Partitioned adsorption objective table and processing equipment

Abstract

The utility model provides a partition adsorption objective table, which is used for adsorbing light guide plate molds with different sizes and comprises an objective table main body and an objective table bottom plate fixedly connected with the objective table main body, a groove is formed in the objective table main body, and the objective table bottom plate is used for closing the groove to form a cavity; the objective table body is further provided with an air inlet hole, a partition structure and an air outlet hole, the partition structure is arranged in the groove and used for dividing the cavity into a plurality of sub-cavities, and the air inlet hole and the air outlet hole are communicated with the sub-cavities to form a vacuumizing air channel used for generating negative pressure adsorption at the air inlet hole. The utility model further provides processing equipment which comprises vacuumizing equipment and the partition adsorption objective table. According to the partition adsorption objective table provided by the utility model, the negative pressure switches of the plurality of sub-cavities can be independently controlled to be combined to form the adsorption areas with different sizes, so that the light guide plate molds with different sizes can be adsorbed. The main structure is arranged on the objective table body, the bearing capacity is improved, and the overall thickness can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of processing equipment, in particular to a partitioned adsorption loading platform and processing equipment. Background Art

[0002] In recent years, the market demand for light guide plates has gradually diversified, and the size specifications of light guide plates have become more and more. The stage is a device used to carry the light guide plate mold when processing the light guide plate. Conventional stages are usually only suitable for carrying light guide plate molds of a single size. Especially when the processing equipment has a large effective working area, in order to meet the conditions for processing the light guide plate of the largest size, the stage is generally designed according to the largest size, but in actual processing and production, it is inevitable that other small-sized light guide plates need to be processed.

[0003] When processing small-sized light guide plate molds, the existing single-vacuum air duct stage on the market will cause adsorption force leakage because the mold itself cannot completely cover the micropores, and the vacuum degree of the cavity is not high, which makes the adsorption force of the stage on the mold insufficient, affecting the flatness of the mold and further affecting the mold processing yield. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a partitioned adsorption stage and processing equipment, which can form adsorption areas of different sizes by individually controlling the negative pressure switches of multiple sub-cavities to adsorb light guide plate molds of different sizes. The main structures are arranged on the stage body, which improves the load-bearing capacity and reduces the overall thickness.

[0005] The utility model provides a partitioned adsorption stage for adsorbing light guide plate molds of different sizes, comprising a stage body and a stage bottom plate fixedly connected thereto, the stage body being provided with a groove, the stage bottom plate being used to close the groove to form a cavity; the stage body being provided with an air inlet, a partitioning structure and an air outlet, the partitioning structure being arranged in the groove for dividing the cavity into a plurality of sub-cavities, the air inlet and the air outlet being connected to the sub-cavities to form a vacuum air passage for generating negative pressure adsorption at the air inlet.

[0006] Furthermore, the partition structure includes a first partition wall and a second partition wall, the first partition wall divides the cavity into two sub-cavities, and the second partition wall is arranged in one of the sub-cavities to further divide the sub-cavity into two smaller sub-cavities.

[0007] Furthermore, the partition structure also includes a spacing frame, which is arranged at the boundary of the groove, and the spacing frame is fixedly connected to the first partition wall and the second partition wall, and the worktable body and the spacing frame, the worktable bottom plate, the first partition wall and / or the second partition wall form the sub-cavity.

[0008] Furthermore, the partitioned adsorption stage also includes a seal, and a seal groove for installing the seal is opened on the partition structure, and when the stage bottom plate is fixedly connected to the stage body, the seal is squeezed to increase the sealing between the sub-cavities.

[0009] Furthermore, the stage body further comprises an adsorption surface, the adsorption surface is arranged opposite to the bottom surface of the groove, and two ends of the air inlet are respectively arranged on the adsorption surface and the bottom surface of the groove.

[0010] Furthermore, the air inlet hole includes a first hole segment and a second hole segment, the aperture of the second hole segment is larger than the aperture of the first hole segment, the first hole segment is close to the adsorption surface, and the second hole segment is close to the bottom surface of the groove.

[0011] Furthermore, reinforcing ribs are provided on the stage body, a plurality of air inlet holes are opened on the stage body, and the reinforcing ribs are provided at the bottom of the groove and between the plurality of air inlet holes; when the stage bottom plate is fixedly connected to the stage body, a gap exists between the stage bottom plate and the reinforcing ribs for air flow in the sub-cavity.

