Crystal bar feeding device

Abstract

The utility model discloses a crystal bar feeding device, which relates to the technical field of semiconductor substrate material manufacturing and comprises a device main body, a displacement driving mechanism and a carrier, the carrier is detachably mounted on the device main body in a sliding manner and is used for loading a crystal bar; the displacement driving mechanism is installed on the device body, connected with the carrier and used for driving the carrier to slide. The carrier is arranged on the device main body and connected with the displacement driving mechanism, and then the displacement driving mechanism drives the carrier to move back and forth, so that the carrier and the crystal bar can be arranged in the fretsaw cutting machine together, and the manual operation intensity is reduced. And after the carrier and the crystal bar are arranged in the fretsaw cutting machine, the connection between the carrier and the displacement driving mechanism can be released, so that the device main body is taken down, and the feeding is completed. According to the design, the feeding efficiency can be improved, the labor intensity of workers is reduced, and the operation safety is improved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor substrate material manufacturing, and particularly to a crystal bar loading device. Background Art

[0002] After the growth of gallium arsenide single crystal is completed to form a crystal bar, a crystal bar slicing process is required. However, generally, the weight of a grown crystal bar is about 20 KG, which has a relatively large weight. The traditional loading method is that an operator moves the crystal bar to a loading height of about 1.2 meters and then installs it on the loading tooling of a wire saw cutting machine. The whole process is laborious for personnel, and there is a risk of dropping, which is time-consuming and laborious and also has safety problems. Summary of the Utility Model

[0003] In view of this, the purpose of this application is to provide a crystal bar loading device to solve the technical problems of low efficiency and poor safety of the existing loading method.

[0004] To achieve the above technical purpose, this application provides a crystal bar loading device, including a device main body, a displacement driving mechanism, and a carrier;

[0005] The carrier is detachably and slidably installed on the device main body for loading crystal bars;

[0006] The displacement driving mechanism is installed on the device main body and is connected to the carrier for driving the carrier to slide.

[0007] Furthermore, a limiting through groove is provided on the device main body;

[0008] The limiting through groove penetrates the device main body in the thickness direction of the device main body, and one end extends out of one end of the device main body to form a through groove outlet for the carrier to extend out movably.

[0009] Furthermore, on the top of the device main body, track grooves are respectively provided at the edge positions on both sides of the limiting through groove;

[0010] A plurality of rolling members arranged in an array are installed on both of the two track grooves;

[0011] Extension flanges corresponding to the track grooves one by one are respectively provided on the top sides of both sides of the carrier;

[0012] The bottom surface of the extension flange is in rolling contact with the rolling member.

[0013] Furthermore, the rolling member is a rolling bearing and is installed on the side surface of the track groove.

[0014] Furthermore, a stop member for stopping the carrier from moving in the direction of extending out of the through groove outlet is detachably installed on the top of the device main body near the through groove outlet.

[0015] Further, there are two stoppers, which are symmetrically arranged with respect to the limiting through groove;

[0016] The stopper is a screw.

[0017] Further, a first connecting member is fixed to one end of the carrier away from the outlet of the through groove;

[0018] The displacement driving mechanism includes a linear displacement driver and a second connecting member;

[0019] The linear displacement driver is installed on the device main body, and the driving end is connected to the second connecting member;

[0020] The second connecting member is detachably connected to the first connecting member.

[0021] Further, there are two linear displacement drivers, which are symmetrically arranged in parallel with respect to the limiting through groove;

[0022] A fixing plate is connected between the driving ends of the two linear displacement drivers;

[0023] The second connecting member is installed on the fixing plate.

[0024] Further, the first connecting member is a rod structure;

[0025] A clamping groove is provided on the first connecting member;

[0026] The second connecting member includes a connecting seat and a clamping block;

[0027] A avoiding groove for the first connecting member to extend into or pass through is provided at the top of the connecting seat;

[0028] Insertion holes are symmetrically formed on both sides of the avoiding groove at the top of the connecting seat;

[0029] Insertion posts corresponding to and inserted into the insertion holes are fixed at the bottom of the clamping block;

[0030] The clamping block can be clamped into the clamping groove to fix the first connecting member and the second connecting member together.

[0031] Further, the top of the clamping block on the device main body is a hook-shaped structure.

