FFU automatic wind speed adjusting system in EFEM

Abstract

The utility model relates to an FFU automatic wind speed adjusting system in an EFEM, comprising a wind speed detection plate and a signal acquisition and processing module, the wind speed detection plate is arranged in the EFEM and is electrically connected with an FFU module, and the signal acquisition and processing module is electrically connected with the wind speed detection plate and a frequency converter; the wind speed detection plate is used for detecting wind speed information in the EFEM equipment, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after acquiring the wind speed information, the wind speed of a fan is adjusted through the frequency converter, and therefore stable control over the wind speed is achieved; meanwhile, the wind speed can be adjusted and wind speed data can be recorded through an upper system.

Description

Technical Field

[0001] The utility model relates to the technical field of wind speed adjustment of semiconductor equipment, in particular to an automatic wind speed adjustment system of FFU in EFEM. Background Art

[0002] EFEM (Equipment Front End Module) is a semiconductor equipment front-end module. In EFEM equipment, FFU (Fan Filter Unit) plays a key role in controlling the cleanliness of the entire system. FFU blows out fresh air from top to bottom through the filtration system, blowing the dust particles in the chamber to the bottom of the equipment to ensure the cleanliness of the wafer surface.

[0003] Most EFEM systems on the market currently use speed regulators to adjust the FFU wind speed. This method has certain limitations due to the structure and layout of the chamber of the EFEM equipment, resulting in large errors in the wind speed at each location, which in turn makes the speed regulation device in the prior art unable to adapt to the FEEM equipment and also leads to the problem of low speed regulation accuracy. Utility Model Content

[0004] Based on this, it is necessary to provide an automatic wind speed adjustment system for FFU in EFEM that can adjust the wind speed of the fan through a small wind speed sensor and a wind speed acquisition control module, thereby achieving stable control of the wind speed. At the same time, the wind speed can be adjusted through the upper system and the wind speed data can be recorded.

[0005] The technical solution of this utility model is as follows:

[0006] An automatic wind speed adjustment system for FFU in an EFEM comprises an EFEM device, an FFU module and a frequency converter, wherein the FFU module is arranged in the EFEM device, and the frequency converter is electrically connected to the FFU module; further comprising a wind speed detection board and a signal acquisition and processing module, wherein the wind speed detection board is arranged in the EFEM device and is electrically connected to the FFU module, and the signal acquisition and processing module is electrically connected to both the wind speed detection board and the frequency converter; the wind speed detection board is used to detect wind speed information in the EFEM device, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after acquiring the wind speed information.

[0007] Optionally, the wind speed detection board includes a board body and a wind speed collection and processing circuit arranged on the board body, and the wind speed collection and processing circuit is electrically connected to the signal collection and processing module.

[0008] Optionally, the wind speed collection and processing circuit includes a power supply end, a temperature compensation circuit, a wind speed detection circuit and a signal amplification circuit. The temperature compensation circuit is connected to the power supply end, the wind speed detection circuit is connected to the temperature compensation circuit, and the signal amplification circuit is electrically connected to both the power supply end and the wind speed detection circuit; the signal amplification circuit is also electrically connected to the signal collection and processing module.

[0009] Optionally, the wind speed collection and processing circuit includes a thermal film wind speed sensor, the thermal film wind speed sensor is electrically connected to the temperature compensation circuit and the signal amplification circuit, and the thermal film wind speed sensor is arranged at the front end of the plate body.

[0010] Optionally, an air guide cover is further provided at the front end of the plate body, and the thermal film wind speed sensor is arranged on the air guide cover.

[0011] Optionally, a through hole is provided in the wind guide cover, and the thermal film wind speed sensor is arranged on a side wall of the through hole.

[0012] Optionally, the signal amplification circuit includes an amplifier, a 30th resistor, a 29th resistor and a 27th resistor; the first input terminal of the amplifier is connected to the 30th resistor, and the 30th resistor is also connected to the power supply terminal; the 29th resistor is connected to the second input terminal of the amplifier, and the 27th resistor is connected to the 29th resistor; the 27th resistor is also connected to the signal acquisition and processing module.

[0013] Optionally, the temperature compensation circuit includes a fifteenth resistor, an eighteenth resistor, a sliding resistor, a nineteenth resistor and a twenty-sixth resistor; the fifteenth resistor is connected to a fourteenth resistor and then connected to the power supply end; the eighteenth resistor is connected to the fifteenth resistor; the two ends of the sliding resistor are respectively connected to the eighteenth resistor and the twenty-sixth resistor, and the two ends of the nineteenth resistor are respectively connected to the fifteenth resistor and the sliding resistor; the twenty-sixth resistor is also connected to the thermal film wind speed sensor and the twenty-ninth resistor.

