Thermal insulation device and temperature measuring device for quartz plate

Abstract

The present application provides a heat-insulating device for a quartz plate, which includes a mounting seat, an end cover and an outer sleeve; the mounting seat is used to be fixedly mounted on a silicon carbide synthesis furnace, and has a through hole connected to the furnace mouth; the end cover is arranged on the upper side of the mounting seat, and has a reserved hole for being coaxially arranged with the quartz plate; the outer sleeve is fixedly arranged between the mounting seat and the end cover, and the inner sleeve of the outer sleeve has an inner sleeve, and a cavity is formed between the inner sleeve and the outer sleeve; the outer sleeve has an air inlet pipe connected to the cavity, and the air inlet pipe is connected to an air pump; wherein the cavity is connected to the reserved hole, and the inner wall of the reserved hole has a plurality of air outlet holes. The present application also provides a temperature measuring device, and the two have the same beneficial effects. The heat-insulating device for a quartz plate provided by the present application can raise the position of the quartz plate, reduce the influence of thermal radiation on it, and form an air curtain in front of the inner surface of the quartz plate to block the influence of organic matter precipitation and dust in the furnace, thereby improving the accuracy of infrared temperature measurement.

Description

Technical Field

[0001] The utility model belongs to the technical field of infrared temperature measurement, and more specifically relates to a heat insulation device and a temperature measurement device for a quartz sheet. Background Art

[0002] With the development of science and technology, infrared temperature measurement technology has been widely used in the field of silicon carbide synthesis. The temperature measurement principle of infrared thermometer is to convert the radiation energy of infrared rays emitted by the measured object into electrical signals. The magnitude of infrared radiation energy corresponds to the temperature of the measured object itself.

[0003] In the observation of the existing silicon carbide synthesis furnace, a quartz plate is often installed at the furnace mouth of the silicon carbide synthesis furnace, and an infrared thermometer is installed on the outside of the quartz plate for non-contact measurement; when measuring the temperature, the infrared rays radiated from the inside of the silicon carbide synthesis furnace pass through the quartz plate into the infrared thermometer and are converted into electrical signals. According to the size of the converted electrical signals, the temperature inside the silicon carbide synthesis furnace can be determined.

[0004] The inventors found that during the temperature measurement process, the quartz plate is easily affected by dust and other volatile organic substances in the furnace, resulting in a decrease in the temperature measurement accuracy; at the same time, the quartz plate is exposed to heat radiation at the furnace mouth for a long time, which will cause the temperature of the quartz plate to be too high, thereby affecting the light transmittance of the quartz plate and causing a decrease in the temperature measurement accuracy. Utility Model Content

[0005] The purpose of the present application is to provide a heat insulation device and a temperature measuring device for a quartz plate, so as to solve the technical problem in the prior art that the quartz plate is easily affected by the temperature and impurities of the silicon carbide synthesis furnace, thereby causing a decrease in temperature measurement accuracy.

[0006] To achieve the above purpose, the technical solution adopted in the present application is: to provide a heat insulation device for a quartz sheet, which is arranged between the furnace mouth of a silicon carbide synthesis furnace and an infrared thermometer, and the furnace mouth is defined as facing up and down; it is characterized by comprising:

[0007] A mounting seat, used for fixed installation on the silicon carbide synthesis furnace, and having a through hole penetrating in the up-down direction and communicating with the furnace opening;

[0008] an end cover, which is arranged on the upper side of the mounting seat and has a reserved hole which penetrates in the up-down direction and is used to be coaxially arranged with the quartz plate; and

[0009] An outer sleeve is fixedly arranged between the mounting seat and the end cover, and its upper and lower ends are respectively connected with the through hole and the reserved hole; an inner sleeve is provided inside the outer sleeve, and a cavity is formed between the inner sleeve and the outer sleeve; an air intake pipe connected with the cavity is provided on the outer sleeve, and the air intake pipe is connected with an air pump;

[0010] The cavity is communicated with the reserved hole, and the inner wall of the reserved hole is provided with a plurality of air outlet holes penetrating to the outer peripheral wall of the end cover.

