Auxiliary tool for substrate surface treatment

Abstract

The utility model relates to the technical field of integrated circuit packaging, and particularly discloses an auxiliary tool for substrate surface treatment, which comprises a base and support rods transversely mounted on the base at intervals along the length direction of the base, and a plurality of positioning grooves are formed in the peripheries of the support rods at intervals; the two side plates are fixed to the two ends of the base in the length direction at intervals, a plurality of first clamping grooves in one-to-one correspondence with the positioning grooves are formed in the inner side of at least one side plate at intervals, and the first clamping grooves penetrate through the two ends of the side plates in the length direction of the side plates; a plurality of adjusting rods are arranged between the two side plates, a plurality of second clamping grooves corresponding to the first clamping grooves in a one-to-one mode are formed in the sides, facing the first clamping grooves, of the adjusting rods at intervals, and the adjusting rods are connected with the side plates through connecting pieces and can selectively slide in the length direction of the base. The substrate hanging and fixing device can adapt to hanging and fixing of substrates of multiple sizes, particularly can fix substrates of large breadth, is not prone to being broken for the substrates made of fragile materials, can process multiple substrates at a time, and effectively reduces the substrate surface processing cost.

Description

Technical Field

[0001] The utility model relates to a substrate for the field of integrated circuit packaging technology, and particularly relates to an auxiliary tool for substrate surface treatment. Background Art

[0002] At present, there are mainly two surface treatment modes for substrates, namely spray mode (spray) and dip mode (dip). Among them, the spray mode refers to a method of spraying a surface treatment liquid such as an etching liquid onto the substrate through a nozzle for surface treatment; while the dip mode refers to a method of immersing the substrate in a liquid storage tank filled with a surface treatment liquid such as an etching liquid for surface treatment. Among them, during the etching process in the dip mode, the fixture used to hold the substrate product plays a key role in the etching effect. The design of the fixture has a very crucial impact on the thickness uniformity and surface effect after etching. If the fixture design is not good, it will cause uneven substrate thickness and leave serious protrusions at the positions in contact with the fixture during dipping, which will make it difficult to carry out subsequent processes.

[0003] In view of the above problems, Patent CN101215101A discloses a thinning fixture for a flat glass substrate, which can effectively avoid the influence on the flow of the liquid medicine by the combination of a frame and a strip while achieving the purpose of thinning by holding the glass substrate for immersion etching with the liquid medicine, and can make the glass substrate fully contact with the liquid medicine by setting a groove with a wider outer width and a narrower inner width, eliminate the protrusions at the contact points between the glass substrate and the fixture, improve the thinning effect of the glass substrate, improve the uniformity after etching of the glass substrate, and ensure the execution of subsequent processes.

[0004] However, the above-mentioned thinning fixture for a flat glass substrate has insufficient load-bearing capacity and is only applicable to holding glass substrates with a length of 240 - 300 millimeters, such as the immersion etching of glass substrates with a length × width × thickness of 300 × 351 × 1 millimeter or 280 × 350 × 1.4 millimeter, and the applicable range is relatively narrow and not applicable to larger-sized glass substrates. Content of the Utility Model

[0005] The purpose of the utility model is to provide an auxiliary tool for substrate surface treatment, which is applicable to the fixation of substrates of various sizes.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] Provide an auxiliary tool for substrate surface treatment, including:

[0008] A base and a plurality of support rods that are spaced at intervals along the length direction of the base and are horizontally installed on the base, and a plurality of positioning grooves are spacedly opened on the outer circumference of the support rods;

[0009] Two side plates are fixedly spaced at both ends of the base along its length direction. A plurality of first clamping grooves corresponding to the positioning grooves one by one are spacedly arranged on the inner side of at least one of the side plates, and the first clamping grooves penetrate through both ends of the side plate along the length direction of the side plate.

[0010] A plurality of adjusting rods are further arranged between the two side plates. A plurality of second clamping grooves corresponding to the first clamping grooves one by one are spacedly arranged on one side of the adjusting rod facing the first clamping grooves. The adjusting rod is connected to the side plate through a connecting piece and can selectively slide along the length direction of the base.