[0032] As can be seen from the above technical solutions, when the ingot loading device designed in this application is used: First, the ingot is fixed on the carrier through adhesive materials such as glue, then the carrier is installed on the device main body and connected to the displacement driving mechanism, and then the displacement driving mechanism is used to drive the carrier to move back and forth, so that the carrier and the ingot can be loaded into the wire saw cutting machine together, reducing the manual operation intensity. After the carrier and the ingot are loaded into the wire saw cutting machine, the connection between the carrier and the displacement driving mechanism can be released, and then the device main body can be removed to complete the loading. After the ingot cutting process is completed, the displacement driving mechanism on the device main body is connected to the carrier again, and the carrier is driven to move to take out the carrier and the ingot from the wire saw cutting machine. The above design can improve the loading efficiency, reduce the labor intensity of personnel, and improve the operation safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 is a three-dimensional view of an ingot loading device provided in the present application;

[0035] Figure 2 is a three-dimensional view of the cooperation between the carrier and the ingot of an ingot loading device provided in the present application;

[0036] Figure 3 is a three-dimensional view of the cooperation between the device main body and the displacement driving mechanism of an ingot loading device provided in the present application;

[0037] Figure 4 is a three-dimensional view of the cooperation between the displacement driving mechanism and the first connecting member of an ingot loading device provided in the present application;

[0038] Figure 5 is a partial structural cross-sectional view of an ingot loading device provided in the present application;

[0039] Figure 6 is a partial structural three-dimensional view of an ingot loading device provided in the present application;

[0040] In the figure: 1. Device main body; 11. Limit through groove; 111. Through groove outlet; 12. Track groove; 13. Rolling member; 14. Stopper; 2. Carrier; 21. Extension flange; 22. First connecting member; 23. Card slot; 3. Displacement driving mechanism; 31. Linear displacement driver; 311. Slide block; 32. Second connecting member; 321. Connecting seat; 322. Clamping block; 323. Avoidance groove; 324. Insertion hole; 325. Insertion post; 33. Fixed plate; 4. Crystal bar. Detailed implementation manner

[0041] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the embodiments of the present application.

[0042] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0043] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0044] The embodiments of the present application disclose a crystal bar loading device.

[0045] Please refer to Figure 1 and Figure 2 One embodiment of a crystal bar loading device provided in the embodiments of the present application includes:

[0046] Device main body 1, displacement driving mechanism 3, and carrier 2.

[0047] The carrier 2 is detachably and slidably mounted on the device main body 1 for loading the ingot 4. The loading method is to fix the main ingot 4 to be processed with an adhesive material such as glue. Specifically, the ingot 4 is fixed to the bottom of itself. To better install the ingot 4, the bottom of the carrier 2 is provided with an arc surface that fits the ingot 4, and the structure of the carrier 2 itself can be designed to vary according to actual needs without limitation.

[0048] The displacement driving mechanism 3 is mounted on the device main body 1 and connected to the carrier 2 for driving the carrier 2 to slide.

[0049] During use: First, the ingot 4 is fixed to the carrier 2 with an adhesive material such as glue. Then, the carrier 2 is installed on the device main body 1 and connected to the displacement driving mechanism 3. After that, the device main body 1 can be lifted by a lifting device to the required loading height corresponding to the wire saw cutting machine. Then, the displacement driving mechanism 3 is used to drive the carrier 2 to move back and forth, so that the carrier 2 and the ingot 4 can be loaded into the wire saw cutting machine together, reducing the manual operation intensity. After the carrier 2 and the ingot 4 are loaded into the wire saw cutting machine, the connection between the carrier 2 and the displacement driving mechanism 3 can be released, and then the device main body 1 can be removed to complete the loading. After the cutting process of the ingot 4 is completed, the displacement driving mechanism 3 on the device main body 1 is connected to the carrier 2 again, and the carrier 2 is driven to move to take out the carrier 2 and the ingot 4 from the wire saw cutting machine. The above design can improve the loading efficiency, reduce the labor intensity of personnel, improve the operation safety, and avoid the material from falling and injuring the operators.

[0050] The above is the first embodiment of a crystal ingot loading device provided by this application. The following is the second embodiment of a crystal ingot loading device provided by this application. For details, please refer to Figures 1 to 6 。

[0051] Based on the solution of the first embodiment above:

[0052] Further, as Figure 3 shown, a limiting through groove 11 is provided on the device main body 1. The limiting through groove 11 penetrates the device main body 1 in the thickness direction of the device main body 1, and one end extends out of one end of the device main body 1 to form a through groove outlet 111 for the carrier 2 to extend out, so as to facilitate the loading of the carrier 2 and play a limiting role in the sliding of the carrier 2, realizing the stable sliding of the carrier 2 on the device main body 1.

