Induction circuit device, liquid leakage monitoring system and semiconductor process system

Abstract

The utility model relates to an induction circuit device, a liquid leakage monitoring system and a semiconductor process system. The liquid leakage monitoring system comprises the induction circuit device, a force bearing device and an alarm device, the force bearing device is arranged above the induction circuit device, is in contact connection with the induction circuit device and is used for moving downwards in the vertical direction under the action of gravity; and the alarm device is in contact connection with the induction circuit device and is used for giving an alarm under the control of the induction circuit device. The liquid leakage alarm device has the advantages that the force bearing device can move downwards under the gravity action of liquid, so that a circuit of the induction circuit device is switched on, the circuit is switched on according to the relay principle of the induction circuit device, and the alarm device works, so that a worker is reminded of equipment faults and liquid leakage conditions; the problems that no liquid leakage alarm device is arranged in the gas holder, manual checking is needed, and the personal safety of workers is affected are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor process, in particular to an induction circuit device, a liquid leakage monitoring system and a semiconductor process system. Background Art

[0002] TEOS liquid refers to ethyl silicate, which is a colorless, transparent liquid with a special odor. This liquid is stable in the absence of water, decomposes into ethanol and silicic acid when it comes into contact with water, becomes turbid in humid air, and is soluble in organic solvents such as alcohol and ether. The molecular formula of TEOS is (C2H5O)4Si, the melting point is -77℃, and the boiling point is 168.1℃; TEOS is toxic and has strong irritation to human eyes and respiratory tract.

[0003] TEOS is widely used in the semiconductor industry. It is used as a substrate when manufacturing transistors and can be used as an excellent solvent. When manufacturing semiconductor devices, ethyl silicate needs to be soaked in ethyl orthosilicate to remove dirt and impurities on the surface, while increasing the flatness and transmittance of the silicon wafer surface to ensure the quality of semiconductor transistors. In addition, ethyl orthosilicate can also be used as a packaging material for liquid crystal displays. It is applied to a glass substrate by spraying or dripping to form a liquid crystal layer to display images.

[0004] There is no alarm device installed in the existing gas cabinet. When TEOS leakage occurs, the staff often need to directly check the inside of the gas cabinet to check the leakage, which affects the personal safety of the staff.

[0005] At present, there is no effective solution to the problems existing in the relevant technology, such as the lack of leakage alarm device inside the gas cabinet, which requires manual inspection and may affect the personal safety of the staff. Utility Model Content

[0006] The purpose of the utility model is to provide an induction circuit device, a leakage monitoring system and a semiconductor process system to address the deficiencies in the prior art, so as to solve the problems existing in the related art such as the lack of a leakage alarm device inside the gas cabinet and the need for manual inspection, which may affect the personal safety of the staff.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] In a first aspect, an inductive circuit device is provided, comprising:

[0009] A first circuit unit, wherein an input end of the first circuit unit is disposed at the bottom of the load-bearing device and is used to connect to the first relay circuit when in contact with the load-bearing device;

[0010] a first relay unit, the first relay unit being connected to the first circuit unit and being used to generate magnetism when the first circuit unit is connected to the first relay circuit;

[0011] The first switch unit is arranged on the top of the first relay unit and is used for contacting and connecting with the alarm device to activate the alarm device when the first relay unit has magnetism.

[0012] In some embodiments, the first switch unit includes:

[0013] a first bottom plate component, the first relay unit being disposed on the top of the first bottom plate component;

[0014] a first switch element, the first switch element being disposed on the top of the first relay unit and being used for approaching the first relay unit when the first relay unit has magnetism;

[0015] a first resetting element, the first resetting element being connected to the first bottom plate element and the first switch element respectively, and being used for moving the first switch element away from the first relay unit when the first relay unit loses its magnetism;

[0016] a first insulating element, the first insulating element being disposed at an end of the first switching element;

[0017] A first connecting element is arranged at an end of the first insulating element, and is used to contact and connect with the alarm device to activate the alarm device when the first switching element is close to the first relay unit, and to disconnect from the alarm device to shut down the alarm device when the first switching element is away from the first relay unit.