[0011] In this solution, the substrate can be placed in the positioning groove, and both ends of it can be respectively clamped and fixed with the first clamping groove and the second clamping groove. Since the second clamping groove is located on the movably arranged adjusting rod, the distance between the second clamping groove and the first clamping groove can be adjusted according to the size of the substrate, so that the substrate is just clamped and fixed between the first clamping groove and the second clamping groove.

[0012] The auxiliary tooling for substrate surface treatment in this solution can be applicable to the clamping and suspension of substrates with multiple sizes by setting a movable adjusting rod, and has a sufficient bearing capacity. It is especially applicable to the surface treatment of large-format substrates, and multiple substrates can be suspended and fixed at one time, improving the efficiency of substrate surface treatment.

[0013] As a preferred solution of the auxiliary tooling for substrate surface treatment, the connecting piece includes two groups of intermediate connecting pieces. The two groups of intermediate connecting pieces are respectively adjacent to both ends of the side plate along its width direction. Each group of intermediate connecting pieces includes a plurality of connecting rods arranged at intervals from top to bottom. Both ends of each connecting rod are respectively connected to the two side plates. At least one connecting rod in each group of intermediate connecting pieces is provided with an adjusting long hole along its length direction, and the positions of the adjusting long holes on the connecting rods in the two groups of intermediate connecting pieces correspond to each other. Both ends of the adjusting rod are respectively inserted into the adjusting long holes of the connecting rods, and the adjusting rod can slide along the length direction of the adjusting long hole and is locked by a locking piece.

[0014] Among them, on the one hand, the connecting rod can be used as a reinforcing rib to improve the connection stability between the two side plates. On the other hand, the adjusting long hole opened on the connecting rod allows the adjusting rod to slide along the length direction of the adjusting long hole to realize the adjustment of the distance between the first clamping groove and the second clamping groove to adapt to the corresponding size of the substrate. After the adjustment is completed, the adjusting rod is locked by a locking piece to fix the substrate.

[0015] As a preferred solution for the auxiliary tooling for substrate surface treatment, in order to synchronously adjust all the adjusting rods, in each set of the intermediate connectors, at least two of the connecting rods are provided with the adjusting elongated holes, the connector further includes two synchronous connecting rods, the two synchronous connecting rods are respectively located outside the intermediate connector, and the end of the adjusting rod passes through the adjusting elongated hole and is connected to the synchronous connecting rod.

[0016] As a preferred solution for the auxiliary tooling for substrate surface treatment, the synchronous connecting rod is connected to the end of the adjusting rod through an elastic member, and the elastic member makes the synchronous connecting rod have a tendency to move towards the intermediate connector and abut against the connecting rod.

[0017] As a preferred solution for the auxiliary tooling for substrate surface treatment, in order to further improve the adjustment convenience of the adjusting rod and prevent jamming during the adjustment process, a roller is provided below the adjusting rod, and correspondingly, a guiding sliding groove is opened on one side of the adjusting elongated hole close to the roller.

[0018] Furthermore, this solution also designs a push rod, which is spaced at the upper end of the side plate and fixedly connected to the two synchronous connecting rods. By pushing the push rod, the synchronous movement of the adjusting rods driven by the synchronous connecting rods on both sides can be realized.

[0019] As a preferred solution for the auxiliary tooling for substrate surface treatment, scale marks are provided on the outside of the connecting rod and above or below the adjusting elongated hole.

[0020] As a preferred solution for the auxiliary tooling for substrate surface treatment, the base includes a bottom plate and two mounting seats. The bottom plate is provided with a plurality of through holes at intervals along its thickness direction, and the two mounting seats are respectively fixed at both ends of the bottom plate along its width direction; both ends of the support rod are connected to the two mounting seats.

[0021] As a preferred solution for the auxiliary tooling for substrate surface treatment, the support rod is of a cylindrical structure, and both ends thereof are pivotally connected to the mounting seats through pivot shafts, and the support rod can rotate around the pivot shafts.

[0022] As a preferred solution for the auxiliary tooling for substrate surface treatment, the first card slot and the second card slot have the same structure, and the cross section is composed of a rectangular slot and an isosceles trapezoidal slot that communicate with each other. Among them, one side of the rectangular slot serves as the slot bottom, and the two sides adjacent to the slot bottom are respectively connected to the hypotenuses of the isosceles trapezoidal slot, and the long side of the isosceles trapezoidal slot serves as the slot opening.

