Clean room equipment

Abstract

The utility model provides clean room equipment, an air conditioning area is arranged in a clean room, the height of the air conditioning area is higher than that of production equipment, and the clean room equipment comprises an air conditioning unit, an air circulation unit and a control unit, the height of the air circulation unit is higher than that of the air conditioning area, an air inlet of the air circulation unit is located below an air outlet of the air conditioning unit, an air supply outlet of the air circulation unit is located in the air conditioning area, a plurality of fins giving vortex components to the temperature-adjusted air blown into the air conditioning area are installed on the air supply outlet, and the fins are radially arranged around the central axis of the air supply outlet; one end of the exhaust pipeline is located at the production equipment, and the other end extends out of the clean room. The clean room is divided into the air conditioning areas, through cooperative arrangement of the air conditioning unit and the air circulation unit, cooling and heating temperature adjusting air can be provided for the air circulation unit, air in the air conditioning areas is purified and subjected to temperature adjusting in different seasons, the high-altitude air purification and temperature adjusting conditions are reduced, and energy consumption can be reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of air purification, and more particularly, relates to a clean room device. Background Art

[0002] Clean rooms are widely used in the fields of semiconductors, pharmaceutical industries, hospitals, food, cosmetics, beverage product production, animal laboratories, physical and chemical inspection rooms, and blood banks. There are two types of clean room devices: one is the non-laminar flow method (conventional method), in which the air in the clean room is mixed and diluted by air flow, and the other is the laminar flow method, in which the air in the clean room is pushed in one direction in a laminar state while discharging dust. Among them, the non-laminar flow clean room device has the advantage of being more economical than the laminar flow clean room device in terms of construction cost, operation cost, etc.

[0003] However, the traditional non-laminar flow clean room device evenly mixes and dilutes the air in the entire clean room. Usually, production equipment and personnel are only within a certain height above the ground. For the mixing and dilution of the air at high altitudes, excessive energy will be consumed. Summary of the Utility Model

[0004] The utility model provides a clean room device, in which there is an air-conditioning area in the clean room, production equipment is arranged in the air-conditioning area, the height of the air-conditioning area is higher than the height of the production equipment, and the clean room device includes:

[0005] An air-conditioning unit for providing temperature-controlled air to the air circulation unit;

[0006] An air circulation unit, the height of which is higher than the height of the air-conditioning area, the air inlet of which is located below the air outlet of the air-conditioning unit, and the air supply outlet of which is located in the air-conditioning area. A plurality of fins for imparting a vortex component to the temperature-controlled air blown into the air-conditioning area are installed on the air supply outlet, and the plurality of fins are radially arranged around the central axis of the air supply outlet;

[0007] An exhaust pipeline, one end of which is located at the production equipment and the other end extends to the outside of the clean room.

[0008] Optionally, the plurality of fins are inclined at the same angle with respect to a plane orthogonal to the central axis of the air supply outlet.

[0009] Optionally, the air-conditioning unit includes a compressor, a first heat exchanger, a throttling device, a four-way valve, a plurality of blowers, and a second heat exchanger connected by pipelines. A refrigerant is filled in the pipelines. Among them, the compressor, the first heat exchanger, the throttling device, and the four-way valve are installed outdoors, the plurality of blowers and the second heat exchanger are installed indoors and above the air circulation unit, and the air outlet of the second heat exchanger is used as the air outlet of the air-conditioning unit.

[0010] Optionally, the refrigerant outlet of the compressor is connected to the refrigerant inlet of the first heat exchanger through a pipeline via a four-way valve. The refrigerant outlet of the first heat exchanger is connected to the refrigerant inlet of the throttling device through a pipeline. The refrigerant outlet of the throttling device is connected to the refrigerant inlets of the second heat exchangers through a first pipeline. The refrigerant outlets of the second heat exchangers are connected to the refrigerant inlet of the compressor through a second pipeline via the four-way valve. The air outlet of the blower faces the second heat exchanger.

[0011] Optionally, the air circulation unit includes a housing, a second exhaust fan disposed within the housing, and a wind deflector disposed below the second exhaust fan. A filter is further disposed below the wind deflector.