[0018] In some of the embodiments, it also includes:

[0019] a first elastic unit, wherein the first elastic unit is arranged at an input end of the first circuit unit;

[0020] A second circuit unit, wherein an input end of the second circuit unit is arranged at the bottom of the load-bearing device, and a height of the input end of the second circuit unit is arranged lower than a height of the first circuit unit, and is used for connecting the second relay circuit when in contact with the load-bearing device;

[0021] a second relay unit, the second relay unit being connected to the second circuit unit and configured to generate magnetism when the second circuit unit is connected to the second relay circuit;

[0022] The second switch unit is arranged on the top of the second relay unit and is used for contacting and connecting with the alarm device to activate the alarm device when the second relay unit has magnetism.

[0023] In some embodiments, the second switch unit includes:

[0024] a second bottom plate member, the second relay unit being disposed on the top of the second bottom plate member;

[0025] a second switch element, the second switch element being disposed on the top of the second relay unit and being used for approaching the second relay unit when the second relay unit has magnetism;

[0026] a second resetting element, the second resetting element being connected to the second bottom plate element and the second switch element respectively, and being used for moving the second switch element away from the second relay unit when the second relay unit loses its magnetism;

[0027] a second insulating element, the second insulating element being disposed at an end of the second switching element;

[0028] A second connecting element is arranged at the end of the second insulating element, and is used to contact and connect with the alarm device to activate the alarm device when the second switch element is close to the second relay unit, and to disconnect from the alarm device to shut down the alarm device when the second switch element is far away from the second relay unit.

[0029] In a second aspect, a liquid leakage monitoring system is provided, comprising:

[0030] The induction circuit device according to the first aspect;

[0031] A load-bearing device, which is disposed above the sensing circuit device and is in contact connection with the sensing circuit device, and is used to move downward in a vertical direction under the action of gravity;

[0032] An alarm device is contact-connected with the induction circuit device and is used for issuing an alarm under the control of the induction circuit device.

[0033] In some of the embodiments, the load-bearing device comprises:

[0034] A load-bearing unit, the load-bearing unit is arranged above the sensing circuit device and is used to move downward in a vertical direction under the action of gravity;

[0035] A base unit, the base unit is arranged below the load-bearing unit and located on the side of the induction circuit device;

[0036] a second elastic unit, the second elastic unit being connected to the load-bearing unit and the base unit respectively, and being used for moving the load-bearing unit upward in a vertical direction when the load-bearing unit is not subjected to gravity;

[0037] The first connecting unit is arranged at the bottom of the load-bearing unit and is contact-connected with the first circuit unit of the induction circuit device so that the first circuit unit is connected to the first relay circuit.

[0038] In some embodiments, the alarm device comprises:

[0039] a third circuit unit, the third circuit unit being in contact connection with the first switch unit of the sensing circuit device;

[0040] A first alarm unit, wherein the first alarm unit is connected to the third circuit unit and is used for issuing an alarm.

[0041] In some of the embodiments, the load-bearing device further comprises:

[0042] The second connecting unit is arranged at the bottom of the load-bearing unit and is contact-connected with the second circuit unit of the sensing circuit device.

[0043] In some of the embodiments, the load-bearing device further comprises:

[0044] An insulating unit is disposed between the first connecting unit and the second connecting unit to prevent the first connecting unit from accidentally touching the second connecting unit.

[0045] In some of the embodiments, the alarm device further comprises:

[0046] a fourth circuit unit, the fourth circuit unit being in contact connection with the second switch unit of the induction circuit device;

[0047] A second alarm unit, wherein the second alarm unit is connected to the fourth circuit unit and is used for issuing an alarm.

[0048] In some of the embodiments, the load-bearing device further comprises:

[0049] A liquid holding unit is arranged on the top of the load-bearing unit and is used for collecting leaked liquid.

[0050] In a third aspect, a semiconductor process system is provided, comprising:

[0051] A gas cabinet, wherein the gas cabinet is arranged vertically;

[0052] As in the liquid leakage monitoring system described in the second aspect, the sensing circuit device and the load-bearing device of the liquid leakage monitoring system are arranged at the bottom inside the gas cabinet, and the alarm device of the liquid leakage monitoring system is arranged outside the gas cabinet.

