Cleaning device for evaporation line source crucible

Abstract

According to the cleaning device for the evaporation line source crucible, a driving assembly drives a rotating sleeve to drive a cleaning rod to clean an evaporation hole, so that when the evaporation hole needs to be cleaned, a driving motor drives a transmission gear to rotate, and then racks on the two sides are driven to slide along sliding rails; the gear disc can be driven to rotate through meshing transmission of the rack and the gear disc, then the rotating sleeve is driven to rotate, and then the cleaning rod is driven to slide along the inner side wall of the evaporation hole through the annular extension plate at the top of the rotating sleeve to clean the evaporation hole, so that the evaporation material is prevented from being attached to the inner side wall of the evaporation hole for a long time; therefore, the evaporation rate and the film forming uniformity can be kept, and the production efficiency and the product quality are improved.

Description

Technical Field

[0001] The present application relates to the technical field of evaporation crucibles, and in particular to a cleaning device for evaporation line source crucibles. Background Art

[0002] Vacuum thermal evaporation technology is a process that uses a pressure below 5×10 -5 In a vacuum environment of 1.5 Pa, the material is changed from solid to vapor by heating, and then it rises to the substrate at high speed to be deposited and solidified into a solid film. This technology is widely used in the preparation of OLED (organic light-emitting diode) organic films and other fields.

[0003] In the traditional vacuum thermal evaporation process, an evaporation crucible is usually used to heat the evaporation material into vapor. The evaporation crucible generally includes a crucible body and a crucible cover, wherein the crucible cover is provided with an evaporation hole. The crucible body is used to contain the evaporation material, and the material is heated to form vapor, which overflows from the evaporation hole and rises onto the substrate. However, during the evaporation process, the evaporation hole often adheres to the evaporation material. When the evaporation hole adheres to more material, the deposited and solidified material in the edge area of ​​the substrate is less than that in the center area of ​​the substrate, resulting in poor film uniformity; as the evaporation hole is gradually blocked by the attachment, the aperture becomes smaller, and it becomes difficult to evaporate the material, resulting in a decrease in the evaporation rate and poor stability. If not cleaned in time, the evaporation hole may be completely blocked, and the material cannot be evaporated, thereby interrupting the evaporation process and seriously affecting production efficiency.

[0004] Therefore, in order to solve the problem that the evaporation holes are easily clogged by attachments during the evaporation process, an effective cleaning device is urgently needed to ensure the continuity of the evaporation process and the film quality. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the present application is to provide a cleaning device for an evaporation line source crucible to solve the problems raised in the above background technology.

[0006] According to one aspect of the present application, a cleaning device for a vapor deposition line source crucible comprises a crucible body, a line source crucible cover, a cleaning seat plate, a support tube, a rotating sleeve, a cleaning rod and a driving assembly, wherein a line source crucible cover is arranged on the top of the crucible body, a plurality of vapor deposition holes are opened on the line source crucible cover along its length direction, a cleaning seat plate is installed on the top of the line source crucible cover, a support tube is vertically fixed on the cleaning seat plate at the position corresponding to each of the vapor deposition holes, and each of the support tubes is connected to the corresponding vapor deposition hole, the inner diameter of each of the support tubes is consistent with the inner diameter of the corresponding vapor deposition hole, a rotating sleeve is rotatably arranged on the outer side of each of the support tubes, an annular extension plate is fixed on the top of each of the rotating sleeves, and each of the annular The inner diameter of the extension plate is consistent with the inner diameter of the corresponding support tube, and a cleaning rod is vertically fixed on the inner wall of each annular extension plate, the lower end of the cleaning rod extends to the position of the evaporation hole, and the cleaning rod is in sliding contact with the inner wall of the evaporation hole, each of the rotating sleeves is transmission-connected to the driving assembly, and the driving assembly can drive the rotating sleeve to rotate, so that the cleaning rod is in sliding contact along the inner wall of the evaporation hole, and a protective shell is provided on the upper outer cover of the driving assembly and the rotating sleeve, the protective shell is fixedly connected to the cleaning seat plate, and a through hole is opened on the protective shell corresponding to each position of the evaporation hole, and the inner diameter of each through hole is consistent with the inner diameter of the corresponding evaporation hole.

