is rotationally connected to the base plate.

[0009] Optionally, the X-axis slide also includes a first guide rail, the first slide is slidably connected to the first guide rail, and the first guide rail is arranged on the base plate.

[0010] Optionally, the first rotation driver is a servo motor.

[0011] Optionally, the first measuring component is a first grating ruler, the scale grating of the first grating ruler is arranged on the base plate, and the first reading head of the first grating ruler is arranged on the first slide.

[0012] Optionally, the Y-axis slide is a servo transmission assembly, including a second rotary drive, a second coupling, a second transmission screw and a second slide, the second rotary drive drives the second transmission screw to rotate through the second coupling, the second transmission screw drives the second slide to move, the electron microscope is arranged on the second slide, the second rotary drive is arranged on the first slide, and the second transmission screw is rotationally connected to the first slide.

[0013] Optionally, the Y-axis slide also includes a second guide rail, the second slide is slidably connected to the second guide rail, and the second guide rail is arranged on the first slide.

[0014] Optionally, the second rotation driver is a servo motor.

[0015] Optionally, it also includes a second measuring component for measuring the Y-axis position of the Y-axis slide, the second measuring component is a second grating ruler, the scale grating of the second grating ruler is set on the first slide, and the second reading head of the second grating ruler is set on the second slide.

[0016] The utility model provides a focus card type optical system back distance measuring device, which has the following beneficial effects:

[0017] Since the optical axis direction of the collimator is arranged along the X direction, the optical axis of the electron microscope is arranged along the X direction, and the electron microscope is arranged on the output end of the XY slide, the optical axis of the collimator is arranged in parallel with the optical axis of the electron microscope. When the focus card type optical system to be measured is arranged between the collimator and the electron microscope, and the optical axis of the focus card type optical system to be measured is parallel to the optical axis of the collimator, the electron microscope can be used to detect the clear image of the collimator target to determine the focal position of the measured system, and the electron microscope can be used to clearly image the mounting surface to confirm the surface position of the focus card type optical system to be measured, and The position of the electron microscope at the focal position and the position of the electron microscope at the back surface are measured by the first measuring component, and the difference between the position of the electron microscope at the focal position and the position of the electron microscope at the back surface is calculated to obtain the back distance of the measured focused card-type optical system; since the original subjective judgment method of determining the position by judging the size of the laser spot emitted by the interferometer is directly converted into the method of using electron microscope imaging to determine the accurate position of the back distance during the entire measurement process, the measurement accuracy is relatively high; in addition, the back distance measuring device for the focused card-type optical system is simple to operate and highly efficient, and can be widely used in the back distance measurement of various optical lenses. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the card-type optical system;

[0019] Figure 2 It is a cross-sectional view of the card-type optical system;

[0020] Figure 3 It is a structural schematic diagram of the embodiment of the utility model when the back distance measuring device of the focus card type optical system measures the focus position;

[0021] Figure 4 It is a structural schematic diagram of the embodiment of the utility model when the back distance measuring device of the focus card type optical system measures the back surface position;

[0022] Figure 5 It is a structural schematic diagram of a Y-axis slide table with a focus card type optical system back distance measuring device in an embodiment of the utility model.

[0023] Description of reference numerals:

[0024] 100-parallel light tube; 200-X-axis slide; 300-Y-axis slide; 310-second rotary drive; 320-second coupling; 330-second transmission screw; 340-second slide; 350-second guide rail; 400-electron microscope; 500-first measuring component; 600-second measuring component; 700-focused card-type optical system. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] refer to Figure 3 , Figure 4 and Figure 5 , Figure 3 This is a schematic diagram of the structure of the embodiment of the utility model when the focus position is measured by the back distance measuring device of the focus card type optical system. Figure 4 This is a schematic diagram of the structure of the embodiment of the utility model when the back distance measuring device of the focus card type optical system measures the back surface position. Figure 5 It is a structural schematic diagram of a Y-axis slide 300 with a focus card type optical system back distance measuring device in an embodiment of the utility model. This embodiment provides a focus card type optical system back distance measuring device, including a parallel light tube 100 with an optical axis arranged along the X direction, an XY slide 200, an electron microscope 400 and a first measuring component 500 for measuring the X-direction position of the X-axis slide, the optical axis of the electron microscope 400 is arranged along the X direction, and the electron microscope 400 is arranged on the output end of the XY slide.