[0053] Further, as Figure 3 shown, in order to better realize the sliding fit between the carrier 2 and the device main body 1, the device main body 1 is provided with track grooves 12 at both side edges of the limiting through groove 11 at the top, and a plurality of rolling elements 13 arranged in an array are installed on both track grooves 12.

[0054] On both sides of the top of the vehicle 2, there are extension flanges 21 corresponding to the track grooves 12 one by one. The bottom surface of the extension flange 21 is in rolling contact with the rolling element 13. The rolling contact and cooperation between the extension flange 21 and the rolling element 13 are used to achieve the sliding fit between the vehicle 2 and the device main body 1, reduce the contact friction force, and improve the sliding smoothness.

[0055] Further, the rolling element 13 can be designed as a rolling bearing and is specifically installed on the side of the track groove 12. Of course, it can also be other rolling structures such as rollers, without limitation.

[0056] Further, as Figure 3 shown, in order to prevent the vehicle 2 installed on the device main body 1 from disengaging from the through slot outlet 111 during the feeding preparation, in this application, a stop member 14 for stopping the vehicle 2 from moving in the direction of extending out of the through slot outlet 111 is detachably installed at the top of the device main body 1 near the through slot outlet 111.

[0057] Further, in order to improve the stopping effect, the stop member 14 is designed as two, symmetrically arranged with respect to the limit through slot 11. Specifically, the stop member 14 can be designed as a screw. When feeding, the screw can be removed to ensure that the vehicle 2 can smoothly feed the ingot 4 to the wire sawing machine. It is convenient to use as a whole, and it can also be a structure such as a bolt, without specific limitation.

[0058] Further, as Figure 2 shown, in order to facilitate the connection between the vehicle 2 and the displacement driving mechanism 3, a first connecting member 22 is fixed at one end of the vehicle 2 away from the through slot outlet 111.

[0059] As Figure 4 shown, the displacement driving mechanism 3 includes a linear displacement driver 31 and a second connecting member 32.

[0060] The linear displacement driver 31 is installed on the device main body 1. Specifically, it can be a driving module such as a cylinder slide table or a rodless cylinder. Taking the rodless cylinder as an example, its driving end, that is, the slider 311, is specifically connected to the second connecting member 32, and the second connecting member 32 is detachably connected to the first connecting member 22. The limit displacement driver drives the second connecting member 32 to move, and then drives the first connecting member 22 to move, so as to synchronously drive the vehicle 2 to move.

[0061] Further, in order to achieve more stable driving control, there are two linear displacement drivers 31, symmetrically arranged in parallel with respect to the limit through slot 11. A fixing plate 33 is connected between the driving ends of the two linear displacement drivers 31, and the second connecting member 32 is installed on the fixing plate 33.

[0062] Further, as Figures 4 to 6As shown, the first connecting member 22 is a rod structure and can be a threaded rod, which is fixed to the vehicle 2 by means of threaded connection, facilitating disassembly and replacement, and there is no specific limitation in this regard.

[0063] A clamping groove 23 is provided on the first connecting member 22, and the clamping groove 23 can be an annular clamping groove 23.

[0064] The second connecting member 32 includes a connecting seat 321 and a clamping block 322. An avoidance groove 323 for the first connecting member 22 to extend into or pass through is provided at the top of the connecting seat 321, and at least one end of the avoidance groove 323 extends out of the side surface of the connecting seat 321 to facilitate the first connecting member 22 to extend in.

[0065] Insertion holes 324 are symmetrically formed on both sides of the avoidance groove 323 at the top of the connecting seat 321, and insertion posts 325 that are correspondingly inserted into the insertion holes 324 are fixed to the bottom of the clamping block 322.

[0066] The clamping block 322 can be clamped into the clamping groove 23 to fix the first connecting member 22 and the second connecting member 32 together.

[0067] When the vehicle 2 is pushed along the limit through groove 11 into place until the clamping groove 23 corresponds to the position of the insertion hole 324, the insertion post 325 and the insertion hole 324 can be aligned, and the clamping block 322 is inserted onto the connecting seat 321. When inserted in place, the bottom of the clamping block 322 is correspondingly clamped into the clamping groove 23, thereby restricting the first connecting member 22 and realizing the fixed connection between the first connecting member 22 and the second connecting member 32. When canceling the connection, only the clamping block 322 needs to be pulled out, and the operation is convenient. In order to better realize the engagement between the clamping block 322 and the clamping groove 23, an arc surface adapted to the annular groove is provided at the bottom of the clamping block 322, so that it can better fit with the clamping groove 23 after being clamped into the clamping groove 23, and there is no specific limitation in this regard.

