Anti-shielding graphite boat sensor assembly

Abstract

The utility model discloses an anti-shielding graphite boat inductor assembly, which comprises a shell and an inductor, a linear lifting device is fixed in the shell, a mounting plate is fixed at the lifting end of the linear lifting device, the inductor is fixed at the top of the mounting plate, a gas ejector pipe is fixed on one side of the shell and is connected with a gas supply device, and the gas supply device is connected with the linear lifting device. And the gas spraying pipe is used for spraying gas flow to the surface of the graphite boat tray. Compared with the prior art, the linear lifting device can drive the inductor to rise, the gas supply device can spray gas through the gas spraying pipe, fragments, close to the inductor, on the top of the tray are blown away, and the situation that the state of the graphite boat is lost due to the fact that the fragments shield the inductor is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer coating, and particularly relates to an anti-blocking graphite boat inductor assembly. Background Art

[0002] With the development of the photovoltaic industry, the thinning of silicon wafers has become a trend. When depositing a film on a silicon wafer by plasma enhanced chemical vapor deposition (PECVD), obvious differences in specific surface area may be caused by differences in the microscopic structure of the silicon wafer surface, which in turn affects the uniformity of the film, indirectly increasing the risk of fragmentation. Moreover, poor electrical and thermal conductivity and uneven reaction temperature will also affect the uniformity of the film layer, further affecting the structural stability of the silicon wafer and increasing the risk of fragmentation. Therefore, when a manipulator takes out a graphite boat loaded with silicon wafers from a coating device and places it on a tray, the silicon wafer fragments generated in the graphite boat will fall onto the tray.

[0003] When there are too many fragments falling on the tray, the fragments will block the inductor for detecting the presence of the graphite boat, resulting in the loss of the graphite boat status. It is necessary to re-set the status of the graphite boat after initializing the whole machine, which affects the processing efficiency. Content of the Utility Model

[0004] The main purpose of the utility model is to provide an anti-blocking graphite boat inductor assembly. The linear lifting device can drive the inductor to rise, and the air supply device can eject gas through a spray pipe to blow away the fragments near the inductor on the top of the tray, avoiding the loss of the graphite boat status caused by fragment blocking of the inductor.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] An anti-blocking graphite boat inductor assembly, comprising a housing and an inductor. A linear lifting device is fixed inside the housing. The lifting end of the linear lifting device is fixed with a mounting plate, and the inductor is fixed on the top of the mounting plate. One side of the housing is fixed with a spray pipe for ejecting an air flow to the top of the graphite boat tray. The spray pipe is connected to an air supply device through a pipeline, and the spray pipe is used for ejecting an air flow to the surface of the graphite boat tray.

[0007] Further, a plurality of spray holes are equidistantly arranged on the spray pipe, and the height of the spray holes is the same as the height of the contact surface between the mounting plate and the housing.

[0008] Further, the housing is vertically through, and the linear lifting device is a cylinder or an electric cylinder.

[0009] Further, the air supply device is an air pump.

[0010] Further, a plurality of cable limiting devices are also arranged on the housing.

[0011] Further, the cable limiting device includes a U-shaped plate fixed to the housing, and limiting screws are threadedly connected to two opposite sides of the U-shaped plate.

[0012] Further, a connecting plate is fixed to the bottom of the other side of the housing.

[0013] Further, the inductor is a proximity sensor.

[0014] Compared with the prior art, the present utility model has the following beneficial effects:

[0015] The linear lifting device of the present utility model can drive the inductor to rise, and the air supply device can eject gas through the air injection pipe to blow away the debris near the inductor on the top of the tray, avoiding the loss of the state of the graphite boat caused by the debris blocking the inductor.

[0016] The data cable of the inductor of the present utility model will be sorted and limited by the cable limiting device, avoiding the mess of the data cable and ensuring that the data cable will not be pulled apart when the inductor rises and falls.

[0017] The limiting screw of the present utility model can be disassembled from the U-shaped plate, so that the data cable can be taken out of the cable limiting device without disconnecting the data cable from the inductor. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is an overall schematic diagram of an anti-blocking graphite boat inductor assembly of the present utility model.

[0019] Figure 2 is an exploded schematic diagram of the housing, the linear lifting device and the mounting plate of an anti-blocking graphite boat inductor assembly of the present utility model.

[0020] Figure 3 is a schematic diagram of the structure of the air injection pipe of an anti-blocking graphite boat inductor assembly of the present utility model.

[0021] Figure 4 is a schematic diagram of the structure of the cable limiting device of an anti-blocking graphite boat inductor assembly of the present utility model.

