Accurate liquid preparation system suitable for semiconductors

Abstract

The utility model discloses an accurate liquid preparation system suitable for semiconductors, which comprises a liquid weighing barrel and a liquid supplementing barrel, a weighing pipe for weighing the liquid level height is arranged in the liquid weighing barrel, and a communication pipeline communicated with the liquid supplementing barrel is arranged on the weighing pipe; a liquid supplementing pipeline communicated with the liquid supplementing barrel and a main pipeline communicated with an external treatment tank body are arranged on the liquid weighing barrel; a measuring pipe for measuring the height of the liquid level is arranged in the liquid supplementing barrel, a liquid return pipeline communicated with the liquid storage tank is arranged on the measuring pipe, and a branch pipeline communicated with the external treatment tank body is further arranged in the liquid supplementing barrel. The liquid supplementing device has the main beneficial effects that when the concentration or the amount of liquid in the external treatment tank body is reduced, the liquid needs to be supplemented, at the moment, the liquid can be supplemented to the external treatment tank body through the branch pipeline, the liquid supplementing mode is stable and reliable, the amount of the supplemented liquid can be specifically controlled, the stability of the concentration and the amount of the liquid is ensured, the production efficiency is improved, and the production cost is reduced. And the method has relatively wide applicability.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, and in particular to a precise liquid dispensing system suitable for semiconductors. Background Art

[0002] During the wafer processing, after the wafer is processed by mechanical processes such as slicing and grinding, a damage layer of a certain depth is formed on its surface due to the stress generated by the mechanical processing. Chemical corrosion is usually used to eliminate the mechanical damage layer. Among them, the chemical etching process of silicon wafers is usually divided into alkaline etching process and acid etching process. Alkaline etching is an anisotropic etching process with a relatively slow etching rate and a large surface roughness of the silicon wafer. Acid etching is an isotropic etching process with a fast etching rate, especially the etching rate in the center of the silicon wafer is faster and the surface roughness is small, but the morphology of the silicon wafer is difficult to control.

[0003] For example, the authorization announcement number CN 220753371 U discloses a silicon wafer acid etching device, which includes a box and an etching cage arranged in the box, the interior of the box is provided with a mounting frame, the mounting frame is provided with a fast transfer mechanism, a water washing tank, a fast discharge buffer box, an acid etching tank, a constant temperature box and a liquid concentration detection system, the water washing tank and the acid etching tank are arranged side by side above the mounting frame and the fast transfer mechanism can transport the etching cage back and forth between the water washing tank and the acid etching tank, the fast discharge buffer box is arranged below the water washing tank and the discharge port of the water washing tank is connected to the fast discharge buffer box, the constant temperature box is arranged below the acid etching tank and the lower end of the acid etching tank is connected to the constant temperature box through a circulation pipe, and the liquid in the constant temperature box can be replenished into the acid etching tank by a metering pump. However, the amount of liquid added to the acid etching tank by the metering pump cannot be specifically controlled, there is a huge error, which seriously affects the concentration stability of the liquid, affects the production process, reduces production efficiency, and has great limitations. Utility Model Content

[0004] The purpose of the utility model is to overcome the deficiencies in the prior art and provide a precise liquid dispensing system suitable for semiconductors.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] A precise liquid dispensing system suitable for semiconductors comprises a liquid weighing barrel and a liquid replenishing barrel, wherein the liquid weighing barrel is provided with a weighing tube for weighing the liquid level height, and the weighing tube is provided with a connecting pipe connected to the liquid replenishing barrel; the liquid weighing barrel is provided with a liquid replenishing pipe connected to the liquid replenishing barrel and a main pipe connected to an external processing tank body; the liquid replenishing barrel is provided with a measuring tube for measuring the liquid level height, and the measuring tube is provided with a liquid return pipe connected to a liquid storage tank, and the liquid replenishing barrel is also provided with a branch pipe connected to the external processing tank body.

[0007] Preferably, the liquid weighing barrel and the liquid replenishing barrel are both provided with a cleaning pipe, the cleaning pipe is provided with a first pneumatic valve, and a water inlet pipe is provided above the liquid weighing barrel and the liquid replenishing barrel.

