A device for mixing wet oxygen and dry oxygen

Abstract

The utility model discloses a wet oxygen and dry oxygen mixing device, comprising: a box body, a cavity is arranged inside the box body, the cavity comprises a first cavity, a second cavity, a third cavity and a fourth cavity, a gas-liquid mixing mechanism is arranged inside the third cavity, the gas-liquid mixing mechanism comprises a first exhaust pipe, a water tank, a water pump, a water pumping pipe, a discharge pipe and an atomizer, the output port of the first cavity is fixedly connected to the first exhaust pipe, the input end of the water pump is communicated with the water tank, the output end of the water pump is fixedly connected to the water pumping pipe, the other end of the water pumping pipe is fixedly connected to the discharge pipe, the lower surface of the discharge pipe is fixedly connected to the atomizer, a mixing box is arranged inside the fourth cavity, and the mixing mechanism can be used to extract distilled water and dry oxygen in the first cavity according to the required moisture and oxygen ratio of wet oxygen, decompose the step of mixing oxygen and water vapor, improve the control of reaction rate, and improve the accuracy of regulation ratio.

Description

Technical Field

[0001] The utility model relates to the technical field of wet oxygen and dry oxygen mixing, in particular to a wet oxygen and dry oxygen mixing device. Background Art

[0002] Wet oxygen and dry oxygen refer to different types of oxidizing gases used to oxidize silicon materials during semiconductor manufacturing. The main difference between them is whether moisture is included in the oxidation process. The use of a mixture of dry and wet oxygen can optimize the quality and performance of the oxide layer.

[0003] Existing wet oxygen and dry oxygen mixing devices generally heat high-purity water to generate water vapor during mixing, and then directly mix it with dry oxygen to form an oxidizing atmosphere. This method is difficult to control during the process. Due to the different properties of dry oxygen and wet oxygen, the reaction rate may be difficult to predict and control, thereby affecting product quality and production efficiency. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art, and provides a device for mixing wet oxygen and dry oxygen. The device can extract distilled water and dry oxygen in the first cavity according to the required moisture and oxygen ratio of the wet oxygen through a mixing mechanism, differentiate the steps of mixing oxygen and water vapor, improve the control of the reaction rate, ensure that the ratio of wet oxygen and dry oxygen entering the mixing box meets the mixing standard, achieve accurate regulation of the ratio, and ensure the quality of the product; the temperature and humidity of the mixing box can be detected by the temperature detector and humidity detector, and the heater and the fan are coordinated for regulation to ensure that the gas in the mixing box reaches the optimum temperature and the best humidity when mixed, fully ensure the mixing effect, and have good practicality.

[0005] The utility model also provides a device for mixing wet oxygen and dry oxygen, comprising: a box, a cavity is arranged inside the box, the cavity comprises a first cavity, a second cavity, a third cavity and a fourth cavity, a gas-liquid mixing mechanism is arranged inside the third cavity, the gas-liquid mixing mechanism comprises a first exhaust pipe, a water tank, a water pump, a water suction pipe, a discharge pipe and an atomizer, the output port of the first cavity is fixedly connected to the first exhaust pipe, the input end of the water pump is communicated with the water tank, the output end of the water pump is fixedly connected to the water suction pipe, the other end of the water suction pipe is fixedly connected to the discharge pipe, the lower surface of the discharge pipe is fixedly connected to the atomizer, and a mixing box is arranged inside the fourth cavity.

[0006] According to the wet oxygen and dry oxygen mixing device, a piston is slidably connected to the side inner wall of the first cavity, a cylinder is provided on the outside of the box, an output end of the cylinder is fixedly connected to a push rod, and the other end of the push rod is fixedly connected to the piston.

[0007] According to the wet oxygen and dry oxygen mixing device, one end of the first exhaust pipe away from the first cavity extends into the interior of the third cavity, and a first control valve is provided on the outer surface of the first exhaust pipe.

