Sample holder for vertical liquid phase epitaxial growth

Abstract

The utility model relates to the technical field of liquid phase epitaxy, and provides a sample holder for vertical liquid phase epitaxy growth, which comprises a main body and a plurality of fixing components arranged on the main body, and the main body is provided with a plurality of mounting positions for mounting substrates; the plurality of fixing assemblies are in one-to-one correspondence with the plurality of mounting positions, and each fixing assembly comprises a first clamping block and a second clamping block which are detachably arranged on the main body; the first clamping block and the second clamping block are arranged on the left side and the right side of the installation position respectively, the distance between the first clamping block and the second clamping block can be adjusted, and the first clamping block and the second clamping block are used for clamping or loosening a substrate placed on the installation position. According to the sample holder, the substrate is fixed through the first clamping block and the second clamping block which are arranged on the two sides and have the adjustable distance, mother liquor cannot be left between the sample holder and the fixing assembly in the actual application process, and therefore the sample holder can be rapidly assembled and disassembled without polluting the back face of the substrate, and the working efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid phase epitaxy, in particular to a sample rack used for vertical liquid phase epitaxial growth. Background Art

[0002] Mercury cadmium telluride material is a single crystal material obtained by solid-liquid phase transition and is an important infrared material. Currently, focal plane devices made of mercury cadmium telluride have been widely used in space remote sensing, meteorological detection, aerospace applications and military detection.

[0003] At present, most of the mercury cadmium telluride materials are obtained by solid-liquid phase change. In order to obtain a large amount of mercury cadmium telluride materials to meet the needs of the development of infrared focal plane devices, liquid phase epitaxy technology based on solid-liquid phase change has emerged. The vertical liquid phase epitaxial growth technology uses a sample boat and a quartz fixture to fix the substrate, and then immerses it as a whole in the growth mother liquid for epitaxial growth. Therefore, efficient assembly and disassembly of the substrate is one of the key factors in the entire process. In addition, in the actual growth process, it is necessary to ensure that there is no residual mother liquid on the back of the substrate as much as possible, so the sample boat and quartz fixture are also required to stably clamp the substrate.

[0004] CN103849929A ​​discloses a sample holder for immersion-type HgCdTe liquid phase epitaxy, the sample holder adopts a polygonal structure, a support plate for stirring up and down is arranged at the bottom, and the mother liquid is homogenized by rotating and moving up and down in the mother liquid; the main body of the sample holder is made of high-purity graphite, and the surface is covered by a quartz gasket and a boron nitride bottom support plate, which can effectively prevent the graphite material from generating debris and contaminating the mother liquid; the use of a quartz gasket can also effectively prevent the mother liquid from adhering to the back of the substrate. When the above-mentioned sample holder is used for material growth, the mechanism of the sample holder for fixing the substrate is not immersed in the mother liquid, and the substrate or epitaxial wafer can be loaded and unloaded after epitaxy without high-temperature baking, and the size of the mother liquid remaining at the edge of the epitaxial material is small, which can meet the needs of mass production of immersion-type HgCdTe liquid phase epitaxial materials. However, the patent specification states that in order to prevent the mother liquid from entering the screw hole, the bottom fixed pressing plate of the sample holder is generally not removed after installation. This results in mother liquid remaining on the bottom fixed pressing plate after the sample holder is raised. There is a risk of contaminating the back of the substrate when removing the substrate. The residual mother liquid on the bottom fixed pressing plate needs to be drained again before the substrate can be removed.

[0005] CN103014844A discloses a mercury cadmium telluride vertical liquid phase epitaxial growth sample holder. It is on the sample holder plane, with three closed covering strips on the top and left and right sides, and a bottom fixing clamp. The three covering strips and the clamp have an inclined surface at a 45-degree angle to the sample holder plane, and are in contact with the edge of the substrate. The clamp is fixed on the sample holder plane by a fastening screw. The above-mentioned sample holder is suitable for mercury cadmium telluride vertical liquid phase epitaxial growth. When the substrate is clamped and fixed, the covering strips cover and press the upper part and the left and right sides of the substrate, which can prevent the mother liquid from penetrating to the back of the substrate during epitaxy from the front. The clamp presses the bottom end of the substrate. The combined action of the covering strips and the clamp can tightly and flatten the substrate on the sample holder plane, reduce the gap between the back of the substrate and the sample holder plane, and prevent the mother liquid from penetrating to the back of the substrate during epitaxial growth, thereby eliminating residual liquid on the back of the epitaxial wafer. However, this patent still has the same problem as the above-mentioned patent with publication number CN103849929A, specifically, the problem of residual mother liquid in the clamp leads to the risk of contaminating the back side of the substrate when the substrate is disassembled.