[0008] Preferably, the connecting pipe, the liquid replenishing pipe, the main pipe, the liquid return pipe and the branch pipe are all provided with a second pneumatic valve.

[0009] Preferably, a liquid inlet pipe is provided between the liquid storage box and the liquid weighing barrel, and a liquid delivery pump is fixedly provided on the liquid inlet pipe.

[0010] Preferably, a third pneumatic valve is further provided on the liquid inlet pipeline, and the third pneumatic valve is located between the liquid delivery pump and the liquid storage tank.

[0011] Preferably, a liquid level sensor is provided on the liquid weighing barrel.

[0012] Preferably, overflow holes are provided on the tops of the liquid weighing barrel and the liquid replenishing barrel.

[0013] Preferably, the capacity of the liquid weighing bucket is 5-50L, and the capacity of the liquid replenishing bucket is 50-400mL.

[0014] The beneficial effects of the utility model are mainly reflected in:

[0015] 1. The design is exquisite. The weighing tube weighs the liquid in the symmetrical liquid barrel, and the excess liquid is transported to the liquid replenishment barrel through the connecting pipe. The main pipe transports the weighed liquid to the external processing tank, thereby ensuring the stability of the liquid concentration. If the concentration or amount of the liquid in the external processing tank decreases, it needs to be replenished. At this time, the external processing tank can be replenished through the branch pipe. This replenishment method is stable and reliable, and the amount of replenishment can be specifically controlled to ensure the stability of the liquid concentration and amount, improve production efficiency, and has a wide range of applicability;

[0016] 2. The setting of the overflow hole can ensure that when the liquid level sensor is damaged or fails, the liquid can be discharged from the dedicated channel in time through the overflow hole to avoid liquid overflow and potential safety hazards, thereby improving safety;

[0017] 3. Clean water can be introduced through the water inlet pipe to clean the symmetrical liquid barrel and the liquid replenishing barrel to ensure the cleanliness of the interior. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The technical solution of the utility model is further described below in conjunction with the accompanying drawings:

[0019] Figure 1 : Pipeline diagram of the preferred embodiment of the utility model. DETAILED DESCRIPTION

[0020] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments are not limited to the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0022] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0023] like Figure 1 As shown, the utility model discloses a precise liquid dispensing system suitable for semiconductors, including a liquid weighing barrel 1 and a liquid replenishing barrel 2. The capacity of the liquid weighing barrel 1 is 5-50L, and the capacity of the liquid replenishing barrel 2 is 50-400mL. Of course, it can also be other capacities, all of which belong to the protection scope of the utility model. The liquid weighing barrel 1 is provided with a liquid level sensor 12, and the liquid level sensor 12 can be multiple, respectively detecting liquids at different heights, thereby improving the accuracy of the detection position. The position of the liquid level sensor 12 can be adjusted accordingly according to actual needs, all of which belong to the protection scope of the utility model, and will not be described in detail here.

[0024] Overflow holes are provided on the tops of the weighing tank 1 and the replenishing tank 2. When all the liquid level sensors 12 are damaged or malfunction, the liquid can be discharged from the dedicated channel in time through the overflow holes to avoid liquid overflow and potential safety hazards, thereby improving safety.

[0025] The weighing barrel 1 is provided with a weighing tube 11 for weighing the liquid level, and the weighing tube 11 is provided with a connecting pipe 3 connected to the liquid replenishing barrel 2, and the weighing barrel 1 is provided with a liquid replenishing pipe 4 connected to the liquid replenishing barrel 2 and a main pipe 5 connected to the external processing tank; the liquid replenishing barrel 2 is provided with a measuring tube 21 for measuring the liquid level, and the measuring tube 21 is provided with a liquid return pipe 7 connected to the liquid storage tank 6, and the liquid replenishing barrel 2 is also provided with a branch pipe 8 connected to the external processing tank. A liquid inlet pipe 61 is provided between the liquid storage tank 6 and the weighing barrel 1, and a liquid delivery pump 62 is fixed on the liquid inlet pipe 61, and the setting of the liquid delivery pump 62 can pressurize the liquid in the liquid inlet pipe 61 to ensure that the liquid can be stably transmitted.