[0008] According to the wet oxygen and dry oxygen mixing device, the water inlet of the water pump is fixedly connected to the water inlet pipe, the outer surface of the water inlet pipe is provided with a fifth control valve, the water outlet of the water pump is provided with a flow monitoring sensor, and the lower surface of the atomizer is provided with a nozzle.

[0009] According to the wet oxygen and dry oxygen mixing device, a fixing rod is fixedly connected to the side inner wall of the third cavity, and the outer surface of the discharge pipe is fixedly connected to the fixing rod.

[0010] According to the wet oxygen and dry oxygen mixing device, a connecting pipe is fixedly connected to the side surface of the mixing box, one end of the connecting pipe away from the mixing box extends into the interior of the third cavity, the exhaust port of the second cavity is fixedly connected to the second exhaust pipe, the other end of the second exhaust pipe extends into the interior of the mixing box, a second control valve is provided on the outer surface of the connecting pipe, a third control valve is provided on the outer surface of the second exhaust pipe, the side surface of the mixing box is fixedly connected to the third exhaust pipe, and the outer surface of the third exhaust pipe is provided with a fourth control valve.

[0011] According to the wet oxygen and dry oxygen mixing device, a temperature detector is fixedly connected to the upper surface of the box body, and the probe of the temperature detector extends into the interior of the fourth cavity. A humidity detector is fixedly connected to the upper surface of the box body, and the probe of the humidity detector extends into the interior of the mixing box.

[0012] According to the wet oxygen and dry oxygen mixing device, a heater is provided inside the fourth cavity, a motor is fixedly connected to the outer surface of the box, a main shaft is fixedly connected to the output end of the motor, and a fan is fixedly connected to the other end of the main shaft.

[0013] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0015] Figure 1 This is a schematic diagram of the overall structure of a wet oxygen and dry oxygen mixing device of the utility model;

[0016] Figure 2 This is a schematic diagram of the overall internal structure of a wet oxygen and dry oxygen mixing device of the utility model;

[0017] Figure 3 This is a schematic diagram of the internal structure of the third cavity and the fourth cavity of a wet oxygen and dry oxygen mixing device of the utility model;

[0018] Figure 4 The utility model is a partial structural schematic diagram of a wet oxygen and dry oxygen mixing device.

[0019] Legend:

[0020] 1. Box body; 2. First cavity; 3. Second cavity; 4. Cylinder; 5. Push rod; 6. Piston; 7. First exhaust pipe; 8. First control valve; 9. Third cavity; 10. Fourth cavity; 11. Water tank; 12. Water pump; 13. Suction pipe; 14. Discharge pipe; 15. Atomizer; 16. Nozzle; 17. Flow monitoring sensor; 18. Connecting pipe; 19. Mixing box; 20. Second control valve; 21. Second exhaust pipe; 22. Third control valve; 23. Third exhaust pipe; 24. Fourth control valve; 25. Motor; 26. Spindle; 27. Fan; 28. Temperature detector; 29. ​​Humidity detector; 30. Heater; 31. Fixing rod; 32. Water inlet pipe; 33. Fifth control valve. DETAILED DESCRIPTION

