Dust-free workshop air purification equipment for integrated equipment semiconductor production

Abstract

The utility model relates to the technical field of air purification, and discloses dust-free workshop air purification equipment for integrated equipment semiconductor production, which comprises an air pipe, a through hole is arranged at the top of the air pipe, a positioning groove is arranged at the bottom of the inner wall of the air pipe and right below the through hole, and a filtering part is movably inserted in the through hole. The top of the filtering part is flush with the top of the air pipe, the bottom of the filtering part is located in the positioning groove, a containing groove is formed in the right side of the filtering part, an air inlet communicated with the containing groove is formed in the left side of the filtering part, and fixing blocks are fixedly installed at the four corners, close to the right side, of the inner wall of the containing groove. Dust in the air can be intercepted through the filtering part, the dust can be attached to the filtering plate or fall into the containing groove, then the filtering part is taken out from the through opening in the top of the air pipe, the intercepted dust can be completely taken out, and the mode of taking out the filtering part is simple and convenient. The filtering plate in the filtering part can be conveniently cleaned or replaced.

Description

Technical Field

[0001] The utility model belongs to the technical field of air purification, in particular to air purification equipment for a dust-free workshop used in semiconductor production using integrated equipment. Background Art

[0002] A dust-free workshop is also called a clean plant, clean room, or clean room. It refers to a room that excludes pollutants such as particles, harmful air, and bacteria in the air within a certain space, and controls the indoor temperature, cleanliness, indoor pressure, air flow speed and air flow distribution, noise, vibration, lighting, and static electricity within a certain required range. Dust-free workshops are used in the production of semiconductors, and the air purification equipment used in dust-free workshops needs to be equipped with air ducts for ventilation. Equipment filtering devices are required in the air ducts to purify dust in the air through the filtering devices. However, after long-term use, a large amount of dust will adhere to the surface of the filtering device, and the dust intercepted by the filtering device will also fall into the air duct. When the filtering device is taken out for cleaning, the dust fallen in the air duct cannot be cleaned out, and the dust remaining in the air duct will seriously affect the air purification effect. For this reason, the present application proposes an integrated equipment dust-free workshop air purification equipment for semiconductor production. Utility Model Content

[0003] In order to solve the problems raised in the above-mentioned background technology, the utility model provides the following technical solutions: an integrated equipment dust-free workshop air purification equipment for semiconductor production, including an air duct, a through opening is opened on the top of the air duct, a positioning groove is opened at the bottom of the inner wall of the air duct and directly below the through opening, a filter part is movably inserted in the through opening, the top of the filter part is flush with the top of the air duct, and the bottom of the filter part is located in the positioning groove, a storage groove is opened on the right side of the filter part, and an air inlet connected to the storage groove is opened on the left side of the filter part, and fixed blocks are fixedly installed at the four right corners of the inner wall of the storage groove, and screws are fixedly installed on the right sides of the four fixed blocks, and a filter plate is arranged at the opening on the right side of the storage groove, and through holes are opened at the four corners of the side of the filter plate, and the four through holes on the side of the filter plate are respectively sleeved on the screws on the sides of the four fixed blocks, and nuts against the side of the filter plate are threadedly sleeved on the four screws, and a high-efficiency filter is arranged in the middle of the side of the filter plate.

[0004] Preferably, the opening at the left end of the air inlet is set to be rectangular, and the opening at the right end of the air inlet is set to be circular, and the diameter of the circular opening at the right end of the air inlet is smaller than the side length of the rectangular opening at the left end thereof.

[0005] Preferably, the top and bottom of the rectangular opening at the left end of the air inlet are flush with the top and bottom of the inner wall of the air duct respectively.

[0006] Preferably, a groove is provided at the top of the filter portion, and a fixing rod is fixedly installed between the tops of both ends of the inner wall of the groove.

[0007] Preferably, a fixed shaft is fixedly installed on the top of the air duct and on the right side of the opening, and a cover is rotatably sleeved on the fixed shaft. When the cover is in a horizontal state, the bottom of the cover fits with the top of the air duct, and two screw grooves are opened on the top of the air duct and on the left side of the opening. Bolts are provided at the two corners of the top of the cover away from the fixed shaft. The two bolts pass through the cover and are respectively threaded into the two screw grooves on the top of the air duct.

