Coating device

Abstract

The utility model discloses a coating device. The coating device comprises a carrying table body, a plurality of air holes are formed in the carrying table body; the clamping mechanism is suitable for clamping a substrate to be coated on the carrying table body so as to carry out positioning adjustment; the adjusting end of the jacking mechanism has a movable state in which the adjusting end ascends to be higher than the upper surface of the carrying table body so as to abut against and support the to-be-coated substrate, and a hidden state in which the adjusting end descends to be lower than the upper surface of the carrying table body so as to place the to-be-coated substrate; the air holes have an air floating state for carrying out suspension support on the to-be-coated substrate and a fixing state for adsorbing the to-be-coated substrate; when the adjusting end of the jacking mechanism is switched from a movable state to a hidden state and the substrate to be coated is adjusted, each air hole is in an air floating state; and after the to-be-coated substrate is adjusted, each air hole is switched from the air floating state to the fixed state. The technical problems that a to-be-coated substrate is difficult to correct by an existing coating machine, and the to-be-coated substrate is damaged due to friction caused by movement of the to-be-coated substrate attached to a coating platform are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines and coating machine accessories, and particularly relates to a coating device. Background Art

[0002] As a precise wet coating technology, the working principle of slit extrusion coating is that the slurry is extruded and sprayed along the slit of the coating die head under a certain pressure and flow rate and then transferred to the substrate. Compared with other coating methods, it has many advantages, such as high coating speed, high precision, uniform wet thickness, a closed coating system, which can prevent pollutants from entering during the coating process, high slurry utilization rate, can maintain the stability of slurry properties, and can adapt to different slurry viscosities and solid content ranges.

[0003] Existing coating machines usually include a coating platform and a positioning and transplanting mechanism. During the coating process, the substrate to be coated needs to be first transferred to the coating platform of the coating machine by a manipulator or other means, and then the substrate to be coated is moved by the positioning and transplanting mechanism for calibration. During the calibration process, since the substrate to be coated lands on the coating platform, adsorption is formed between the substrate to be coated and the coating platform due to the increased contact area, which leads to an increase in the resistance of the positioning and transplanting mechanism to move the substrate to be coated, increasing the calibration difficulty. Moreover, when the substrate to be coated moves while adhering to the coating platform, it is easy to cause friction and damage between the back surface of the substrate to be coated and the coating platform. Summary of the Utility Model

[0004] The utility model provides a coating device, which solves the technical problems that during the calibration of the substrate to be coated by the existing coating machine, since the substrate to be coated lands on the coating platform, adsorption is formed between the substrate to be coated and the coating platform due to the increased contact area, which leads to an increase in the resistance of the positioning and transplanting mechanism to move the substrate to be coated, increasing the calibration difficulty, and when the substrate to be coated moves while adhering to the coating platform, it is easy to cause friction and damage between the back surface of the substrate to be coated and the coating platform.

[0005] In view of this, the utility model provides a coating device, comprising:

[0006] A stage body, adapted to place the substrate to be coated; a plurality of air holes are provided on the stage body, and the air holes are adapted to communicate with an external gas source device;

[0007] A clamping mechanism, arranged on the periphery of the stage body, adapted to clamp the substrate to be coated on the stage body for positioning adjustment;

[0008] The lifting mechanism is arranged on the carrier body; the adjusting end of the lifting mechanism has an active state of rising vertically above the upper surface of the carrier body to abut against and support the substrate to be coated, and a hidden state of descending below the upper surface of the carrier body to place the substrate to be coated; the adjusting end of the lifting mechanism is set to switch between the active state and the hidden state, and is adapted to receive the substrate to be coated and move it onto the carrier body;

[0009] The air holes have an air floating state in which positive pressure blowing is provided by an external air source device to suspend and support the substrate to be coated through air flow, and a fixed state in which negative pressure suction is provided to adsorb the substrate to be coated; when the adjusting end of the lifting mechanism switches from the active state to the hidden state and the clamping mechanism adjusts the substrate to be coated, each air hole is in the air floating state; after the clamping mechanism completes the adjustment of the substrate to be coated, each air hole switches from the air floating state to the fixed state.

[0010] Optionally, a plurality of the air holes are uniformly arranged on the carrier body.

[0011] Optionally, the clamping mechanism includes at least one group of first positioning components, and each group of first positioning components includes two positioning modules;

[0012] The two positioning modules in each group of first positioning components are symmetrically arranged on both sides of the carrier body along its width direction, and the two positioning modules are adapted to abut against and clamp both sides of the substrate to be coated in the width direction of the carrier body for positioning adjustment.