[0011] Preferably, the thermal insulation device further comprises:

[0012] The heat-insulating sleeve is sleeved on the outer circumference of the outer sleeve, and its upper and lower ends are respectively connected to the mounting seat and the end cover, and a closed cavity is formed between the heat-insulating sleeve and the outer sleeve; the heat-insulating sleeve has an inlet pipe and an outlet pipe that are connected to the closed cavity and are both connected to an electromagnetic valve, and the inlet pipe is connected to a liquid pump.

[0013] Preferably, the connection between the water inlet pipe and the thermal insulation sleeve is located below the connection between the water outlet pipe and the thermal insulation sleeve.

[0014] Preferably, a water temperature sensor is further provided on the thermal insulation sleeve; the water temperature sensor is used to monitor the temperature of the liquid in the closed cavity, and is electrically connected to both of the two solenoid valves.

[0015] Preferably, the upper side surface of the mounting seat has a first ring platform suitable for being embedded in the interior of the thermal insulation sleeve.

[0016] Preferably, the lower side of the end cover has a second annular platform suitable for being embedded between the thermal insulation sleeve and the outer sleeve.

[0017] Preferably, the inner sleeve has a plurality of blowing ports connected to the cavity.

[0018] Preferably, in the direction of the air outlet toward the central axis of the inner sleeve, the air outlet is arranged to be inclined upward so as to face the quartz plate.

[0019] Preferably, the upper side surface of the end cover has a fixing groove which is coaxially arranged with the reserved hole and is suitable for the quartz plate to be embedded.

[0020] In the embodiment of the present application, a quartz plate is fixedly installed between the furnace mouth of the silicon carbide synthesis furnace and the infrared thermometer by using a heat insulation device, and the quartz plate is arranged on the end cover, so that the position of the quartz plate is raised, and then the observation position of the infrared thermometer is raised, thereby reducing the influence of thermal radiation on it, reducing the temperature of the quartz plate, and thus reducing the measurement error; the cavity is connected with the reserved hole, and the outer sleeve has an air inlet pipe connected with the cavity, and the air inlet pipe is connected with an air pump, so that an air curtain is formed in front of the surface of the quartz plate to block the organic matter and dust volatilized by the material in the furnace from settling, thereby preventing dust and other organic matter from adhering to the quartz plate when the infrared thermometer is working, thereby affecting the temperature measurement accuracy.

[0021] Compared with the prior art, the thermal insulation device for the quartz plate provided in the embodiment of the present application can raise the position of the quartz plate, reduce the influence of thermal radiation thereon, and form an air curtain in front of the inner surface of the quartz plate to block the influence of organic matter precipitation and dust in the furnace, thereby improving the accuracy of infrared temperature measurement.

[0022] The technical solution adopted in the present application also provides a temperature measuring device, including the thermal insulation device for the quartz plate proposed in any of the aforementioned items.

[0023] The beneficial effects of the temperature measuring device provided in this embodiment are the same as the beneficial effects of the aforementioned thermal insulation device for the quartz plate, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 A schematic front view of the structure of a heat insulation device for a quartz sheet provided in an embodiment of the present application;

[0026] Figure 2 A schematic diagram of the cross-sectional structure of a heat insulation device for a quartz sheet provided in an embodiment of the present application;

[0027] Figure 3 A schematic diagram of the three-dimensional structure of a heat insulation device for a quartz sheet provided in an embodiment of the present application;

[0028] Among them, the reference numerals in the figure are:

[0029] 1. Mounting seat; 11. Through hole; 12. First ring platform; 2. End cover; 21. Reserved hole; 211. Air outlet; 212. Fixing groove; 22. Second ring platform; 31. Outer sleeve; 311. Air inlet pipe; 32. Inner sleeve; 321. Air outlet; 33. Cavity; 34. Air pump; 4. Heat-insulating sleeve; 41. Sealed cavity; 42. Water inlet pipe; 43. Water outlet pipe; 44. Solenoid valve; 45. Liquid pump; 46. Water temperature sensor; 5. Quartz plate; 6. Silicon carbide synthesis furnace; 7. Infrared thermometer. DETAILED DESCRIPTION

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0032] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0034] Please also read Figures 1 to 3 The quartz plate heat insulation device provided by the present application is now described. The quartz plate heat insulation device is arranged between the furnace mouth of the silicon carbide synthesis furnace 6 and the infrared thermometer 7, and the furnace mouth is defined as facing up and down, and includes a mounting seat 1, an end cover 2 and an outer sleeve 31.