[0012] Furthermore, the air inlet is provided on the bottom surface of the groove, and the air outlet is provided on the side wall surface of the groove.

[0013] Furthermore, the height of the partition structure is smaller than the depth of the groove, the side of the stage bottom plate is in contact with the side of the groove, and the groove, the stage bottom plate and the partition structure together form the sub-cavity.

[0014] The utility model also provides a processing device, comprising a vacuum pumping device and a partitioned adsorption stage as described in any one of the above items, wherein the vacuum pumping device comprises an air nozzle, and the air nozzle is fixedly connected to the air outlet.

[0015] In summary, the embodiment of the utility model can form adsorption areas of different sizes by individually controlling the negative pressure switches of multiple sub-cavities to adsorb light guide plate molds of different sizes. The main structures are arranged on the stage body, which improves the load-bearing capacity and reduces the overall thickness.

[0016] Furthermore, the positions of the first partition wall and the second partition wall can be adjusted to further change the sizes of the multiple sub-cavities, and the shape of the adsorption area can better fit the light guide plate mold, thereby improving the adsorption effect.

[0017] Moreover, the light guide plate mold is supported by the stage body, and the stage body is manufactured by an integrated molding process. The pressure applied during the load-bearing process is dispersed throughout the stage body, making it less likely to deform.

[0018] Moreover, the sealing performance of the sub-cavity is enhanced by means of the structure of the stage bottom plate extruding the seal and the spacing frame.

[0019] Moreover, the air inlet hole includes a first hole segment and a second hole segment, and the aperture of the second hole segment is larger than that of the first hole segment, which can not only reduce the processing difficulty of the stage body, but also increase the pressure of the vacuum air duct and improve the adsorption force. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 This is a schematic diagram of the structure of the partitioned adsorption stage in the embodiment of the utility model;

[0022] Figure 2 The structure explosion of the partition adsorption stage in the embodiment of the utility model Figure 1 ;

[0023] Figure 3 The structure explosion of the partition adsorption stage in the embodiment of the utility model Figure 2 ;

[0024] Figure 4 A bottom view of the main body of the stage in the embodiment of the utility model;

[0025] Figure 5 for Figure 4 A partial enlarged view of

[0026] Figure 6 It is a structural schematic diagram of the main body of the loading platform in the embodiment of the utility model;

[0027] Figure 7 for Figure 6 A partial enlarged view of

[0028] Figure 8 It is a top view of the partitioned adsorption stage in the embodiment of the utility model;

[0029] Fig. 9 for Figure 8 Schematic diagram of the cross-sectional structure in the AA direction;

[0030] Fig.10 for Figure 8 Schematic diagram of the cross-sectional structure in the middle BB direction;

[0031] Fig.11 It is a bottom view of the partitioned adsorption stage in the embodiment of the utility model.

[0032] Among them, the reference numerals of the embodiments of the utility model in the above drawings are as follows:

[0033] 100, stage body; 110, groove; 120, mounting hole;

[0034] 130, air inlet; 131, first hole section; 132, second hole section;

[0035] 140, partition structure; 141, first partition wall; 142, second partition wall; 143, partition frame; 144, sealing groove;

[0036] 150, vent hole;

[0037] 160, sub-cavity; 170, adsorption surface; 180, reinforcing rib;

[0038] 200, stage bottom plate; 210, fixing hole;

[0039] 300, seals;

[0040] 400. Air nozzle. DETAILED DESCRIPTION

[0041] The following will describe in detail a specific embodiment of the utility model in conjunction with the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all of the embodiments. Based on the description of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0042] In the description of the present utility model, unless otherwise clearly specified and limited, the terms "set", "install", "connection" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0043] The directions or positional relationships indicated by terms such as "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of description and simplified description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the utility model.

[0044] The terms "first", "second", "third" and the like are merely used to distinguish elements of similar nature, and do not indicate or imply relative importance or a particular order.

[0045] The terms "comprises," "comprising," or any other variations thereof, are intended to cover a non-exclusive inclusion of the elements listed and may also include additional elements not expressly listed.

[0046] The following is a detailed description through specific embodiments.