[0012] Optionally, a plurality of the air outlets are provided on the front surface of the air circulation unit. One end of the wind deflector is fixed to the housing on the side of the air outlet, and the other end horizontally extends above at least the position of the filter. An opening is formed between the other end and the housing.

[0013] Optionally, the fins are formed by punching from a flat plate.

[0014] Optionally, the vortex components of the air blown out from adjacent air outlets are opposite.

[0015] Optionally, the exhaust pipeline is connected to a first exhaust fan outside the clean room, and the air volume at the air outlet of the air conditioning unit is greater than the exhaust volume of the first exhaust fan.

[0016] Optionally, the second exhaust fan and the first exhaust fan are variable-frequency fans.

[0017] The present utility model has the following beneficial effects:

[0018] (1) By dividing the clean room into air conditioning areas and arranging the air conditioning unit and the air circulation unit in cooperation, temperature-controlled air for refrigeration and heating can be provided for the air circulation unit, and the air in the air conditioning areas can be purified and temperature-controlled in different seasons, reducing the situation of purifying and temperature-controlling the air at high altitudes and reducing energy consumption.

[0019] (2) After the temperature-controlled air is given a rotational component by the fins at the air outlet, it can be quickly mixed with the air in the air conditioning area, enabling rapid adjustment of the indoor temperature.

[0020] (3) The rotational airflows blown out from each air outlet also increase the amount of air in the air conditioning area induced by the temperature-controlled air, which rapidly reduces the temperature difference between the temperature-controlled air and the surrounding air, and thus does not cause the need to increase the air supply volume by opening the air intake of the air conditioner due to insufficient uniformity of the upper and lower temperature differences. It can efficiently and uniformly adjust the air in the air conditioning area with as small an air volume as possible, having a certain energy-saving effect.

[0021] (4) The fins of the air supply outlet impart a rotational component to the conditioned air, which can increase the induction amount of the air in the air-conditioned area induced by the conditioned air. Moreover, with the increase in the induction amount, according to the law of conservation of momentum, the speed of the conditioned air rapidly decelerates after being supplied into the air-conditioned area. Therefore, there is almost no discomfort caused by the airflow with the supply of the conditioned air into the air-conditioned area.

[0022] (5) The fins of the air supply outlet impart a rotational component to the conditioned air, which can increase the induction amount of the air in the air-conditioned area induced by the amount of conditioned air. The air in the air-conditioned area and the conditioned air quickly mix and then rise to near the ceiling, which can effectively dilute the pollutants generated in the air-conditioned area, etc., so that the clean room can be kept clean.

[0023] (6) By guiding the airflow through the wind deflector, the conditioned air can be made to enter the filter more concentratedly and quickly, so as to improve the air supply efficiency. Description of the Drawings

[0024] By describing its embodiments in conjunction with the following drawings, the above features and technical advantages of the present utility model will become clearer and easier to understand.

[0025] Figure 1 It is a schematic diagram of the clean room equipment according to the embodiment of the present application.

[0026] Figure 2 It is a schematic diagram of the air conditioning unit according to the embodiment of the present application.

[0027] Figure 3 It is a side view of the air circulation unit according to the embodiment of the present application.

[0028] Figure 4 It is a front view of the air circulation unit according to the embodiment of the present application.

[0029] Figure 5 It is a schematic diagram of the air supply outlet providing a counterclockwise vortex component according to the embodiment of the present application.

[0030] Figure 6 It is a schematic diagram of the air supply outlet providing a clockwise vortex component according to the embodiment of the present application.

[0031] Figure 7 It is a schematic diagram of adjacent air supply outlets having vortex components in opposite directions according to the embodiment of the present application.

[0032] Figure 8 It is a schematic diagram of adjacent air supply outlets having vortex components in the same direction according to the embodiment of the present application. Detailed Embodiments

[0033] Embodiments of the present utility model will be described below with reference to the accompanying drawings. Those of ordinary skill in the art can recognize that the described embodiments can be modified in various different ways or in combinations thereof without departing from the spirit and scope of the present utility model. Therefore, the drawings and the description are illustrative in nature and are not used to limit the scope of protection of the claims. In addition, in this specification, the drawings are not drawn to scale, and the same reference numerals represent the same parts.

