Defect detection system

Abstract

The utility model relates to a flaw detection system, which comprises a dust-free operation platform, a detection platform and a detection device, the product bearing device is arranged on the working table, is constructed to be capable of bearing a plurality of to-be-tested products and can move forwards, backwards, leftwards and rightwards; the camera is configured to collect an image of a to-be-detected product; the image processing device is connected with the camera and is configured to detect flaws according to the product images acquired by the camera; and the adjustable light source device is arranged on the working table and irradiates the product to be detected with oblique light. According to the flaw detection system disclosed by the utility model, a plurality of products to be detected can be simultaneously placed by utilizing the bearing device, a plurality of products can be detected at one time, the efficiency is high, the bearing device can move forwards, backwards, leftwards and rightwards, an operator does not need to directly contact the products to move, and the possibility that the products are polluted is reduced.

Description

Technical Field

[0001] The utility model relates to the field of optical detection, in particular to a defect detection system. Background Art

[0002] Currently, in the industrial production process, defect detection is an important step in many product quality inspection links. For example, for defect detection in the production process of mask blank substrates, the traditional detection method uses manual visual inspection to judge, which often consumes a lot of manpower and time. These manpower and time are reflected in the overall production cost in the long run. With the advancement of defect detection technology, automatic optical inspection (AOI) systems have emerged to detect defects, using optical lenses instead of human eyes for detection. However, in some factories, the mask blank substrates are manually moved for comprehensive inspection during the inspection process. The operators directly contact the products, and the particles of dust and other pollutants on the hands / body of the operators are easy to fall on the products. Moreover, one product is usually inspected at a time, and the inspection efficiency is low. Utility Model Content

[0003] In order to solve at least part of the above problems in the prior art, the present invention provides a defect detection system, which is characterized by comprising:

[0004] A dust-free operating table having a work surface;

[0005] A product carrying device, which is arranged on the work surface and is configured to carry a plurality of products to be tested and can move forward, backward, left and right;

[0006] a camera configured to capture an image of the product to be tested;

[0007] an image processing device connected to the camera and configured to detect defects based on the product image captured by the camera; and

[0008] An adjustable light source device is arranged on the work surface to illuminate the product to be tested with oblique light.

[0009] Furthermore, the product carrying device comprises:

[0010] A first rail, which is fixed on the work surface;

[0011] a second track, which is slidably connected to the first track;

[0012] A third track fixedly connected to the second track; and

[0013] The load-bearing structure comprises:

[0014] a carrying body, comprising a plurality of carrying slots, wherein the carrying slots are configured to accommodate a product to be tested; and

[0015] The fourth track is located at two ends of the bearing body and is slidably connected with the third track.

[0016] Furthermore, the third track is located above the second track, and the two are perpendicular to each other.

[0017] Furthermore, the bearing slot is provided with clamping slots on two opposite sides thereof for fixing the product to be tested.

[0018] Furthermore, the image processing device has built-in image processing software, and the image processing software includes AIO software and AI software.

[0019] Furthermore, the dust-free operating table also includes a side wall fixedly connected to the work surface and a supporting structure under the work surface.

[0020] Furthermore, it also includes:

[0021] An air blowing device, which is arranged on the side wall of the dust-free operating table, and the air outlet is facing the bearing structure of the product; and

[0022] A filter is arranged at the air outlet of the air blowing device.

[0023] Furthermore, it also includes a wind speed detection device, which is arranged at the air outlet of the air blowing device and is connected to the image processing device.

[0024] Furthermore, it also includes:

[0025] A servo motor is arranged on the dust-free operating table; and

[0026] A transmission device is connected to the servo motor and the bearing structure.

[0027] Furthermore, the image processing device also includes a motor control module, which is communicatively connected to the servo motor.

[0028] The present invention has at least the following beneficial effects: the defect detection system of the present invention utilizes a carrying device to place multiple products to be inspected at the same time, and multiple products can be inspected at one time, with high efficiency; and the carrying device can be moved forward, backward, left and right, without the need for an operator to directly contact the product to move it, thereby reducing the possibility of product contamination; the image processing device is internally configured with image processing software including AOI software and AI software, and most defect problems are first detected by the AOI software, while defects that are difficult to identify and have unclear definitions are judged using the AI ​​software, which can effectively detect defects and reduce omissions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to further illustrate the above and other advantages and features of various embodiments of the present invention, a more specific description of various embodiments of the present invention will be presented with reference to the accompanying drawings. It will be understood that these drawings only depict typical embodiments of the present invention and are therefore not to be considered as limiting the scope thereof. In the accompanying drawings, for clarity, identical or corresponding parts will be represented by identical or similar reference numerals.