[0014] Optionally, a host computer is also included, and the host computer is electrically connected to the signal acquisition and processing module.

[0015] Optionally, there are multiple wind speed detection plates, and each of the wind speed detection plates is arranged in the EFEM device at equal intervals.

[0016] The utility model achieves the following technical effects:

[0017] The utility model sets a wind speed detection board and a signal acquisition and processing module, wherein the wind speed detection board is set in the EFEM device and electrically connected to the FFU module, and the signal acquisition and processing module is electrically connected to the wind speed detection board and the frequency converter; the wind speed detection board is used to detect the wind speed information in the EFEM device, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after obtaining the wind speed information, thereby overcoming the problem that the speed regulation device cannot be arranged correspondingly due to the structure and layout of the chamber of the EFEM device, realizing adaptive layout, and thus achieving the effect of improving the speed regulation accuracy; specifically, by setting a small wind speed sensor and a wind speed acquisition control module, the wind speed of the fan is adjusted by the frequency converter, thereby realizing stable control of the wind speed, and at the same time, the wind speed can be adjusted and the wind speed data can be recorded by the upper system. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0019] Figure 1 The overall structure diagram of the FFU automatic wind speed adjustment system in the EFEM in one embodiment;

[0020] Figure 2 A block diagram of the circuit components of the FFU automatic wind speed adjustment system in an EFEM in one embodiment;

[0021] Figure 3 A physical structure diagram of a wind speed detection plate in one embodiment;

[0022] Figure 4 The figure is a circuit schematic diagram of a wind speed collection and processing circuit in one embodiment.

[0023] Description of Reference Numerals

[0024] 1. EFEM; 2. FFU1; 3. FFU2; 100. wind speed detection board; 110. board body; 111. wind guide cover; 112. through hole; 120. wind speed acquisition and processing circuit; 121. temperature compensation circuit; 122. wind speed detection circuit; 123. signal amplification circuit. DETAILED DESCRIPTION

[0025] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0027] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0028] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0029] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0030] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0031] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the embodiments of the present application.

[0032] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0033] In one embodiment, Figure 1 As shown, a FFU automatic wind speed adjustment system in an EFEM is provided, comprising an EFEM device, an FFU module and a frequency converter, wherein the FFU module is arranged in the EFEM device, and the frequency converter is electrically connected to the FFU module. Figure 1 The EFEM device is marked as 1. Figure 1 The reference numerals 2 and 3 are the two FFU modules, namely FFU1 and FFU2.

[0034] The FFU automatic wind speed adjustment system in the EFEM also includes a wind speed detection board 100 and a signal acquisition and processing module. In this embodiment, the number of the wind speed detection boards 100 is 4, which are respectively arranged at Figure 1 The signal acquisition and processing module is generally arranged on the top of the EFEM device, which is not shown in the figure.

[0035] Specifically, the wind speed detection board 100 is arranged in the EFEM device and is electrically connected to the FFU module, and the signal acquisition and processing module is electrically connected to the wind speed detection board 100 and the frequency converter; the wind speed detection board 100 is used to detect the wind speed information in the EFEM device, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after obtaining the wind speed information.

[0036] The utility model provides a wind speed detection board 100 and a signal acquisition and processing module. The wind speed detection board 100 is provided in the EFEM device and electrically connected to the FFU module. The signal acquisition and processing module is electrically connected to the wind speed detection board 100 and the frequency converter. The wind speed detection board 100 is used to detect the wind speed information in the EFEM device, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after obtaining the wind speed information, thereby overcoming the problem that the speed regulation device cannot be arranged correspondingly due to the structure and layout of the chamber of the EFEM device, realizing an adaptive layout, and thus achieving the effect of improving the speed regulation accuracy. Specifically, by providing a small wind speed sensor and a wind speed acquisition control module, the wind speed of the fan is adjusted by the frequency converter, thereby realizing stable control of the wind speed, and at the same time, the wind speed can be adjusted and the wind speed data can be recorded by the upper system.

[0037] In one embodiment, Figure 2 As shown, the wind speed detection board 100 includes a board body 110 and a wind speed collection and processing circuit 120 disposed on the board body 110, and the wind speed collection and processing circuit 120 is electrically connected to the signal collection and processing module. In this embodiment, the number of the wind speed detection boards 100 is 4, namely, wind speed detection board 1001, wind speed detection board 1002, wind speed detection board 1003 and wind speed detection board 1004.