[0007] Preferably, the driving assembly includes a gear plate, a rack, a transmission gear and a driving motor. A gear plate is provided on the fixed sleeve on the outer side wall of each rotating sleeve. Racks are symmetrically provided on both sides of the gear plate, and the length direction of the two racks is parallel to the length direction of the cleaning seat plate. Each gear plate is meshed and transmission connected with the racks on both sides thereof. The two racks are slidably arranged on the cleaning seat plate. A transmission gear is arranged between the two racks. The transmission gear meshes and transmits with the two racks. The transmission gear is fixedly connected to the output shaft of the driving motor, and the driving motor is mounted on the protective shell.

[0008] Preferably, a connecting plate is fixed to the outer side of each of the racks, and a plurality of sliders are fixed to the bottom of the connecting plate along its length direction, and each of the sliders is slidably mounted on a slide rail, and the slide rail is fixed on the cleaning seat plate, and the length direction of the slide rail is parallel to the length direction of the cleaning seat plate.

[0009] Preferably, the transmission gears are provided at both ends between the two racks, each of the transmission gears is fixedly connected to the output shaft of the drive motor, and the two drive motors are synchronously driven.

[0010] Preferably, the lower surface of the cleaning seat plate is tightly fitted with the upper surface of the line source crucible cover, the top end surface of the support tube is tightly fitted with the lower surface of the annular extension plate, the inner lower surface of the protective shell is tightly fitted with the upper surface of the annular extension plate, and the evaporation hole, the support tube, the annular extension plate and the through hole are connected to form a continuous channel.

[0011] Preferably, the rotating sleeve and the supporting tube are rotatably connected via a bearing.

[0012] Preferably, two cleaning rods are symmetrically arranged on the inner side wall of the annular extension plate.

[0013] The advantages of the present application over the prior art are as follows: a cleaning device for a evaporation line source crucible of the present application drives a rotating sleeve to drive a cleaning rod to clean the evaporation hole through a driving assembly, so that when the evaporation hole needs to be cleaned, the driving motor drives the transmission gear to rotate, thereby driving the racks on both sides to slide along the slide rail, and then the gear plate can be driven to rotate through the meshing transmission of the rack and the gear plate, thereby driving the rotating sleeve to rotate, and then the cleaning rod is driven by the annular extension plate on the top of the rotating sleeve to slide along the inner wall of the evaporation hole to clean it, thereby preventing the evaporation material from adhering to the inner wall of the evaporation hole for a long time, thereby maintaining the evaporation rate and film formation uniformity, and improving production efficiency and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The figure is a three-dimensional diagram of a cleaning device for an evaporation line source crucible according to an embodiment of the present application.

[0015] Figure 2 This is a three-dimensional exploded view of a cleaning device for an evaporation line source crucible according to an embodiment of the present application.

[0016] Figure 3 It is a three-dimensional structural diagram of a cleaning seat plate of a cleaning device for a evaporation line source crucible according to an embodiment of the present application.

[0017] Figure 4 This is a bottom perspective of a three-dimensional image of a cleaning base plate of a cleaning device for an evaporation line source crucible according to an embodiment of the present application.

[0018] Figure 5 It is a main cross-sectional view of a cleaning device for an evaporation line source crucible according to an embodiment of the present application.

[0019] Figure 6 yes Figure 5 A schematic diagram of the enlarged structure of part A in the middle.

[0020] Figure 7 The figure is a side sectional view of a cleaning device for an evaporation line source crucible according to an embodiment of the present application.

[0021] Figure numerals: 1. crucible body; 2. line source crucible cover; 3. cleaning seat plate; 4. support tube; 5. rotating sleeve; 6. cleaning rod; 7. driving assembly; 71. gear plate; 72. rack; 73. transmission gear; 74. driving motor; 75. connecting plate; 76. slider; 77. slide rail; 8. evaporation hole; 9. annular extension plate; 10. protective shell; 11. through hole. DETAILED DESCRIPTION

[0022] In order to make the content of this application easier to understand, the technical solutions in the embodiments of this application will be described clearly and completely in conjunction with the drawings in the embodiments of this application. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached drawings. Figure 7 As used herein, the terms "inward" and "outward" refer to directions toward and away from, respectively, the geometric center of the particular component.