[0030] Figure 1 A schematic front view of a defect detection system according to an embodiment of the present invention is shown; and

[0031] Figure 2 A schematic top view of a defect detection system according to an embodiment of the utility model is shown. DETAILED DESCRIPTION

[0032] It should be noted that various components in the various drawings may be shown exaggeratedly for illustrative purposes and are not necessarily correct to scale.

[0033] In the present invention, each embodiment is only intended to illustrate the solution of the present invention and should not be understood as limiting.

[0034] In the present invention, unless otherwise specified, the quantifiers "a", "an" and "an" do not exclude the presence of multiple elements.

[0035] It should also be pointed out that in the embodiments of the present invention, for the sake of clarity and simplicity, only a portion of the parts or components may be shown, but a person of ordinary skill in the art will understand that, under the guidance of the present invention, required parts or components may be added according to the needs of specific scenarios.

[0036] It should also be pointed out that within the scope of the present invention, the terms "same", "equal", "equal to" and the like do not mean that the two values ​​are absolutely equal, but allow a certain reasonable error, that is, the terms also cover "substantially the same", "substantially equal", and "substantially equal to".

[0037] It should also be pointed out that in the description of the present invention, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than explicitly or implicitly indicating that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as explicitly or implicitly indicating relative importance.

[0038] In addition, the embodiments of the present invention describe the process steps in a specific order, but this is only for the convenience of distinguishing the steps, and does not limit the order of the steps. In different embodiments of the present invention, the order of the steps can be adjusted according to the adjustment of the process.

[0039] like Figure 1 and Figure 2 As shown, a defect detection system includes a dust-free operating table 1, a product carrying device 2, a camera 3, an adjustable light source device 4, and an image processing device 5.

[0040] The dust-free operating table 1 comprises a work surface 11 , a side wall 12 and a supporting structure 13 below the work surface.

[0041] The product carrying device 2 is disposed on the work surface 11 and is used to carry the product to be tested. The product carrying device 2 includes a carrying structure 21 , a first track 22 , a second track 23 , and a third track 24 .

[0042] The supporting structure 21 includes a supporting body 25 and fourth rails 26 located at two ends of the supporting body 25 .

[0043] The first track 22 is fixedly connected to the work surface 11. The second track 23 is fixedly connected to the third track 24, and the third track 24 is located on the second track 23, and the two are perpendicular to each other. The second track 23 is slidably connected to the first track 22. The third track 24 is slidably connected to the fourth track 26 of the bearing structure 21.

[0044] The first track 22 and the second track 23 slide together so that the supporting structure 21 moves in the Y direction (moves forward and backward). The third track 24 and the fourth track 26 slide together so that the supporting structure 21 moves in the X direction (moves left and right).

[0045] The bearing body 25 includes a plurality of bearing slots 26, which have no bottom, which is equivalent to the bearing body 25 being hollowed out. The bearing slots 26 are configured to accommodate the product to be tested. The bearing slots are provided with card slots 27 on opposite sides thereof for fixing the product to be tested. During the test, the two sides of the product are fixed with a fixture or other fixing tool, and when the product is placed in the bearing slot 26, the fixture or other fixing tool is placed in the card slot 27. During the test, the operator pushes the bearing structure 21 to move in the X / Y direction so that the camera can capture the image of each product.

[0046] The bearing body 25 is provided with a plurality of bearing slots 26, which can increase the number of products inspected at one time and improve the inspection efficiency.

[0047] The camera 3 is disposed on the work surface 11 and is used to obtain images of the product.

[0048] The camera 3 is connected to the image processing device 5, and the camera 3 transmits the image of the product to the image processing device 5. The image processing device 5 has built-in image processing software, which detects whether the product has defects based on the image of the product. The image processing software includes AOI software and AI software. 80% of the defects are first detected by AOI software, while the defects that are difficult to identify and unclear are handed over to AI for final decision. AI can imitate humans to a certain extent and apply "rules of thumb" to image recognition, so that the remaining 20% ​​of the problems can be solved.