[0047] like Figures 1 to 11 As shown, an embodiment of the utility model provides a partitioned adsorption stage for adsorbing light guide plate molds of different sizes, including a stage body 100 and a stage bottom plate 200 fixedly connected thereto, the stage body 100 is provided with a groove 110, and the stage bottom plate 200 is used to close the groove 110 to form a cavity; the stage body 100 is also provided with an air inlet 130, a partition structure 140 and an air outlet 150, the partition structure 140 is arranged in the groove 110 for dividing the cavity into a plurality of sub-cavities 160, the air inlet 130 and the air outlet 150 are connected to the sub-cavity 160 to form a vacuum air duct, which is used to generate negative pressure adsorption at the air inlet 130.

[0048] Specifically, the stage body 100 is in the shape of a cuboid, the groove 110 is provided in the middle, and the opening of the groove 110 is downward. The stage bottom plate 200 is in the shape of a rectangular flat plate, which is attached to the bottom of the stage and fixedly connected thereto. The air inlet 130 and the air outlet 150 are provided on the stage body 100, and are respectively connected to the sub-cavity 160. In the present embodiment, a plurality of air inlets 130 and a plurality of air outlets 150 are provided, and each sub-cavity 160 is respectively connected to the corresponding air inlet 130 and the air outlet 150, and an independent vacuum air duct is formed between each sub-cavity 160. When a vacuum air duct is working, a negative pressure is generated on the surface of the corresponding air inlet 130 to adsorb objects located on the surface of these air inlet 130. Therefore, the opening or closing of a plurality of vacuum air ducts forms an arrangement and combination, which can change the shape and size of the adsorbed area on the partitioned adsorption stage, so that the shape and size of the adsorbed area just match the light guide plate mold adsorbed in production, and achieve a better adsorption effect.

[0049] like Figure 3 As shown, in this embodiment, the partition structure 140 includes a first partition wall 141 and a second partition wall 142. The first partition wall 141 divides the cavity into two sub-cavities 160, and the second partition wall 142 is arranged in one of the sub-cavities 160 to further divide the sub-cavity 160 into two smaller sub-cavities 160.

[0050] Specifically, in this embodiment, the first partition wall 141 is a protruding structure located at the bottom of the groove 110, which is in a straight line and divides the cavity into two left and right sub-cavities 160. The second partition wall 142 is also a protruding structure located at the bottom of the groove 110, which is arranged in one of the two sub-cavities 160, and further divides the sub-cavity 160 into two smaller sub-cavities 160. The first partition wall 141 and the second partition wall 142 are in a "T" shape, which divide the cavity into three independent sub-cavities 160. By controlling the opening or closing of the vacuum ducts corresponding to the three sub-cavities 160 respectively, three light guide plate molds of different sizes can be adsorbed. For example, if the vacuum duct of the smallest sub-cavity 160 is controlled to be opened, and the vacuum ducts of the other two sub-cavities 160 are closed, a small-sized light guide plate mold can be adsorbed; if the vacuum ducts of the two smallest sub-cavities 160 are controlled to be opened, and the vacuum ducts of the other sub-cavity 160 are closed, a medium-sized light guide plate mold can be adsorbed; if the vacuum duct of the larger sub-cavity 160 is controlled to be opened, and the vacuum ducts of the other two smaller sub-cavities 160 are closed, a medium-sized light guide plate mold can also be adsorbed; if the vacuum ducts of the three sub-cavities 160 are controlled to be opened, a large-sized light guide plate mold can be adsorbed. According to actual production needs, more partition walls can be added to separate more sub-cavities 160, such as a "well" shape; the position or shape of each partition wall can also be adjusted, for example, the shape of the sub-cavity 160 can be triangular or hexagonal to match light guide plate molds of different shapes. Each sub-cavity 160 is connected to the air pipe by using its own air outlet 150, and the opening and closing of the vacuum pumping of each air pipe is controlled by a switch valve or an electronic method, so as to achieve the effect of partitioned adsorption.

[0051] like Figure 3As shown, in this embodiment, the partition structure 140 also includes a spacing frame 143, which is arranged at the boundary of the groove 110, and the spacing frame 143 is fixedly connected to the first partition wall 141 and the second partition wall 142, and the stage body 100 and the spacing frame 143, the stage bottom plate 200, the first partition wall 141 and / or the second partition wall 142 form a sub-cavity 160. Specifically, the spacing frame 143 is in the shape of a "mouth", and is fixedly connected to the first partition wall 141 and the second partition wall 142, dividing the cavity into three sub-cavities 160. When the stage bottom plate 200 is fixedly connected to the stage body 100, a plane of the stage bottom plate 200 squeezes the first partition wall 141, the second partition wall 142 and the spacing frame 143 from bottom to top, and the side of the stage bottom plate 200 fits with the side wall of the groove 110.