[0053] The utility model adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0054] The utility model provides an induction circuit device, a liquid leakage monitoring system and a semiconductor process system. A load-bearing device is used to move downward under the gravity of a liquid, so that the circuit of the induction circuit device is connected. The circuit is connected by the relay principle of the induction circuit device, so that an alarm device works to remind staff members of equipment failures and liquid leakages, thereby solving the problem of no liquid leakage alarm device inside the gas cabinet, which requires manual inspection and may affect the personal safety of staff members. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 is a schematic diagram of an induction circuit device according to an embodiment of the utility model (I);

[0056] Figure 2 is a schematic diagram of a first switch unit according to an embodiment of the utility model;

[0057] Figure 3 is a schematic diagram of an induction circuit device according to an embodiment of the utility model (II);

[0058] Figure 4 is a schematic diagram of a second switch unit according to an embodiment of the utility model;

[0059] Figure 5 is a schematic diagram of a liquid leakage monitoring system according to an embodiment of the utility model;

[0060] Figure 6 is a schematic diagram of a load-bearing device according to an embodiment of the utility model;

[0061] Figure 7 is a schematic diagram of an alarm device according to an embodiment of the utility model;

[0062] Figure 8 It is a schematic diagram of a semiconductor process according to an embodiment of the utility model.

[0063] The accompanying drawings are denoted as follows: 1000, a liquid leakage monitoring system;

[0064] 1100, induction circuit device;

[0065] 1110, a first circuit unit;

[0066] 1120, first relay unit;

[0067] 1130, first switch unit; 1131, first bottom plate element; 1132, first switch element; 1133, first reset element; 1134, first insulation element; 1135, first connection element;

[0068] 1140, first elastic unit;

[0069] 1150, second circuit unit;

[0070] 1160, second relay unit;

[0071] 1170, second switch unit; 1171, second bottom plate element; 1172, second switch element; 1173, second reset element; 1174, second insulation element; 1175, second communication element;

[0072] 1200, load-bearing device; 1210, load-bearing unit; 1220, base unit; 1230, second elastic unit; 1240, first connecting unit; 1250, second connecting unit; 1260, insulating unit; 1270, liquid containing unit;

[0073] 1300, alarm device; 1310, third circuit unit; 1320, first alarm unit; 1330, fourth circuit unit; 1340, second alarm unit;

[0074] 2000. Gas cabinet. DETAILED DESCRIPTION

[0075] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0076] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0077] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0078] Example 1

[0079] This embodiment relates to the induction circuit device of the utility model.

[0080] An illustrative embodiment of the present utility model is as follows: Figure 1As shown, an induction circuit device 1100 includes a first circuit unit 1110, a first relay unit 1120 and a first switch unit 1130. The input end of the first circuit unit 1110 is arranged at the bottom of the load-bearing device, and is used to connect the first relay circuit when in contact with the load-bearing device; the first relay unit 1120 is connected to the first circuit unit 1110, and is used to generate magnetism when the first circuit unit 1110 is connected to the first relay circuit; the first switch unit 1130 is arranged at the top of the first relay unit 1120, and is used to contact and connect with the alarm device to activate the alarm device when the first relay unit 1120 has magnetism.

[0081] Both ends of the first circuit unit 1110 are in contact connection with the load-bearing device.

[0082] In the present invention, the first relay unit 1120 is an electromagnetic relay.

[0083] like Figure 2 As shown, the first switch unit 1130 includes a first base element 1131 , a first switch element 1132 , a first reset element 1133 , a first insulating element 1134 and a first connecting element 1135 . Among them, a first relay unit 1120 is arranged on the top of the first base element 1131; the first switch element 1132 is arranged on the top of the first relay unit 1120, and is used to approach the first relay unit 1120 when the first relay unit 1120 has magnetism; the first reset element 1133 is connected to the first base element 1131 and the first switch element 1132 respectively, and is used to make the first switch element 1132 away from the first relay unit 1120 when the first relay unit 1120 loses its magnetism; the first insulating element 1134 is arranged at the end of the first switch element 1132; the first connecting element 1135 is arranged at the end of the first insulating element 1134, and is used to contact and connect with the alarm device when the first switch element 1132 is close to the first relay unit 1120 to start the alarm device, and to disconnect from the alarm device when the first switch element 1132 is away from the first relay unit 1120 to turn off the alarm device.

[0084] In some of the embodiments, the connection method between the first base plate component 1131 and the first relay unit 1120 includes but is not limited to bolt connection.

[0085] In some of the embodiments, the first base plate element 1131 is made of insulating material, including but not limited to rubber.

[0086] In some of the embodiments, the first switch element 1132 is magnetically connected to the first relay unit 1120 .

[0087] In some embodiments, the first switch element 1132 includes a first support member and a first switch member. The first support member is vertically arranged and located on one side of the first reset element 1133; the middle part of the first switch member is arranged on the top of the first support member, the bottom of the first end of the first switch member is connected to the first reset element 1133, the second end of the first switch member is connected to the first insulating element 1134, and the first switch member is connected to the first reset element 1133, the first support member, and the first insulating element 1134 respectively.