[0013] Optionally, the clamping mechanism further includes at least one group of second positioning components, and each group of second positioning components includes two positioning modules;

[0014] The two positioning modules in each group of second positioning components are symmetrically arranged on both sides of the carrier body along its length direction, and the two positioning modules are adapted to abut against and clamp both sides of the substrate to be coated in the length direction of the carrier body for positioning adjustment.

[0015] Optionally, there are two groups of the first positioning components, and the two groups of the first positioning components are arranged at intervals; there are two groups of the second positioning components, and the two groups of the second positioning components are arranged at intervals.

[0016] Optionally, the positioning module includes a driving member, a telescopic member, a connecting plate and a positioning stopper; the driving member is arranged on the periphery of the carrier body; a groove is provided on the carrier body corresponding to each positioning module;

[0017] The connecting plate is horizontally arranged; one end of the connecting plate is connected to the output end of the driving member, and the other end is connected to the telescopic member, and is adapted to be driven by the driving member to rotate in the groove;

[0018] The positioning stop block is connected to the output end of the telescopic member, and is adapted to be driven by the telescopic member to rise or fall in the vertical direction to a position higher than the upper surface of the carrier body or lower than the upper surface of the carrier body;

[0019] When the positioning stop block rises to a position higher than the upper surface of the carrier body, the positioning stop block has a first position where it is driven by the driving member to rotate towards one side of the carrier body to abut against the peripheral side of the substrate to be coated, and a second position where it rotates towards the side away from the carrier body to be spaced from the substrate to be coated.

[0020] Optionally, a baffle is provided on each side of the carrier body; the baffle is located above the positioning module, and the top of the baffle is lower than the upper surface of the carrier body; an arc-shaped opening is provided on the baffle corresponding to each positioning module; the radius of the arc-shaped opening is greater than the maximum rotation radius of the telescopic member and the positioning stop block.

[0021] Optionally, an installation cover is provided on each side of the carrier body, and the installation cover is adapted to cover all the positioning modules on the same side of the carrier body; a slot is provided at the top of the installation cover corresponding to the baffle.

[0022] Optionally, the lifting mechanism includes:

[0023] A lifting assembly, arranged at the bottom of the carrier body;

[0024] Multiple ejector pins, arranged in the vertical direction and drivingly connected to the output end of the lifting assembly, and adapted to be driven by the lifting assembly to reciprocate in the vertical direction;

[0025] Wherein, a plurality of through holes are vertically penetrated through the carrier body, and each ejector pin is correspondingly inserted into one of the through holes; the ejector pin has an active state where it is driven by the lifting assembly to rise in the vertical direction to a position higher than the upper surface of the carrier body to abut against and support the substrate to be coated, and a hidden state where it descends to a position lower than the upper surface of the carrier body to place the substrate to be coated.

[0026] Optionally, the multiple ejector pins are evenly arranged in the horizontal direction.

[0027] The technical solution of the present utility model has the following advantages:

[0028] 1. The utility model generates air flow by blowing air through multiple air holes, and cooperates with the lifting mechanism to receive the substrate to be coated, lower it, abut and support the substrate to be coated to float to a preset height, avoiding the adsorption resistance and friction generated by the contact between the substrate to be coated and the carrier body. Furthermore, it is convenient for the clamping mechanism to drive the substrate to be coated to move, and avoid damage to the substrate to be coated during the calibration process of the clamping mechanism, improving the calibration accuracy;

[0029] 2. The utility model successively sucks and blows air through all the air holes on the middle carrier body, so that the air-floating position of the substrate to be coated after calibration overlaps with the position adsorbed and fixed on the carrier body after calibration in the up-down direction projection, which is beneficial to ensuring the consistency of the position of the substrate to be coated. The same air hole realizes the air-floating and adsorption functions, without the need to additionally provide separate air blowing holes or air suction holes, reducing costs;

[0030] 3. The utility model receives the substrate to be coated through the lifting mechanism, so as to slowly place the substrate to be coated on the carrier body, reducing the risk of damage to the substrate to be coated caused by placing it through a manipulator or other means; after the coating is completed, the coated substrate can be lifted by the lifting mechanism, facilitating taking. Description of the Drawings

[0031] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required to be used in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0032] Figure 1 Structural schematic diagram of the coating device provided by the present utility model from the first perspective;

[0033] Figure 2 Structural schematic diagram of the coating device provided by the present utility model from the second perspective;

[0034] Figure 3 Structural schematic diagram of the coating device provided by the present utility model from the third perspective;

[0035] Figure 4 Structural schematic diagram of the positioning module provided by the present utility model from the fourth perspective;

[0036] Figure 5 Structural schematic diagram of the positioning module provided by the present utility model from the fifth perspective.