[0023] like Figure 1 to Figure 7As shown, a cleaning device for a vapor deposition line source crucible comprises a crucible body 1, a line source crucible cover 2, a cleaning seat plate 3, a support tube 4, a rotating sleeve 5, a cleaning rod 6 and a driving assembly 7. A line source crucible cover 2 is arranged on the top of the crucible body 1, and a plurality of vapor deposition holes 8 are opened on the line source crucible cover 2 along its length direction. A cleaning seat plate 3 is installed on the top of the line source crucible cover 2. A support tube 4 is vertically fixed at the position of each vapor deposition hole 8 on the cleaning seat plate 3, and each support tube 4 is connected with the corresponding vapor deposition hole 8, and the inner diameter size of each support tube 4 is consistent with the inner diameter size of the corresponding vapor deposition hole 8. A rotating sleeve 5 is rotatably arranged on the outer side of each support tube 4 through a bearing, and an annular extension plate 9 is fixedly arranged on the top of each rotating sleeve 5, and the inner diameter size of each annular extension plate 9 is consistent with the inner diameter size of the corresponding support tube 4, and two cleaning rods 6 are symmetrically arranged on the inner side wall of each annular extension plate 9, and the lower end of the cleaning rod 6 is extended and placed in the vapor deposition hole 8, and the cleaning rod 6 is in sliding contact with the inner wall of the evaporation hole 8, each rotating sleeve 5 is transmission connected with the driving assembly 7, the driving assembly 7 can drive the rotating sleeve 5 to rotate, so that the cleaning rod 6 is in sliding contact along the inner wall of the evaporation hole 8, and the upper outer cover of the driving assembly 7 and the rotating sleeve 5 is provided with a protective shell 10, the protective shell 10 is fixedly connected to the cleaning seat plate 3, and a through hole 11 is opened on the protective shell 10 corresponding to the position of each evaporation hole 8, and the inner diameter of each through hole 11 is consistent with the inner diameter of the corresponding evaporation hole 8. In addition, the lower surface of the cleaning seat plate 3 is tightly fitted with the upper surface of the line source crucible cover 2, the top end surface of the support tube 4 is tightly fitted with the lower surface of the annular extension plate 9, the inner lower surface of the protective shell 10 is tightly fitted with the upper surface of the annular extension plate 9, the evaporation hole 8, the support tube 4, the annular extension plate 9 and the through hole 11 are connected to form a continuous channel. This design can ensure that the evaporation material of the crucible body 1 can overflow smoothly through the continuous channel.

[0024] In one embodiment, in combination Figure 2 to Figure 7The driving assembly 7 includes a gear plate 71, a rack 72, a transmission gear 73 and a driving motor 74. A gear plate 71 is fixedly sleeved on the outer wall of each rotating sleeve 5. Racks 72 are symmetrically arranged on both sides of the gear plate 71, and the length direction of the two racks 72 is parallel to the length direction of the cleaning seat plate 3. Each gear plate 71 is meshed and connected to the racks 72 on both sides thereof. A connecting plate 75 is fixedly arranged on the outer side of each rack 72. A plurality of sliders 76 are fixedly arranged on the bottom of the connecting plate 75 along its length direction. Each slider 76 Both are slidably arranged on the slide rail 77, the slide rail 77 is fixedly arranged on the cleaning seat plate 3, and the length direction of the slide rail 77 is parallel to the length direction of the cleaning seat plate 3, and transmission gears 73 are arranged at both ends between the two racks 72, and the transmission gear 73 is meshed with the two racks 72 for transmission, and each transmission gear 73 is fixedly connected to the output shaft of the drive motor 74, and the two drive motors 74 are installed on the protective shell 10, and the two drive motors 74 are synchronously driven, thereby being able to enhance the meshing transmission drive of the transmission gear 73 to the rack 72.

[0025] Working principle: When the evaporation hole 8 needs to be cleaned, the driving motor 74 drives the transmission gear 73 to rotate, and then drives the racks 72 on both sides to slide along the slide rail 77, and then the gear plate 71 can be driven to rotate through the meshing transmission of the rack 72 and the gear plate 71, and then the rotating sleeve 5 is driven to rotate, and then the cleaning rod 6 is driven by the annular extension plate 9 on the top of the rotating sleeve 5 to slide along the inner wall of the evaporation hole 8 to clean it, thereby preventing the evaporation material from adhering to the inner wall of the evaporation hole 8 for a long time, thereby maintaining the evaporation rate and film formation uniformity, and improving production efficiency and product quality.

[0026] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, rather than to limit them. Although the embodiments of the present application are described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the technical solutions described in the above embodiments can still be modified, or some of the technical features can be replaced by equivalents, without departing from the spirit and scope defined by the claims of the present application.