[0008] Preferably, a sealing gasket is provided at the bottom of the cover, the cover covers the top of the through opening, and the width of the cover is greater than the width of the through opening.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] The filter part can intercept dust in the air, so that the dust will adhere to the filter plate or fall into the storage slot, and then the filter part can be taken out from the opening at the top of the air duct. In this way, the intercepted dust can be completely removed, and the method of removing the filter part is simple and convenient, which makes it easy to clean or replace the filter plate in the filter part. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0013] Figure 2 It is a schematic diagram of the cross-sectional structure of the air duct of the utility model;

[0014] Figure 3 This is a schematic diagram of the cross-sectional structure of the connection between the filter part and the air duct of the utility model;

[0015] Figure 4 It is a schematic diagram of the cross-sectional structure of the filter part of the utility model;

[0016] Figure 5 It is an enlarged structural schematic diagram of A of the utility model;

[0017] Figure 6 It is a structural schematic diagram of the filter part of the utility model;

[0018] Figure 7 This is a schematic diagram of the structure of the filter plate of the utility model;

[0019] Figure 8 It is a structural schematic diagram of the side surface of the filter part of the utility model;

[0020] In the figure: 1. air duct; 2. through opening; 3. positioning groove; 4. filter part; 5. storage groove; 6. air inlet; 7. fixing block; 8. screw; 9. filter plate; 10. through hole; 11. nut; 12. groove; 13. fixing rod; 14. fixing shaft; 15. cover; 16. screw groove; 17. bolt. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments; based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0022] Depend on Figure 1-8 The utility model includes an air duct 1, a through opening 2 is provided at the top of the air duct 1, a positioning groove 3 is provided at the bottom of the inner wall of the air duct 1 and directly below the through opening 2, a filter part 4 is movably inserted in the through opening 2, the top of the filter part 4 is flush with the top of the air duct 1, and the bottom of the filter part 4 is located in the positioning groove 3, a storage groove 5 is provided on the right side of the filter part 4, and an air inlet 6 connected to the storage groove 5 is provided on the left side of the filter part 4, and a fixing block 7 is fixedly installed at the four right corners of the inner wall of the storage groove 5, and a screw 8 is fixedly installed on the right side of the four fixing blocks 7, and the placement A filter plate 9 is provided at the opening on the right side of the material slot 5, and through holes 10 are opened at the four corners of the side of the filter plate 9. The four through holes 10 on the side of the filter plate 9 are respectively sleeved on the screws 8 on the sides of the four fixing blocks 7, and nuts 11 are threadedly sleeved on the four screws 8 and abut against the side of the filter plate 9. A high-efficiency filter screen is provided in the middle of the side of the filter plate 9. The filter plate 9 can be removed from the four screws 8 by screwing the nuts 11, and then the removed filter plate 9 can be cleaned or replaced, and the dust remaining in the material slot 5 on the right side of the filter part 4 can be processed.

[0023] like Figure 8 As shown, the opening at the left end of the air inlet 6 is set to be rectangular, and the opening at the right end of the air inlet 6 is set to be circular. The diameter of the circular opening at the right end of the air inlet 6 is smaller than the side length of the rectangular opening at the left end. In this way, the air entering the air duct 1 can smoothly pass through the air inlet 6 into the storage groove 5, and then the dust in the air is intercepted by the high-efficiency filter net on the filter plate 9, and the dust will adhere to the filter plate 9 or fall into the storage groove 5.

[0024] like Figure 3 and Figure 4As shown, the top and bottom of the rectangular opening at the left end of the air inlet 6 are flush with the top and bottom of the inner wall of the air duct 1, respectively, so that the air entering the air duct 1 can smoothly pass through the air inlet 6 on the left side of the filter part 4 into the storage slot 5, and then the high-efficiency filter on the filter plate 9 can intercept the dust in the air.

[0025] like Figure 4 and Figure 6 As shown, a groove 12 is provided at the top of the filter part 4, and a fixing rod 13 is fixedly installed between the tops of the two ends of the inner wall of the groove 12. The two bolts 17 are screwed and the cover 15 is flipped, and the cover 15 is flipped around the fixed axis 14, so that the opening 2 at the top of the air duct 1 can be opened, and then the fixing rod 13 in the groove 12 can be lifted to take the filter part 4 out of the opening 2.