[0037] Description of the reference numerals:

[0038] 1. Stage body; 2. Air hole; 3. Positioning module; 31. Driving part; 32. Telescopic part; 33. Positioning stop block; 34. Mounting plate; 35. Mounting cover; 36. Groove; 37. Connecting plate; 4. Lifting mechanism; 41. Lifting component; 42. Thimble; 5. Height adjusting mechanism; 6. Groove; 7. Baffle plate. Detailed implementation mode

[0039] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative work shall fall within the protection scope of the present utility model.

[0040] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0041] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0042] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0043] Embodiment 1

[0044] Please refer to Figures 1 to 5, this embodiment provides a coating device, including: a stage body 1 adapted to place a substrate to be coated; a plurality of air holes 2 are provided on the stage body 1, and the air holes 2 are adapted to communicate with an external gas source device to provide a gas source for blowing or suction; a clamping mechanism is arranged on the periphery of the stage body 1 and is adapted to clamp the substrate to be coated on the stage body 1 for positioning and adjustment; a lifting mechanism 4 is arranged on the stage body 1; the adjustment end of the lifting mechanism 4 has an active state of rising in the vertical direction to be higher than the upper surface of the stage body 1 to abut against and support the substrate to be coated, and a hidden state of descending to be lower than the upper surface of the stage body 1 to place the substrate to be coated; the adjustment end of the lifting mechanism 4 is switched between the active state and the hidden state and is adapted to receive the substrate to be coated and move it onto the stage body 1; the air hole 2 has an air floating state in which positive pressure blowing is provided by an external gas source device to suspend and support the substrate to be coated through air flow, and a fixed state in which negative pressure suction is provided to adsorb the substrate to be coated; when the adjustment end of the lifting mechanism 4 is switched from the active state to the hidden state and the clamping mechanism adjusts the substrate to be coated, each air hole 2 is in the air floating state; after the clamping mechanism completes the adjustment of the substrate to be coated, each air hole 2 is switched from the air floating state to the fixed state; wherein, when the clamping mechanism adjusts the substrate to be coated, the adjustment end of the lifting mechanism 4 moves away from the substrate to be coated and switches to the hidden state.

[0045] It should be noted that the air hole 2 communicates with the upper surface of the stage body 1; the air hole 2 is switched between the air floating state and the fixed state.

[0046] In this embodiment, when it is necessary to place the substrate to be coated on the carrier body 1, the adjustment end of the lifting mechanism 4 is first switched to an active state, so that the adjustment end of the lifting mechanism 4 rises to a position higher than the upper surface of the carrier body 1, and then the substrate to be coated is placed on the adjustment end of the lifting mechanism 4 through an external device such as a manipulator or other means, and the adjustment end of the lifting mechanism 4 receives the substrate to be coated, and then the adjustment end of the lifting mechanism 4 is switched from an active state to a hidden state, and then the substrate to be coated is slowly driven down, thereby reducing the risk of damaging the substrate to be coated caused by placing the substrate to be coated by a manipulator or other means, and at the same time, positive pressure is provided to each air hole 2 through an external air source device, such as a clean dry Gas or other clean inert gas (such as nitrogen) causes the air hole 2 to blow outward, forming an airflow of a certain height below the substrate to be coated. When the substrate to be coated drops to abut against the airflow, the substrate to be coated is supported to float to a preset height on the stage body 1 under the action of the airflow. At the same time, after the substrate to be coated abuts against the airflow, the adjusting end of the lifting mechanism 4 continues to drop away from the substrate to be coated until the adjusting end of the lifting mechanism 4 is lower than the upper surface of the stage body 1 and is hidden to avoid affecting the clamping mechanism to adjust the substrate to be coated. Then, the substrate to be coated is clamped by the clamping mechanism and moved to a predetermined position for positioning and adjustment, and the position of the substrate to be coated is corrected so that it is located directly above the working area of ​​the stage body. After the positioning and adjustment of the substrate to be coated is completed, all the air holes 2 stop emitting air, and the substrate to be coated drops to the working area of ​​the carrier body 1 under the action of its own gravity. Then each air hole switches from an air-floating state to a fixed state, that is, the external air source equipment provides negative pressure suction to each air hole, so that the air hole 2 produces an adsorption effect to fix it to the carrier body 1, which is convenient for coating, and then the positioning and adjustment of the substrate to be coated is completed. After the coating is completed, the air hole 2 is re-filled with gas to break the vacuum, so that the carrier body 1 no longer adsorbs the coated substrate; then the coated substrate is lifted by the lifting mechanism 4, which is convenient for taking away the substrate to be coated.