[0068] Furthermore, the top of the clamping block 322 on the device main body 1 is a hook-shaped structure to facilitate pulling out the clamping block 322.

[0069] In this application, the connecting seat 321 can be fixed to the fixing plate 33 by fasteners such as bolts, and there is no limitation in this regard.

[0070] The process of using the ingot 4 loading device designed in this application is as follows:

[0071] 1. The ingot 4 is fixed to the vehicle 2, and then the vehicle 2 is loaded into the device main body 1 to realize rolling contact with the rolling members 13 on the device main body 1;

[0072] 2. Install the stop member 14 to prevent the vehicle 2 from sliding out;

[0073] 3. Insert the clamping block 322 on the connecting seat 321 and make the clamping block 322 be clamped into the clamping groove 23 of the first connecting member 22 to realize the connection and fixation with the first connecting member 22;

[0074] 4. Remove the stopper 14, and control the linear drive to drive the carrier 2 to slide. This sliding direction can be set as the X-axis direction, that is, to achieve the sliding control along the X-axis direction, and realize the feeding to the wire saw cutting machine by driving the carrier 2 to slide;

[0075] 5. After the carrier 2 and the ingot 4 are loaded into the wire saw cutting machine, the connection between the carrier 2 and the displacement drive mechanism 3 can be released, so as to remove the device main body 1 and complete the feeding.

[0076] The above has introduced in detail a kind of ingot feeding device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A crystal rod feeding device, characterized in that: It comprises a device body (1), a displacement driving mechanism (3) and a carrier (2); The carrier (2) is detachably and slidably mounted on the device body (1) and is used to load the crystal rod (4); The displacement driving mechanism (3) is installed on the device body (1) and connected to the carrier (2) to drive the carrier (2) to slide.

2. The crystal rod loading device according to claim 1, characterized in that: The device body (1) is provided with a limiting through slot (11); The limiting through slot (11) penetrates the device body (1) in the thickness direction of the device body (1), and one end extends out of one end of the device body (1) to form a through slot outlet (111) for the carrier (2) to movably extend out.

3. The crystal rod loading device according to claim 2, characterized in that: The device body (1) is provided with track grooves (12) at the top and at the edges of both sides of the limiting groove (11); A plurality of rolling elements (13) arranged in an array are installed on each of the two track grooves (12); The tops of the two side surfaces of the top of the carrier (2) are respectively provided with extension flanges (21) corresponding one to one with the track grooves (12); The bottom surface of the extended flange (21) is in rolling contact with the rolling element (13).

4. The crystal rod loading device according to claim 3, characterized in that: The rolling element (13) is a rolling bearing, which is installed on the side of the track groove (12).

5. The crystal rod loading device according to claim 2, characterized in that: A stopper (14) for stopping the carrier (2) from moving in a direction extending out of the through slot outlet (111) is detachably mounted on the top of the device body (1) at a position close to the through slot outlet (111).

6. The crystal rod loading device according to claim 5, characterized in that: There are two stoppers (14), which are symmetrically arranged relative to the limiting through slot (11); The stopper (14) is a screw.

7. The crystal rod loading device according to claim 2, characterized in that: A first connecting member (22) is fixed to one end of the carrier (2) away from the through slot outlet (111); The displacement drive mechanism (3) comprises a linear displacement driver (31) and a second connecting member (32); The linear displacement driver (31) is installed on the device body (1), and the driving end is connected to the second connecting member (32); The second connecting member (32) is detachably connected to the first connecting member (22).

8. The crystal rod loading device according to claim 7, characterized in that: There are two linear displacement drivers (31), which are arranged in parallel and symmetrically with respect to the limiting through slot (11); A fixing plate (33) is connected between the driving ends of the two linear displacement drivers (31); The second connecting member (32) is mounted on the fixing plate (33).

9. The crystal rod loading device according to claim 7, characterized in that: The first connecting member (22) is a rod structure; The first connecting member (22) is provided with a slot (23); The second connecting member (32) comprises a connecting seat (321) and a clamping block (322); The top of the connecting seat (321) is provided with an avoidance groove (323) for the first connecting member (22) to extend into or pass through; The top of the connection seat (321) is symmetrically provided with insertion holes (324) on both sides of the avoidance groove (323); The bottom of the block (322) is fixed with a plug post (325) which is inserted into the plug hole (324) in a one-to-one correspondence; The clamping block (322) can be clamped into the clamping slot (23) to fix the first connecting member (22) and the second connecting member (32) together.

10. The crystal rod loading device according to claim 9, characterized in that: The top of the clamping block (322) on the device body (1) is a hook-shaped structure.

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