V-shaped partition-plate-free air filter applied to dust-free room of chip factory

Abstract

The utility model relates to the field of air purification, and discloses a V-shaped partition-free air filter applied to a dust-free room of a chip factory, which comprises a connecting plate, an outer frame is fixedly connected to the right end of the connecting plate, a V-shaped filter element is arranged in the outer frame, a baffle is slidably arranged on the inner wall, at the right end of the V-shaped filter element, of the outer frame, and the baffle is fixedly connected with the connecting plate. A protection mechanism is jointly arranged in the connecting plate and the outer frame and comprises a rotating rod, the rotating rod is rotationally connected with the inner wall, located above the V-shaped filter element, of the connecting plate, a pull rope is fixedly connected to the outer wall of the rotating rod, and a shielding plate is fixedly connected to the end, away from the rotating rod, of the pull rope. According to the utility model, through the arrangement of the rotating rod, the pull rope, the shielding plate, the rotating sleeve, the fixed rod, the torsion spring, the ratchet wheel, the pawl, the elastic sheet and the pull rod, when the V-shaped filter element is replaced, the opening in the connecting plate is shielded by the shielding plate, so that impurities adhered to the filter element cannot enter a room after the filter element is replaced.

Description

Technical Field

[0001] The utility model relates to the field of air purification, in particular to a V-shaped air filter without partition applied to a clean room of a chip factory. Background Art

[0002] The chip factory clean room, also known as the clean room or dust-free workshop, is a special environment control space commonly used in semiconductor manufacturing. Its main purpose is to exclude pollutants such as air dust particles, harmful gases, bacteria, etc. within a certain space range, and control the indoor temperature, cleanliness, indoor pressure, airflow speed and distribution, noise vibration, lighting, static electricity, etc. within a certain required range.

[0003] At present, in order to ensure the cleanliness of the air in the clean room of the chip factory, it is often necessary to filter the air inside it through a V-shaped air filter without partitions to ensure that the indoor environment of the clean room of the chip factory meets the requirements of semiconductor manufacturing. After searching, the Chinese patent announcement number: CN209490607U discloses a high-temperature V-shaped filter without partitions, including a fastening screw, a first outer frame support plate is arranged on one side of the fastening screw, a protective plate is arranged at the bottom of the first outer frame support plate, a base is arranged at the bottom of the protective plate, a rotating block is arranged on the front of the base, and fixed blocks are arranged on both sides of the rotating block. A movable rod is arranged on one side of the fixed block, and an arc block is arranged on one side of the movable rod. A circular shaft is arranged at the bottom of the arc block. The utility model sets a connecting plate, drives the threaded rod to rotate by rotating the rotating block, so that the moving block moves, and drives the movement of the through block through the moving block, so that the support plate moves, thereby pushing the connecting plate, so that the cross plate moves into the inside of the concave hole, so as to facilitate the removal of the V-shaped filter plate inside the single protective plate.

[0004] The above application document can achieve the effect of replacing a single filter plate, but in actual use, since the filter plate is often made of ultra-fine glass fiber filter material, during the process of replacing the filter plate, some impurities adhering to the filter plate may enter the room during the movement of the filter plate, thereby affecting the indoor environment. For this reason, a V-shaped partitionless air filter used in the clean room of a chip factory is proposed to solve the above problem. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a V-shaped partitionless air filter used in the clean room of a chip factory, aiming to improve the problem of impurities entering the room during the process of replacing the filter plate in the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a V-shaped partitionless air filter used in a clean room of a chip factory, comprising a connecting plate, the right end of the connecting plate is fixedly connected to an outer frame, a V-shaped filter element is arranged inside the outer frame, a baffle is slidably arranged on the inner wall of the outer frame at the right end of the V-shaped filter element, a protective mechanism is jointly arranged between the connecting plate and the inner part of the outer frame, the protective mechanism comprises a rotating rod, the rotating rod is rotatably connected to the inner wall of the connecting plate above the V-shaped filter element, a pull rope is fixedly connected to the outer wall of the rotating rod, the end of the pull rope away from the rotating rod is fixedly connected to a baffle, the inner wall of the connecting plate below the V-shaped filter element is rotatably connected to a rotating sleeve, the end of the baffle away from the pull rope is fixedly connected to the outer wall of the rotating sleeve, the baffle is fixedly connected to the outer frame by a fixing component, and the fixing component comprises a movable groove, and the movable groove is opened on the inner wall of the baffle.