[0088] In some of the embodiments, the first support member is a support rod.

[0089] In some of the embodiments, the first switch element is in a plate shape and can be elastically bent.

[0090] In some of the embodiments, the first switch element 1132 is an armature.

[0091] In some embodiments, the connection method between the first reset element 1133 and the first switch element 1132 includes but is not limited to bonding and welding.

[0092] The size of the first reset element 1133 matches the size of the first switch element 1132. Generally, the undeformed height of the first reset element 1133 is equal to the height of the first support member.

[0093] In some of the embodiments, the first reset element 1133 is a return spring.

[0094] In some embodiments, the connection method between the first insulating element 1134 and the first switch element 1132 includes but is not limited to bonding.

[0095] In some of the embodiments, the first insulating element 1134 includes but is not limited to a rubber connector and the like.

[0096] In some embodiments, the connection method between the first connecting element 1135 and the first insulating element 1134 includes but is not limited to bonding.

[0097] In some of the embodiments, the first communication element 1135 includes but is not limited to a metal contact plate.

[0098] The working principle of this embodiment is as follows:

[0099] (1) The first relay circuit is connected

[0100] When the first circuit unit 1110 is in contact connection with the load-bearing device, the first relay circuit is turned on, and the first relay unit 1120 generates magnetism;

[0101] Under the effect of magnetic attraction, the first switch element 1132 approaches the first relay unit 1120, which drives the first connecting element 1135 to move downward;

[0102] When the first switch element 1132 is attracted by the first relay unit 1120 , the first connecting element 1135 is in contact connection with the alarm device to activate the alarm device to sound an alarm.

[0103] (2) The first relay circuit is not connected

[0104] When the first circuit unit 1110 is not in contact connection with the load-bearing device, the first relay circuit is not conducting, and the first relay unit 1120 loses its magnetism;

[0105] Under the action of the first reset element 1133, the first switch element 1132 moves away from the first relay unit 1120, that is, the first connecting element 1135 moves upward;

[0106] When the first switch element 1132 is reset to the initial position, the first connecting element 1135 is not in contact connection with the alarm device, and the alarm device does not sound an alarm.

[0107] Example 2

[0108] This embodiment is a supplementary embodiment of Embodiment 1.

[0109] like Figure 3 As shown, the induction circuit device 1100 further includes a first elastic unit 1140, a second circuit unit 1150, a second relay unit 1160 and a second switch unit 1170. The first elastic unit 1140 is arranged at the input end of the first circuit unit 1110; the input end of the second circuit unit 1150 is arranged at the bottom of the load-bearing device, and the height of the input end of the second circuit unit 1150 is lower than the height of the first circuit unit 1110, and is used to connect the second relay circuit when in contact with the load-bearing device; the second relay unit 1160 is connected to the second circuit unit 1150, and is used to generate magnetism when the second circuit unit 1150 is connected to the second relay circuit; the second switch unit 1170 is arranged at the top of the second relay unit 1160, and is used to contact and connect with the alarm device to activate the alarm device when the second relay unit 1160 has magnetism.

[0110] The number of the first elastic units 1140 is 2. Specifically, the two first elastic units 1140 are respectively disposed at two ends of the input end of the first circuit unit 1110 .

[0111] In some embodiments, the first elastic unit 1140 and the first circuit unit 1110 are integrally formed.

[0112] In some embodiments, the first elastic unit 1140 is a conductive spring.

[0113] Both ends of the second circuit unit 1150 are in contact connection with the load-bearing device.

[0114] In some of the embodiments, the second relay unit 1160 is an electromagnetic relay.

[0115] like Figure 4 As shown, the second switch unit 1170 includes a second base element 1171 , a second switch element 1172 , a second reset element 1173 , a second insulating element 1174 and a second connecting element 1175 . Among them, a second relay unit 1160 is arranged on the top of the second base element 1171; the second switch element 1172 is arranged on the top of the second relay unit 1160, and is used to approach the second relay unit 1160 when the second relay unit 1160 is magnetic; the second reset element 1173 is connected to the second base element 1171 and the second switch element 1172 respectively, and is used to make the second switch element 1172 away from the second relay unit 1160 when the second relay unit 1160 loses its magnetism; the second insulating element 1174 is arranged at the end of the second switch element 1172; the second connecting element 1175 is arranged at the end of the second insulating element 1174, and is used to contact and connect with the alarm device to start the alarm device when the second switch element 1172 is close to the second relay unit 1160, and to disconnect from the alarm device to turn off the alarm device when the second switch element 1172 is away from the second relay unit 1160.

