Wafer locking mechanism and wafer accommodating device

Abstract

The utility model provides a wafer lock catch mechanism and a wafer containing device, and relates to the technical field of wafer cassettes, the wafer lock catch mechanism comprises a lock catch shell, a magnetic lock cylinder and two magnetic core lock catch door plates, the lock catch shell is used for being arranged on a wafer cassette, and the lock catch shell is provided with a communication groove communicated to the inside of the wafer cassette; the two magnetic core lock catch door plates are oppositely arranged in the communicating groove and are connected to the inner side wall of the communicating groove; the magnetic lock cylinder is movably arranged in the magnetic core lock catch door plate and used for selectively locking the magnetic core lock catch door plate or unlocking the magnetic core lock catch door plate under the action of magnetic force. Compared with the prior art, the magnetic lock cylinder is used for locking or unlocking the magnetic core lock catch door plate, closing and opening of the opening of the wafer box are achieved, opening and closing can be achieved through magnetic force, opening and closing of the wafer box are achieved, wafers are very convenient to take and place, a mechanical lock and a key do not need to be used, and the situation that the wafer box cannot be opened is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer boxes, and more specifically, to a wafer locking mechanism and a wafer accommodating device. Background Art

[0002] With the rapid development of the semiconductor industry, wafers usually need to be processed. A wafer is a silicon wafer used in the production of semiconductor integrated circuits. Transistors are formed on the surface of the wafer in sequence to achieve processing. Wafers can be divided into 6-inch, 8-inch, 12-inch, etc. according to different sizes. The cost of manufacturing wafers is relatively high, so they are usually stored in a nitrogen cabinet. The nitrogen cabinet usually uses a mechanical lock to lock, but this way of locking the nitrogen cabinet brings great inconvenience in taking and placing, and once the key is forgotten, it cannot be opened. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a wafer locking mechanism and a wafer accommodating device, which can realize opening and closing by magnetic force, are very convenient for taking and placing wafers, and do not require the use of a mechanical lock and a key, avoiding the situation of being unable to open.

[0004] The embodiments of the utility model are implemented as follows:

[0005] In a first aspect, the utility model provides a wafer locking mechanism, including:

[0006] A lock housing, which is used to be arranged on the wafer box, and a communication groove communicating with the inside of the wafer box is arranged on the lock housing;

[0007] Two oppositely arranged magnetic core lock door panels, which are oppositely arranged in the communication groove and connected to the inner side wall of the communication groove;

[0008] A magnetic lock core, which is movably arranged in the magnetic core lock door panel and is used to selectively lock or unlock the magnetic core lock door panel under the action of magnetic force.

[0009] In an optional embodiment, the magnetic core lock door panel includes a door panel body, a fixed cross shaft and a rotating sleeve. The fixed cross shaft is fixedly connected to the inner side wall of the communication groove. The rotating sleeve is rotatably sleeved outside the fixed cross shaft. The door panel body is connected to the fixed cross shaft and can rotate relative to the fixed cross shaft driven by the fixed cross shaft. The magnetic lock core is movably arranged in the door panel body and selectively locks the rotating sleeve and the fixed cross shaft.

[0010] In an alternative embodiment, magnetic core receiving grooves are provided on both sides of the door panel body along the axial direction of the fixed horizontal shaft. Locking holes are correspondingly formed in the rotating sleeve, and locking grooves are correspondingly formed in the fixed horizontal shaft. The magnetic lock core is movably disposed in the magnetic core receiving groove and passes through the locking hole for selectively extending into the locking groove under the action of magnetic force.

[0011] In an alternative embodiment, the magnetic core receiving grooves on the two door panel bodies correspond to each other one by one, and the magnetic lock cores in the two door panels are used to repel each other so that the magnetic lock cores move away from each other and extend into the locking grooves.

[0012] In an alternative embodiment, positioning protrusions are provided at both ends of the fixed horizontal shaft, positioning grooves are formed on the opposite side walls of the communicating groove, and the positioning protrusions are correspondingly assembled in the positioning grooves so that the fixed horizontal shaft is fixed in the communicating groove.