[0047] During the adjustment process of the clamping mechanism, since the substrate to be coated is in a floating state, there is a certain distance between the substrate to be coated and the stage body 1. Therefore, the substrate to be coated will not be adsorbed by the stage body 1 due to close contact, which will increase the resistance during the adjustment process. In addition, the clamped part of the substrate to be coated will not be damaged due to the large resistance during the correction process, so that the clamping mechanism can correct the position of the substrate to be coated and ensure that the clamping mechanism has good positioning accuracy. At the same time, because the back side of the substrate to be coated is not in direct contact with the stage body 1, the back side of the substrate to be coated will not move directly on the stage body 1 to generate friction and cause damage, thereby better reducing the risk of possible damage to the substrate to be coated during the position correction process on the stage body 1.

[0048] In addition, in this embodiment, the same air hole can realize both the blowing function and the suction function. When generating an air flow through the air hole 2 to support or adsorb the substrate to be coated, the states of all the air holes are kept consistent. Since the position of the air hole on the carrier body remains unchanged all the time, the air-floating position of the substrate to be coated after correction overlaps with the position where it is adsorbed and fixed to the carrier body 1 in the up-and-down direction after correction, which is beneficial to ensuring the consistency of the position of the substrate to be coated. The air holes 2 on the carrier body 1 are effectively utilized. It can be used for vacuum adsorption to fix the substrate to be coated, and at the same time, a new blowing air-floating function is added. It can not only reduce the damage to the substrate to be coated during the clamping and correction process, but also remove the particles in the air hole 2 by blowing to ensure the stability of the vacuum adsorption of the substrate to be coated, without the need to additionally provide separate blowing holes or suction holes, thus reducing costs.

[0049] Embodiment 2

[0050] As a further improvement to Embodiment 1, as Figures 1 to 3 shown, a plurality of air holes 2 are uniformly arranged on the carrier body 1.

[0051] In this embodiment, the air holes 2 are uniformly arranged on the carrier body 1, which improves the uniformity and stability of the force when blowing to make the substrate to be coated float and when adsorbing and fixing the substrate to be coated, and improves the control accuracy.

[0052] On the basis of the above implementation manner, in a specific implementation manner, as Figures 1 to 3 shown, the clamping mechanism includes at least one set of first positioning components, and each set of first positioning components includes two positioning modules 3; the two positioning modules 3 in each set of first positioning components are symmetrically arranged on both sides of the carrier body 1 along its width direction, and the two positioning modules 3 are adapted to abut against and clamp both sides of the substrate to be coated in the width direction of the carrier body 1 for positioning and adjustment.

[0053] It should be noted that the two positioning modules 3 of the same set of positioning components are arranged oppositely to facilitate the alignment and clamping of the substrate to be coated.

[0054] In this embodiment, by respectively arranging at least one positioning module 3 on both sides of the carrier body 1 in the width direction, at this time the substrate to be coated is in an air-floating state. By programming the clamping position of the positioning module 3, the positioning modules 3 located on both sides of the substrate to be coated respectively abut against both sides of the substrate to be coated, and cooperate to clamp and adjust the substrate to be coated to a predetermined position in the width direction of the carrier body 1 to complete the correction of the substrate to be coated in the width direction of the carrier body 1.

[0055] On the basis of the above implementation manner, in a specific implementation manner, as Figures 1 to 3As shown, the clamping mechanism further includes at least one set of second positioning components, and each set of second positioning components includes two positioning modules 3. The two positioning modules 3 in each set of second positioning components are symmetrically arranged on both sides of the carrier body 1 along its length direction, and the two positioning modules 3 are adapted to abut against and clamp both sides of the substrate to be coated in the width direction of the carrier body 1 for positioning adjustment.

[0056] It should be noted that the two positioning modules 3 of the same set of positioning components are arranged oppositely to facilitate the alignment and clamping of the substrate to be coated.