Claims

1. A cleaning device for a evaporation line source crucible, comprising a crucible body (1), a line source crucible cover (2), a cleaning seat plate (3), a support tube (4), a rotating sleeve (5), a cleaning rod (6) and a driving assembly (7), characterized in that: A line source crucible cover (2) is arranged on the top of the crucible body (1), and a plurality of evaporation holes (8) are opened on the line source crucible cover (2) along its length direction. A cleaning seat plate (3) is installed on the top of the line source crucible cover (2), and a support tube (4) is vertically fixedly arranged on the cleaning seat plate (3) at the position corresponding to each of the evaporation holes (8), and each of the support tubes (4) is connected to the corresponding evaporation hole (8), and the inner diameter size of each of the support tubes (4) is consistent with the inner diameter size of the corresponding evaporation hole (8), and a rotating sleeve (5) is rotatably arranged on the outer side of each of the support tubes (4), and an annular extension plate (9) is fixedly arranged on the top of each of the rotating sleeves (5), and the inner diameter size of each of the annular extension plates (9) is consistent with the inner diameter size of the corresponding support tube (4), and each of the annular extension plates (9) is connected to the corresponding support tube (4). ) are vertically fixed with a cleaning rod (6), the lower end of the cleaning rod (6) extends to the position of the evaporation hole (8), and the cleaning rod (6) is in sliding contact with the inner wall of the evaporation hole (8), each of the rotating sleeves (5) is transmission-connected with a driving component (7), and the driving component (7) can drive the rotating sleeve (5) to rotate, thereby making the cleaning rod (6) slide along the inner wall of the evaporation hole (8), and the upper outer cover of the driving component (7) and the rotating sleeve (5) is provided with a protective shell (10), the protective shell (10) is fixedly connected to the cleaning seat plate (3), and a through hole (11) is opened on the protective shell (10) at the position corresponding to each of the evaporation holes (8), and the inner diameter size of each of the through holes (11) is consistent with the inner diameter size of the corresponding evaporation hole (8).

2. The cleaning device for a evaporation line source crucible according to claim 1, characterized in that: The driving assembly (7) comprises a gear plate (71), a rack (72), a transmission gear (73) and a driving motor (74); a gear plate (71) is fixedly sleeved on the outer wall of each rotating sleeve (5); racks (72) are symmetrically arranged on both sides of the gear plate (71); and the length direction of the two racks (72) is parallel to the length direction of the cleaning seat plate (3); and each gear plate (71) is meshed and transmission-connected with the racks (72) on both sides thereof; the two racks (72) are slidably arranged on the cleaning seat plate (3); a transmission gear (73) is arranged between the two racks (72); the transmission gear (73) meshes and transmits with the two racks (72); the transmission gear (73) is fixedly connected with the output shaft of the driving motor (74); and the driving motor (74) is mounted on the protective shell (10).

3. A cleaning device for a evaporation line source crucible according to claim 2, characterized in that: A connecting plate (75) is fixedly provided on the outer side of each rack (72), and a plurality of sliding blocks (76) are fixedly provided on the bottom of the connecting plate (75) along its length direction. Each sliding block (76) is slidably arranged on a slide rail (77), and the slide rail (77) is fixedly arranged on the cleaning seat plate (3), and the length direction of the slide rail (77) is parallel to the length direction of the cleaning seat plate (3).

4. The cleaning device for a evaporation line source crucible according to claim 2, characterized in that: The transmission gears (73) are provided at both ends between the two racks (72), each of the transmission gears (73) is fixedly connected to the output shaft of the drive motor (74), and the two drive motors (74) are synchronously driven.

5. The cleaning device for a evaporation line source crucible according to claim 1, characterized in that: The lower surface of the cleaning seat plate (3) is tightly fitted with the upper surface of the line source crucible cover (2), the top end surface of the support tube (4) is tightly fitted with the lower surface of the annular extension plate (9), the inner lower surface of the protective shell (10) is tightly fitted with the upper surface of the annular extension plate (9), and the evaporation hole (8), the support tube (4), the annular extension plate (9) and the through hole (11) are connected to form a continuous channel.

6. The cleaning device for a evaporation line source crucible according to claim 1, characterized in that: The rotating sleeve (5) and the supporting tube (4) are rotatably connected via a bearing.

7. The cleaning device for a evaporation line source crucible according to claim 1, characterized in that: Two cleaning rods (6) are symmetrically arranged on the inner side wall of the annular extension plate (9).

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