[0116] In some of the embodiments, the connection method between the second base plate component 1171 and the first relay unit 1120 includes but is not limited to bolt connection.

[0117] In some of the embodiments, the second base plate element 1171 is made of insulating material, including but not limited to rubber and the like.

[0118] In some of the embodiments, the second switch element 1172 is magnetically connected to the second relay unit 1160 .

[0119] In some embodiments, the second switch element 1172 includes a second support member and a second switch member. The second support member is vertically arranged and located on one side of the second reset element 1173; the middle part of the second switch member is arranged on the top of the second support member, the bottom of the first end of the second switch member is connected to the second reset element 1173, the second end of the second switch member is connected to the second insulation element 1174, and the second switch member is respectively connected to the second reset element 1173, the second support member, and the second insulation element 1174.

[0120] In some of the embodiments, the second support member is a support rod.

[0121] In some of the embodiments, the second switch element is in a plate shape and can be elastically bent.

[0122] In some of the embodiments, the second switch element 1172 is an armature.

[0123] In some embodiments, the connection method between the second reset element 1173 and the second switch element 1172 includes but is not limited to bonding and welding.

[0124] The size of the second restoring element 1173 matches the size of the second switch element 1172. Generally, the undeformed height of the second restoring element 1173 is equal to the height of the second support member.

[0125] In some of the embodiments, the second reset element 1173 is a return spring.

[0126] In some embodiments, the connection method between the second insulating element 1174 and the second switch element 1172 includes but is not limited to bonding.

[0127] In some of the embodiments, the second insulating element 1174 includes but is not limited to a rubber connector and the like.

[0128] In some of the embodiments, the connection method between the second connecting element 1175 and the second insulating element 1174 includes but is not limited to bonding.

[0129] In some of the embodiments, the second communication element 1175 includes but is not limited to a metal contact plate.

[0130] (1) The second relay circuit is connected

[0131] When the second circuit unit 1150 is in contact connection with the load-bearing device, the second relay circuit is turned on, and the second relay unit 1160 generates magnetism;

[0132] Under the effect of magnetic attraction, the second switch element 1172 approaches the second relay unit 1160, which drives the second connecting element 1175 to move downward;

[0133] When the second switch element 1172 is attracted by the second relay unit 1160 , the second connecting element 1175 is in contact connection with the alarm device to activate the alarm device to sound an alarm.

[0134] (2) The second relay circuit is not connected

[0135] When the second circuit unit 1150 is not in contact connection with the load-bearing device, the second relay circuit is not conducting, and the second relay unit 1160 loses its magnetism;

[0136] Under the action of the second reset element 1173, the second switch element 1172 moves away from the second relay unit 1160, that is, drives the second connecting element 1175 to move upward;

[0137] When the second switch element 1172 is reset to the initial position, the second connecting element 1175 is not in contact connection with the alarm device, and the alarm device does not sound an alarm.

[0138] Example 3

[0139] This embodiment relates to a liquid leakage monitoring system of the utility model.

[0140] like Figure 5 As shown, a liquid leakage monitoring system 1000 includes the sensing circuit device 1100, the load-bearing device 1200, and the alarm device 1300 as described in Examples 1 and 2. The load-bearing device 1200 is arranged above the sensing circuit device 1100 and is in contact connection with the sensing circuit device 1100, and is used to move downward in the vertical direction under the action of gravity; the alarm device 1300 is in contact connection with the sensing circuit device 1100, and is used to issue an alarm under the control of the sensing circuit device 1100.

[0141] like Figure 6 As shown, the load-bearing device 1200 includes a load-bearing unit 1210, a base unit 1220, a second elastic unit 1230 and a first connecting unit 1240. The load-bearing unit 1210 is arranged above the sensing circuit device 1100, and is used to move downward in the vertical direction under the action of gravity; the base unit 1220 is arranged below the load-bearing unit 1210 and is located at the side of the sensing circuit device 1100; the second elastic unit 1230 is respectively connected to the load-bearing unit 1210 and the base unit 1220, and is used to make the load-bearing unit 1210 move upward in the vertical direction when the load-bearing unit 1210 is not subjected to gravity; the first connecting unit 1240 is arranged at the bottom of the load-bearing unit 1210, and is contact-connected with the first circuit unit 1110 of the sensing circuit device 1100, so that the first circuit unit 1110 is connected to the first relay circuit.