[0057] In this embodiment, at least one positioning module 3 is correspondingly arranged on both sides of the carrier body 1 along its length direction, so that the positioning modules 3 located on both sides of the substrate to be coated respectively abut against both sides of the substrate to be coated, and cooperate to clamp and adjust the substrate to be coated to a predetermined position in the length direction of the carrier body 1 to complete the correction of the substrate to be coated in the length direction of the carrier body 1. At the same time, in cooperation with the positioning modules 3 on both sides of the carrier body 1 in the length direction, the accuracy of the correction of the substrate to be coated is further improved.

[0058] On the basis of the above embodiments, in a specific embodiment, as Figure 4 and Figure 5 shown, the positioning module 3 includes a driving member 31, a telescopic member 32, a connecting plate 37 and a positioning stopper 33. The driving member 31 is arranged on the periphery of the carrier body 1. A groove 6 is provided on the carrier body 1 corresponding to each positioning module 3. The connecting plate 37 is horizontally arranged. One end of the connecting plate 37 is connected to the output end of the driving member 31, and the other end is connected to the telescopic member 32, and is adapted to be driven by the driving member 31 to rotate in the groove 6. The positioning stopper 33 is connected to the output end of the telescopic member 32, and is adapted to be driven by the telescopic member 32 to rise above the upper surface of the carrier body 1 or descend below the upper surface of the carrier body 1. When the positioning stopper 33 rises above the upper surface of the carrier body 1, the positioning stopper 33 has a first position where it is driven by the driving member 31 to rotate towards one side of the carrier body 1 to abut against the periphery of the substrate to be coated, and a second position where it rotates towards the side away from the carrier body 1 to be spaced from the substrate to be coated.

[0059] In this embodiment, the substrate to be coated descends until it abuts against the air flow generated by blowing air through the air holes 2, and is supported to a preset height under the action of the air flow. Then, the telescopic member 32 drives the positioning stopper 33 to adjust in the vertical direction, so that the position of the positioning stopper 33 is higher than the upper surface of the stage body 1, and rises until the position of the positioning stopper 33 corresponds to the position of the side wall of the substrate to be coated. At this time, the positioning stopper 33 is in the second position. Then, the driving member 31 can drive the connecting plate 37 to drive the telescopic member 32 and the positioning stopper 33 to rotate, so that the positioning stopper 33 rotates towards the side of the substrate to be coated until it abuts against the circumferential side of the substrate to be coated at the first position. Thus, the two relatively arranged positioning stoppers 33 can clamp and position the substrate to be coated in one direction, completing the alignment of the substrate to be coated. After completing the positioning adjustment of the substrate to be coated, the positioning stopper 33 is rotated in the reverse direction to return to the second position. Then, the telescopic member 32 drives the positioning stopper 33 to descend to a position lower than the upper surface of the stage body 1 to avoid affecting subsequent processes. Preferably, in this embodiment, the angle at which the positioning stopper 33 rotates from the first position to the second position is set to 90 degrees, and the rotation angle of the positioning stopper 33 can be specifically determined according to the actual situation.

[0060] Specifically, the driving member 31 can be selected from existing adjusting devices such as a rotary motor or a motor, etc., so as to drive the telescopic member 32 and the positioning stopper to rotate through the connecting plate.

[0061] Specifically, the telescopic member 32 can be selected from existing adjusting devices such as a cylinder, a hydraulic cylinder, an electric telescopic rod, etc., so as to adjust the height of the positioning stopper 33 to be the same as the height of the substrate to be coated in the vertical direction.

[0062] Specifically, as Figure 4 and Figure 5 shown, the positioning stopper is cylindrical, and its axis is along the vertical direction, which is convenient for reducing the risk of damaging the substrate to be coated when abutting against it.

[0063] On the basis of the above implementation manner, in a specific implementation manner, as Figures 1 to 3 shown, there are two sets of the first positioning components, and the two sets of the first positioning components are arranged at intervals; there are two sets of the second positioning components, and the two sets of the second positioning components are arranged at intervals.

[0064] In this embodiment, preferably, there are two sets of the first positioning components and two sets of the second positioning components. Both the first positioning components and the second positioning components are provided with two sets, which clamp and position the substrate to be coated around its perimeter, improving the accuracy of clamping and positioning the substrate to be tested.

[0065] As a variable implementation manner, it can also be that the number of the first positioning components and the second positioning components can also be 1, 3, 4 or more sets. Multiple sets of the first positioning components or the second positioning components are arranged at intervals, and can be specifically limited according to the actual situation.