[0021] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0022] Reference Figure 1-4The utility model embodiment is a wet oxygen and dry oxygen mixing device, which includes: a box body 1, a cavity is arranged inside the box body 1, the cavity includes a first cavity 2, a second cavity 3, a third cavity 9 and a fourth cavity 10, a gas-liquid mixing mechanism is arranged inside the third cavity 9, and the gas-liquid mixing mechanism includes a first exhaust pipe 7, a water tank 11, a water pump 12, a water pumping pipe 13, a discharge pipe 14 and an atomizer 15, the output port of the first cavity 2 is fixedly connected to the first exhaust pipe 7, the end of the first exhaust pipe 7 away from the first cavity 2 extends into the third cavity 9, the outer surface of the first exhaust pipe 7 is provided with a first control valve 8, the input end of the water pump 12 is communicated with the water tank 11, the output end of the water pump 12 is fixedly connected with the water pumping pipe 13, the other end of the water pumping pipe 13 is fixedly connected with the discharge pipe 14, the lower surface of the discharge pipe 14 is fixedly connected with the atomizer 15, the side inner wall of the first cavity 2 is slidably connected with a piston 6, the outer side of the box body 1 is provided with a cylinder 4, the output end of the cylinder 4 is connected to the push The rod 5 is fixedly connected, and the other end of the push rod 5 is fixedly connected to the piston 6. The water inlet of the water pump 12 is fixedly connected with the water inlet pipe 32. The outer surface of the water inlet pipe 32 is provided with a fifth control valve 33. The water outlet of the water pump 12 is provided with a flow monitoring sensor 17. The lower surface of the atomizer 15 is provided with a nozzle 16. First, the first control valve 8 and the third control valve 22 are opened, and the two cylinders 4 are started to slowly extend the push rod 5. According to the mixed volume ratio, the two pistons 6 are pushed to discharge a certain amount of dry oxygen. The dry oxygen in the first cavity 2 first enters the third cavity 9 from the first exhaust pipe 7. At the same time, the water pump 12 is started to extract the distilled water in the water tank 11, and it is transported into the discharge pipe 14 through the water extraction pipe 13. Under the action of the atomizer 15, the distilled water is atomized and sprayed from the nozzle 16, so that the dry oxygen in the third cavity 9 is mixed with water vapor to become wet oxygen, and the amount of water extracted and output by the water pump 12 can be controlled by the set flow monitoring sensor 17 to ensure that the water content of the wet oxygen meets the standard.

[0023] A fixing rod 31 is fixedly connected to the inner side wall of the third cavity 9 , and the outer surface of the discharge pipe 14 is fixedly connected to the fixing rod 31 . The fixing rod 31 is used to fix and install the discharge pipe 14 .

[0024] A mixing box 19 is provided inside the fourth cavity 10, and a connecting pipe 18 is fixedly connected to the side surface of the mixing box 19, and one end of the connecting pipe 18 away from the mixing box 19 extends into the interior of the third cavity 9, and the exhaust port of the second cavity 3 is fixedly connected to a second exhaust pipe 21, and the other end of the second exhaust pipe 21 extends into the interior of the mixing box 19, and a second control valve 20 is provided on the outer surface of the connecting pipe 18, and a third control valve 22 is provided on the outer surface of the second exhaust pipe 21. A temperature detector 28 is fixedly connected to the upper surface of the box 1, and the probe of the temperature detector 28 extends into the interior of the fourth cavity 10. A humidity detector 29 is fixedly connected to the upper surface of the box 1, and the humidity detector The probe 29 extends into the interior of the mixing box 19, a heater 30 is arranged inside the fourth cavity 10, a motor 25 is fixedly connected to the outer surface of the box 1, an output end of the motor 25 is fixedly connected to a main shaft 26, and the other end of the main shaft 26 is fixedly connected to a fan 27, wet oxygen is transported into the mixing box 19 through the connecting pipe 18 and the second control valve 20, and dry oxygen discharged from the second cavity 3 enters the mixing box 19, so that the dry oxygen and wet oxygen are mixed, and the temperature and humidity of the mixing box 19 can be detected by the temperature detector 28 and the humidity detector 29, and the heater 30 and the fan 27 are coordinated for regulation to ensure the optimum temperature and humidity, thereby ensuring the mixing effect.

[0025] A third exhaust pipe 23 is fixedly connected to the side surface of the mixing box 19 , and a fourth control valve 24 is provided on the outer surface of the third exhaust pipe 23 . After mixing, the mixed oxygen is used through the third exhaust pipe 23 and the fifth control valve 33 .