[0142] In some of the embodiments, the load-bearing unit 1210 is in a plate shape.

[0143] In some of the embodiments, the load-bearing unit 1210 is made of corrosion-resistant material, including but not limited to duplex smelting process medical stainless steel (VAR stainless steel) or maraging stainless steel (VIM stainless steel).

[0144] In some of the embodiments, the load-bearing unit 1210 is a support plate.

[0145] The number of the base units 1220 is at least 2. Specifically, the two base units 1220 are respectively disposed on both sides of the bottom of the load-bearing unit 1210 .

[0146] In some of the embodiments, the connection method between the second elastic unit 1230 and the load-bearing unit 1210 and the base unit 1220 includes but is not limited to bonding and welding.

[0147] The number of the second elastic units 1230 matches the number of the base units 1220. Generally, the number of the second elastic units 1230 is equal to the number of the base units 1220, that is, the second elastic units 1230 correspond to the base units 1220 one by one.

[0148] In some embodiments, the number of the second elastic units 1230 is 2. Specifically, the two second elastic units 1230 are respectively disposed on both sides of the bottom of the load-bearing unit 1210 .

[0149] In some of the embodiments, the second elastic unit 1230 is a return spring.

[0150] In some of the embodiments, the connection method between the first connection unit 1240 and the load-bearing unit 1210 includes but is not limited to bonding.

[0151] In some of the embodiments, the first connection unit 1240 is a metal connection sheet.

[0152] Furthermore, the load-bearing device 1200 further includes a second connection unit 1250. The second connection unit 1250 is disposed at the bottom of the load-bearing unit 1210 and is contact-connected with the second circuit unit 1150 of the sensing circuit device 1100.

[0153] In some of the embodiments, the connection method between the second connection unit 1250 and the load-bearing unit 1210 includes but is not limited to bonding.

[0154] The size of the second connection unit 1250 matches the size of the first connection unit 1240. Generally, the length of the second connection unit 1250 is less than the length of the first connection unit 1240.

[0155] In some of the embodiments, the second connection unit 1250 is a metal connection sheet.

[0156] Furthermore, the load-bearing device 1200 further includes an insulating unit 1260. The insulating unit 1260 is disposed between the first connecting unit 1240 and the second connecting unit 1250 to prevent the first connecting unit 1240 and the second connecting unit 1250 from accidentally touching each other.

[0157] In some of the embodiments, the insulating unit 1260 is supported by insulating materials, including but not limited to rubber and the like.

[0158] In some of the embodiments, the insulating unit 1260 includes but is not limited to an insulating gasket.

[0159] Furthermore, the load-bearing device 1200 further includes a liquid holding unit 1270. The liquid holding unit 1270 is disposed on the top of the load-bearing unit 1210 and is used to collect leaked liquid.

[0160] In some of the embodiments, the connection method between the liquid holding unit 1270 and the load-bearing unit 1210 includes but is not limited to bonding and placement.

[0161] The size of the liquid holding unit 1270 matches the size of the force bearing unit 1210. Generally, the radial size of the liquid holding unit 1270 is not less than the radial size of the force bearing unit 1210.

[0162] In some of the embodiments, the liquid holding unit 1270 is a liquid holding pan.

[0163] like Figure 7 As shown, the alarm device 1300 includes a third circuit unit 1310 and a first alarm unit 1320. The third circuit unit 1310 is in contact connection with the first switch unit 1130 of the sensing circuit device 1100; the first alarm unit 1320 is connected to the third circuit unit 1310 for issuing an alarm.

[0164] Specifically, the input end of the third circuit unit 1310 is in contact connection with the first connecting element 1135 .

[0165] In some of the embodiments, the first alarm unit 1320 is an alarm light.

[0166] Furthermore, the alarm device 1300 further includes a fourth circuit unit 1330 and a second alarm unit 1340. The fourth circuit unit 1330 is in contact connection with the second switch unit 1170 of the sensing circuit device 1100; the second alarm unit 1340 is connected to the fourth circuit unit 1330 for issuing an alarm. Specifically, the input end of the fourth circuit unit 1330 is in contact connection with the second connecting element 1175.

[0167] In some of the embodiments, the second alarm unit 1340 is a buzzer.