[0006] Based on this, the technical problem solved in this case is: how to solve the problem of residual mother liquid on the sample holder and the fixture to avoid contamination of the back of the substrate when disassembling the substrate. Utility Model Content

[0007] In order to solve the above technical problems, the utility model provides a sample holder for vertical liquid phase epitaxial growth. The sample holder fixes the substrate by means of a first clamping block and a second clamping block which are arranged on both sides and have adjustable spacing. In actual application, no mother liquid will remain between the sample holder and the fixing component, so that the sample holder can be quickly disassembled and assembled without contaminating the back side of the substrate, thereby greatly improving work efficiency.

[0008] The technical solution of the utility model is:

[0009] A sample holder for vertical liquid phase epitaxial growth comprises a main body and a plurality of fixing components arranged on the main body, wherein the main body is provided with a plurality of mounting positions for mounting a substrate; the plurality of fixing components correspond one-to-one to the plurality of mounting positions, and the fixing components comprise a first clamping block and a second clamping block detachably arranged on the main body; the first clamping block and the second clamping block are respectively arranged on the left and right sides of the mounting position, and the spacing between the first clamping block and the second clamping block can be adjusted, so as to clamp or release the substrate placed on the mounting position.

[0010] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the lower end of the first clamping block is chamfered at the contact point with the substrate; the lower end of the second clamping block is chamfered at the contact point with the substrate.

[0011] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, a limiting structure is provided at the contact point between the side ends of the first clamping block and / or the second clamping block and the substrate; the limiting structure is used to press the substrate tightly on the mounting position.

[0012] In the above-mentioned sample rack for vertical liquid phase epitaxial growth, the upper part of the main body is provided with an upper mounting portion protruding along the outer circumference of the main body, and the lower part of the main body is provided with a lower mounting portion protruding along the outer circumference of the main body; the mounting position is formed between the upper mounting portion and the lower mounting portion.

[0013] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the first clamping block is a U-shaped structure and has symmetrically arranged fixing holes at the upper and lower ends; the first clamping block is detachably connected to the upper mounting part and the lower mounting part through the fixing holes at the upper and lower ends.

[0014] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the second clamping block is a U-shaped structure with symmetrically arranged waist-shaped grooves at the upper and lower ends; the second clamping block is detachably connected to the upper mounting part and the lower mounting part respectively through the waist-shaped grooves at the upper and lower ends.

[0015] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the upper end surface of the upper mounting portion is chamfered.

[0016] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the upper end surface of the main body is provided with a column for connecting with a pull rod of an external liquid phase epitaxial system.

[0017] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the lower end surface of the main body is provided with a disk body; the upper end surface of the disk body is an arc surface, and the lower end surface of the disk body is a plane.

[0018] In the above-mentioned sample holder for vertical liquid phase epitaxial growth, the main body is a quadrangular prism, and each of the four sides of the quadrangular prism is provided with a fixing component.

[0019] One of the above technical solutions of the utility model has at least one of the following advantages or beneficial effects:

[0020] The main body of the utility model is provided with a plurality of mounting positions for mounting substrates, and epitaxial layers of a plurality of substrates can be grown simultaneously, thereby greatly improving production efficiency. Meanwhile, its fixing assembly fixes the substrate by means of a first clamping block and a second clamping block which are arranged on both sides and have adjustable spacing. In actual application, no mother liquid will remain between the sample holder and the fixing assembly, so that the mother liquid can be drained, and the staff can quickly install and remove the fixing assembly without contaminating the back side of the substrate, thereby greatly improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1It is a schematic diagram of the three-dimensional structure of Example 1 of the utility model;

[0022] Figure 2 This is a schematic diagram of the main structure of Example 1 of the utility model;

[0023] Figure 3 This is a schematic diagram of the structure of the first clamping block of Example 1 of the utility model;

[0024] Figure 4 This is a schematic diagram of the second clamping block structure of Example 1 of the utility model.

[0025] The corresponding relationship of the numbers in the figure is as follows:

[0026] Main body 1; upper mounting part 2; first mounting hole 201; lower mounting part 3; second mounting hole 301; disk body 4; column 5; fixing assembly 6; first clamping block 61; fixing hole 611; second clamping block 62; waist-shaped groove 621; mounting position a; limiting structure b; first chamfer c; second chamfer d; third chamfer e; substrate f. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] Example 1

[0029] refer to Figures 1 to 4 A sample holder for vertical liquid phase epitaxial growth includes a main body 1, four fixing components 6 arranged on the main body 1, and four mounting positions a for mounting substrates f are arranged on the main body 1; the four fixing components 6 correspond to the four mounting positions a one by one, and the fixing components 6 include a first clamping block 61 and a second clamping block 62 detachably arranged on the main body 1; the first clamping block 61 and the second clamping block 62 are respectively arranged on the left and right sides of the mounting position a, and the spacing between the first clamping block 61 and the second clamping block 62 can be adjusted, and are used to clamp or release the substrate f placed on the mounting position a. In this embodiment, the main body 1 is a quadrangular prism 5, and a fixing component 6 is respectively arranged on the four sides of the quadrangular prism 5. It should be noted that the main body 1 can also be a triangular prism 5 or other structures.