[0052] like Figures 2 to 7 As shown, in this embodiment, the partitioned adsorption stage also includes a seal 300, and a seal groove 144 for installing the seal 300 is provided on the partition structure 140. When the stage bottom plate 200 is fixedly connected to the stage body 100, the seal 300 is squeezed to increase the sealing between the sub-cavities 160. Specifically, the seal 300 is a rubber ring. In this embodiment, there are three seals 300, which are respectively sleeved on the periphery of the three sub-cavities 160. Similarly, there are three seal grooves 144, which are provided on the first partition wall 141, the second partition wall 142 and the partition frame 143. Figure 5 and Figure 7 As shown, two parallel sealing grooves 144 are formed on the first partition wall 141 , which are respectively used to seal the sub-cavities 160 on both sides of the first partition wall 141 .

[0053] like Fig. 9 and Fig.10 As shown, in this embodiment, the stage body 100 also includes an adsorption surface 170, and the adsorption surface 170 is arranged opposite to the bottom surface of the groove 110, and the two ends of the air inlet 130 are respectively arranged on the adsorption surface 170 and the bottom surface of the groove 110. The adsorption surface 170 can be further divided into three sub-adsorption surfaces 170 according to the sub-cavity 160, which are distinguished by dotted lines in the figure. The adsorption surface 170 is divided into a plurality of sub-adsorption surfaces 170 corresponding to the sub-cavity 160, and each sub-adsorption surface 170 is evenly distributed with equally spaced air inlet holes 130, and the sub-adsorption surfaces 170 correspond to the sub-cavity 160 in position, size and shape. When using this embodiment, according to the dotted line prompt, the light guide plate mold is placed on the adsorption surface 170, and after alignment, the corresponding vacuum air duct is opened to vacuum adsorb and fix it, so that the adsorption effect is better.

[0054] like Fig. 9 and Fig.10As shown, in this embodiment, the air inlet 130 includes a first hole segment and a second hole segment 132 , the aperture of the second hole segment 132 is larger than that of the first hole segment, the first hole segment is close to the adsorption surface 170 , and the second hole segment 132 is close to the bottom surface of the groove 110 .

[0055] Specifically, the light guide plate mold is generally a thin flat plate made of steel material. The aperture of the air inlet hole 130 of the conventional technology is relatively large. During adsorption, due to the large suction force of a single air inlet hole 130, it is easy to deform the light guide plate mold and cause a depression in the air inlet hole 130. In this embodiment, the air inlet hole 130 adopts a micro-hole design to solve this problem. Specifically, the depth of the air inlet hole 130 is 25mm-35mm, and the preferred value is 30mm; the diameter of the first hole section is only 1mm, and the depth is only 5mm; the diameter of the second hole section 132 is 6mm-8mm, and the preferred value is 7mm, and the depth is 20mm-30mm, and the preferred value is 25mm; the first hole section and the second hole section 132 are concentrically designed. The advantage of using a larger number of micro-holes is that the suction force of a single air inlet hole 130 is reduced while the overall suction force remains unchanged, so that the adsorption force is evenly dispersed, and the flatness of the light guide plate mold is not affected during adsorption, thereby avoiding deformation. Since the air inlet hole 130 is deep and adopts a two-stage hole design, the air inlet hole 130 can be processed from two directions during manufacturing, thereby reducing the cost and difficulty of processing the air inlet hole 130; and the air inlet hole 130 is designed to be narrow at the top and wide at the bottom, so that the air flow flows from the end with a smaller aperture to the end with a larger aperture, and the pressurization effect can enhance the adsorption force and make the air flow smoother.

[0056] On the other hand, in order to improve the load-bearing capacity of the stage body 100 and avoid too many micropores affecting the structural strength, the thickness of the stage body 100 is set to 100mm-120mm, preferably 110mm, and the actual load-bearing area, that is, the thinnest area where the air inlet 130 is located, has a thickness that is consistent with the depth of the air inlet 130, which is 25mm-35mm, and preferably 30mm. The stage body 100 of this embodiment is set to have a relatively high thickness, and the main structures (air inlet 130, partition structure 140, air outlet 150, etc.) are all arranged on the stage body 100, which improves the load-bearing capacity. In this embodiment, the stage body 100 is integrally cut and formed from a granite material, and the air inlet 130, the partition structure 140 and the air outlet 150 are integrally designed with the stage body 100, so that the weight is dispersed to the whole when bearing. Compared with the conventional technology of opening the air inlet 130 on a flat plate, the design of this embodiment has a stronger load-bearing capacity, and the light guide plate mold is not easily deformed during adsorption.