[0034] This application provides a cleanroom device for cleaning the air in a cleanroom 10. As Figure 1 shown, the interior of the cleanroom 10 is an enclosed space separated by a ceiling 10a, a floor 10b, and side walls 10c. The cleanroom 10 has a wide range of applications in fields such as semiconductor, pharmaceutical industry, hospitals, food, cosmetics, beverage product production, animal laboratories, physical and chemical inspection rooms, and blood banks. For example, in the semiconductor field, in the lower part of the cleanroom 10, a clean air-conditioning area 11 for manufacturing semiconductors and the like is formed. The air-conditioning area 11 is an area from the floor 10b to a predetermined height. There are various devices 12 in the air-conditioning area 11, such as semiconductor manufacturing equipment. The height of the air-conditioning area 11 is higher than the height of the devices 12. The lower part of the air circulation unit 30 is located in the air-conditioning area 11, while the upper part of the air circulation unit 30 protrudes from the air-conditioning area 11. Suspended particles a in the air are cleaned in the air-conditioning area 11, so that the devices located in the air-conditioning area 11 are in an environment with a cleanliness less than or equal to a predetermined concentration.

[0035] Figure 1 An example of the air circulation unit 30 installed on the side wall 10c is shown. However, in the case of a large-space cleanroom, the air circulation unit 30 can also be placed in the area between the side walls 10c of the cleanroom. For example, two air circulation units 30 are back-to-back so that their respective air supply outlets 32 do not face each other.

[0036] The cleanroom device of this application includes an air-conditioning unit for supplying temperature-controlled air to the air circulation unit. The temperature-controlled air can be low-temperature air for refrigeration or high-temperature air for heating; an air circulation unit 30 for adjusting the air cleanliness in the air-conditioning area; an exhaust pipe 13, one end of which is located at the device in the air-conditioning area and the other end extends outside the cleanroom 10. The first exhaust fan 14 outside the cleanroom, which is connected to the exhaust pipe 13, sucks the pollutants generated by the device 12 itself and discharges them as exhaust gas EA to the outside.

[0037] As Figure 1 、 Figure 2As shown in the figure, the air-conditioning unit includes a compressor 21, a first heat exchanger 23, a throttling device 25, a four-way valve 27, multiple sets of blowers 24 and a second heat exchanger 26 connected by pipelines, and a refrigerant is filled in the pipelines. Among them, the compressor 21, the first heat exchanger 23, the throttling device 25, and the four-way valve 27 are installed outdoors, and multiple sets of blowers and the second heat exchanger are installed indoors and above the air circulation unit 30. The refrigerant outlet of the compressor 21 is communicated with the refrigerant inlet of the first heat exchanger 23 through a pipeline via the four-way valve 27. The refrigerant outlet of the first heat exchanger 23 is communicated with the refrigerant inlet of the throttling device 25 through a pipeline. The refrigerant outlet of the throttling device 25 is communicated with the refrigerant inlets of the second heat exchangers 26 through a first pipeline 22. The refrigerant outlets of the second heat exchangers 26 are communicated with the refrigerant inlet of the compressor through a second pipeline 221 via the four-way valve. The air outlet of the blower 24 faces the second heat exchanger 26, and the air outlet of the second heat exchanger 26 is located above the air circulation unit 30.

[0038] When the air-conditioning unit cools, the compressor 21 compresses the low-temperature and low-pressure gaseous refrigerant into a high-temperature and high-pressure gaseous refrigerant, which enters the first heat exchanger 23 outside the clean room for condensation, condensing into a liquid refrigerant and releasing a large amount of heat at the same time. Then, the liquid refrigerant passes through the throttling device 25 for throttling and pressure reduction, becoming a low-temperature and low-pressure liquid refrigerant, flowing through the first pipeline 22 to the second heat exchanger 26 indoors. The low-temperature and low-pressure liquid refrigerant absorbs heat and evaporates into a low-temperature and low-pressure gaseous refrigerant, and the discharged low-temperature and low-pressure gaseous refrigerant flows through the second pipeline 221 to the compressor 21 to start the next cycle. The low-temperature air formed by heat exchange between the second heat exchanger and the surrounding air is blown out by the blower 24 and enters the air circulation unit 30.