[0022] In the figure: 1, housing; 201, air injection pipe; 2011, air injection hole; 203, air supply device; 3, cable limiting device; 301, U-shaped plate; 302, limiting screw; 4, connecting plate; 5, mounting plate; 6, inductor; 7, linear lifting device. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0024] As Figures 1-4As shown in the figure, an anti-blocking graphite boat inductor assembly includes a housing 1 and an inductor 6. A linear lifting device 7 is fixed inside the housing 1. The lifting end of the linear lifting device 7 is fixed with a mounting plate 5, and the inductor 6 is fixed on the top of the mounting plate 5. A jet pipe 201 is fixed on one side of the housing 1. The jet pipe 201 is connected to a gas supply device 203. The jet pipe 201 is used to eject an air flow onto the surface of the graphite boat tray. The linear lifting device 7 is a cylinder or an electric cylinder, the gas supply device 203 is an air pump, and the inductor 6 is a proximity sensor, which is connected to the controller of the manipulator. This is the prior art and will not be elaborated here.

[0025] In this embodiment, as Figure 1 and Figure 2 shown, when the debris on the tray is about to cover the inductor 6, the operator should control the linear lifting device 7 to work, so that its output end drives the mounting plate 5 and the inductor 6 to rise, so that there is a gap between the mounting plate 5 and the housing 1. Then, control the gas supply device 203 to work, which can deliver gas into the jet pipe 201. And, as Figure 1 and Figure 3 shown, a plurality of jet holes 2011 are equidistantly arranged on the jet pipe 201. The height of the jet holes 2011 is the same as the height of the contact surface between the mounting plate 5 and the housing 1. Therefore, the gas in the jet pipe 201 can blow air onto the top surface of the tray through the jet holes 2011, so as to blow away and clean the debris on the top of the tray through the flow of the gas, and avoid the debris from blocking the inductor 6.

[0026] Among them, as Figure 2 shown, the housing 1 is vertically through. A connecting plate 4 is fixed to the bottom of the other side of the housing 1. The housing 1 is connected and fixed to the tray of the graphite boat through the connecting plate 4. After fixation, the housing 1 is located on the side of the tray and is vertically through, which is convenient for wire routing.

[0027] Among them, as Figure 1 and Figure 4 shown, several cable limiting devices 3 are also provided on the housing 1. The cable limiting device 3 includes a U-shaped plate 301 fixed on the housing 1. Limiting screws 302 are threadedly connected to two opposite sides of the U-shaped plate 301. A limiting groove is formed between the limiting screws 302 and the U-shaped plate 301. The data cable of the inductor 6 passes through this limiting groove, so as to avoid the data cable from being messy, and further ensure that when the inductor 6 rises and falls, its data cable will not be pulled and disconnected.

[0028] Working principle: First, connect and fix the housing 1 to the tray of the graphite boat through the connecting plate 4, and ensure that the air injection holes 2011 of the air injection pipe 201 are aligned with the top of the tray. Next, when the debris on the tray is about to cover the sensor 6, the operator should control the linear lifting device 7 to work, so that its output end drives the sensor 6 to rise, thereby leaving a gap between the mounting plate 5 and the housing 1. Then, control the air supply device 203 to work, which can transport gas into the air injection pipe 201, and the gas will be blown out through the air injection holes 2011 of the air injection pipe 201, so as to blow away the debris near the sensor 6 on the top of the tray, avoiding the loss of the state of the graphite boat caused by the debris blocking the sensor 6. And after the cleaning is completed, the linear lifting device 7 drives the sensor 6 to reset for subsequent use.

[0029] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An anti-shielding graphite boat sensor assembly, comprising a housing (1) and a sensor (6), characterized in that: A linear lifting device (7) is fixed in the shell (1), a mounting plate (5) is fixed to the lifting end of the linear lifting device (7), a sensor (6) is fixed to the top of the mounting plate (5), and an air jet pipe (201) for jetting air toward the top of the graphite boat tray is fixed to one side of the shell (1), and the air jet pipe (201) is connected to an air supply device (203) via a pipeline.

2. The anti-shielding graphite boat sensor assembly according to claim 1, characterized in that: The air injection pipe (201) is provided with a plurality of air injection holes (2011) at equal intervals, and the height of the air injection holes (2011) is the same as the height of the contact surface between the mounting plate (5) and the housing (1).

3. The anti-shielding graphite boat sensor assembly according to claim 2, characterized in that: The housing (1) is connected vertically, and the linear lifting device (7) is a pneumatic cylinder or an electric cylinder.

4. The anti-shielding graphite boat sensor assembly according to claim 1, characterized in that: The air supply device (203) is an air pump.

5. An anti-shielding graphite boat sensor assembly according to any one of claims 1 to 4, characterized in that: A plurality of cable limiting devices (3) are also provided on the housing (1).

6. The anti-shielding graphite boat sensor assembly according to claim 5, characterized in that: The cable limiting device (3) comprises a U-shaped plate (301) fixed on the housing (1), and two opposite side surfaces of the U-shaped plate (301) are threadedly connected to limiting screws (302).

7. The anti-shielding graphite boat sensor assembly according to claim 6, characterized in that: A connecting plate (4) is fixed to the bottom of the other side of the housing (1).

8. The anti-shielding graphite boat sensor assembly according to claim 1, characterized in that: The sensor (6) is a proximity sensor.

Images