[0168] The method of using the utility model is as follows:

[0169] (I) No leakage occurs

[0170] When the first circuit unit 1110 and the first connection unit 1240 are not in contact connection, the first relay circuit is not conducting, and the first relay unit 1120 loses its magnetism;

[0171] Under the action of the first reset element 1133, the first switch element 1132 moves away from the first relay unit 1120, that is, the first connecting element 1135 moves upward;

[0172] When the first switch element 1132 is reset to the initial position, the first connecting element 1135 and the third circuit unit 1310 are not in contact connection, and the first alarm unit 1320 does not sound an alarm;

[0173] When the second circuit unit 1150 and the second connection unit 1250 are not in contact connection, the second relay circuit is not conducting, and the second relay unit 1160 loses its magnetism;

[0174] Under the action of the second reset element 1173, the second switch element 1172 moves away from the second relay unit 1160, that is, drives the second connecting element 1175 to move upward;

[0175] When the second switch element 1172 is reset to the initial position, the second connecting element 1175 and the fourth circuit unit 1330 are not in contact connection, and the second alarm unit 1340 does not sound an alarm.

[0176] (II) When leakage occurs

[0177] The leaked liquid enters the liquid holding unit 1270, and as the weight of the liquid increases, the second elastic unit 1230 contracts and the load-bearing unit 1210 descends;

[0178] When the weight of the leaked liquid reaches 10 g, the first relay circuit is connected, and when the first circuit unit 1110 and the first connection unit 1240 are in contact connection, the first relay circuit is turned on, and the first relay unit 1120 generates magnetism;

[0179] Under the effect of magnetic attraction, the first switch element 1132 approaches the first relay unit 1120, which drives the first connecting element 1135 to move downward;

[0180] When the first switch element 1132 is attracted by the first relay unit 1120 , the first connecting element 1135 is in contact connection with the third circuit unit 1310 , the first alarm circuit is turned on, and the first alarm unit 1320 is activated to generate an alarm.

[0181] As the amount of liquid leakage increases, the load-bearing unit 1210 continues to drop, and at the same time, the first elastic unit 1140 contracts;

[0182] When the weight of the leaked liquid reaches 20 g, the second relay circuit is connected, and when the second circuit unit 1150 is in contact connection with the second connection unit 1250, the second relay circuit is turned on, and the second relay unit 1160 generates magnetism;

[0183] Under the effect of magnetic attraction, the second switch element 1172 approaches the second relay unit 1160, which drives the second connecting element 1175 to move downward;

[0184] When the second switch element 1172 is attracted by the second relay unit 1160 , the second communication element 1175 is contact-connected with the fourth circuit unit 1330 , the second alarm circuit is connected, and the second alarm unit 1340 is activated to sound an alarm.

[0185] The advantage of the utility model is that the load-bearing device can be displaced downward under the gravity of the liquid, so that the circuit of the induction circuit device is connected, and the circuit is connected by utilizing the relay principle of the induction circuit device to enable the alarm device to work, so as to remind the staff of equipment failure and leakage, thereby solving the problem of no leakage alarm device inside the gas cabinet, which requires manual inspection and may affect the personal safety of the staff.

[0186] Example 4

[0187] This embodiment relates to the semiconductor process of the utility model.

[0188] like Figure 8 As shown, a semiconductor process includes a gas cabinet 2000 and a liquid leakage monitoring system 1000 as described in Example 3. The sensing circuit device 1100 and the load-bearing device 1200 of the liquid leakage monitoring system 1000 are arranged at the bottom of the gas cabinet 2000, and the alarm device 1300 of the liquid leakage monitoring system is arranged outside the gas cabinet 2000.

[0189] The above description is only a preferred embodiment of the present invention, and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. An induction circuit device, characterized in that: include: A first circuit unit, wherein an input end of the first circuit unit is disposed at the bottom of the load-bearing device and is used to connect to the first relay circuit when in contact with the load-bearing device; a first relay unit, the first relay unit being connected to the first circuit unit and being used to generate magnetism when the first circuit unit is connected to the first relay circuit; The first switch unit is arranged on the top of the first relay unit and is used for contacting and connecting with the alarm device to activate the alarm device when the first relay unit has magnetism.