[0038] Specifically, the signal acquisition and processing module is composed of a 4-channel AD input module, a 2-channel AD output module, an RS485 communication module and a data operation and processing unit. The AD input module is used to collect the wind speed collected by the wind speed detection board 100, and the AD output module is used to output an analog voltage signal to control the frequency of the inverter.

[0039] When the equipment is powered on, the data operation and processing unit performs unit conversion according to the collected AD signal and converts the voltage signal into a wind speed value. By comparing the actual detected wind speed value with the preset wind speed value, the difference between the target wind speed and the actual wind speed is used as the input of the PID for operation, and the result of the operation is multiplied by a fixed coefficient and output as the compensation value of the frequency conversion. When the detected wind speed value is too high, the PID operator outputs a negative value to reduce the frequency of the inverter. The RS485 communication module is used to communicate with the host computer. The host computer can transmit the set wind speed value to the signal acquisition and processing unit through communication, and can also read the status of the sensor in real time through the host computer. The inverter controls the speed of the FFU fan through the AD signal output by the signal acquisition and processing unit. In this way, a closed-loop control system is formed from the wind speed detection sensor to the speed control of the FFU fan.

[0040] In one embodiment, Figure 1-Figure 3As shown, the wind speed acquisition and processing circuit 120 includes a power supply terminal 12V, a temperature compensation circuit 121, a wind speed detection circuit 122 and a signal amplification circuit 123. The temperature compensation circuit 121 is connected to the power supply terminal 12V, the wind speed detection circuit 122 is connected to the temperature compensation circuit 121, and the signal amplification circuit 123 is electrically connected to both the power supply terminal 12V and the wind speed detection circuit 122; the signal amplification circuit 123 is also electrically connected to the signal acquisition and processing module. The signal amplification circuit 123 is used to convert the tiny voltage signal measured by the sensor into a voltage signal outputted from 0 to 10V. The measurement range of the detection board is 0 to 100 m / s, the sensitivity is 0.01 m / s, and the response time is 0.2s.

[0041] In one embodiment, Figure 2-Figure 4 As shown, the wind speed collection and processing circuit 120 includes a thermal film wind speed sensor, which is electrically connected to the temperature compensation circuit 121 and the signal amplification circuit 123. The thermal film wind speed sensor is arranged at the front end of the plate 110. The wind speed detection sensor is a thermal mode wind speed sensor, which can maintain high accuracy at low wind speeds. Figure 4 In the embodiment, the hot film wind speed sensor is marked as FA09. Figure 3 Its entity structure is marked as 300.

[0042] In one embodiment, Figure 3-Figure 4 As shown, a wind guide cover 111 is further provided at the front end of the plate body 110 , and the thermal film wind speed sensor is arranged on the wind guide cover 111 .

[0043] The wind guide cover 111 is provided with a through hole 112, and the hot film wind speed sensor is arranged on the side wall of the through hole 112. The hot film sensor of the wind speed detection board 100 is installed at the end of the board, and is covered with a metal wind guide cover 111, which ensures that the direction of the air flow is parallel to the surface of the sensor, improves the detection accuracy, and also plays a role in protecting the sensor. The structure is small in size and does not occupy the space of the EFEM chamber.

[0044] In one embodiment, Figure 1-Figure 3 As shown, the signal amplifying circuit 123 includes an amplifier U3, a 30th resistor R30, a 29th resistor R29 and a 27th resistor R27; the first input terminal of the amplifier U3 is connected to the 30th resistor R30, and the 30th resistor R30 is also connected to the power supply terminal 12V; the 29th resistor R29 is connected to the second input terminal of the amplifier U3, and the 27th resistor R27 is connected to the 29th resistor R29; the 27th resistor R27 is also connected to the signal acquisition and processing module.

[0045] In one embodiment, Figure 1-Figure 3 As shown, the temperature compensation circuit 121 includes a fifteenth resistor R15, an eighteenth resistor R18, a sliding resistor RV1, a nineteenth resistor R19 and a twenty-sixth resistor R26; the fifteenth resistor R15 is connected to a fourteenth resistor R14 and then connected to the power supply terminal 12V; the eighteenth resistor R18 is connected to the fifteenth resistor R15; the two ends of the sliding resistor RV1 are respectively connected to the eighteenth resistor R18 and the twenty-sixth resistor R26, and the two ends of the nineteenth resistor R19 are respectively connected to the fifteenth resistor R15 and the sliding resistor RV1; the twenty-sixth resistor R26 is also connected to the hot film wind speed sensor and the twenty-ninth resistor R29. In this embodiment, the eighteenth resistor R18, the sliding resistor RV1, the nineteenth resistor R19 and the twenty-sixth resistor R26 use low temperature drift resistors to minimize the influence of ambient temperature on the measurement.