[0023] As a preferred solution for the auxiliary tooling for substrate surface treatment, it further includes a number of intermittent rods. One of the intermittent rods is horizontally fixed between every two adjacent first card slots on the side plate. Both ends of the intermittent rod are fixedly connected to the side plate respectively. When the substrate is fixed on the positioning groove and inserted into the first card slot and the second card slot, there is a gap between the intermittent rod and the substrate. With this structural design, it can prevent the substrate made of fragile material, such as a glass substrate, from fluctuating too much or sticking together during the surface treatment process, resulting in breakage.

[0024] Preferably, one side of the intermittent rod close to the substrate is a ridge, which can prevent the substrate from contacting the intermittent rod during the surface treatment process and affecting the surface treatment effect of the substrate.

[0025] As a preferred solution for the auxiliary tooling for substrate surface treatment, it further includes two groups of lifting lugs. One group of the lifting lugs is fixedly installed on the outside of each side plate and adjacent to the upper end of the side plate respectively. With the structural design of the lifting lugs, it is convenient to pick up and place the substrate.

[0026] For the surface treatment and etching of large-format glass substrates 510*515 / 615*625, 10 pieces can be processed at a time, which can effectively reduce the processing cost.

[0027] The beneficial effects of the present utility model: The auxiliary tooling for substrate surface treatment of the present utility model can adjust the distance between the adjusting rod and the side plate according to the size of the substrate to adapt to the hanging and fixing of substrates of multiple sizes. In particular, it can fix large-format substrates, and it is not easy to break for substrates made of fragile materials. Moreover, 10 pieces can be processed at a time, effectively reducing the substrate surface treatment cost. Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the embodiments of the present utility model will be briefly introduced below. Obviously, the following described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0029] Figure 1 It is a three-dimensional structure diagram of the first perspective of the auxiliary tooling for substrate surface treatment described in the embodiment of the present utility model.

[0030] Figure 2 It is a three-dimensional structure diagram of the second perspective of the auxiliary tooling for substrate surface treatment described in the embodiment of the present utility model.

[0031] Figure 3 It is a top view of the auxiliary tooling for substrate surface treatment described in the embodiment of the present utility model.

[0032] Figure 4It is the front view of the auxiliary tooling for substrate surface treatment described in the embodiments of the present utility model.

[0033] Figure 5 It is the connection schematic diagram of the connecting piece and the adjusting rod described in the embodiments of the present utility model.

[0034] Figure 6 It is the assembly schematic diagram of the support rod and the base described in the embodiments of the present utility model.

[0035] In the figure:

[0036] 1. Base; 1a. Bottom plate; 1b. Mounting seat; 1c. Through hole; 2. Support rod; 3. Positioning groove; 4. Side plate; 5. First card slot; 6. Adjusting rod; 7. Second card slot; 8. Connecting rod; 9. Adjusting long hole; 10. Synchronous connecting rod; 11. Intermittent rod; 12. Lifting lug;

[0037] 100. Substrate. Specific embodiments

[0038] The technical solution of the present utility model will be further described below with reference to the accompanying drawings and through specific embodiments.

[0039] Among them, the accompanying drawings are only for illustrative purposes, showing only schematic diagrams, rather than actual drawings, and should not be construed as a limitation to this patent; in order to better illustrate the embodiments of the present utility model, some components in the accompanying drawings will be omitted, enlarged or reduced, which do not represent the dimensions of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the accompanying drawings may be omitted.