[0032] Since the optical axis direction of the collimator 100 is arranged along the X direction, the optical axis of the electron microscope 400 is arranged along the X direction, and the electron microscope 400 is arranged on the output end of the XY slide, the optical axis of the collimator 100 is arranged in parallel with the optical axis of the electron microscope 400. When the focus card type optical system 700 to be measured is arranged between the collimator 100 and the electron microscope 400, and the optical axis of the focus card type optical system 700 to be measured is parallel to the optical axis of the collimator 100, the electron microscope 400 can detect the clear image of the target of the collimator 100 to determine the focal position of the measured system, and the electron microscope 400 can clearly image the mounting surface to confirm that the focus card type optical system to be measured The back-to-face position of the electron microscope 400 is measured, and the position of the electron microscope 400 at the focus position and the position of the electron microscope 400 at the back-to-face are measured by the first measuring component 500, and the difference between the position of the electron microscope 400 at the focus position and the position of the electron microscope 400 at the back-to-face is calculated to obtain the back-to-face distance of the measured focused card-type optical system 700; since the original subjective judgment method of determining the position by judging the size of the laser spot emitted by the interferometer is directly converted into the method of using the electron microscope 400 imaging to determine the accurate position of the back-to-face distance during the entire measurement process, the measurement accuracy is relatively high; in addition, the back-to-face distance measuring device for the focused card-type optical system is simple to operate and highly efficient, and can be widely used in the back-to-face distance measurement of various optical lenses.

[0033] Preferably, the focus card type optical system back distance measuring device also includes a second measuring component 600 for measuring the Y-axis position of the Y-axis slide 300, so that the position of the electron microscope 400 in the direction perpendicular to the optical axis can be measured, which is easy to operate.

[0034] Preferably, the X-axis slide 200 is a servo transmission assembly, including a base plate, a first rotation driver, a first coupling, a first transmission screw and a first slide, the first rotation driver drives the first transmission screw to rotate through the first coupling, the first transmission screw drives the first slide to move, the Y-axis slide 300 is arranged on the first slide, the first rotation driver is arranged on the base plate, and the first transmission screw is rotatably connected to the base plate.

[0035] Furthermore, the X-axis slide 200 also includes a first guide rail, the first slide is slidably connected to the first guide rail, and the first guide rail is arranged on the bottom plate.

[0036] The first rotation driver is a servo motor.

[0037] Preferably, the Y-axis slide 300 is a servo transmission assembly, including a second rotational driver 310, a second coupling 320, a second transmission screw 330 and a second slide 340. The second rotational driver 310 drives the second transmission screw 330 to rotate through the second coupling 320, and the second transmission screw 330 drives the second slide 340 to move. The electron microscope 400 is arranged on the second slide 340, the second rotational driver 310 is arranged on the first slide, and the second transmission screw 330 is rotationally connected to the first slide.

[0038] Furthermore, the Y-axis slide 300 also includes a second guide rail 350, the second slide 340 is slidably connected to the second guide rail 350, and the second guide rail 350 is arranged on the first slide.

[0039] The second rotation driver 310 is a servo motor.

[0040] The first measuring component 500 is a first grating ruler, the scale grating of the first grating ruler is arranged on the base plate, and the first reading head of the first grating ruler is arranged on the first slide.

[0041] The second measuring component 600 is a second grating ruler, the scale grating of the second grating ruler is set on the first slide, and the second reading head of the second grating ruler is set on the second slide 340.