[0066] Based on the above embodiments, in a specific embodiment, as Figures 1 to 3 shown, a baffle 7 is provided on each side of the stage body 1; the baffle 7 is located above the positioning module 3, and the top of the baffle 7 is lower than the upper surface of the stage body 1; an arc-shaped opening is provided on the baffle 7 corresponding to each positioning module 3; the radius of the arc-shaped opening is greater than the maximum rotation radius of the telescopic member 32 and the positioning stopper 33.

[0067] It should be noted that the horizontal section of the stage body 1 is rectangular.

[0068] In this embodiment, by providing the baffle 7 above the positioning module 3, a protective effect is achieved, avoiding the dripping and splashing of the slurry into the positioning module 3 during the coating process, causing component contamination, and improving the service life. Moreover, a plurality of arc-shaped openings are provided on the baffle 7 to avoid affecting the movement of the telescopic member 32 and the positioning stopper 22 for adjusting the substrate to be coated, playing a role of making way.

[0069] Specifically, as Figure 4 and Figure 5 shown, the positioning module 3 is arranged on the peripheral side of the stage body 1 through the mounting plate 34, and the positioning module 3 is connected to the stage body 1 through the mounting plate 34, improving the mounting strength.

[0070] Specifically, the mounting plate 34 is arranged on the peripheral side of the stage body 1, and the driving member 31 is arranged on the mounting plate 34.

[0071] Based on the above embodiments, in a specific embodiment, as Figures 1 to 3 shown, an installation cover 35 is provided on each side of the stage body 1. The installation cover 35 is adapted to cover all the positioning modules 3 on the same side of the stage body 1; a slot is provided at the top of the installation cover 35 corresponding to the baffle 7.

[0072] In this embodiment, by providing the installation cover 35, a protective effect is achieved on the positioning module 3. At the same time, the slot is provided to facilitate the installation of the baffle 7 and also avoid affecting the adjustment of the telescopic member 32 and the positioning stopper 33.

[0073] Based on the above embodiments, in a specific embodiment, as Figure 3As shown in the figure, the lifting mechanism 4 includes: a lifting component 41 disposed at the bottom of the carrier body 1; a plurality of ejector pins 42 arranged in the vertical direction and drivingly connected to the output end of the lifting component 41, adapted to be driven by the lifting component 41 to reciprocate in the vertical direction; wherein, a plurality of through holes penetrate through the carrier body 1 in the vertical direction, and each ejector pin 42 is correspondingly inserted into one through hole; the ejector pin 42 has an active state in which it is driven by the lifting component 41 to rise in the vertical direction above the upper surface of the carrier body 1 to abut against and support the substrate to be coated, and a hidden state in which it descends below the upper surface of the carrier body 1 to place the substrate to be coated.

[0074] In this embodiment, when receiving the substrate to be coated, the ejector pins 42 are in the active state, that is, the output end of the lifting component 41 drives the plurality of ejector pins 42 to pass through the through holes and rise above the carrier body 1, so as to support the substrate to be coated and complete the reception of the substrate to be coated. Then, it switches from the active state to the hidden state, and then the lifting component 41 drives the plurality of ejector pins 42 to descend below the upper surface of the carrier body 1, so that the substrate to be coated can be slowly moved down. When it descends to a preset height above the air holes 2, in cooperation with the air holes in the air floating state, the substrate to be coated abuts against the air flow ejected through the air holes 2 and is supported by the air flow. It is simple and convenient. After coating is completed, the ejector pins 42 can rise again to lift the substrate to be coated, which is convenient for taking.

[0075] On the basis of the above implementation manner, in a specific implementation manner, such as Figures 1 to 3 The plurality of ejector pins 42 are evenly arranged in the horizontal direction to improve the stability of supporting the substrate to be coated.

[0076] Specifically, the lifting component 41 includes: a bottom plate connected to the bottom of the carrier body 1 through a plurality of guide columns; the guide columns are arranged in the vertical direction; a lifting plate located between the bottom plate and the carrier body 1 and slidably connected to the guide columns through linear bearings; the plurality of ejector pins 42 are all connected to the top of the lifting plate; a driving motor is disposed on the bottom plate, and a lead screw is connected to the output end of the driving motor in the vertical direction, adapted to drive the lead screw to rotate; the lead screw penetrates through the lifting plate in the vertical direction, and the lead screw is connected to the lifting plate through a nut seat. When it is necessary to adjust the lifting of the ejector pins, the driving motor can be used to drive the lead screw to rotate, and then drive the nut seat to move in the vertical direction on the lead screw. Then, the nut seat drives the lifting plate to move in the vertical direction on the guide columns, thereby realizing the lifting adjustment of the ejector pins 42.