[0030] The main body 1 of this embodiment is provided with a plurality of mounting positions a for mounting the substrate f, and can grow the epitaxial layers of a plurality of substrates f simultaneously, greatly improving the production efficiency. At the same time, its fixing component 6 fixes the substrate f through the first clamping block 61 and the second clamping block 62 which are arranged on both sides and have adjustable spacing. In actual application, there will be no mother liquor remaining between the sample rack and the fixing component 6, so that the mother liquor can be drained. The staff can quickly install and disassemble the fixing component 6 without contaminating the back surface of the substrate f, greatly improving the work efficiency.

[0031] In this embodiment, in order to further avoid the mother liquor remaining at the lower edge of the contact between the first clamping block 61 and the second clamping block 62 and the substrate f, the lower end of the first clamping block 61 at the contact with the substrate f is chamfered, which is called the first chamfer c in this embodiment; the lower end of the second clamping block 62 at the contact with the substrate f is chamfered, which is called the second chamfer d in this embodiment. In this embodiment, specifically, the chamfer is a C chamfer. Preferably, after chamfering, the lower edges of the first clamping block 61 and the second clamping block 62 exactly completely contact the substrate f. Of course, in other embodiments, they may not exactly completely fit, but the thickness of the substrate f is slightly larger than the width of the lower edge after chamfering. Under such a preference, there is no position where the mother liquor can accumulate at the contact between the lower ends of the first clamping block 61 and the second clamping block 62 and the substrate f, thus completely avoiding the mother liquor remaining at the contact between the lower ends of the first clamping block 61 and the second clamping block 62 and the substrate f.

[0032] In this embodiment, specifically, a limiting structure b is provided at the contact between the side end of the second clamping block 62 and the substrate f; the limiting structure b is used to press the substrate f onto the mounting position a. More specifically, the limiting structure b is a groove, and the depth of the groove is the same as the thickness of the substrate f. Of course, in actual application, the depth of the groove can be slightly less than the thickness of the substrate f, so as to improve the pressing degree. It should be noted that in other embodiments, the first clamping block 61 may be provided with the limiting structure b, or both the second clamping block 62 and the second clamping block 62 may be provided with the limiting structure b. This embodiment only gives one of the options.

[0033] Specifically, an upper mounting portion 2 protruding along the outer periphery of the main body 1 is provided at the upper part of the main body 1, and a lower mounting portion 3 protruding along the outer periphery of the main body 1 is provided at the lower part of the main body 1; an installation position a is formed between the upper mounting portion 2 and the lower mounting portion 3. Preferably, in order to form an installation position a with a consistent depth, the protruding distances of the upper mounting portion 2 and the lower mounting portion 3 are the same.

[0034] More specifically, the first clamping block 61 is of a U-shaped structure and has fixing holes 611 symmetrically arranged at the upper and lower ends; the first clamping block 61 is detachably connected to the upper mounting portion 2 and the lower mounting portion 3 respectively through the fixing holes 611 at the upper and lower ends.

[0035] More specifically, the second clamping block 62 is in a C-shaped structure and has waist-shaped slots 621 symmetrically arranged at its upper and lower ends; the second clamping block 62 is detachably connected to the upper mounting portion 2 and the lower mounting portion 3 through the waist-shaped slots 621 at its upper and lower ends respectively.

[0036] In this embodiment, it should be noted that the upper mounting portion 2 is provided with a first mounting hole 201, and the lower mounting portion 3 is provided with a second mounting hole 301; the positions of the first mounting hole 201 and the second mounting hole 301 correspond one by one; the fixing hole 611 at the upper end of the first clamping block 61 and the first mounting hole 201 are detachably connected through a quartz gasket and a graphite screw, and the fixing hole 611 at the lower end of the second clamping block 62 and the second mounting hole 301 are detachably connected through a quartz gasket and a graphite screw. Similarly, the second clamping block 62 is also connected through the first mounting hole 201 and the second mounting hole 301. The difference is that, in this embodiment, since the second clamping block 62 is connected through the waist-shaped slot 621, in actual application, the second clamping block 62 can be close to or far from the first clamping block 61, so as to adjust the distance between the first clamping block 61 and the second clamping block 62 according to the size of the substrate f, and thus substrates f of various sizes can be clamped, expanding the application range of this embodiment.