[0057] like Figure 3As shown, in this embodiment, a reinforcing rib 180 is also provided on the stage body 100, and a plurality of air inlet holes 130 are provided on the stage body 100. The reinforcing rib 180 is provided at the bottom of the groove 110 and is located between the plurality of air inlet holes 130. When the stage bottom plate 200 is fixedly connected to the stage body 100, there is a gap between the stage bottom plate 200 and the reinforcing rib 180 for the air flow in the sub-cavity 160. The reinforcing rib 180 design increases the structural strength of the air inlet hole 130 region, and there is a gap of 5mm-10mm between the reinforcing rib 180 and the stage bottom plate 200 for the air flow in the sub-cavity 160. The air flows into the sub-cavity 160 from the air inlet hole 130, passes through the gap between the reinforcing rib 180 and the stage bottom plate 200, flows to the air outlet hole 150, is sucked away by the vacuum device, and negative pressure adsorption is generated at the adsorption surface 170.

[0058] like Figure 2 As shown, in this embodiment, the air inlet 130 is provided on the bottom surface of the groove 110, and the air outlet 150 is provided on the side wall surface of the groove 110. The advantage of such a design is that the overall thickness of the partitioned adsorption stage is reduced, and each of the two smaller sub-cavities 160 is allocated with one air outlet 150, and the larger sub-cavity 160 is allocated with two air outlets 150. The air outlet 150 is used to connect with the air pipe, cooperate with the vacuum pumping equipment, extract the air in the sub-cavity 160, and generate negative pressure on the adsorption surface 170.

[0059] like Fig. 9 and Fig.10 As shown, in this embodiment, the height of the partition structure 140 is less than the depth of the groove 110, the side of the stage bottom plate 200 is in contact with the side of the groove 110, and the groove 110, the stage bottom plate 200 and the partition structure 140 together form a sub-cavity 160. Fig. 9 As shown, a plurality of crisscross reinforcing ribs 180 are arranged in the larger sub-cavity 160, and a plurality of air inlet holes 130 and two air outlet holes 150 are arranged correspondingly, and a sealing member 300 is arranged at the spacing frame 143 and the first partition wall 141. Fig.10 As shown, a plurality of crisscross reinforcing ribs 180 are arranged in the smaller sub-cavity 160 , and a plurality of air inlet holes 130 and an air outlet hole 150 are correspondingly arranged, and seals 300 are arranged at the spacing frame 143 , the first partition wall 141 and the second partition wall 142 .

[0060] like Figure 8 and Fig.11 As shown, a plurality of mounting holes 120 are provided on the periphery of the stage body 100 for mounting and fixing on the processing equipment. A plurality of fixing holes 210 are provided on the stage bottom plate 200, and the fixing holes 210 are arranged in positions corresponding to the partition structure 140, such as Figure 4As shown, the partition structure 140 is also provided with mounting screw holes corresponding to the fixing holes 210. For example, the mounting screw holes are provided between the two sealing grooves 144 of the first partition wall 141, and are used to fix the worktable bottom plate 200 and the worktable body 100 with bolts.

[0061] Another embodiment of the present invention further provides a processing device, comprising a vacuum device and a partitioned adsorption stage as in any one of the above embodiments, wherein the vacuum device comprises an air nozzle 400, and the air nozzle 400 is fixedly connected to the air outlet 150. The vacuum device is used to extract air from the vacuum air passage to generate negative pressure on the adsorption surface 170.

[0062] The working principle of this embodiment is described below: Figures 1 to 11 As shown, the partitioned adsorption stage is fixed on the processing equipment through the mounting hole 120, and the air outlet 150 is connected to the air nozzle 400 of the vacuum equipment. The light guide plate mold is placed on the adsorption surface 170, and the boundary is aligned so that it just covers the corresponding sub-cavity 160. The vacuuming of the corresponding sub-cavity 160 is turned on by the control switch, so that the light guide plate mold is adsorbed and fixed on the adsorption surface 170. The processing equipment processes the light guide plate mold. After the processing is completed, the vacuuming equipment is turned off and the light guide plate mold is removed.