[0077] Specifically, such as Figure 1 As shown in the figure, a height adjustment mechanism 5 is provided at the bottom of the carrier body 1. The carrier body 1 is fixed to an external device or placed on the ground for support by providing the height adjustment mechanism 5, and at the same time, the height of the carrier body 1 can be adjusted by the height adjustment mechanism 5.

[0078] Specifically, the structure of the height adjustment mechanism 5 is not limited in this embodiment, and existing height adjustment devices or lifting devices can be used.

[0079] The specific working principle of the coating device provided in this embodiment is as follows: First, the lifting assembly 41 drives the ejector pin 42 to rise vertically through the through hole to a position higher than the upper surface of the stage body 1. The substrate to be coated can be placed on the ejector pin 42 by an external device such as a manipulator or other means to complete the reception of the substrate to be coated. Then, the lifting assembly 41 drives the ejector pin 42 to descend vertically through the through hole to the upper surface of the stage body 1. At the same time, a positive pressure is provided to each air hole 2 by an external gas source device, such as clean and dry gas or other clean inert gases (such as nitrogen), so that the air hole 2 blows air outwards to form an air flow with a certain height below the substrate to be coated. When the substrate to be coated descends to abut against the air flow, the substrate to be coated is supported by the acting force of the air flow to float by a preset height on the stage body 1. At the same time, after the substrate to be coated abuts against the air flow, the ejector pin 42 continues to descend away from the substrate to be coated until the ejector pin 42 is lower than the upper surface of the stage body 1 for hiding, so as to avoid affecting the clamping mechanism to adjust the substrate to be coated. Then, the positioning modules 3 arranged oppositely in the width and length directions of the stage body 1 are adjusted. The telescopic member 32 drives the positioning block 33 to adjust in the vertical direction, so that the position of the positioning block 33 is higher than the upper surface of the stage body 1 and rises to a position where the position of the positioning block 33 corresponds to the side wall position of the substrate to be coated. At this time, the positioning block 33 is in the second position. Then, the driving member 31 can drive the connecting plate 37 to drive the telescopic member 32 and the positioning block 33 to rotate, so that the positioning block 33 rotates towards the substrate to be coated to abut against the first position on the periphery of the substrate to be coated. Then, the two oppositely arranged positioning blocks 33 can clamp the substrate to be coated in alignment, so that the substrate to be coated is moved to a predetermined position and is located directly above the working area of the stage body 1. When the positioning adjustment of the substrate to be coated is completed, all the air holes 2 stop blowing air, and the substrate to be coated descends to the working area of the stage body 1 under its own gravity. Then, the external gas source device provides negative pressure suction, so that each air hole 2 sucks air to generate an adsorption effect to fix the substrate to be coated on the stage body 1, which is convenient for coating. Thus, the positioning adjustment of the substrate to be coated is completed. After the coating is completed, gas is recharged into the air holes 2 to complete the vacuum breaking, so that the stage body 1 no longer adsorbs the coated substrate; then, the coated substrate is lifted by the ejector pin 42, which is convenient for taking away the substrate to be coated.

[0080] Obviously, the above embodiments are merely examples for clear illustration and not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or alterations can be made based on the above description. It is not necessary and impossible to enumerate all implementation manners here. And the obvious changes or alterations derived therefrom still fall within the protection scope of this utility model creation.

Claims

1. A coating device, characterized in that: include: The carrier body (1) is suitable for placing a substrate to be coated; the carrier body (1) is provided with a plurality of air holes (2), and the air holes (2) are suitable for connecting to an external air source device; A clamping mechanism, arranged on the peripheral side of the carrier body (1), suitable for clamping the substrate to be coated on the carrier body (1) for positioning and adjustment; A lifting mechanism (4) is arranged on the carrier body (1); the adjusting end of the lifting mechanism (4) has an active state in which it rises in the vertical direction to a position higher than the upper surface of the carrier body (1) to abut against and support the substrate to be coated, and a hidden state in which it descends to a position lower than the upper surface of the carrier body (1) to place the substrate to be coated; the adjusting end of the lifting mechanism (4) is switchably arranged between the active state and the hidden state, and is suitable for receiving the substrate to be coated and moving it onto the carrier body (1); The air holes (2) have an air floating state in which positive pressure blowing is provided by an external air source device to suspend and support the substrate to be coated through airflow, and a fixed state in which negative pressure suction is provided to adsorb the substrate to be coated; when the adjustment end of the lifting mechanism (4) switches from the active state to the hidden state and the clamping mechanism adjusts the substrate to be coated, each of the air holes (2) is in the air floating state; after the clamping mechanism completes the adjustment of the substrate to be coated, each of the air holes (2) switches from the air floating state to the fixed state.