[0035] The mounting base 1 is used for being fixedly mounted on the silicon carbide synthesis furnace 6 , and has a through hole 11 which penetrates in the up-down direction and communicates with the furnace opening; the through hole 11 is used for avoiding the conduction of the heat radiation light in the silicon carbide synthesis furnace 6 .

[0036] The end cover 2 is arranged on the upper side of the mounting base 1 and has a reserved hole 21 which penetrates in the up-down direction and is used for being coaxially arranged with the quartz plate 5 .

[0037] The outer sleeve 31 is fixedly arranged between the mounting base 1 and the end cover 2, and its upper and lower ends are respectively connected with the through hole 11 and the reserved hole 21; the outer sleeve 31 has an inner sleeve 32 inside, and a cavity 33 is formed between the inner sleeve 32 and the outer sleeve 31; the outer sleeve 31 has an air inlet pipe 311 connected with the cavity 33, and the air inlet pipe 311 is connected with an air pump 34; the air pump 34 is used to introduce gas into the cavity 33 through the air inlet pipe 311.

[0038] The cavity 33 is connected to the reserved hole 21 , and the inner wall of the reserved hole 21 has a plurality of air outlet holes 211 penetrating to the outer peripheral wall of the end cover 2 ; the air outlet holes 211 are used to discharge the gas in the reserved hole 21 to the outside of the thermal insulation device.

[0039] In the embodiment of the present application, the quartz plate 5 is fixedly installed between the furnace mouth of the silicon carbide synthesis furnace 6 and the infrared thermometer 7 by using a heat insulation device, and the quartz plate 5 is arranged on the end cover 2, so that the position of the quartz plate 5 is raised, and then the observation position of the infrared thermometer 7 is raised, thereby reducing the influence of thermal radiation on it, reducing the temperature of the quartz plate 5, and thus reducing the measurement error; the cavity 33 is connected to the reserved hole 21, and the outer sleeve 31 has an air inlet pipe 311 connected to the cavity 33, and the air inlet pipe 311 is connected to an air pump 34, so that an air curtain is formed in front of the surface of the quartz plate 5 to prevent the organic matter and dust volatilized by the materials in the furnace from settling, thereby preventing dust and other organic matter from adhering to the quartz plate 5 when the infrared thermometer 7 is working, thereby affecting the temperature measurement accuracy.

[0040] Compared with the prior art, the thermal insulation device for the quartz plate provided in the embodiment of the present application can raise the position of the quartz plate 5, reduce the influence of thermal radiation thereon, and form an air curtain in front of the inner surface of the quartz plate 5 to block the influence of organic matter precipitation and dust in the furnace, thereby improving the accuracy of infrared temperature measurement.

[0041] In some embodiments, please refer to Figures 1 to 3 As a specific implementation of the thermal insulation device for a quartz sheet provided in the present application, the thermal insulation device also includes a thermal insulation sleeve 4.

[0042] The heat-insulating sleeve 4 is sleeved on the outer circumference of the outer sleeve 31, and its upper and lower ends are respectively connected to the mounting seat 1 and the end cover 2, and a closed cavity 41 is formed between it and the outer sleeve 31; the heat-insulating sleeve 4 has an inlet pipe 42 and an outlet pipe 43 which are connected to the closed cavity 41 and are both connected to an electromagnetic valve 44, and the inlet pipe 42 is connected to a liquid pump 45.

[0043] By adopting the above technical solution, the liquid pump 45 introduces cooling water into the closed chamber 41 through the water inlet pipe 42, and finally the cooling water is discharged through the water outlet pipe 43. The cooling water in the closed chamber 41 can effectively dissipate the heat of the insulation device, effectively reduce the high temperature in the silicon carbide synthesis furnace 6 from being conducted to the quartz plate 5, ensure the stability of the light transmittance of the quartz plate 5, and thus improve the accuracy of temperature measurement by the infrared thermometer 7.

[0044] In some embodiments, please refer to Figures 1 to 3 As a specific implementation of the thermal insulation device for a quartz sheet provided in the present application, the connection between the water inlet pipe 42 and the thermal insulation sleeve 4 is located below the connection between the water outlet pipe 43 and the thermal insulation sleeve 4.

