Ventilation structure of flatness tester

Abstract

The utility model provides a ventilation structure of a flatness tester. The flatness tester comprises a box body and a blowing nozzle, wherein the box body comprises a side plate and a bottom plate; the side plate is provided with a first opening used for taking and placing a wafer. A second opening for ventilation is formed in the upper surface of the box body; the ventilation structure comprises a baffle plate and the box body; the baffle plate is mounted on the upper surface of the box body, and the baffle plate does not completely cover the second opening; a plurality of first through holes are formed in the baffle, and a nozzle of the blowing nozzle faces the baffle; a cavity is defined by the baffle, the side plates and the bottom plate. According to the flatness tester provided by the utility model, air blown out by the air blowing nozzle passes through the plurality of first through holes and then enters the box body, so that air flow in the box body can be distributed more uniformly, heat in the box body is easy to dissipate, the temperature in the box body and the temperature of the infrared probe are reduced, and the accuracy and the stability of a measurement result of the flatness tester are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of flatness testers, in particular to a ventilation structure of a flatness tester. Background Art

[0002] During the wafer manufacturing process, a flatness tester is required to detect the flatness of the wafer. The structure of the flatness tester is as follows: Figure 1 and Figure 2 As shown, it includes a box 1, an infrared probe 2, a bracket 3, a CDA (Clean Dry Air) blowing nozzle 4 and a crossbeam 5; the box 1 includes a side panel 12 and a bottom panel 13, and the side panel 12 includes a first side panel 121, a second side panel 122 and a third side panel 123; a first opening for taking and placing wafers is provided on the fourth side 124, and a second opening for ventilation is provided on the upper surface of the box 1, and the fourth side 124 and the upper surface of the box 1 are usually in an open state; one end of the infrared probe 2 is mounted on the crossbeam 5, and the other end extends into the interior of the box 1; the crossbeam 5 is connected to the box 1 through a vertical rod; one end of the bracket 3 is connected to the box 1, and the other end extends in the direction of the infrared probe 2; the blowing nozzle 4 is mounted on the bracket 3, and the nozzle of the blowing nozzle 4 faces the interior of the box 1. When detecting the flatness of the wafer 6, the wafer 6 needs to be placed in the box 1, and the infrared probe 2 emits infrared rays to the wafer 6, and the probe receiver can determine the flatness of the wafer 6 according to the received signal.

[0003] However, only the fourth side surface 124 and the upper surface of the housing 1 of the flatness tester can output CDA. After the flatness tester has been running for a long time, the heat in the housing 1 is not easy to dissipate, resulting in high temperature or high temperature fluctuations, which will affect the measurement results of the flatness tester. Utility Model Content

[0004] The utility model provides a ventilation structure of a flatness tester to solve the technical problem that the heat in a box of the flatness tester is not easy to be emitted.

[0005] In order to solve the above technical problems, the utility model provides a ventilation structure of a flatness tester, the flatness tester comprises a box body and a blowing nozzle, the box body comprises a side plate and a bottom plate; the side plate is provided with a first opening for taking and placing a wafer; the upper surface of the box body is provided with a second opening for ventilation;

[0006] The ventilation structure comprises a baffle and the box body; the baffle is mounted on the upper surface of the box body, and the baffle does not completely cover the second opening; a plurality of first through holes are arranged on the baffle, and the nozzle of the blowing nozzle faces the baffle;

[0007] The baffle plate, the side plate and the bottom plate are enclosed to form a cavity.

[0008] Optionally, the side plate is provided with a plurality of second through holes on a side surface opposite to the first opening.

[0009] Optionally, a diameter of the first through hole is smaller than a diameter of the second through hole.

[0010] Optionally, the side panel includes a first side panel, a second side panel and a third side panel connected in sequence; the surface where the first opening is located is parallel to the second side panel; the second through hole is arranged on the second side panel; one end of the baffle is connected to the first side panel, and the other end is connected to the third side panel.

[0011] Optionally, the baffle is tilted relative to the bottom plate, and the side of the baffle close to the second side plate is higher than the side of the baffle close to the first opening; the side of the baffle close to the second side plate is connected to the first side plate and the third side plate through a vertical plate.