2. The coating device according to claim 1, characterized in that: The plurality of air holes (2) are evenly arranged on the carrier body (1).

3. The coating device according to claim 1, characterized in that: The clamping mechanism comprises at least one group of first positioning components, and each group of the first positioning components comprises two positioning modules (3); The two positioning modules (3) in each group of the first positioning components are symmetrically arranged on both sides of the carrier body (1) along its width direction, and the two positioning modules (3) are suitable for abutting and clamping both sides of the substrate to be coated in the width direction of the carrier body (1) to perform positioning adjustment.

4. The coating device according to claim 3, characterized in that: The clamping mechanism further comprises at least one group of second positioning components, each group of the second positioning components comprises two of the positioning modules (3); The two positioning modules (3) in each group of the second positioning components are symmetrically arranged on both sides of the carrier body (1) along its length direction, and the two positioning modules (3) are suitable for abutting and clamping both sides of the substrate to be coated in the length direction of the carrier body (1) to perform positioning adjustment.

5. The coating device according to claim 4, characterized in that: There are two groups of the first positioning components, and the two groups of the first positioning components are arranged at intervals; there are two groups of the second positioning components, and the two groups of the second positioning components are arranged at intervals.

6. The coating device according to any one of claims 3 to 5, characterized in that: The positioning module (3) comprises a driving member (31), a telescopic member (32), a connecting plate (37) and a positioning block (33); the driving member (31) is arranged on the peripheral side of the carrier body (1); a groove (6) is provided on the carrier body (1) corresponding to each of the positioning modules (3); The connecting plate (37) is arranged horizontally; one end of the connecting plate (37) is connected to the output end of the driving member (31), and the other end is connected to the telescopic member (32), and is suitable for being driven by the driving member (31) to rotate in the groove (6); The positioning stopper (33) is connected to the output end of the telescopic member (32), and is suitable for being driven by the telescopic member (32) to rise in the vertical direction to a position higher than the upper surface of the platform body (1) or to fall to a position lower than the upper surface of the platform body (1); When the positioning block (33) rises to a position higher than the upper surface of the carrier body (1), the positioning block (33) is driven by the driving member (31) to rotate toward one side of the carrier body (1) to a first position abutting against the peripheral side of the substrate to be coated, and to rotate toward a side away from the carrier body (1) to a second position spaced apart from the substrate to be coated.

7. The coating device according to claim 6, characterized in that: A baffle (7) is provided on each side of the carrier body (1); the baffle (7) is located above the positioning module (3), and the top of the baffle (7) is lower than the upper surface of the carrier body (1); an arc-shaped opening is provided on the baffle (7) corresponding to each positioning module (3); the radius of the arc-shaped opening is greater than the maximum rotation radius of the telescopic member (32) and the positioning block (33).

8. The coating device according to claim 7, characterized in that: Each side of the carrier body (1) is provided with a mounting cover (35), and the mounting cover (35) is suitable for covering all the positioning modules (3) located on the same side of the carrier body (1); the top of the mounting cover (35) is provided with a groove corresponding to the baffle (7).

9. The coating device according to claim 1, characterized in that: The lifting mechanism (4) comprises: A lifting assembly (41) is arranged at the bottom of the platform body (1); A plurality of ejector pins (42) are arranged in a vertical direction and are drivingly connected to the output end of the lifting assembly (41), and are suitable for being driven by the lifting assembly (41) to reciprocate in the vertical direction; The carrier body (1) is provided with a plurality of through holes in the vertical direction, and each of the ejector pins (42) is correspondingly arranged in one of the through holes; the ejector pins (42) are driven by the lifting assembly (41) to rise in the vertical direction to a position higher than the upper surface of the carrier body (1) to abut against and support the substrate to be coated, and are in the active state of falling to a position lower than the upper surface of the carrier body (1) to place the substrate to be coated.

10. The coating device according to claim 9, characterized in that: The plurality of ejector pins (42) are evenly arranged in the horizontal direction.

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