[0045] By adopting the above technical solution, low-temperature cooling water first enters from the water inlet pipe 42 at the bottom of the insulation sleeve 4, and then the higher-temperature cooling water is discharged from the water outlet pipe 43 at the top of the insulation sleeve 4 after the heat exchange is completed. Therefore, the cooling water can effectively cool the furnace mouth position of the silicon carbide synthesis furnace 6, effectively reducing the conduction rate of the high temperature in the silicon carbide synthesis furnace 6 to the quartz plate 5, thereby reducing the impact of the high temperature on the quartz plate 5.

[0046] In some embodiments, please refer to Figures 1 to 3 As a specific implementation of the thermal insulation device for quartz plates provided in the present application, a water temperature sensor 46 is also provided on the thermal insulation sleeve 4 ; the water temperature sensor 46 is used to monitor the temperature of the liquid in the closed cavity 41 , and is electrically connected to both solenoid valves 44 .

[0047] The water temperature sensor 46 can pre-set a parameter value. When the temperature of the cooling water in the insulation sleeve 4 is higher than the parameter value, the solenoid valve 44 increases the opening amplitude, thereby increasing the flow rate of the cooling water and improving the cooling efficiency; when the temperature of the cooling water in the insulation sleeve 4 is lower than the parameter value, the solenoid valve 44 reduces the opening amplitude, thereby reducing the flow rate of the cooling water and reducing the cooling efficiency.

[0048] By adopting the above technical solution, the temperature of the cooling water in the heat-insulating sleeve 4 can be maintained in a stable range, thereby ensuring the stability of the light transmittance of the quartz plate 5 and further improving the measurement accuracy of the infrared thermometer 7.

[0049] In some embodiments, please refer to Figures 1 to 3 As a specific embodiment of the heat insulation device for quartz plate provided in the present application, the upper side of the mounting seat 1 has a first ring platform 12 suitable for being embedded in the interior of the heat insulation sleeve 4.

[0050] By adopting the above technical solution, when assembling the quartz plate 5 insulation device, the first ring stage 12 can ensure the coaxial installation of the mounting seat 1 and the insulation sleeve 4, and the first ring stage 12 can ensure the welding quality at the joint, thereby ensuring the airtightness between the insulation sleeve 4 and the mounting seat 1.

[0051] In some embodiments, see Figure 2 As a specific embodiment of the heat insulation device for quartz plates provided in the present application, the lower side of the end cover 2 has a second ring platform 22 suitable for being embedded between the heat insulation sleeve 4 and the outer sleeve 31.

[0052] By adopting the above technical solution, when assembling the quartz plate 5 insulation device, the second ring stage 22 can ensure the coaxial installation of the end cover 2, the insulation sleeve 4 and the outer sleeve 31, and the second ring stage 22 can ensure the welding quality at the joint, thereby ensuring the airtightness between the end cover 2 and the insulation sleeve 4 and the outer sleeve 31.

[0053] In some embodiments, please refer to Figures 1 to 3 As a specific embodiment of the heat insulation device for a quartz plate provided in the present application, the inner sleeve 32 has a plurality of blowing ports 321 connected to the cavity 33 .

[0054] In some embodiments, please refer to Figures 1 to 3 As a specific embodiment of the heat insulation device for the quartz plate provided in the present application, in the direction of the air outlet 211 toward the central axis of the inner sleeve 32, the air outlet 321 is arranged to be inclined upward so as to face the quartz plate 5; wherein the size and shape of the air outlet 321 can be replaced according to the shape specifications of the quartz plate 5.

[0055] By adopting the above technical solution, multiple blowing ports 321 are arranged on the inner wall of the inner sleeve 32 and tilted upward toward the quartz plate 5. When the air pump 34 introduces gas into the cavity 33, the gas is discharged through the multiple blowing ports 321, forming a conical wind curtain on the inner bottom surface of the quartz plate 5, which effectively blocks the sedimentation of organic matter and dust volatilized by the materials in the furnace, and can directly blow the middle part of the inner surface of the quartz plate 5 to prevent dust and other organic matter from adhering to the infrared thermometer 7 when it is working and affecting the temperature measurement accuracy.