[0012] Optionally, the second through holes are evenly distributed on the second side plate.

[0013] Optionally, the first through holes are evenly distributed on the baffle.

[0014] The utility model provides a ventilation structure of a flatness tester, comprising a baffle, on which a plurality of first through holes are arranged, and gas blown out of an air nozzle passes through the plurality of first through holes and then enters a box body, so that the air flow distribution in the box body can be more uniform, and the heat in the box body can be easily dissipated, thereby reducing the temperature in the box body and the temperature of the infrared probe, and improving the accuracy and stability of the measurement result of the flatness tester. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The present invention is a structural schematic diagram of a flatness tester in the prior art.

[0016] Figure 2 yes Figure 1 and Figure 3 Schematic diagram of the top view of the middle side panel.

[0017] Figure 3 It is a schematic diagram of the distribution of a ventilation structure of a flatness tester provided by an embodiment of the utility model on the flatness tester.

[0018] Figure 4 It is a structural schematic diagram of a second side plate provided in one embodiment of the utility model.

[0019] Figure 5 It is a front view schematic diagram of a box body and a baffle provided in one embodiment of the utility model.

[0020] [Description of reference numerals is as follows]:

[0021] Box-1, infrared probe-2, bracket-3, air blowing nozzle-4, beam-5, wafer-6;

[0022] Baffle-11, side plate-12, bottom plate-13;

[0023] First through hole-111;

[0024] A first side plate 121, a second side plate 122, a third side plate 123, and a fourth side plate 124;

[0025] Second through hole-1221. DETAILED DESCRIPTION

[0026] In order to make the purpose, advantages and features of the present invention clearer, the ventilation structure of a flatness tester proposed by the present invention is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0027] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0028] like Figure 2 and Figure 3 As shown, this embodiment provides a ventilation structure of a flatness tester, the flatness tester includes a box body 1 and an air blowing nozzle 4, the box body 1 includes a side panel 12 and a bottom panel 13; the side panel 12 is provided with a first opening for taking and placing a wafer 6; the upper surface of the box body 1 is provided with a second opening for ventilation; the ventilation structure includes a baffle 11 and the box body 1; the baffle 11 is installed on the upper surface of the box body 1, and the baffle 11 does not completely cover the second opening; a plurality of first through holes 111 are provided on the baffle 11, and the nozzle of the air blowing nozzle 4 faces the baffle 11; the baffle 11, the side panel 12 and the bottom panel 13 enclose a cavity.

[0029] The ventilation structure of a flatness tester provided in this embodiment includes a baffle 11, on which a plurality of first through holes 111 are arranged. The gas blown out of the blowing nozzle 4 passes through the plurality of first through holes 111 and then enters the box body 1, so that the air flow distribution in the box body 1 can be more uniform, and the heat in the box body 1 can be easily dissipated, thereby reducing the temperature in the box body 1 and the temperature of the infrared probe 2, and improving the accuracy and stability of the measurement results of the flatness tester.

[0030] Optional, such as Figure 2 and Figure 3 As shown, the side plate 12 is provided with a plurality of second through holes 1221 on the side opposite to the first opening. A convection channel can be formed between the first opening and the second through holes 1221 so that the heat in the box body 1 is taken away by the clean dry air blown out by the blowing nozzle 4.

[0031] Optional, reference Figure 3 As shown, the first through hole 111 and the second through hole 1221 are both round holes, which facilitates the processing to form the first through hole 111 and the second through hole 1221. Figure 4 As shown, in other embodiments, the shapes of the first through hole 111 and the second through hole 1221 can be square holes or holes of other shapes.

[0032] Optional, reference Figure 3 As shown, the aperture of the first through hole 111 is smaller than the aperture of the second through hole 1221. The smaller aperture of the first through hole 111 can make the airflow entering the box 1 more stable and uniform, thereby making the temperature in the box 1 more stable. The larger aperture of the second through hole 1221 can discharge the heat in the box 1 as quickly as possible.