[0049] In one embodiment of the present invention, the image processing device 5 may be a computer, which is internally configured with image processing software, such as AIO software and AI software.

[0050] The adjustable light source device 4 is arranged on the work surface 11, and the light source emitting end of the adjustable light source device 4 is aimed at the product to be tested, so as to illuminate the product to be tested with oblique light. The light intensity emitted by the adjustable light source device 4 is adjustable, and the intensity of the light source is adaptively adjusted. In conjunction with the camera, the sensitivity and standard value of the detection are appropriately increased to reduce missed detection and over-killing.

[0051] Optionally, the defect detection system further includes a fixed light source, which is arranged on the side wall of the dust-free operating table 1 .

[0052] Optionally, the defect detection system further includes an air blowing device, which is arranged on the side wall of the dust-free operating table 1, and the air outlet is directly facing the product carrying device 2, so as to prevent dust particles from falling on the product surface during the detection process. A filter is arranged at the air outlet of the air blowing device to filter dust and prevent dust from being blown onto the product surface.

[0053] Optionally, the defect detection system further includes a wind speed detection device, which is arranged at the air outlet of the air blowing device, and is used to monitor the wind speed at the air outlet of the air blowing device and transmit data to the image processing device 5 so as to adjust the wind speed.

[0054] In another embodiment of the utility model, the product carrying device 2 can also be moved by electric control, by setting a servo motor and a transmission device to drive the bearing structure 21 of the product carrying device 2 to move in the X / Y direction, and a motor control module is set inside the image processing device 5 to control the operation of the servo motor, and the motor control module is connected to the servo motor. The servo motor is arranged on the dust-free operating table 1, the servo motor is connected to the transmission device, and the bearing structure 21 is connected to the transmission device, and the transmission device converts the rotational motion of the servo motor into a linear movement of the bearing structure 21. Two groups of servo motors and transmission devices are set, one of which is responsible for the X-direction movement of the bearing structure 21, and the other is responsible for the Y-direction movement of the bearing structure 21. The operation of the servo motor and the transmission device drives the second track 23 to slide with the first track 22, and the third track 24 to slide with the fourth track 26. The transmission device can be, for example, a conveyor belt.

[0055] Although some embodiments of the present invention have been described in this application document, it will be understood by those skilled in the art that these embodiments are only shown as examples. Under the guidance of the present invention, those skilled in the art can think of numerous variations, alternatives and improvements without exceeding the scope of the present invention. The attached claims are intended to define the scope of the present invention and thereby cover methods and structures within the scope of these claims themselves and their equivalents.

Claims

1. A defect detection system, characterized in that: include: A dust-free operating table having a work surface; A product carrying device, which is arranged on the work surface and is configured to carry a plurality of products to be tested and can move forward, backward, left and right; a camera configured to capture an image of the product to be tested; an image processing device connected to the camera and configured to detect defects based on the product image captured by the camera; and An adjustable light source device is arranged on the work surface to illuminate the product to be tested with oblique light.

2. The system according to claim 1, characterized in that The product carrying device comprises: A first rail, which is fixed on the work surface; a second track, which is slidably connected to the first track; A third track fixedly connected to the second track; and The load-bearing structure comprises: a carrying body, comprising a plurality of carrying slots, wherein the carrying slots are configured to accommodate a product to be tested; and The fourth track is located at two ends of the bearing body and is slidably connected with the third track.

3. The system according to claim 2, characterized in that The third track is located on the second track, and the two are perpendicular to each other.

4. The system according to claim 2, characterized in that The two opposite sides of the bearing slot are provided with clamping slots for fixing the product to be tested.

5. The system according to claim 2, characterized in that The dust-free operating table also includes a side wall fixedly connected to the work surface and a supporting structure under the work surface.

6. The system according to claim 5, characterized in that Also includes: An air blowing device, which is arranged on the side wall of the dust-free operating table, and the air outlet is facing the bearing structure of the product; as well as A filter is arranged at the air outlet of the air blowing device.

7. The system according to claim 6, characterized in that It also includes a wind speed detection device, which is arranged at the air outlet of the air blowing device and is connected to the image processing device.

8. The system according to claim 2, characterized in that Also includes: A servo motor is arranged on the dust-free operating table; and A transmission device is connected to the servo motor and the bearing structure.

9. The system according to claim 8, characterized in that The image processing device further includes a motor control module which is communicatively connected with the servo motor.

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