[0037] Under the above multiple designs, the installation and disassembly process of this embodiment is as follows:

[0038] When the staff installs, connect the first clamping block 61 to the upper mounting portion 2 and the lower mounting portion 3 of the main body 1 through a quartz gasket and a graphite screw, place the substrate f into the mounting position a of the main body 1 and make the back of the substrate f close to the main body 1. Then the staff first connect the second clamping block 62 to the upper mounting portion 2 and the lower mounting portion 3 of the main body 1 through a quartz gasket and a graphite screw. It should be noted that at this time, the second clamping block 62 can still be adjusted left and right along its waist-shaped slot 621. Then the staff adjust the second clamping block 62 to make the substrate f enter the limiting structure b of the second clamping block 62 as much as possible, and then tighten the graphite screw, so that both sides of the substrate f are completely close to the first clamping block 61 or the second clamping block 62 and the back of the substrate f is completely pressed against the main body 1. In this embodiment, more preferably, all four sides of the substrate f are completely close to the first clamping block 61 or the second clamping block 62.

[0039] When the staff disassembles, only need to loosen the graphite screw of the second clamping block 62 and take out the substrate f. It should be noted that, in order to simplify the subsequent installation process, the second clamping block 62 can be loosened to the extent that it can be adjusted left and right without falling off.

[0040] The above installation and disassembly process is optimized according to the structure of this embodiment, but in actual application, it is not limited to one usage method, as long as it is ensured that the back of the substrate f is not contaminated.

[0041] As a preferred embodiment of this embodiment, in order to prevent the mother liquid from remaining on the upper end surface of the upper mounting portion 2, the upper end surface of the upper mounting portion 2 is chamfered, which is called the third chamfer e in this embodiment. In actual application, when the sample rack is pulled out, the mother liquid on the upper end surface of the upper mounting portion 2 can flow out from the chamfer.

[0042] As a further preferred embodiment of the present invention, in order to prevent the mother liquid from remaining on the lower end surface of the main body 1, a disk body 4 is provided on the lower end surface of the main body 1; the upper end surface of the disk body 4 is an arc surface, and the lower end surface of the disk body 4 is a flat surface. In practical applications, when the sample rack is pulled out, the mother liquid on the lower end surface of the main body 1 can flow out from the chamfer.

[0043] Of course, in this embodiment, the upper end surface of the main body 1 is provided with a column 5 for connecting with the pull rod of the external liquid phase epitaxy system. This is mainly to allow the graphite rod to enter the sample holder. The above design is a conventional design of the sample holder, so it is not supplemented in this embodiment.

[0044] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A sample holder for vertical liquid phase epitaxial growth, comprising a main body and a plurality of fixing components arranged on the main body, wherein the main body is provided with a plurality of mounting positions for mounting substrates; the plurality of fixing components correspond to the plurality of mounting positions one by one, characterized in that: The fixing component includes a first clamping block and a second clamping block which are detachably arranged on the main body; the first clamping block and the second clamping block are respectively arranged on the left and right sides of the installation position, and the distance between the first clamping block and the second clamping block can be adjusted for clamping or releasing the substrate placed on the installation position.

2. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: The contact part between the lower end of the first clamping block and the substrate is chamfered; the contact part between the lower end of the second clamping block and the substrate is chamfered.

3. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: A limiting structure is provided at the contact part between the side end of the first clamping block and / or the second clamping block and the substrate; the limiting structure is used for pressing the substrate tightly on the installation position.

4. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: An upper installation part protruding along the outer periphery of the main body is provided at the upper part of the main body, and a lower installation part protruding along the outer periphery of the main body is provided at the lower part of the main body; the installation position is formed between the upper installation part and the lower installation part.

5. The sample holder for vertical liquid phase epitaxial growth according to claim 4, characterized in that: The first clamping block is of a U-shaped structure and has fixing holes symmetrically arranged at the upper and lower ends; the first clamping block is detachably connected to the upper installation part and the lower installation part respectively through the fixing holes at the upper and lower ends.

6. The sample holder for vertical liquid phase epitaxial growth according to claim 5, characterized in that: The second clamping block is of a U-shaped structure and has waist-shaped grooves symmetrically arranged at the upper and lower ends; the second clamping block is detachably connected to the upper installation part and the lower installation part respectively through the waist-shaped grooves at the upper and lower ends.

7. The sample holder for vertical liquid phase epitaxial growth according to claim 4, characterized in that: The upper end face of the upper installation part is chamfered.

8. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: A column body for connecting with a pull rod of an external liquid phase epitaxy system is provided on the upper end face of the main body.

9. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: A disk body is provided on the lower end face of the main body; the upper end face of the disk body is an arc surface, and the lower end face of the disk body is a plane.

10. The sample holder for vertical liquid phase epitaxial growth according to claim 1, characterized in that: The main body is a quadrangular prism, and a fixing component is provided on each of the four side faces of the quadrangular prism.

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