Wafer transport basket

Abstract

The utility model provides a wafer transport basket, which comprises a top plate, two sides of the lower surface of the top plate are fixedly connected with side groove plates, a bottom plate is fixedly connected between the bottoms of the two side groove plates, the side groove plates are provided with a plurality of wafer grooves at intervals along the height direction, at least one side of each side groove plate is provided with a vertical slot, and a stop mechanism is inserted in each slot. And the backstop mechanism is provided with backstop blocks at intervals in the height direction, the backstop blocks coincide with the wafer grooves in the transportation process, the upper end of the backstop mechanism is connected with the side groove plate through a locking mechanism, and when the lifting basket is placed on the table top, the backstop mechanism is driven to move upwards, so that the backstop blocks and the wafer grooves are staggered. In the transportation process of the lifting basket, the stop mechanism is locked through the mutual matching of the limiting groove and the wedge-shaped block, so that the relative movement of the stop mechanism and the side groove plate in the transportation process of the lifting basket can be avoided; according to the utility model, the operation convenience of the backstop mechanism is considered, and the stability of the backstop mechanism in the working process is also improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer baskets, in particular to a wafer transport basket. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Because of its round shape, it is called a wafer. It is a relatively expensive product. Various circuit component structures can be processed on the silicon wafer to become electronic products with specific electrical functions. When processing wafer products in the semiconductor chip automation workshop, the processed wafer needs to be transferred to the

[0003] The commonly used tool is a wafer transport basket. In order to avoid stacking and transporting multiple wafers, which may cause contamination, scratches, and damage to the wafers and affect product quality, the wafer transport basket includes a plurality of wafer slots arranged at intervals. Specifically, the wafer transport basket includes a basket body with an opening, and the inner side wall of the basket body is provided with wafer slots at intervals. The wafers enter the basket body through the opening, and the edges of the wafers are arranged in the wafer slots to realize the placement of the wafers.

[0004] In order to prevent the wafer from slipping out of the opening and falling down during the transportation of the wafer transport basket, the prior art has a stop mechanism provided at the opening of the wafer transport basket, on which a stop block matching the wafer slot is provided. During the transportation process, the stop block overlaps with the wafer slot under the action of gravity, thereby preventing the wafer from slipping out of the opening and falling down. However, during the transportation of the basket, the basket shakes up and down, which easily drives the stop mechanism to shake up and down, thereby possibly causing the stop block and the wafer slot to be offset from each other, thereby rendering the stop mechanism ineffective. Therefore, we propose a wafer transport basket to improve this. Utility Model Content

[0005] The purpose of the utility model is to improve and innovate the shortcomings and problems existing in the background technology, provide a wafer transport basket, and improve the stability of the stop mechanism during the transport process.

[0006] A wafer transport basket comprises a top plate, side groove plates are fixedly connected to both sides of the lower surface of the top plate, a bottom plate is fixedly connected between the bottoms of the two side groove plates, the side groove plates are provided with a plurality of wafer grooves spaced apart in a height direction, at least one side of the side groove plates is provided with a vertically arranged slot, a stop mechanism is inserted into the slot, the stop mechanism is provided with stop blocks spaced apart in the height direction, the stop blocks coincide with the wafer grooves during transport, the upper end of the stop mechanism is connected to the side groove plates through a locking mechanism, and when the basket is placed on a table, the stop mechanism is driven upward so that the stop blocks are staggered with the wafer grooves.

[0007] A further solution is that the stop mechanism comprises a lifting bar that is slidably matched with the slot, and the stop block is mounted on the lifting bar.

[0008] A further solution is that the locking mechanism includes a limit block installed on the upper end of the lifting bar, a slide groove matched with the limit block is provided on the upper end of the side groove plate, a limit groove is provided on the limit block, a groove is provided on one side of the slide groove, a spring is fixedly connected to the bottom wall of the groove, a movable block slidingly matched with the groove is fixedly connected to the end of the spring, and a wedge block matched with the limit groove is installed on the movable block.

[0009] A further solution is that when the limiting groove cooperates with the wedge block, the bottom end of the lifting bar extends out of the side groove plate; when the bottom end of the lifting bar is flush with the bottom end of the side groove plate, the stop block is staggered with the wafer groove.

[0010] A further solution is that a vertically arranged stop bar is installed on one side of the side slot plate, and the stop bar is used to limit the wafer from moving out of the wafer slot.

[0011] A further solution is that a handle is provided on the top plate.