[0013] In an alternative embodiment, the magnetic core lock and door panel further includes a magnetic core bushing. The magnetic core bushing is fixedly disposed in the door panel body and partially extends out of the door panel body to be connected to the rotating sleeve, and the magnetic lock core is movably received in the magnetic core bushing.

[0014] In an alternative embodiment, the outer peripheral surface of the cross-section of the rotating sleeve is in the shape of an eccentric wheel.

[0015] In an alternative embodiment, the communicating groove includes a first groove and a second groove that communicate with each other. The size of the first groove is larger than that of the second groove. The first groove communicates with the external space, and the second groove is used to communicate with the wafer cassette.

[0016] In an alternative embodiment, both the first groove and the second groove are rectangular, and the lock housing is circular.

[0017] In a second aspect, the present utility model provides a wafer accommodating device, including a wafer cassette and the wafer locking mechanism according to any one of the foregoing embodiments. The lock housing is disposed on one side of the wafer cassette.

[0018] The beneficial effects of the embodiments of the present utility model include:

[0019] The wafer locking mechanism and the wafer accommodating device provided by the embodiments of the present utility model are provided with a communication groove on the locking housing. Two magnetic core locking door panels are oppositely arranged in the communication groove and connected to the inner side wall of the communication groove. A magnetic lock core is movably arranged in the magnetic core locking door panel and can selectively lock or unlock the magnetic core locking door panel under the action of magnetic force. Compared with the prior art, the present utility model uses a magnetic lock core to lock or unlock the magnetic core locking door panel, realizes the closing and opening of the wafer box opening, can realize opening and closing by magnetic force, is very convenient for taking and placing wafers, and does not require the use of a mechanical lock and a key, avoiding the situation of being unable to open. Brief Description of the Drawings

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0021] Figure 1 Structural schematic diagram of the wafer locking mechanism provided by the embodiment of the present utility model;

[0022] Figure 2 Exploded structural schematic diagram of the wafer locking mechanism provided by the embodiment of the present utility model;

[0023] Figure 3 is Figure 2 Structural schematic diagram of the magnetic core locking door panel in

[0024] Figure 4 is Figure 2 Structural schematic diagram of the locking housing in

[0025] Figure 5 is Figure 2 Internal structural schematic diagram of the magnetic core locking door panel in

[0026] Figure 6 is Figure 2 Cross-sectional structural schematic diagram of the magnetic core locking door panel in

[0027] Reference Signs:

[0028] 100 - Wafer locking mechanism; 110 - Locking housing; 111 - Communication groove; 113 - Positioning groove; 115 - First groove; 117 - Second groove; 130 - Magnetic lock core; 150 - Magnetic core locking door panel; 151 - Door panel body; 153 - Fixed horizontal shaft; 1531 - Locking groove; 1533 - Positioning protrusion; 155 - Rotating sleeve; 157 - Locking hole; 159 - Magnetic core bushing. Detailed implementation manners

[0029] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0030] Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model claimed, but merely represents the selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0031] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0032] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship when the product of this utility model is normally placed. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0033] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0034] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0035] The first embodiment

[0036] Please refer to Figures 1 to 6 , the embodiment of the present utility model provides a wafer locking mechanism 100, which can realize opening and closing by magnetic force, realize the opening and closing of the wafer cassette, is very convenient for taking and placing wafers, and does not require the use of a mechanical lock and a key, avoiding the situation of being unable to open.

[0037] The wafer locking mechanism 100 provided by the embodiment of the present utility model includes a locking housing 110, a magnetic lock core 130, and two magnetic core locking door panels 150. The locking housing 110 is used to be arranged on the wafer cassette, and a communication groove 111 communicating with the inside of the wafer cassette is arranged on the locking housing 110; the two magnetic core locking door panels 150 are oppositely arranged in the communication groove 111 and connected to the inner side wall of the communication groove 111; the magnetic lock core 130 is movably arranged in the magnetic core locking door panel 150 and is used to selectively lock or unlock the magnetic core locking door panel 150 under the action of magnetic force.