[0007] As a further description of the above technical solution:

[0008] The inner wall of the connecting plate located on the inner side of the rotating sleeve is fixedly connected to a fixing rod, the outer wall of the fixing rod is elastically connected to the inner wall of the rotating sleeve via a torsion spring, the outer wall of the rotating rod is fixedly connected to a ratchet, the inner wall of the connecting plate located on the outer side of the ratchet is rotatably connected to a pawl, the outer wall of the pawl is elastically connected to the inner wall of the connecting plate via a spring sheet, the end of the pawl close to the spring sheet is fixedly connected to a pull rod, and the pull rod passes through the inner wall of the connecting plate.

[0009] As a further description of the above technical solution:

[0010] The inner wall of the movable groove is slidably connected with a card block, the outer wall of the card block is elastically connected to the inner wall of the movable groove through a spring, the end of the card block close to the spring is fixedly connected with a control strip, the outer wall of the control strip passes through and is slidably connected to the inner wall of the outer frame, and a card slot is opened on the inner side of the outer frame.

[0011] As a further description of the above technical solution:

[0012] The connecting plate and the interior of the outer frame are jointly provided with an anti-forgetting component, and the anti-forgetting component includes a moving sleeve, the outer wall of the moving sleeve is slidably connected to the inner wall of the connecting plate on the outside of the rotating rod, a threaded groove is provided on the outer wall of the right end of the rotating rod, the outer wall of the threaded groove passes through and is threadedly connected to the inner wall of the moving sleeve, the inner wall of the connecting plate is fixedly connected to an air pressure tube, the area of ​​the air pressure tube on the outside of the connecting plate passes through and is fixedly connected to the inner wall of the outer frame, the inner wall piston of the air pressure tube is connected to a pushing block, the right end of the pushing block is elastically connected to the inner wall of the air pressure tube by spring 2, and the inner wall piston of the air pressure tube is connected to a triangular block.

[0013] As a further description of the above technical solution:

[0014] The inner wall of the outer frame between the air pressure tube and the card slot is provided with a sliding groove, the inner wall of the sliding groove is slidably connected with a card block, the left side of the card block is elastically connected to the inner wall of the sliding groove through a spring, the left side of the card block is provided with a card slot, and the side of the card block close to the triangular block is provided with a triangular groove.

[0015] As a further description of the above technical solution:

[0016] The shield is soft and can be wound into a roll.

[0017] As a further description of the above technical solution:

[0018] The length of the pull rope is consistent with the distance between the rotating rod and the rotating sleeve, and the length of the shield is consistent with the length of the pull rope.

[0019] As a further description of the above technical solution:

[0020] The connection plate is in the shape of a cuboid with a plurality of openings, and the height of the area of ​​the connection plate at the upper end of the opening is shorter than the height of the area of ​​the connection plate at the lower end of the opening.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the utility model, by setting the rotating rod, the pull rope, the shield, the rotating sleeve, the fixed rod, the torsion spring, the ratchet, the pawl, the spring piece and the pull rod, when replacing the V-type filter element, the staff can pull out the shield so that the shield will cover the opening on the connecting plate, thereby ensuring that after the filter element is replaced, the impurities adhering to the filter element will not enter the room.