[0026] Working principle: When wet oxygen and dry oxygen are mixed, the two cylinders 4 are started to slowly extend the push rod 5, and the two pistons 6 are pushed according to the mixed volume ratio to discharge a certain amount of dry oxygen. The dry oxygen in the first cavity 2 first enters the third cavity 9 from the first exhaust pipe 7, and at the same time, the water pump 12 is started to extract the distilled water in the water tank 11, and transports it into the discharge pipe 14 through the water extraction pipe 13. Under the action of the atomizer 15, the distilled water is atomized and sprayed out from the nozzle 16, so that the dry oxygen in the third cavity 9 is mixed with water vapor to become wet oxygen, and the flow monitoring sensor 17 can be set to control The water pump 12 extracts and outputs water to ensure that the water content of the wet oxygen meets the standard, and then transports the wet oxygen into the mixing box 19 through the connecting pipe 18 and the second control valve 20. At the same time, the dry oxygen discharged from the second cavity 3 enters the mixing box 19 to mix the dry oxygen and the wet oxygen. The temperature and humidity of the mixing box 19 can be detected by the temperature detector 28 and the humidity detector 29, and the heater 30 and the fan 27 are used to control the temperature and humidity to ensure the optimum temperature and the best mixing effect. Finally, the mixed oxygen is used through the third exhaust pipe 23 and the fifth control valve 33.

[0027] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A device for mixing wet oxygen and dry oxygen, characterized in that: include: A box (1), wherein a cavity is arranged inside the box (1), wherein the cavity comprises a first cavity (2), a second cavity (3), a third cavity (9) and a fourth cavity (10), wherein a gas-liquid mixing mechanism is arranged inside the third cavity (9), wherein the gas-liquid mixing mechanism comprises a first exhaust pipe (7), a water tank (11), a water pump (12), a water suction pipe (13), a discharge pipe (14) and an atomizer (15), wherein the output port of the first cavity (2) is fixedly connected to the first exhaust pipe (7), the input end of the water pump (12) is communicated with the water tank (11), the output end of the water pump (12) is fixedly connected to the water suction pipe (13), the other end of the water suction pipe (13) is fixedly connected to the discharge pipe (14), the lower surface of the discharge pipe (14) is fixedly connected to the atomizer (15), and a mixing box (19) is arranged inside the fourth cavity (10).

2. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: A piston (6) is slidably connected to the inner side wall of the first cavity (2), a cylinder (4) is arranged on the outer side of the box body (1), an output end of the cylinder (4) is fixedly connected to a push rod (5), and the other end of the push rod (5) is fixedly connected to the piston (6).

3. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: One end of the first exhaust pipe (7) away from the first cavity (2) extends into the interior of the third cavity (9), and a first control valve (8) is provided on the outer surface of the first exhaust pipe (7).

4. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: The water inlet of the water pump (12) is fixedly connected to a water inlet pipe (32), the outer surface of the water inlet pipe (32) is provided with a fifth control valve (33), the water outlet of the water pump (12) is provided with a flow monitoring sensor (17), and the lower surface of the atomizer (15) is provided with a nozzle (16).

5. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: A fixing rod (31) is fixedly connected to the side inner wall of the third cavity (9), and the outer surface of the discharge pipe (14) is fixedly connected to the fixing rod (31).

6. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: A connecting pipe (18) is fixedly connected to the side surface of the mixing box (19), and one end of the connecting pipe (18) away from the mixing box (19) extends into the interior of the third cavity (9); an exhaust port of the second cavity (3) is fixedly connected to a second exhaust pipe (21), and the other end of the second exhaust pipe (21) extends into the interior of the mixing box (19); a second control valve (20) is provided on the outer surface of the connecting pipe (18), and a third control valve (22) is provided on the outer surface of the second exhaust pipe (21); a third exhaust pipe (23) is fixedly connected to the side surface of the mixing box (19), and a fourth control valve (24) is provided on the outer surface of the third exhaust pipe (23).

7. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: A temperature detector (28) is fixedly connected to the upper surface of the box body (1), and a probe of the temperature detector (28) extends into the interior of the fourth cavity (10). A humidity detector (29) is fixedly connected to the upper surface of the box body (1), and a probe of the humidity detector (29) extends into the interior of the mixing box (19).

8. A wet oxygen and dry oxygen mixing device according to claim 1, characterized in that: A heater (30) is arranged inside the fourth cavity (10); a motor (25) is fixedly connected to the outer surface of the box (1); an output end of the motor (25) is fixedly connected to a main shaft (26); and the other end of the main shaft (26) is fixedly connected to a fan (27).

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