[0012] A further solution is that a placement is provided on the outer side of the side groove plate.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows: during the transportation of the basket, the utility model locks the stop mechanism through the cooperation between the limit groove and the wedge block, thereby avoiding relative movement between the stop mechanism and the side groove plate during the transportation of the basket; in addition, when the basket is placed on the table, the stop mechanism is driven to move upward, so that the limit block automatically squeezes the wedge block into the groove, thereby realizing automatic unlocking of the stop mechanism; since the unlocking is achieved by the support of the work table, the stop mechanism is simple to operate and easy to use; that is, the utility model takes into account the operational convenience of the stop mechanism and improves its stability during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0015] Figure 1 A front structural schematic diagram of a wafer transport basket provided by an embodiment of the utility model;

[0016] Figure 2 A schematic diagram of the front structure of the side channel plate provided by an embodiment of the utility model;

[0017] Figure 3 For this utility model Figure 1 A schematic diagram of the partially enlarged structure at center A;

[0018] Figure 4 For this utility model Figure 1 A schematic diagram of the partially enlarged structure at B in the middle;

[0019] Figure 5 This is a schematic structural diagram of a stop mechanism provided in an embodiment of the utility model.

[0020] Figure numerals: handle 1, top plate 2, side groove plate 3, placement plate 4, bottom plate 5, raised strip 6, wafer groove 7, lifting strip 8, stop block 9, pressing block 10, limit block 11, limit groove 12, groove 13, spring 14, movable block 15, wedge block 16, slide groove 17, slot 18, stop strip 19. DETAILED DESCRIPTION

[0021] In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific implementations and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0024] See also Figure 1-Figure 5 The utility model provides a wafer transport basket, including a top plate 2, a handle 1 is fixedly connected to the upper surface of the top plate 2, and during the wafer transport process, the operator can hold the handle 1 to transfer the wafer transport basket. Side groove plates 3 are fixedly connected to both sides of the lower surface of the top plate 2, and a bottom plate 5 is fixedly connected between the bottoms of the two side groove plates 3. The bottom plate 5 is arranged opposite to the top plate 2, and the bottom plate 5 is used to increase the contact area between the transport basket and the work surface.

[0025] The side groove plate 3 is provided with raised bars 6 at intervals along the height direction, and a wafer groove 7 is provided between adjacent raised bars 6. The edge of the wafer is placed in the wafer groove 7, and the raised bars 6 are used to support the edge of the wafer. Since the wafer grooves 7 are arranged at intervals along the height direction, it is possible to avoid stacking and transporting multiple wafers, which is conducive to reducing the pollution, scratches, and damage of the wafers. In addition, placing the transport basket in the cleaning pool and placing the wafers at intervals can also be conducive to cleaning the surface of the wafer.

[0026] A vertically arranged slot 18 is provided on the side of the side slot plate 3 close to the opening, and the slot 18 is interconnected with the wafer slot 7. A vertically arranged stop bar 19 is installed on the side of the side slot plate 3 away from the opening, and the stop bar 19 is installed on the side slot plate 3 by screws. The stop bar 19 protrudes inwardly so that the wafer placed on the wafer slot 7 cannot pass through the stop bar 19, that is, the stop bar 19 is used to limit the wafer from moving out of the wafer slot 7. It should be noted that the side on which the wafer moves in and out of the wafer slot 7 is the opening of the side slot plate 3. Since the stop bar 19 limits the wafer from entering and exiting the wafer slot 7, the wafer can only enter the wafer slot 7 through the opening end of the side slot plate 3.

[0027] The slot 18 is provided with a stop mechanism, which includes a lifting bar 8, and the lifting bar 8 is provided with stop blocks 9 at intervals along the height direction. The lifting bar 8 is thin and will not block the wafer from entering and exiting the wafer slot 7. When the stop block 9 overlaps with the wafer slot 7 during transportation, it can block the wafer from entering and exiting the wafer slot 7; therefore, when the stop block 9 is staggered with the wafer slot 7, it is convenient to move the wafer in and out of the wafer slot 7.

[0028] It should be noted that the stop block 9 can completely overlap with the wafer slot 7 during transportation, or can partially overlap with the wafer slot 7, as long as it can block the wafer from entering and exiting the wafer slot 7, and this application does not make any specific limitations.