[0040] In the accompanying drawings of the embodiments of the present utility model, the same or similar reference numerals correspond to the same or similar components; in the description of the present utility model, it should be understood that if terms such as "upper", "lower", "left", "right", "inner", "outer", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the accompanying drawings are only for illustrative purposes and should not be construed as a limitation to this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0041] In the description of the present utility model, unless otherwise clearly defined and limited, if terms such as "connection" are used to indicate the connection relationship between components, such terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0042] Such as Figure 1-4 , the auxiliary tooling for substrate surface treatment in this embodiment includes:

[0043] A base 1 and a plurality of support rods 2 that are spaced along the length direction of the base 1 and are horizontally installed on the base 1. A plurality of positioning grooves 3 are spaced on the outer periphery of the support rods 2;

[0044] Two side plates 4 are fixedly spaced at both ends of the base 1 along its length direction. At least one side plate 4 is provided with a plurality of first card slots 5 that correspond one-to-one with the positioning grooves 3 at intervals on the inner side. The first card slots 5 penetrate through both ends of the side plate 4 along the length direction of the side plate 4;

[0045] A plurality of adjusting rods 6 are further provided between the two side plates 4. A plurality of second card slots 7 that correspond one-to-one with the first card slots 5 are spaced on the side of the adjusting rod 6 facing the first card slots 5. The adjusting rod 6 is connected to the side plate 4 through a connecting piece and can selectively slide along the length direction of the base 1.

[0046] In this embodiment, the adjusting rod 6 is pushed close to one of the side plates 4, so that the side of the adjusting rod 6 with the second card slots 7 faces the first card slots 5 of the side plate 4 on the opposite side. Then, a plurality of substrates 100 are sequentially placed on the support rods 2. After adjusting the positions, the lower ends of the substrates 100 just get stuck in the positioning grooves 3. Then, the adjusting rod 6 is pushed, so that the two transverse ends of the substrates 100 are respectively stuck in the first card slots 5 and the second card slots 7, making the substrates 100 stable on this auxiliary tooling.

[0047] Specifically, the positioning groove 3 can be a trapezoidal structure or other structures similar to a trapezoid, such as an arc-shaped hypotenuse, which will not be elaborated here.

[0048] The auxiliary tooling in this embodiment can fix multiple pieces in sequence, and by adjusting the adjusting rod 6, it can adapt to the hanging fixation of substrates of various sizes. After being fixed, surface treatment can be carried out, which can improve the surface treatment efficiency of the substrates.

[0049] As a preferred embodiment of the present invention, the connecting member includes two sets of intermediate connecting members. The two sets of intermediate connecting members are respectively adjacent to the two ends of the side plate 4 along its width direction. Each set of intermediate connecting members includes a plurality of connecting rods 8 arranged at intervals from top to bottom. The two ends of each connecting rod 8 are respectively connected to the two side plates 4. At least one connecting rod 8 in each set of intermediate connecting members is provided with an adjusting long hole 9 along its length direction, and the positions of the adjusting long holes 9 on the connecting rods 8 in the two sets of intermediate connecting members correspond to each other. The two ends of the adjusting rod 6 are respectively inserted into the adjusting long holes 9 on the connecting rods 8 at both ends. The adjusting rod 6 can slide along the length direction of the adjusting long hole 9 and is locked by a locking member. Among them, the length of the adjusting long hole 9 is not limited and can extend to near its two ends respectively, so as to adapt to the suspension fixation of substrates of more sizes. After adjusting the position of the substrate, push each adjusting rod 6 so that its two ends slide along the length direction of the adjusting long hole 9 on the connecting rod 8 until the substrate is respectively clamped with the adjusting rod 6 and one of the side plates 4, and then lock it through the locking member to prevent the substrate from shaking during the surface treatment process.

[0050] In a preferred embodiment, as Figure 5 , in each set of intermediate connecting members, at least two connecting rods 8 are provided with adjusting long holes 9. The connecting member further includes two synchronous connecting rods 10. The two synchronous connecting rods 10 are respectively located outside the intermediate connecting members. The end of the adjusting rod 6 passes through the adjusting long hole 9 and is connected to the synchronous connecting rod 10. By providing the two synchronous connecting rods 10, a plurality of adjusting rods 6 can be synchronously adjusted through the synchronous connecting rods 10.

[0051] In a preferred embodiment, the synchronous connecting rod 10 is connected to the end of the adjusting rod 6 through an elastic member. The elastic member makes the synchronous connecting rod 10 have a tendency to move towards the intermediate connecting member and abut against the connecting rod 8. The elastic member in this embodiment functions to automatically lock the adjusting rod 6.