[0046] In one embodiment, Figure 1-Figure 3 As shown, the FFU automatic wind speed adjustment system in the EFEM also includes a host computer, and the host computer is electrically connected to the signal acquisition and processing module.

[0047] In one embodiment, Figure 1-Figure 3 As shown, there are multiple wind speed detection plates 100, and each of the wind speed detection plates 100 is arranged in the EFEM device at equal intervals.

[0048] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the contents of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can understand and use the utility model well. The utility model is only limited by the claims and their full scope and equivalents. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

[0049] In addition, various implementations of the embodiments of the present utility model can also be arbitrarily combined, as long as they do not violate the concept of the embodiments of the present utility model, they should also be regarded as the contents disclosed in the embodiments of the present utility model.

Claims

1. An automatic wind speed adjustment system for FFU in EFEM, comprising an EFEM device, an FFU module and a frequency converter, wherein the FFU module is arranged in the EFEM device, and the frequency converter is electrically connected to the FFU module; characterized in that: It also includes a wind speed detection board and a signal acquisition and processing module. The wind speed detection board is arranged in the EFEM device and is electrically connected to the FFU module. The signal acquisition and processing module is electrically connected to the wind speed detection board and the frequency converter. The wind speed detection board is used to detect the wind speed information in the EFEM device, so that the signal acquisition and processing module drives the frequency converter to adjust the wind speed of the FFU module according to the wind speed information after obtaining the wind speed information.

2. The FFU automatic wind speed adjustment system in EFEM according to claim 1 is characterized in that: The wind speed detection board includes a board body and a wind speed collection and processing circuit arranged on the board body, and the wind speed collection and processing circuit is electrically connected to the signal collection and processing module.

3. The FFU automatic wind speed adjustment system in EFEM according to claim 2 is characterized in that: The wind speed collection and processing circuit includes a power supply end, a temperature compensation circuit, a wind speed detection circuit and a signal amplification circuit. The temperature compensation circuit is connected to the power supply end, the wind speed detection circuit is connected to the temperature compensation circuit, and the signal amplification circuit is electrically connected to both the power supply end and the wind speed detection circuit; the signal amplification circuit is also electrically connected to the signal collection and processing module.

4. The FFU automatic wind speed adjustment system in EFEM according to claim 3 is characterized in that: The wind speed collection and processing circuit includes a hot film wind speed sensor, which is electrically connected to the temperature compensation circuit and the signal amplification circuit. The hot film wind speed sensor is arranged at the front end of the plate body.

5. The FFU automatic wind speed adjustment system in EFEM according to claim 4 is characterized in that: The front end of the plate body is also provided with an air guide cover, and the thermal film wind speed sensor is arranged on the air guide cover.

6. The FFU automatic wind speed adjustment system in EFEM according to claim 5, characterized in that: A through hole is provided in the wind guide cover, and the hot film wind speed sensor is arranged on the side wall of the through hole.

7. The FFU automatic wind speed adjustment system in EFEM according to claim 4, characterized in that: The signal amplification circuit includes an amplifier, a 30th resistor, a 29th resistor and a 27th resistor; the first input terminal of the amplifier is connected to the 30th resistor, and the 30th resistor is also connected to the power supply terminal; the 29th resistor is connected to the second input terminal of the amplifier, and the 27th resistor is connected to the 29th resistor; the 27th resistor is also connected to the signal acquisition and processing module.

8. The FFU automatic wind speed adjustment system in EFEM according to claim 7, characterized in that: The temperature compensation circuit includes a fifteenth resistor, an eighteenth resistor, a sliding resistor, a nineteenth resistor and a twenty-sixth resistor; the fifteenth resistor is connected to a fourteenth resistor and then connected to the power supply end; the eighteenth resistor is connected to the fifteenth resistor; the two ends of the sliding resistor are respectively connected to the eighteenth resistor and the twenty-sixth resistor, and the two ends of the nineteenth resistor are respectively connected to the fifteenth resistor and the sliding resistor; the twenty-sixth resistor is also connected to the thermal film wind speed sensor and the twenty-ninth resistor.

9. The FFU automatic wind speed adjustment system in EFEM according to any one of claims 1 to 8, characterized in that: It also includes a host computer, which is electrically connected to the signal acquisition and processing module.

10. The FFU automatic wind speed adjustment system in EFEM according to any one of claims 1 to 8, characterized in that: There are multiple wind speed detection plates, and each of the wind speed detection plates is arranged at equal intervals in the EFEM device.

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