[0042] In this embodiment, the working process of the focus card type optical system back distance measuring device is as follows:

[0043] In the first step, the focus card type optical system 700 to be tested is installed in front of the collimator 100, requiring that the focus card type optical system 700 to be tested is directly opposite to the light outlet of the collimator 100, that is, the optical axis of the focus card type optical system 700 to be tested is coaxial with the optical axis of the collimator 100.

[0044] In the second step, the electron microscope 400 is installed behind the focal card type optical system 700 to be measured, and the moving path of the X-axis slide table 200 is required to be parallel to the optical axis of the focal card type optical system 700 to be measured.

[0045] The third step is to adjust the position of the electron microscope 400 through the Y-axis slide 300 so that the electron microscope 400 can observe the target on the parallel light tube 100 through the focus of the focus card optical system 700 being measured, and use the automatic focusing function to make the electron microscope 400 form a clear image of the target, and record the precise position reading a of the first measuring component 500 on the current X-axis slide 200.

[0046] The fourth step is to adjust the position of the electron microscope 400 through the Y-axis slide 300 so that the electron microscope 400 can clearly image the mounting surface of the measured focus card optical system 700, and use the automatic focusing function to make the electron microscope 400 form a clear image of the mounting surface, and record the precise position reading b of the first measuring component 500 on the current X-axis slide 200.

[0047] Step 5: Calculate the back distance of the system under test: |ab|.

[0048] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A device for measuring the back distance of a focal card optical system, comprising a collimator arranged along the X direction with the optical axis, characterized in that: It also includes an XY slide, an electron microscope and a first measuring component for measuring the X-direction position of the X-axis slide. The optical axis of the electron microscope is arranged along the X direction, and the electron microscope is arranged on the output end of the XY slide.

2. The back distance measuring device of the focused card type optical system according to claim 1, characterized in that: It also includes a second measuring component for measuring the Y-axis position of the Y-axis slide.

3. The back distance measuring device of the focused card type optical system according to claim 1, characterized in that: The X-axis slide is a servo transmission assembly, including a base plate, a first rotation driver, a first coupling, a first transmission screw and a first slide. The first rotation driver drives the first transmission screw to rotate through the first coupling, and the first transmission screw drives the first slide to move. The Y-axis slide is arranged on the first slide, the first rotation driver is arranged on the base plate, and the first transmission screw is rotationally connected to the base plate.

4. The back distance measuring device of the focused card type optical system according to claim 3, characterized in that: The X-axis slide also includes a first guide rail, the first slide is slidably connected to the first guide rail, and the first guide rail is arranged on the bottom plate.

5. The back distance measuring device of the focused card type optical system according to claim 3, characterized in that: The first rotation driver is a servo motor.

6. The device for measuring the back distance of a focused card-type optical system according to claim 3, characterized in that: The first measuring component is a first grating ruler, the scale grating of the first grating ruler is arranged on the base plate, and the first reading head of the first grating ruler is arranged on the first slide.

7. The back distance measuring device of the focused card type optical system according to claim 3, characterized in that: The Y-axis slide is a servo transmission assembly, including a second rotary driver, a second coupling, a second transmission screw and a second slide. The second rotary driver drives the second transmission screw to rotate through the second coupling, and the second transmission screw drives the second slide to move. The electron microscope is arranged on the second slide, the second rotary driver is arranged on the first slide, and the second transmission screw is rotationally connected to the first slide.

8. The back distance measuring device of the focused card type optical system according to claim 7, characterized in that: The Y-axis slide also includes a second guide rail, the second slide is slidably connected to the second guide rail, and the second guide rail is arranged on the first slide.

9. The device for measuring the back distance of a focused card-type optical system according to claim 7, characterized in that: The second rotation driver is a servo motor.

10. The back distance measuring device of a focused card type optical system according to claim 7, characterized in that: It also includes a second measuring component for measuring the Y-axis position of the Y-axis slide, the second measuring component is a second grating ruler, the scale grating of the second grating ruler is set on the first slide, and the second reading head of the second grating ruler is set on the second slide.

Images