[0038] It should be noted that during actual use, a magnetic component, such as a magnet, can be additionally designed on the robotic arm for transporting wafers, which can apply an external magnetic force, thereby controlling the position of the magnetic lock core 130 to realize locking or unlocking the magnetic core locking door panel 150. In this embodiment, a communication groove 111 is arranged on the locking housing 110, the two magnetic core locking door panels 150 are oppositely arranged in the communication groove 111 and connected to the inner side wall of the communication groove 111, and the magnetic lock core 130 is movably arranged in the magnetic core locking door panel 150, and can selectively lock or unlock the magnetic core locking door panel 150 under the action of magnetic force. Using the magnetic lock core 130 to lock or unlock the magnetic core locking door panel 150 realizes the closing and opening of the opening of the wafer cassette, can realize opening and closing by magnetic force, realizes the opening and closing of the wafer cassette, is very convenient for taking and placing wafers, and does not require the use of a mechanical lock and a key, avoiding the situation of being unable to open.

[0039] The magnetic core latch door panel 150 includes a door panel body 151, a fixed horizontal shaft 153, and a rotating sleeve 155. The fixed horizontal shaft 153 is fixedly connected to the inner side wall of the communication groove 111. The rotating sleeve 155 is rotatably sleeved outside the fixed horizontal shaft 153. The door panel body 151 is connected to the fixed horizontal shaft 153 and can rotate relative to the fixed horizontal shaft 153 driven by the fixed horizontal shaft 153. The magnetic lock core 130 is movably arranged in the door panel body 151 and selectively locks the rotating sleeve 155 and the fixed horizontal shaft 153. Specifically, the door panel body 151 is in the shape of a rectangular plate and exactly spliced to seal the communication groove 111. The rotating sleeves 155 are arranged on both sides of the door panel body 151 away from each other. The rotating sleeves 155 are respectively sleeved on the fixed horizontal shaft 153, so that the two door panel bodies 151 can rotate relative to the fixed horizontal shaft 153, and the rotating sleeve 155 and the fixed horizontal shaft 153 can be locked or unlocked by the magnetic lock core 130, thereby realizing the control of the positions of the two door panel bodies 151 and realizing the opening or closing action.

[0040] In this embodiment, magnetic core accommodation grooves are arranged on both sides of the door panel body 151 along the axial direction of the fixed horizontal shaft 153. Locking holes 157 are correspondingly opened on the rotating sleeve 155, and locking grooves 1531 are correspondingly opened on the fixed horizontal shaft 153. The magnetic lock core 130 is movably arranged in the magnetic core accommodation groove and passes through the locking holes 157 for selectively extending into the locking grooves 1531 under the action of magnetic force. Specifically, the extending direction of the magnetic core accommodation groove is perpendicular to the axial direction of the fixed horizontal shaft 153. The magnetic lock core 130 can move relatively in the magnetic core accommodation groove under the action of magnetic force and can just be locked into the locking groove 1531 after passing through the locking holes 157, thereby realizing the relative fixation between the fixed horizontal shaft 153 and the rotating sleeve 155.

[0041] In this embodiment, the magnetic core accommodation grooves on the two door panel bodies 151 correspond to each other one by one, and the magnetic lock cores 130 in the two door panels are used to repel each other so that the magnetic lock cores 130 move away from each other and extend into the locking grooves 1531. Specifically, in the absence of an external magnetic part, the magnetic lock cores 130 in the two door panels will apply magnetic force to each other due to the principle of like poles repelling, so that the two corresponding magnetic lock cores 130 move away from each other and respectively extend into the locking grooves 1531, realizing the locking of the entire magnetic core latch door panel 150. When there is an external magnetic part, the magnetic force of the external magnetic part dominates, and the two corresponding magnetic lock cores 130 will move towards each other and disengage from the locking grooves 1531, realizing unlocking.