[0039] When the air-conditioning unit heats, the gaseous refrigerant is pressurized by the compressor 21 to become a high-temperature and high-pressure gas, which enters the second heat exchanger 26 through the second pipeline 221, condenses and liquefies to release heat and becomes a low-temperature and high-pressure liquid refrigerant, while heating the indoor air at the same time. The blower 24 blows the heated air out from the air outlet of the second heat exchanger 26 and enters the air circulation unit 30. The low-temperature and high-pressure liquid refrigerant passes through the throttling device 25 for throttling and pressure reduction, becoming a low-temperature and low-pressure liquid refrigerant, and then enters the first heat exchanger 23. The low-temperature and low-pressure liquid refrigerant absorbs heat and evaporates into a low-temperature and low-pressure gaseous refrigerant, and enters the compressor 21 again to start the next cycle.

[0040] Multiple sets of blowers 24 and second heat exchangers 26 are arranged on the side wall 10c in the clean room 10. Correspondingly, an air circulation unit 30 is provided below the air outlet of each second heat exchanger 26, so that the air circulation unit 30 can surround the equipment 12 arranged in the clean room 10 from the periphery.

[0041] The structure of the air circulation unit will be described below. As Figure 3 andFigure 4 As shown, the air circulation unit 30 includes a housing 301, a second exhaust fan 37 disposed within the housing 301, and a wind deflector 40 disposed below the second exhaust fan 37. A filter 36 is further disposed below the wind deflector.

[0042] An air inlet 31 for sucking air from the clean room 10 is provided on the top surface of the air circulation unit 30. The air above the air-conditioning area 11 in the clean room 10 is sucked into the interior of the air circulation unit 30 through the air inlet 31 by the second exhaust fan 37. A plurality of air outlets 32 are provided on the front surface (the surface facing the interior of the clean room 10) of the air circulation unit 30. The plurality of air outlets 32 are spaced apart and distributed in the front part of the air circulation unit 30, and can be arranged in multiple rows and columns. The air is blown horizontally across the entire height direction of the air-conditioning area 11. Preferably, the second exhaust fan 37 and the first exhaust fan 14 are variable-frequency fans.

[0043] When the flow rate of the temperature-controlled and cleaned air SA supplied to the air-conditioning area 11 is less than 0.5 m / s, the entire air-conditioning area 11 may not be effectively mixed / diluted by the temperature-controlled and cleaned air SA. Therefore, as Figure 8 shown, a plurality of air circulation units 30 for supplying air to the air-conditioning area 11 are installed, and the number of operating units of the air circulation unit 30 can be switched according to the air supply volume. For example, when the air supply volume of the temperature-controlled and cleaned air SA decreases, the number of operating units of the air circulation unit 30 can be reduced to prevent the flow rate of the temperature-controlled and cleaned air SA from dropping below 0.5 m / s.

[0044] One end of the wind deflector 40 is fixed to the housing 301, and the other end horizontally extends above at least the position of the filter 36. An opening 41 is formed between the other end and the housing 301. The air sucked by the second exhaust fan 37 is blocked by the wind deflector 40 and then flows downward through the opening 41, passes through the filter 36, and the air is blown into the clean room 10 from the air outlet 32.

[0045] As Figure 5 and Figure 6 shown, a plurality of fins 45 are installed at each air outlet 32 in the front part of the air circulation unit 30. The fins 45 are uniformly installed along the circumferential direction of the air supply port on the central axis 32' of the air outlet 32. The central axis 32' can be supported on the axis by several struts fixedly connected to the inner wall of the air outlet. And each fin is inclined with respect to the central axis 32' of the air supply port, so that the air blown out from the air outlet 32 is given an eddy current component centered on the central axis 32' to the air-conditioning area 11 in the clean room 10.

[0046] The fins 45 can be formed by punching fins from a flat plate, such as the swirl-forming plate disclosed in FIG. 18 of the applicant's previous application No. CN200510059558.8.