[0023] 2. In the utility model, through the arrangement of the movable groove, the clamping block, the spring one, the control strip, the clamping groove, the movable sleeve, the threaded groove, the air pressure tube, the pushing block, the triangular block, the sliding groove, the clamping block, the spring three, the clamping groove, the triangular groove and the spring two, the staff can take out and put in the V-shaped filter element by installing and disassembling the baffle plate, and can ensure that the baffle plate can be taken out only after the opening of the shielding connecting plate is blocked, so as to ensure that the staff will not forget to start the baffle plate when replacing the filter element. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a three-dimensional structural schematic diagram of the overall structure of the utility model;

[0025] Figure 2 It is a schematic cross-sectional view of the three-dimensional structure of the overall structure of the utility model;

[0026] Figure 3 For the utility model Figure 2 A magnified schematic diagram of the three-dimensional structure of part A;

[0027] Figure 4 For the utility model Figure 2 A magnified schematic diagram of the three-dimensional structure of part B;

[0028] Figure 5 For the utility model Figure 2 The enlarged schematic diagram of the three-dimensional structure of the middle C part;

[0029] Figure 6 It is a schematic cross-sectional view of the three-dimensional structure of the overall structure of the utility model;

[0030] Figure 7 For the utility model Figure 6 The enlarged schematic diagram of the three-dimensional structure of the D part;

[0031] Figure 8 It is a three-dimensional structural schematic diagram of the air pressure tube, the push block and the triangular block in the utility model.

[0032] Legend:

[0033] 1. Connecting plate; 2. Outer frame; 3. V-shaped filter element; 4. Baffle; 5. Protection mechanism; 6. Fixed assembly; 7. Anti-forgetting assembly; 51. Turning rod; 52. Pull rope; 53. Shield; 54. Rotating sleeve; 55. Fixed rod; 56. Torsion spring; 57. Ratchet; 58. Ratchet; 59. Shrapnel; 510. Pull rod; 61. Moving groove; 62. Block; 63. Spring one; 64. Control strip; 65. Slot; 71. Moving sleeve; 72. Threaded groove; 73. Air pressure tube; 74. Pushing block; 75. Triangular block; 76. Sliding groove; 77. Snap-on block; 78. Spring three; 79. Snap-on groove; 710. Triangular groove; 711. Spring two. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] Reference Figure 1 , Figure 2 and Figure 6The utility model provides an embodiment: a V-shaped partitionless air filter used in a clean room of a chip factory, comprising a connecting plate 1, the connecting plate 1 is in the shape of a rectangular parallelepiped with a plurality of openings, and the height of the connecting plate 1 at the upper end of the opening is shorter than the height of the area at the lower end of the opening, the right end of the connecting plate 1 is fixedly connected to an outer frame 2, the outer frame 2 is in the shape of a frame-shaped right end connected to a plurality of triangular protrusions at the left end, a V-shaped filter element 3 is arranged inside the outer frame 2, the material of the V-shaped filter element 3 is ultra-fine glass fiber filter material, and a baffle 4 is slidably arranged on the inner wall of the outer frame 2 at the right end of the V-shaped filter element 3.

[0036] Reference Figure 2 , Figure 5 and Figure 6 The connecting plate 1 and the outer frame 2 are jointly provided with a protective mechanism 5, which includes a rotating rod 51. The rear end of the rotating rod 51 does not contact the inner wall of the connecting plate 1. The rotating rod 51 is rotatably connected to the inner wall of the connecting plate 1 above the V-shaped filter element 3. A pull rope 52 is fixedly connected to the outer wall of the rotating rod 51. The pull rope 52 is inelastic. The end of the pull rope 52 away from the rotating rod 51 is fixedly connected to a shield plate 53. The shield plate 53 is soft and can be wound into a roll. The inner wall of the connecting plate 1 below the V-shaped filter element 3 is rotatably connected to a rotating sleeve 54. The material setting of the shield plate ensures that The baffle 53 can be wrapped around the outside of the rotating sleeve 54, the length of the pull rope 52 is consistent with the distance between the rotating rod 51 and the rotating sleeve 54, the end of the baffle 53 away from the pull rope 52 is fixedly connected to the outer wall of the rotating sleeve 54, the length of the baffle 53 is consistent with the length of the pull rope 52, the inner wall of the connecting plate 1 inside the rotating sleeve 54 is fixedly connected with a fixing rod 55, the outer wall of the fixing rod 55 is elastically connected to the inner wall of the rotating sleeve 54 through a torsion spring 56, one end of the torsion spring 56 is fixedly connected to the outer wall of the fixing rod 55, and the other end of the torsion spring 56 is fixedly connected to the inner wall of the rotating sleeve 54.