[0026] like Figure 2 and Figure 3 As shown, a fixed shaft 14 is fixedly installed at the top of the air duct 1 and on the right side of the through-hole 2, and a cover 15 is rotatably sleeved on the fixed shaft 14. When the cover 15 is in a horizontal state, the bottom of the cover 15 fits with the top of the air duct 1, and two screw grooves 16 are provided at the top of the air duct 1 and on the left side of the through-hole 2. Bolts 17 are provided at two corners of the top of one end of the cover 15 away from the fixed shaft 14. The two bolts 17 penetrate the cover 15 and are respectively threadedly inserted into the two screw grooves 16 at the top of the air duct 1. One end of the cover 15 can be connected to the air duct 1 through the bolts 17, so that the cover 15 is fixed at the through-hole 2 at the top of the air duct 1.

[0027] like Figure 1 As shown, a sealing gasket is provided at the bottom of the cover 15, the cover 15 covers the top of the opening 2, and the width of the cover 15 is greater than the width of the opening 2. The cover 15 can seal the opening 2 at the top of the air duct 1, thereby avoiding air leakage.

[0028] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0029] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Integrated equipment A clean room air purification equipment for semiconductor production, comprising an air duct (1), characterized in that: The top of the air duct (1) is provided with a through opening (2), a positioning groove (3) is provided at the bottom of the inner wall of the air duct (1) and directly below the through opening (2), a filter portion (4) is movably inserted in the through opening (2), the top of the filter portion (4) is flush with the top of the air duct (1), and the bottom of the filter portion (4) is located in the positioning groove (3), a storage groove (5) is provided on the right side of the filter portion (4), an air inlet (6) connected to the storage groove (5) is provided on the left side of the filter portion (4), and the four right corners of the inner wall of the storage groove (5) are provided with a plurality of air inlets (6) connected to the storage groove (5). A fixing block (7) is fixedly installed on each of the four fixing blocks (7). Screw rods (8) are fixedly installed on the right sides of the four fixing blocks (7). A filter plate (9) is arranged at the opening on the right side of the storage groove (5). Through holes (10) are opened at four corners of the side of the filter plate (9). The four through holes (10) on the side of the filter plate (9) are respectively sleeved on the screw rods (8) on the sides of the four fixing blocks (7). Nuts (11) that abut against the side of the filter plate (9) are threadedly sleeved on the four screw rods (8). A high-efficiency filter screen is arranged in the middle of the side of the filter plate (9).

2. The integrated equipment semiconductor production clean room air purification equipment according to claim 1, characterized in that: The opening at the left end of the air inlet (6) is arranged in a rectangular shape, and the opening at the right end of the air inlet (6) is arranged in a circular shape, wherein the diameter of the circular opening at the right end of the air inlet (6) is smaller than the side length of the rectangular opening at the left end thereof.

3. The integrated equipment semiconductor production clean room air purification equipment according to claim 2, characterized in that: The top and bottom of the rectangular opening at the left end of the air inlet (6) are respectively flush with the top and bottom of the inner wall of the air duct (1).

4. The integrated equipment semiconductor production clean room air purification equipment according to claim 1, characterized in that: A groove (12) is provided at the top of the filter portion (4), and a fixing rod (13) is fixedly installed between the tops of the two ends of the inner wall of the groove (12).

5. The integrated equipment semiconductor production clean room air purification equipment according to claim 1, characterized in that: A fixed shaft (14) is fixedly installed at the top of the air duct (1) and located on the right side of the through opening (2), and a cover (15) is rotatably sleeved on the fixed shaft (14). When the cover (15) is in a horizontal state, the bottom of the cover (15) fits with the top of the air duct (1). Two screw grooves (16) are provided at the top of the air duct (1) and located on the left side of the through opening (2). Bolts (17) are provided at two corners of the top of the end of the cover (15) away from the fixed shaft (14). The two bolts (17) penetrate the cover (15) and are respectively threadedly inserted into the two screw grooves (16) at the top of the air duct (1).

6. The integrated equipment semiconductor production clean room air purification equipment according to claim 5, characterized in that: A sealing gasket is provided at the bottom of the sealing cover (15), the sealing cover (15) covers the top of the through opening (2), and the width of the sealing cover (15) is greater than the width of the through opening (2).

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