[0047] In Figure 4 and Figure 5 , the inclination directions of the fins 45 are opposite, and according to Figure 4 the fins 45 shown, when passing through the air supply opening 32, when observing the front surface of the air circulation unit 30 from the inside of the clean room 10, the fins give the air a counterclockwise rotation component. According to Figure 5 the fins 45 shown, when observing from the inside of the clean room 10 when the air circulation unit 30 passes through the air supply opening 32, the fins give the air a clockwise rotation component.

[0048] As described above, a plurality of air supply openings 32 are distributed on the entire front surface of the air circulation unit 30, and their heights are substantially the same as those of the air conditioning area 11. Therefore, the vortex components of the air blown out from the adjacent air supply openings 32 cause an interference effect on each other. For example, as Figure 7 shown, taking four air supply openings 32a, 32b, 32c, and 32d arranged in the vertical direction as an example for description, the rotation directions of the vortex components of the air blown out from the adjacent air supply openings 32 are opposite. That is, the inclination directions of the fins 45 at the first air supply opening 32a and the third air supply opening 32c are the same. The inclination directions of the fins 45 at the second air supply opening 32b and the fourth air supply opening 32d are the same. Therefore, between the adjacent air supply openings 32a and 32b, 32b and 32c, 32c and 32d, air is blown out rotating in opposite rotation directions.

[0049] If the vortex components of the air blown out from the adjacent air supply openings 32a, 32b, 32c, and 32d are opposite, then between the air supply opening 32a and the air supply opening 32b, between the air supply opening 32b and the air supply opening 32c, and between the air supply opening 32c and the air supply opening 32d, since the air is blown out in the same direction, the vortex components of the air blown out from each of the air supply openings 32a, 32b, 32c, 32d can assist each other.

[0050] On the other hand, as shown in the example of Figure 8 , when air rotating in the same rotation direction is blown out from four air supply openings 32a, 32b, 32c, and 32d arranged in the vertical direction (in the example shown in Figure 8 , they all rotate in the counterclockwise rotation direction), between the air supply opening 32a and the air supply opening 32b, between the air supply opening 32b and the air supply opening 32c, and between the air supply opening 32c and the air supply opening 32d, the air is blown out in directions that cancel each other out. Therefore, the vortex components of the air blown out from the air supply openings 32a, 32b, 32c, and 32d can cancel the vortex components of the air blown out from each of the air supply openings 32a, 32b, 32c, and 32d.

[0051] It can be seen that the air supply outlets 32 arranged adjacent to each other can cancel out the vortex components by virtue of their different rotational directions of the vortex components.

[0052] In the clean room equipment 1, the temperature-controlled air CA generated by the air-conditioning unit is supplied from the air outlet of the second heat exchanger 26 to the upper part of the clean room 10. Since the air outlet of the second heat exchanger 26 is directly above the air circulation unit 30, the temperature-controlled air CA is directly supplied to the air circulation unit 30. Then, this air passes through the filter 36. The filter 36 can be arranged at a position covering the entire interior of a plurality of air supply outlets 32. The temperature-controlled clean air SA is blown out from the air supply outlets 32 after passing through the filter 36.

[0053] Therefore, due to the action of the fins 45, the temperature-controlled clean air SA blown out from each air supply outlet 32 has a vortex component, and the air in the air-conditioning area 11 at the bottom of the clean room 10 is attracted into the temperature-controlled clean air SA. Therefore, according to the law of conservation of momentum, the velocity of the temperature-controlled clean air SA rapidly decelerates after being blown out from each air supply outlet 32.

[0054] In addition, when the air is horizontally supplied from each air supply outlet 32 in front of the air circulation unit 30 to the clean room 10 in this way, through the power control of the second exhaust fan 37, the average flow velocity on the discharge surface to the air-conditioning area 11 at the bottom of the clean room 10 from each air supply outlet 32 is 0.5 m / s or more and 1.2 m / s or less (preferably 0.6 m / s or more and 1.1 m / s or less).