[0037] Reference Figure 1 - Figure 3 The outer wall of the rotating rod 51 is fixedly connected with a ratchet 57, and the inner wall of the connecting plate 1 outside the ratchet 57 is rotatably connected with a pawl 58. The shape of the pawl 58 matches the shape of the notch on the outer wall of the ratchet 57. The outer wall of the pawl 58 is elastically connected to the inner wall of the connecting plate 1 through a spring sheet 59. One end of the spring sheet 59 is fixedly connected to the outer wall of the pawl 58, and the other end of the spring sheet 59 is fixedly connected to the inner wall of the connecting plate 1. The end of the pawl 58 close to the spring sheet 59 is fixedly connected with a pull rod 510. The material of the pull rod 510 is soft, and the diameter of the pull rod 510 is shorter than the hole opened in the connecting plate 1 for the pull rod 510 to pass through, and the pull rod 510 passes through the inner wall of the connecting plate 1.

[0038] Reference Figure 6 and Figure 7The baffle plate 4 is fixed to the outer frame 2 by a fixing component 6, which includes a movable groove 61, which is opened on the inner wall of the baffle plate 4, and a block 62 is slidably connected to the inner wall of the movable groove 61. The block 62 is in the shape of a rectangular parallelepiped, and a triangular prism cut corner is provided at one end of the block 62 away from the V-shaped filter element 3. The outer wall of the block 62 is elastically connected to the inner wall of the movable groove 61 through a spring 63, one end of the spring 63 is fixedly connected to the outer wall of the block 62, and the other end of the spring 63 is fixedly connected to the inner wall of the movable groove 61. A control strip 64 is fixedly connected to one end of the block 62 close to the spring 63, and the shape of the control strip 64 is L-shaped. The outer wall of the control strip 64 passes through and is slidably connected to the inner wall of the outer frame 2. A slot 65 is opened on the inner side of the outer frame 2, and the shape and size of the slot 65 match the block 62.

[0039] Reference Figure 4 , Figure 7 and Figure 8 The connecting plate 1 and the outer frame 2 are jointly provided with an anti-forgetting component 7, and the anti-forgetting component 7 includes a moving sleeve 71, and the moving sleeve 71 is in the shape of a hollow cylinder. The hollow opening of the moving sleeve 71 is arranged at the rear end, and the outer wall of the moving sleeve 71 is slidably connected with the inner wall of the connecting plate 1 outside the rotating rod 51. A threaded groove 72 is provided on the outer wall of the right end of the rotating rod 51, and the outer wall of the threaded groove 72 passes through and is threadedly connected with the inner wall of the moving sleeve 71. The inner wall of the connecting plate 1 is fixedly connected with an air pressure tube 73, and the air pressure tube 73 passes through the area outside the connecting plate 1 and is fixedly connected with the inner wall of the outer frame 2. The inner wall piston of 73 is connected to a push block 74, and the right end of the push block 74 is elastically connected to the inner wall of the air pressure tube 73 through a spring 2 711, one end of the spring 2 711 is fixedly connected to the right end of the push block 74, and the other end of the spring 2 711 is fixedly connected to the inner wall of the air pressure tube 73, and the inner wall piston of the air pressure tube 73 is connected to a triangular block 75, and the cross-sectional area of ​​the push block 74 is larger than the cross-sectional area of ​​the triangular block 75. The difference in area size ensures that a single push block 74 can drive multiple triangular blocks 75 to move after moving, and the outer wall of the triangular block 75 fits with the inner wall of the air pressure tube 73.