[0026] The above design is ingenious. The weighing tube 11 weighs the liquid in the symmetrical liquid barrel 1, and the excess liquid is transported to the liquid replenishing barrel 2 through the connecting pipe 3. The main pipe 5 transports the weighed liquid to the external processing tank body, thereby ensuring the stability of the liquid concentration. If the concentration or amount of the liquid in the external processing tank body decreases, it needs to be replenished. At this time, the external processing tank body can be replenished through the branch pipe. The replenishment method is stable and reliable, and the amount of replenishment can be specifically controlled to ensure the stability of the concentration and amount of the liquid, improve production efficiency, and has a wide applicability.

[0027] In this preferred embodiment, a cleaning pipe 9 is provided on the liquid weighing barrel 1 and the liquid replenishing barrel 2, and a first pneumatic valve 91 is provided on the cleaning pipe 9. A water inlet pipe 92 is provided above the liquid weighing barrel 1 and the liquid replenishing barrel 2. Clean water can enter through the water inlet pipe 92 to clean the liquid weighing barrel 1 and the liquid replenishing barrel 2 to ensure the cleanliness of the inside.

[0028] The connecting pipe 3, the infusion pipe 4, the main pipe 5, the return pipe 7 and the branch pipe 8 are all provided with a second pneumatic valve 10. The liquid inlet pipe 61 is also provided with a third pneumatic valve 63, and the third pneumatic valve 63 is located between the liquid delivery pump 62 and the liquid storage tank 6. The first pneumatic valve 91, the second pneumatic valve 10 and the third pneumatic valve 63 can all control the corresponding pipeline flow and flow rate to achieve high-precision regulation and ensure the stability of liquid concentration and amount.

[0029] It should be understood that although this specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0030] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A precise liquid dispensing system for semiconductors, comprising a liquid weighing bucket (1) and a liquid replenishing bucket (2), characterized in that: The liquid weighing barrel (1) is provided with a weighing tube (11) for weighing the liquid level, and the weighing tube (11) is provided with a connecting pipe (3) connected to the liquid replenishing barrel (2); the liquid weighing barrel (1) is provided with a liquid replenishing pipe (4) connected to the liquid replenishing barrel (2) and a main pipe (5) connected to an external processing tank; the liquid replenishing barrel (2) is provided with a measuring tube (21) for measuring the liquid level, and the measuring tube (21) is provided with a liquid return pipe (7) connected to a liquid storage tank (6); the liquid replenishing barrel (2) is also provided with a branch pipe (8) connected to the external processing tank.

2. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: The weighing barrel (1) and the replenishing barrel (2) are both provided with a cleaning pipe (9), the cleaning pipe (9) is provided with a first pneumatic valve (91), and a water inlet pipe (92) is provided above the weighing barrel (1) and the replenishing barrel (2).

3. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: The connecting pipe (3), the liquid replenishing pipe (4), the main pipe (5), the liquid return pipe (7) and the branch pipe (8) are all provided with a second pneumatic valve (10).

4. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: A liquid inlet pipe (61) is provided between the liquid storage box (6) and the liquid weighing barrel (1), and a liquid delivery pump (62) is fixedly provided on the liquid inlet pipe (61).

5. The precise liquid dispensing system for semiconductors according to claim 4, characterized in that: A third pneumatic valve (63) is also provided on the liquid inlet pipeline (61), and the third pneumatic valve (63) is located between the liquid delivery pump (62) and the liquid storage tank (6).

6. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: The weighing liquid barrel (1) is provided with a liquid level sensor (12).

7. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: Overflow holes are provided on the tops of the weighing barrel (1) and the replenishing barrel (2).

8. The precise liquid dispensing system for semiconductors according to claim 1, characterized in that: The capacity of the weighing tank (1) is 5-50L, and the capacity of the rehydration tank (2) is 50-400mL.

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