2. The induction circuit device according to claim 1, characterized in that: The first switch unit comprises: a first bottom plate component, the first relay unit being disposed on the top of the first bottom plate component; a first switch element, the first switch element being disposed on the top of the first relay unit and being used for approaching the first relay unit when the first relay unit has magnetism; a first resetting element, the first resetting element being connected to the first bottom plate element and the first switch element respectively, and being used for moving the first switch element away from the first relay unit when the first relay unit loses its magnetism; a first insulating element, the first insulating element being disposed at an end of the first switching element; A first connecting element is arranged at an end of the first insulating element, and is used to contact and connect with the alarm device to activate the alarm device when the first switching element is close to the first relay unit, and to disconnect from the alarm device to shut down the alarm device when the first switching element is away from the first relay unit.

3. The induction circuit device according to any one of claims 1 to 2, characterized in that: Also includes: a first elastic unit, wherein the first elastic unit is arranged at an input end of the first circuit unit; A second circuit unit, wherein an input end of the second circuit unit is arranged at the bottom of the load-bearing device, and a height of the input end of the second circuit unit is arranged lower than a height of the first circuit unit, and is used for connecting the second relay circuit when in contact with the load-bearing device; a second relay unit, the second relay unit being connected to the second circuit unit and configured to generate magnetism when the second circuit unit is connected to the second relay circuit; The second switch unit is arranged on the top of the second relay unit and is used for contacting and connecting with the alarm device to activate the alarm device when the second relay unit has magnetism.

4. The induction circuit device according to claim 3, characterized in that: The second switch unit comprises: a second bottom plate member, the second relay unit being disposed on the top of the second bottom plate member; a second switch element, the second switch element being disposed on the top of the second relay unit and being used for approaching the second relay unit when the second relay unit has magnetism; a second resetting element, the second resetting element being connected to the second bottom plate element and the second switch element respectively, and being used for moving the second switch element away from the second relay unit when the second relay unit loses its magnetism; a second insulating element, the second insulating element being disposed at an end of the second switching element; A second connecting element is arranged at the end of the second insulating element, and is used to contact and connect with the alarm device to activate the alarm device when the second switch element is close to the second relay unit, and to disconnect from the alarm device to turn off the alarm device when the second switch element is far away from the second relay unit.

5. A liquid leakage monitoring system, characterized in that: include: The induction circuit device according to any one of claims 1 to 4; A load-bearing device, which is disposed above the sensing circuit device and is in contact connection with the sensing circuit device, and is used to move downward in a vertical direction under the action of gravity; An alarm device is contact-connected with the induction circuit device and is used for issuing an alarm under the control of the induction circuit device.

6. The liquid leakage monitoring system according to claim 5, characterized in that: The load-bearing device comprises: A load-bearing unit, the load-bearing unit is arranged above the sensing circuit device and is used to move downward in a vertical direction under the action of gravity; A base unit, the base unit is arranged below the load-bearing unit and located at a side of the induction circuit device; a second elastic unit, the second elastic unit being connected to the load-bearing unit and the base unit respectively, and being used for moving the load-bearing unit upward in a vertical direction when the load-bearing unit is not subjected to gravity; a first connection unit, the first connection unit being disposed at the bottom of the load-bearing unit and being contact-connected with the first circuit unit of the induction circuit device so that the first circuit unit is connected to the first relay circuit; and / or The alarm device comprises: a third circuit unit, the third circuit unit being in contact connection with the first switch unit of the sensing circuit device; A first alarm unit, wherein the first alarm unit is connected to the third circuit unit and is used for issuing an alarm.

7. The liquid leakage monitoring system according to claim 6, characterized in that: The load-bearing device also includes: a second connection unit, which is disposed at the bottom of the load-bearing unit and is in contact connection with the second circuit unit of the sensing circuit device; and / or The alarm device also includes: a fourth circuit unit, the fourth circuit unit being in contact connection with the second switch unit of the induction circuit device; A second alarm unit, wherein the second alarm unit is connected to the fourth circuit unit and is used for issuing an alarm.

8. The liquid leakage monitoring system according to claim 7, characterized in that: The load-bearing device also includes: An insulating unit is disposed between the first connecting unit and the second connecting unit to prevent the first connecting unit from accidentally touching the second connecting unit.

9. The liquid leakage monitoring system according to any one of claims 6 to 8, characterized in that: The load-bearing device also includes: A liquid holding unit is arranged on the top of the load-bearing unit and is used for collecting leaked liquid.

10. A semiconductor process system, characterized in that: include: A gas cabinet, wherein the gas cabinet is arranged vertically; According to any one of claims 5 to 9, the sensing circuit device and the load-bearing device of the leakage monitoring system are arranged at the bottom of the interior of the gas cabinet, and the alarm device of the leakage monitoring system is arranged outside the gas cabinet.

Images