[0033] Optional, such as Figure 2 and Figure 3 As shown, the side panel 12 includes a first side panel 121, a second side panel 122 and a third side panel 123 connected in sequence; the surface where the first opening is located is parallel to the second side panel 122; the second through hole 1221 is arranged on the second side panel 122; one end of the baffle 11 is connected to the first side panel 121, and the other end is connected to the third side panel 123. The fourth side surface 124 opposite to the second side panel 122 and the upper surface of the box body 1 can be in an open state. The baffle 11 can be made of an acrylic plate or other plastic plates with good hardness. In other embodiments, the side panel 12 can include more sub-side panels.

[0034] Optional, such as Figure 2 and Figure 5As shown, the baffle 11 is tilted relative to the bottom plate 13, and the side of the baffle 11 close to the second side plate 122 is higher than the side of the baffle 11 close to the first opening; the side of the baffle 11 close to the second side plate 122 is connected to the first side plate 121 and the third side plate 123 through a vertical plate. The baffle 11 is tilted to prevent airflow from impacting the infrared probe 2, thereby preventing the temperature of the infrared probe 2 from fluctuating too much.

[0035] Optional, such as Figure 3 As shown, the box body 1 is in the shape of a cuboid, which is convenient for processing to form the box body 1. In other embodiments, the box body 1 may be in the shape of a cylinder or other shapes.

[0036] Optional, such as Figure 3 As shown, the second through holes 1221 are evenly distributed on the second side plate 122 , which can improve the heat dissipation effect of the box body 1 .

[0037] Optional, such as Figure 3 As shown, the first through holes 111 are evenly distributed on the baffle 11 , so that the airflow entering the box body 1 can be more uniform and the heat dissipation effect of the box body 1 is better.

[0038] In summary, the utility model provides a ventilation structure of a flatness tester, including a baffle 11, on which a plurality of first through holes 111 are arranged. The gas blown out of the blowing nozzle 4 passes through the plurality of first through holes 111 and then enters the box body 1. In this way, the air flow distribution in the box body 1 can be more even, and the heat in the box body 1 can be easily dissipated, thereby reducing the temperature in the box body 1 and the temperature of the infrared probe 2, and improving the accuracy and stability of the measurement results of the flatness tester.

[0039] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A ventilation structure of a flatness tester, characterized in that: The flatness tester comprises a box body and a blowing nozzle, wherein the box body comprises a side plate and a bottom plate; the side plate is provided with a first opening for taking and placing a wafer; and the upper surface of the box body is provided with a second opening for ventilation; The ventilation structure comprises a baffle and the box body; the baffle is mounted on the upper surface of the box body, and the baffle does not completely cover the second opening; a plurality of first through holes are arranged on the baffle, and the nozzle of the blowing nozzle faces the baffle; The baffle plate, the side plate and the bottom plate are enclosed to form a cavity.

2. A ventilation structure of a flatness tester as claimed in claim 1, characterized in that: The side plate is provided with a plurality of second through holes on a side surface opposite to the first opening.

3. A ventilation structure of a flatness tester as claimed in claim 2, characterized in that: The aperture of the first through hole is smaller than the aperture of the second through hole.

4. A ventilation structure of a flatness tester as claimed in claim 2, characterized in that: The side plate includes a first side plate, a second side plate and a third side plate connected in sequence; the surface where the first opening is located is parallel to the second side plate; the second through hole is arranged on the second side plate; one end of the baffle is connected to the first side plate, and the other end is connected to the third side plate.

5. A ventilation structure of a flatness tester as claimed in claim 4, characterized in that: The baffle is tilted relative to the bottom plate, and the side of the baffle close to the second side plate is higher than the side of the baffle close to the first opening; the side of the baffle close to the second side plate is connected to the first side plate and the third side plate through a vertical plate.

6. A ventilation structure of a flatness tester as claimed in claim 4, characterized in that: The second through holes are evenly distributed on the second side plate.

7. The ventilation structure of a flatness tester according to claim 1, characterized in that: The first through holes are evenly distributed on the baffle.

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