[0042] In this embodiment, positioning bumps 1533 are provided at both ends of the fixed horizontal shaft 153, and positioning grooves 113 are formed on the opposite side walls of the communication groove 111. The positioning bumps 1533 are correspondingly assembled in the positioning grooves 113 so that the fixed horizontal shaft 153 is fixed in the communication groove 111. Specifically, the positioning bumps 1533 are integrally provided at both ends of the fixed horizontal shaft 153, and the positioning grooves 113 are provided on the corresponding inner side walls of the communication groove 111. The positioning bumps 1533 can be assembled in the corresponding positioning grooves 113 by applying pressure with an external force. Preferably, both the positioning bumps 1533 and the positioning grooves 113 can be rectangular structures, so as to prevent the fixed horizontal shaft 153 from rotating.

[0043] Furthermore, the magnetic core lock catch door panel 150 further includes a magnetic core bushing 159. The magnetic core bushing 159 is fixedly provided in the door panel body 151 and partially extends out of the door panel body 151 to be connected to the rotating sleeve 155. The magnetic lock core 130 is movably accommodated in the magnetic core bushing 159. Specifically, the magnetic core bushing 159 is fixedly provided in the magnetic core accommodating groove, fixedly connected to the rotating sleeve 155, and the magnetic core bushing 159 corresponds to the locking hole 157 on the rotating sleeve 155. The magnetic lock core 130 can be movably accommodated in the magnetic core bushing 159 and can move along the magnetic core bushing 159 under the action of magnetic force to achieve the locking or unlocking action.

[0044] In other preferred embodiments of the present utility model, the outer peripheral surface of the cross-section of the rotating sleeve 155 in this embodiment is in the shape of an eccentric wheel. By adopting the eccentric wheel-shaped rotating sleeve 155, when the door panel body 151 is in the locked state, the gap between the two door panels is minimized, and as the rotating sleeve 155 rotates, the width of the gap between the two door panel bodies 151 will increase accordingly, which is more conducive to quickly opening the door panel body 151.

[0045] In this embodiment, the communication groove 111 includes a first groove 115 and a second groove 117 that are interconnected. The size of the first groove 115 is larger than that of the second groove 117. The first groove 115 communicates with the external space, and the second groove 117 is used to communicate with the wafer cassette. Specifically, the first groove 115 and the second groove 117 are concentrically arranged, and the magnetic core lock catch door panel 150 is arranged in the first groove 115, which can ensure that the door panel body 151 completely blocks the second groove 117 to achieve locking and closing.

[0046] Preferably, both the first groove 115 and the second groove 117 are rectangular, and the lock catch housing 110 is circular. By adopting the rectangular structures of the first groove 115 and the second groove 117, the locking and closing action of the door panel body 151 can be ensured to be smoother and the blocking effect is better. By adopting the circular lock catch housing 110, while ensuring the structural strength, the size of the lock catch housing 110 can be minimized as much as possible, which is convenient for its installation on the wafer cassette.

[0047] In summary, the embodiment of the present utility model provides a wafer locking mechanism 100. A communication groove 111 is provided on the locking housing 110. Two magnetic core locking door panels 150 are oppositely arranged in the communication groove 111 and connected to the inner side wall of the communication groove 111. The magnetic lock core 130 is movably arranged in the magnetic core locking door panel 150 and can selectively lock or unlock the magnetic core locking door panel 150 under the action of magnetic force. Compared with the prior art, the present utility model uses the magnetic lock core 130 to lock or unlock the magnetic core locking door panel 150, realizes the closing and opening of the wafer cassette opening, can realize the opening and closing by magnetic force, is very convenient for taking and placing wafers, and does not need to use a mechanical lock and a key, avoiding the situation of being unable to open.

[0048] Second Embodiment

[0049] This embodiment provides a wafer accommodating device, which includes a wafer cassette and a wafer locking mechanism 100. The basic structure, principle and technical effects of the wafer locking mechanism 100 are the same as those of the first embodiment. For a brief description, for the parts not mentioned in this embodiment, reference can be made to the corresponding content in the first embodiment.