[0056] In some embodiments, please refer to Figures 1 to 3 As a specific embodiment of the heat insulation device for the quartz plate provided in the present application, the upper side surface of the end cover 2 has a fixing groove 212 which is coaxially arranged with the reserved hole 21 and is suitable for the quartz plate 5 to be embedded; the size of the fixing groove 212 is adapted according to the specification size of the quartz plate 5 used.

[0057] By adopting the above technical solution, the quartz plate 5 can be installed in the fixing groove 212 by gluing or fixing with fasteners, thereby preventing the quartz plate 5 from moving when measuring temperature, thereby ensuring the measurement accuracy of the infrared thermometer 7.

[0058] The technical solution adopted in the present application also provides a temperature measuring device, including the thermal insulation device for the quartz plate proposed in any of the aforementioned items.

[0059] The beneficial effects of the temperature measuring device provided in this embodiment are the same as the beneficial effects of the aforementioned thermal insulation device for the quartz plate, and will not be repeated here.

[0060] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A heat insulation device for a quartz sheet, arranged between the furnace mouth of a silicon carbide synthesis furnace and an infrared thermometer, wherein the furnace mouth is oriented in the up and down direction; characterized in that: include: A mounting seat, used for fixed installation on the silicon carbide synthesis furnace, and having a through hole penetrating in the up-down direction and communicating with the furnace opening; an end cover, which is arranged on the upper side of the mounting seat and has a reserved hole which penetrates in the up-down direction and is used to be coaxially arranged with the quartz plate; and An outer sleeve is fixedly arranged between the mounting seat and the end cover, and its upper and lower ends are respectively connected with the through hole and the reserved hole; an inner sleeve is provided inside the outer sleeve, and a cavity is formed between the inner sleeve and the outer sleeve; an air intake pipe connected with the cavity is provided on the outer sleeve, and the air intake pipe is connected with an air pump; The cavity is communicated with the reserved hole, and the inner wall of the reserved hole is provided with a plurality of air outlet holes penetrating to the outer peripheral wall of the end cover.

2. The thermal insulation device for a quartz plate according to claim 1, characterized in that: The thermal insulation device also includes: The heat-insulating sleeve is sleeved on the outer circumference of the outer sleeve, and its upper and lower ends are respectively connected to the mounting seat and the end cover, and a closed cavity is formed between the heat-insulating sleeve and the outer sleeve; the heat-insulating sleeve has an inlet pipe and an outlet pipe that are connected to the closed cavity and are both connected to an electromagnetic valve, and the inlet pipe is connected to a liquid pump.

3. The thermal insulation device for a quartz plate according to claim 2, characterized in that: The connection point between the water inlet pipe and the heat insulation sleeve is located below the connection point between the water outlet pipe and the heat insulation sleeve.

4. The thermal insulation device for a quartz plate according to claim 2, characterized in that: A water temperature sensor is also provided on the heat-insulating sleeve; the water temperature sensor is used to monitor the temperature of the liquid in the closed cavity, and the water temperature sensor is electrically connected to both of the two solenoid valves.

5. The thermal insulation device for a quartz plate according to claim 2, characterized in that: The upper side surface of the mounting seat has a first ring platform suitable for being embedded in the interior of the heat insulation sleeve.

6. The heat insulating device for a quartz plate according to claim 2, characterized in that: The lower side surface of the end cover has a second ring platform suitable for being embedded between the heat insulation sleeve and the outer sleeve.

7. The thermal insulation device for a quartz plate according to claim 1, characterized in that: The inner sleeve is provided with a plurality of blowing ports which are communicated with the cavity.

8. The heat insulating device for a quartz plate according to claim 7, characterized in that: In the direction from the air outlet toward the central axis of the inner sleeve, the air blowing port is arranged to be inclined upwards so as to face the quartz plate.

9. The heat insulating device for a quartz plate according to claim 1, characterized in that: The upper side surface of the end cover is provided with a fixing groove which is coaxially arranged with the reserved hole and is suitable for the quartz plate to be embedded.

10. The temperature measuring device is characterized in that: A thermal insulation device for a quartz plate comprising any one of claims 1 to 9.

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