[0040] Reference Figure 4 , Figure 7 and Figure 8 The inner wall of the outer frame 2 between the air pressure tube 73 and the card slot 65 is provided with a sliding groove 76, and the inner wall of the sliding groove 76 is slidably connected with a clamping block 77, and a protrusion is provided at one end of the clamping block 77 close to the clamping block 62, and the left side of the clamping block 77 is elastically connected to the inner wall of the sliding groove 76 through a spring three 78, one end of the spring three 78 is fixedly connected to the left side of the clamping block 77, and the other end of the spring three 78 is fixedly connected to the inner wall of the sliding groove 76, and a clamping groove 79 is provided on the left side of the clamping block 62, and a triangular groove 710 is provided on the side of the clamping block 77 close to the triangular block 75, and the shape of the triangular groove 710 matches the shape of the triangular block 75.

[0041] Working principle: During use, when the staff needs to replace the V-type filter element 3, the staff first rotates the rotating rod 51, so that the pull rope 52 is wrapped around the outside of the rotating rod 51, and the pull rope 52 pulls the baffle 53 to move upward, so that the baffle 53 can cover the opening position of the connecting plate 1.

[0042] At the same time, when the rotating rod 51 rotates, the rotating sleeve 54 moves to the right under the control of the thread of the thread groove 72. When the baffle 53 completely blocks the connecting plate 1, the rotating sleeve 54 just moves to completely squeeze the push block 74 so that the push block 74 completely enters the air pressure tube 73. At the same time, after the rotating sleeve 54 moves to completely squeeze the push block 74, the rotating sleeve 54 cannot continue to move to the right, so that the rotating rod 51 cannot continue to rotate under the restriction of the thread groove 72 and the rotating sleeve 54, thereby ensuring that the baffle 53 does not move excessively when moving upward, thereby causing an opening at the bottom.

[0043] When the pushing block 74 enters the air pressure tube 73, the gas pressure inside the air pressure tube 73 increases due to the entry of the pushing block 74, so that the triangular block 75 moves in the direction of leaving the air pressure tube 73 under the action of the air pressure, and after the movement, the triangular block 75 can push the clamping block 77 through the inclined surface of the triangular groove 710, so that the clamping block 77 leaves the clamping groove 79, thereby releasing the limiting effect of the clamping block 77 on the clamping block 62.

[0044] After being released, the staff selects the control strip 64 corresponding to the V-shaped filter element 3 that needs to be replaced, and pulls the control strip 64 in the direction away from the block 62, so that the block 62 leaves the slot 65. After the block 62 leaves the slot 65, the staff takes out the baffle 4, then takes out the V-shaped filter element 3 and replaces it.

[0045] When the replacement is completed, the staff pulls the pull rod 510, so that the pull rod 510 drives the pawl 58 to deflect, so that the pawl 58 leaves the ratchet 57, so that the ratchet 57 is separated from the pawl 58. At this time, since the ratchet 57 leaves the pawl 58, the rotating rod 51 can rotate. At this time, the rotating sleeve 54 is reset under the drive of the torsion spring 56, so that the rotating sleeve 54 is reset, and drives the rotating plate 53 to rotate until it is wrapped around the outside of the rotating sleeve 54, so that the V-type filter element 3 can continue to be used normally.

[0046] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A V-shaped air filter without partitions used in a clean room of a chip factory, comprising a connecting plate (1), characterized in that: The right end of the connecting plate (1) is fixedly connected to an outer frame (2), a V-shaped filter element (3) is arranged inside the outer frame (2), a baffle (4) is slidably arranged on the inner wall of the outer frame (2) at the right end of the V-shaped filter element (3), the connecting plate (1) and the inner wall of the outer frame (2) are jointly provided with a protection mechanism (5), the protection mechanism (5) comprises a rotating rod (51), the rotating rod (51) is rotatably connected to the inner wall of the connecting plate (1) above the V-shaped filter element (3), and the outer wall of the rotating rod (51) is fixedly connected to a pull rod (4). The draw rope (52) is fixedly connected to a shield plate (53) at one end away from the rotating rod (51); the inner wall of the connecting plate (1) below the V-shaped filter element (3) is rotatably connected to a rotating sleeve (54); the end of the shield plate (53) away from the draw rope (52) is fixedly connected to the outer wall of the rotating sleeve (54); the baffle plate (4) is fixed to the outer frame (2) by a fixing component (6); the fixing component (6) includes a movable groove (61); and the movable groove (61) is opened on the inner wall of the baffle plate (4).