[0050] In this embodiment, the wafer accommodating device includes a wafer cassette and a wafer locking mechanism 100. The wafer locking mechanism 100 includes a locking housing 110, a magnetic lock core 130 and two magnetic core locking door panels 150. The locking housing 110 is used to be arranged on the wafer cassette, and a communication groove 111 communicating with the inside of the wafer cassette is provided on the locking housing 110; the two magnetic core locking door panels 150 are oppositely arranged in the communication groove 111 and connected to the inner side wall of the communication groove 111; the magnetic lock core 130 is movably arranged in the magnetic core locking door panel 150 and is used to selectively lock or unlock the magnetic core locking door panel 150 under the action of magnetic force. The locking housing 110 is arranged on one side of the wafer cassette.

[0051] In this embodiment, the wafer accommodating device further includes a robotic arm for transporting wafers. A magnetic member is further provided at the front end of the robotic arm. The magnetic core locking door panel 150 can be opened by magnetic force by using this magnetic member, and when the magnetic member moves away, the two magnetic core locking door panels can be closed and locked under the action of their own magnetic force.

[0052] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A wafer locking mechanism, characterized in that: include: A locking shell, used to be arranged on the wafer box, and the locking shell is provided with a connecting groove connected to the interior of the wafer box; Two magnetic core lock door plates, which are arranged opposite to each other in the connecting groove and connected to the inner side wall of the connecting groove; A magnetic lock core is movably arranged in the magnetic core lock door panel and is used to selectively lock or unlock the magnetic core lock door panel under the action of magnetic force.

2. The wafer locking mechanism according to claim 1, characterized in that: The magnetic core lock door panel includes a door panel body, a fixed transverse axis and a rotating sleeve. The fixed transverse axis is fixedly connected to the inner side wall of the connecting groove, and the rotating sleeve is rotatably mounted outside the fixed transverse axis. The door panel body is connected to the fixed transverse axis and can rotate relative to the fixed transverse axis driven by the fixed transverse axis. The magnetic lock core is movably arranged in the door panel body and selectively locks the rotating sleeve and the fixed transverse axis.

3. The wafer locking mechanism according to claim 2, characterized in that: The door panel body is provided with magnetic core accommodating grooves on both sides along the axial direction of the fixed horizontal axis, the rotating sleeve is correspondingly provided with a locking hole, and the fixed horizontal axis is correspondingly provided with a locking groove, the magnetic lock core is movably arranged in the magnetic core accommodating groove and passes through the locking hole, and is used to selectively extend into the locking groove under the action of magnetic force.

4. The wafer locking mechanism according to claim 3, characterized in that: The magnetic core accommodating grooves on the two door panel bodies correspond to each other one by one, and the magnetic lock cores in the two door panels are used to repel each other so that the magnetic lock cores move away from each other and extend into the locking grooves.

5. The wafer locking mechanism according to claim 2, characterized in that: Positioning protrusions are arranged at both ends of the fixed transverse axis, and positioning grooves are opened on the side walls opposite to the connecting groove. The positioning protrusions are correspondingly assembled in the positioning grooves to fix the fixed transverse axis in the connecting groove.

6. The wafer locking mechanism according to claim 2, characterized in that: The magnetic core lock door panel also includes a magnetic core sleeve, which is fixedly arranged in the door panel body and partially extends out of the door panel body to be connected with the rotating sleeve, and the magnetic lock core is movably accommodated in the magnetic core sleeve.

7. The wafer locking mechanism according to claim 2, characterized in that: The outer peripheral surface of the cross section of the rotating sleeve is in the shape of an eccentric wheel.

8. The wafer locking mechanism according to claim 1, characterized in that: The communicating groove comprises a first groove and a second groove communicating with each other, the size of the first groove is larger than the size of the second groove, the first groove is communicated with an external space, and the second groove is used to communicate with the wafer box.

9. The wafer locking mechanism according to claim 8, characterized in that: The first groove and the second groove are both rectangular, and the lock shell is circular.

10. A wafer receiving device, characterized in that: It comprises a wafer box and a wafer locking mechanism as described in any one of claims 1 to 9, wherein the locking shell is arranged on one side of the wafer box.

Images