[0052] Furthermore, scale marks are provided above or below the adjusting long hole 9 on the outer side of the connecting rod 8. By providing the scale marks, it is convenient to observe whether the positions of the two ends of the adjusting rod 6 correspond, and to prevent the adjusting rod 6 from tilting and affecting the fixing effect of the substrate.

[0053] Furthermore, as Figure 6 , the base 1 includes a bottom plate 1a and two mounting seats 1b. The bottom plate 1a is provided with a plurality of through holes 1c at intervals along its thickness direction. The two mounting seats 1b are respectively fixed at the two ends of the bottom plate 1a along its width direction; the two ends of the support rod 2 are respectively connected to the two mounting seats 1b. When the entire auxiliary tool is placed in a surface treatment tank filled with surface treatment liquid, the plurality of through holes 1c provided on the base 1 can prevent the water from entering too fast and causing the substrate to vibrate violently and break compared with the traditional cross frame; compared with a solid non-hollow bottom plate, it can avoid excessive resistance to the up and down movement of the auxiliary tooling.

[0054] In this embodiment, the support rod 2 is of a cylindrical structure, and its two ends are respectively pivotally connected to the mounting seat 1b through a pivot shaft. The support rod 2 can rotate around the pivot shaft. After the substrate is placed in the positioning groove 3 on the support rod 2, when adjusting the position of the substrate, the substrate can roll along the positioning groove 3 to reduce the resistance of substrate adjustment.

[0055] Furthermore, the first card slot 5 and the second card slot 7 have the same structure, and their cross-sections are both composed of a rectangular slot and an isosceles trapezoidal slot that communicate with each other. Among them, one side of the rectangular slot serves as the slot bottom, and the two sides adjacent to the slot bottom are respectively connected to the hypotenuse of the isosceles trapezoidal slot. The long side of the isosceles trapezoidal slot serves as the slot opening. Even further, an arc transition is adopted between the isosceles trapezoidal slot and the rectangular slot, which can enable the substrate to smoothly move into the rectangular slot after being inserted into the slot opening.

[0056] The auxiliary tooling of this embodiment further includes a number of intermittent rods 11. One intermittent rod 11 is horizontally fixed between every two adjacent first card slots 5 on the side plate 4. The two ends of the intermittent rod 11 are respectively fixedly connected to the side plate 4. When the substrate 100 is fixed on the positioning groove 3 and inserted into the first card slot 5 and the second card slot 7, there is a gap between the intermittent rod 11 and the substrate 100. The setting of the intermittent rod 11 can prevent the substrates on both sides from being severely vibrated and damaged during the surface treatment process.

[0057] Preferably, one side of the intermittent rod 11 close to the substrate 100 is a ridge, which can prevent the substrate from making surface contact with the intermittent rod 11 during the surface treatment process and affecting the surface treatment effect of the substrate.

[0058] Furthermore, the auxiliary tooling of this embodiment further includes two groups of lifting lugs 12. One group of lifting lugs 12 is respectively fixed on the outside of each side plate 4 and adjacent to the upper end of the side plate 4. By providing the lifting lugs 12, it is convenient to lift the auxiliary tooling. After all the substrates are suspended and fixed, the auxiliary tooling together with the substrates can be lifted into the surface treatment tank through the lifting lugs and an auxiliary lifting tool such as a crane.

[0059] The working principle of the auxiliary tooling for substrate surface treatment in this embodiment is as follows: According to the size of the substrate, the adjusting rod 6 is pushed by a connecting member towards one side plate 4 (defined as the first side plate) until the distance between the adjusting rod 6 and the other side plate 4 (defined as the second side plate) is greater than the size of the substrate; a number of substrates are sequentially placed close to the second side plate on the support rod 2 and clamped in the positioning groove 3; then the adjusting rod 6 is pushed by an intermediate connecting member so that the second card slot 7 of the adjusting rod 6 and the first card slot 5 of the second side plate are respectively clamped with the two ends of the substrate. Then the adjusting rod 6 is fixed by a locking member such as a screw or an elastic member, thereby realizing the fixed suspension of the substrate. The auxiliary tooling is lifted into the surface treatment tank through a lifting tool such as a crane by hanging the lifting lugs 12. After the treatment is completed, the auxiliary tooling is lifted out by hanging the lifting lugs 12 through the lifting tool.