[0063] In summary, the embodiment of the utility model can form adsorption areas of different sizes by individually controlling the negative pressure switches of multiple sub-cavities 160 to adsorb light guide plate molds of different sizes. The main structures are arranged on the stage body 100, which improves the bearing capacity and reduces the overall thickness.

[0064] Furthermore, the positions of the first partition wall 141 and the second partition wall 142 can be adjusted to further change the sizes of the plurality of sub-cavities 160 , and the shape of the adsorption area can better fit the light guide plate mold, thereby improving the adsorption effect.

[0065] Moreover, the light guide plate mold is supported by the stage body 100, and the stage body 100 is manufactured by an integrated molding process. The pressure received during the load is dispersed to the entire stage body 100, and is not easily deformed.

[0066] Moreover, the sealing performance of the sub-cavity 160 is enhanced by the structure of the stage bottom plate 200 squeezing the seal 300 and the spacing frame 143.

[0067] Moreover, the air inlet 130 includes a first hole segment and a second hole segment 132. The aperture of the second hole segment 132 is larger than that of the first hole segment, which can reduce the processing difficulty of the stage body 100 and increase the pressure of the vacuum air duct to improve the adsorption force.

[0068] The above are only specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the attached claims.

Claims

1. A partitioned adsorption stage for adsorbing light guide plate molds of different sizes, characterized in that: The present invention comprises a loading platform body and a loading platform bottom plate fixedly connected thereto, the loading platform body being provided with a groove, and the loading platform bottom plate being used to close the groove to form a cavity; the loading platform body is also provided with an air inlet, a partitioning structure and an air outlet, the partitioning structure being arranged in the groove to divide the cavity into a plurality of sub-cavities, the air inlet and the air outlet being connected with the sub-cavities to form a vacuum air passage, which is used to generate negative pressure adsorption at the air inlet.

2. The partitioned adsorption stage according to claim 1, characterized in that: The partition structure includes a first partition wall and a second partition wall, wherein the first partition wall divides the cavity into two sub-cavities, and the second partition wall is arranged in one of the sub-cavities to further divide the sub-cavity into two smaller sub-cavities.

3. The partitioned adsorption stage according to claim 2, characterized in that: The partition structure also includes a spacing frame, which is arranged at the boundary of the groove, and the spacing frame is fixedly connected to the first partition wall and the second partition wall. The worktable body and the spacing frame, the worktable bottom plate, the first partition wall and / or the second partition wall form the sub-cavity.

4. The partitioned adsorption stage according to claim 1, characterized in that: The partitioned adsorption stage also includes a seal, and a seal groove for installing the seal is opened on the partition structure. When the stage bottom plate is fixedly connected to the stage body, the seal is squeezed to increase the sealing between the sub-cavities.

5. The partitioned adsorption stage according to claim 1, characterized in that: The stage body further comprises an adsorption surface, which is arranged opposite to the bottom surface of the groove, and two ends of the air inlet are respectively arranged on the adsorption surface and the bottom surface of the groove.

6. The partitioned adsorption stage according to claim 5, characterized in that: The air inlet hole includes a first hole segment and a second hole segment, the aperture of the second hole segment is larger than the aperture of the first hole segment, the first hole segment is close to the adsorption surface, and the second hole segment is close to the bottom surface of the groove.

7. The partitioned adsorption stage according to claim 1, characterized in that: The stage body is also provided with reinforcing ribs, and a plurality of air inlet holes are opened on the stage body. The reinforcing ribs are arranged at the bottom of the groove and are located between the plurality of air inlet holes. When the stage bottom plate is fixedly connected to the stage body, there is a gap between the stage bottom plate and the reinforcing ribs for air flow in the sub-cavity.

8. The partitioned adsorption stage according to claim 1, characterized in that: The air inlet is formed on the bottom surface of the groove, and the air outlet is formed on the side wall surface of the groove.

9. The partitioned adsorption stage according to claim 1, characterized in that: The height of the partition structure is smaller than the depth of the groove, the side of the stage bottom plate is in contact with the side of the groove, and the groove, the stage bottom plate and the partition structure together form the sub-cavity.

10. A processing equipment, characterized in that: It comprises a vacuum pumping device and a partitioned adsorption stage as described in any one of claims 1 to 9, wherein the vacuum pumping device comprises an air nozzle, and the air nozzle is fixedly connected to the air outlet.

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