[0029] During the transportation process, the upper end of the stop mechanism is connected to the side slot plate 3 through a locking mechanism, and the locking mechanism includes a limit block 11 installed on the upper end of the lifting bar 8, and a slide groove 17 adapted to the limit block 11 is provided on the upper end of the side slot plate 3. The limit block 11 is provided with a limit groove 12, and a groove 13 is provided on one side of the slide groove 17. A spring 14 is fixedly connected to the bottom wall of the groove 13, and a movable block 15 that slides with the groove 13 is fixedly connected to the end of the spring 14. A wedge block 16 adapted to the limit groove 12 is installed on the movable block 15. It can be understood that the locking of the stop mechanism is achieved through the mutual cooperation of the limit groove 12 and the wedge block 16, so that the relative movement between the stop mechanism and the side slot plate 3 due to shaking during the transportation of the basket can be avoided, so that the stop block 9 and the wafer slot 7 can be prevented from being staggered with each other during the transportation of the basket, resulting in the failure of the stop.

[0030] When the limiting groove 12 cooperates with the wedge block 16, the bottom end of the lifting bar 8 extends out of the side slot plate 3, and when the bottom end of the lifting bar 8 is flush with the bottom end of the side slot plate 3, the stop block 9 is staggered with the wafer slot 7; with this arrangement, the basket is placed on the table, and the stop mechanism is driven to move upward. Since the limiting groove 12 cooperates with the wedge block 16 in a wedge shape, the inclined surface of the limiting groove 12 can automatically squeeze the wedge block 16 into the groove 13, thereby realizing automatic unlocking of the stop mechanism; since the unlocking is realized by the support of the work table, the stop mechanism is simple to operate and convenient.

[0031] A pressing block 10 is fixedly connected to the top of the lifting bar 8 . When the basket is detached from the table, the pressing block 10 is pressed downward to facilitate the wedge block 16 to automatically embed into the limiting groove 12 .

[0032] A placing plate 4 is arranged on the outer side of the side groove plate 3, and the placing plate 4 facilitates placing the basket in the cleaning tank, thereby facilitating cleaning of the wafers on the basket.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the utility model.

[0034] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0035] Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Mentioning "embodiment" in this article means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present embodiment application. The appearance of this phrase in various positions in the specification is not necessarily the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It can be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0036] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A wafer transport basket, comprising a top plate (2), side groove plates (3) are fixedly connected to both sides of the lower surface of the top plate (2), and a bottom plate (5) is fixedly connected between the bottoms of the two side groove plates (3), characterized in that: The side trough plate (3) is provided with a plurality of wafer slots (7) at intervals along the height direction, at least one side of the side trough plate (3) is provided with a vertically arranged slot (18), a stop mechanism is inserted into the slot (18), the stop mechanism is provided with stop blocks (9) at intervals along the height direction, the stop blocks (9) overlap with the wafer slots (7) during the transportation process, the upper end of the stop mechanism is connected to the side trough plate (3) via a locking mechanism, and when the basket is placed on the table, the stop mechanism is driven upwards so that the stop blocks (9) are staggered with the wafer slots (7); The stop mechanism comprises a lifting bar (8) slidably engaged with the slot (18), and the stop block (9) is mounted on the lifting bar (8); The locking mechanism comprises a limit block (11) mounted on the upper end of the lifting bar (8); a slide groove (17) matched with the limit block (11) is provided at the upper end of the side groove plate (3); a limit groove (12) is provided on the limit block (11); a groove (13) is provided on one side of the slide groove (17); a spring (14) is fixedly connected to the bottom wall of the groove (13); a movable block (15) slidably matched with the groove (13) is fixedly connected to the end of the spring (14); a wedge block (16) matched with the limit groove (12) is installed on the movable block (15).

2. A wafer transport basket according to claim 1, characterized in that: When the limiting groove (12) and the wedge block (16) cooperate, the bottom end of the lifting bar (8) extends out of the side groove plate (3); when the bottom end of the lifting bar (8) is flush with the bottom end of the side groove plate (3), the stop block (9) is staggered with the wafer groove (7).

3. The wafer transport basket according to claim 1, characterized in that: A vertically arranged stop bar (19) is installed on one side of the side slot plate (3), and the stop bar (19) is used to limit the wafer from moving out of the wafer slot (7).

4. The wafer transport basket according to claim 1, characterized in that: A handle (1) is provided on the top plate (2).

5. The wafer transport basket according to claim 1, characterized in that: A placement plate (4) is arranged on the outer side of the side groove plate (3).

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