[0060] It should be noted that the above specific embodiments are only the preferred embodiments of the present utility model and the technical principles applied. Those skilled in the art should understand that various modifications, equivalent replacements, changes, etc. can be made to the present utility model. However, as long as these transformations do not deviate from the spirit of the present utility model, they should be within the protection scope of the present utility model. In addition, some terms used in the specification and claims of this application are not restrictive, but are only for the convenience of description.

Claims

1. An auxiliary tooling for substrate surface treatment, characterized in that: include: A base and a plurality of support rods spaced apart along the length direction of the base and transversely mounted on the base, wherein a plurality of positioning grooves are spaced apart on the outer circumference of the support rods; Two side panels are fixed at intervals at two ends of the base along the length direction thereof, and a plurality of first slots corresponding to the positioning slots are spaced apart on the inner side of at least one of the side panels, and the first slots penetrate through the two ends of the side panels along the length direction of the side panels; A plurality of adjustment rods are also arranged between the two side plates. A plurality of second slots corresponding to the first slots are arranged at intervals on one side of the adjustment rod facing the first slot. The adjustment rod is connected to the side plate through a connecting piece and can selectively slide along the length direction of the base.

2. The auxiliary tooling for substrate surface treatment according to claim 1, characterized in that: The connecting parts include two groups of intermediate connecting parts, and the two groups of intermediate connecting parts are respectively adjacent to the two ends of the side panels along the width direction thereof. Each group of intermediate connecting parts includes a plurality of connecting rods spaced from top to bottom, and the two ends of each connecting rod are respectively connected to the two side panels. At least one connecting rod in each group of intermediate connecting parts is provided with an adjusting long hole along its length direction, and the positions of the adjusting long holes on the connecting rods of the two groups of intermediate connecting parts correspond one to one. The two ends of the adjusting rod are respectively inserted into the adjusting long holes of the connecting rod, and the adjusting rod can slide along the length direction of the adjusting long hole and be locked by a locking member.

3. The auxiliary tooling for substrate surface treatment according to claim 2, characterized in that: In each group of the intermediate connecting parts, at least two of the connecting rods are provided with the adjusting long holes, and the connecting parts also include two synchronous connecting rods, which are respectively located on the outside of the intermediate connecting parts, and the ends of the adjusting rods pass through the adjusting long holes and are connected to the synchronous connecting rods.

4. The auxiliary tooling for substrate surface treatment according to claim 3, characterized in that: The synchronous link is connected to the end of the adjusting rod through an elastic component, and the elastic component makes the synchronous link have a tendency to move toward the intermediate connecting member and abut against the connecting rod.

5. The auxiliary tooling for substrate surface treatment according to claim 2, characterized in that: A scale mark is arranged on the outer side of the connecting rod and above or below the adjusting slot.

6. The auxiliary tooling for substrate surface treatment according to claim 1, characterized in that: The base comprises a bottom plate and two mounting seats. The bottom plate is provided with a plurality of through holes spaced apart along its thickness direction. The two mounting seats are respectively fixed to the two ends of the bottom plate along its width direction. The two ends of the support rod are respectively connected to the two mounting seats.

7. The auxiliary tooling for substrate surface treatment according to claim 6, characterized in that: The support rod is a cylindrical structure, and both ends of the support rod are pivotally connected to the mounting seat through pivot shafts, and the support rod can rotate around the pivot shafts.

8. The auxiliary tooling for substrate surface treatment according to claim 1, characterized in that: The first card slot and the second card slot have the same structure, and their cross-sections are composed of mutually interpenetrating rectangular slots and isosceles trapezoidal slots, wherein one side of the rectangular slot serves as the slot bottom, and the two sides adjacent to the slot bottom are respectively connected to the hypotenuse of the isosceles trapezoidal slot, and the long side of the isosceles trapezoidal slot serves as the slot opening.

9. The auxiliary tool for substrate surface treatment according to any one of claims 1 to 8, characterized in that: It also includes two groups of lifting ears, and one group of the lifting ears is respectively fixed on the outer side of each side plate and adjacent to the upper end of the side plate.

Images