2. A V-shaped air filter without partitions for use in a clean room of a chip factory according to claim 1, characterized in that: The inner wall of the connecting plate (1) located inside the rotating sleeve (54) is fixedly connected to a fixing rod (55), the outer wall of the fixing rod (55) is elastically connected to the inner wall of the rotating sleeve (54) via a torsion spring (56), the outer wall of the rotating rod (51) is fixedly connected to a ratchet (57), the inner wall of the connecting plate (1) located outside the ratchet (57) is rotatably connected to a pawl (58), the outer wall of the pawl (58) is elastically connected to the inner wall of the connecting plate (1) via a spring sheet (59), the end of the pawl (58) close to the spring sheet (59) is fixedly connected to a pull rod (510), and the pull rod (510) passes through the inner wall of the connecting plate (1).

3. A V-shaped air filter without partitions for use in a clean room of a chip factory according to claim 1, characterized in that: The inner wall of the movable groove (61) is slidably connected to a clamping block (62); the outer wall of the clamping block (62) is elastically connected to the inner wall of the movable groove (61) via a spring (63); one end of the clamping block (62) close to the spring (63) is fixedly connected to a control strip (64); the outer wall of the control strip (64) penetrates and is slidably connected to the inner wall of the outer frame (2); and a clamping slot (65) is provided on the inner side of the outer frame (2).

4. A V-shaped air filter without partition applied to a clean room of a chip factory according to claim 3, characterized in that: The connecting plate (1) and the outer frame (2) are provided with an anti-forgetting component (7) inside. The anti-forgetting component (7) comprises a moving sleeve (71). The outer wall of the moving sleeve (71) is slidably connected to the inner wall of the connecting plate (1) outside the rotating rod (51). The outer wall of the right end of the rotating rod (51) is provided with a thread groove (72). The outer wall of the thread groove (72) penetrates and is threadedly connected to the inner wall of the moving sleeve (71). The inner wall of the connecting plate (1) is fixedly connected to an air pressure tube (73). The area of ​​the air pressure tube (73) outside the connecting plate (1) penetrates and is fixedly connected to the inner wall of the outer frame (2). The inner wall piston of the air pressure tube (73) is connected to a pushing block (74). The right end of the pushing block (74) is elastically connected to the inner wall of the air pressure tube (73) through a spring 2 (711). The inner wall piston of the air pressure tube (73) is connected to a triangular block (75).

5. A V-shaped air filter without partition applied to a clean room of a chip factory according to claim 4, characterized in that: The inner wall of the outer frame (2) between the air pressure tube (73) and the clamping groove (65) is provided with a sliding groove (76), the inner wall of the sliding groove (76) is slidably connected with a clamping block (77), the left side of the clamping block (77) is elastically connected to the inner wall of the sliding groove (76) via a spring three (78), the left side of the clamping block (62) is provided with a clamping groove (79), and the side of the clamping block (77) close to the triangular block (75) is provided with a triangular groove (710).

6. The V-shaped air filter without partition applied to the clean room of chip factory according to claim 1, characterized in that: The shield (53) is soft and can be wound into a roll.

7. The V-shaped air filter without partition applied to the clean room of chip factory according to claim 1, characterized in that: The length of the pull rope (52) is consistent with the distance between the rotating rod (51) and the rotating sleeve (54), and the length of the shielding plate (53) is consistent with the length of the pull rope (52).

8. The V-shaped air filter without partition applied to the clean room of chip factory according to claim 1, characterized in that: The connection plate (1) is in the shape of a cuboid with a plurality of openings, and the height of the area of ​​the connection plate (1) at the upper end of the opening is shorter than the height of the area at the lower end of the opening.

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