[0055] As a result, the air existing in the air-conditioning area 11 is mixed with the temperature-controlled clean air SA, so that the concentration of the suspended particles a in the entire air-conditioning area 11 is reduced by the dilution effect. By blowing out the temperature-controlled clean air SA from each air supply outlet 32 at a flow velocity of 0.5 m / s or higher and 1.2 m / s or lower, the entire air-conditioning area 11 can be diluted and mixed. In this way, not only can alternative ventilation be carried out with a small air supply flow rate, but also the suspended particles A that do not rise with the hot air flow can be diluted. Then, the temperature-controlled clean air SA blown out from each air supply outlet 32 rapidly decelerates and further blows the temperature-controlled clean air SA towards the air-conditioning area 11, so that the temperature-controlled clean air SA does not mix with the air existing above the air-conditioning area 11 in the clean room 10, and only the air-conditioning area 11 can be kept clean and temperature-controlled.

[0056] In addition, the pollutants generated from various equipment 12 (such as semiconductor manufacturing equipment provided in the clean room 10) are locally sucked into the exhaust duct 13 through the power of the first exhaust fan 14 and discharged to the outside as exhaust gas EA. In this case, by setting the air supply volume of the blower 24 provided in the air-conditioning unit to be greater than the exhaust volume of the first exhaust fan 14, the interior of the clean room 10 can always be maintained at a positive pressure, and the intrusion of pollutants from the outside can be prevented.

[0057] In addition, in the air-conditioned area 11, pollutants such as suspended particles A and the human body generated around the equipment 12 are ultimately heated by the thermal effects of the equipment 12, the human body, etc., and gradually rise. Therefore, pollutants such as suspended particles A generated in the air-conditioned area 11 are transported above the air-conditioned area 11 in the clean room 10. Then, the air (the air heated by the equipment 12, the human body, etc.) accumulated above the air-conditioned area 11 in the clean room 10 is inhaled into the air circulation unit 30 together with the conditioned air CA from the air inlet 31. Inside the air circulation unit 30, it is filtered through the filter 36 to become the conditioned clean air SA. The conditioned clean air SA is blown laterally from the air outlet 32 to the air-conditioned area 11 in the clean room 10. Therefore, the air-conditioned area 11 is always maintained in a clean and conditioned environment.

[0058] According to the clean room equipment 1, by circulating the air in the clean room 10 with the air circulation unit 30, the air-conditioned area 11 at the bottom of the clean room 10 can be diluted and mixed to maintain its cleanliness. The ventilation rate (based on the volume of the entire clean room 10) can be extremely low to ensure the cleanliness of the air-conditioned area 11. Therefore, energy consumption can be reduced. In addition, by the induction effect of the eddy current, the entire air-conditioned area 11 is diluted and mixed with the conditioned clean air SA, and the vertical temperature difference inside the air-conditioned area 11 can be reduced.

[0059] In addition, since the filter 36 has a high pressure loss, the air conveyed by the second exhaust fan 37 has a uniform pressure inside the filter 36. Therefore, when the conditioned air inhaled by the second exhaust fan 37 passes through the multiple air outlets 32 arranged vertically and horizontally, it passes through each air outlet 32 at substantially the same flow rate. That is to say, since the air passes through each air outlet 32 at a uniform temperature and a uniform flow rate, the eddy current component provided by the fins 45 of each air outlet 32 does not change. Therefore, the conditioned clean air SA with unchanged flow rate, temperature, and eddy current components is evenly blown into the entire air-conditioned area 11, and the temperature can be adjusted more evenly, and it will not cause the need to increase the air supply volume and open the air intake volume of the air-conditioning unit due to insufficient temperature difference uniformity. Therefore, it can efficiently perform uniform air conditioning in the air-conditioned area with the smallest possible air volume, having a certain energy-saving effect.

[0060] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cleanroom device, characterized in that, The clean room has an air-conditioned area where production equipment is arranged. The height of the air-conditioned area is higher than that of the production equipment. The clean room equipment includes: An air-conditioning unit for supplying temperature-controlled air to the air circulation unit; An air circulation unit, whose height is higher than that of the air-conditioned area. Its air inlet is located below the air outlet of the air-conditioning unit, and its air supply outlet is located within the air-conditioned area. A plurality of fins for imparting a vortex component to the temperature-controlled air blown into the air-conditioned area are installed on the air supply outlet, and the plurality of fins are arranged radially around the central axis of the air supply outlet; An exhaust pipe, one end of which is located at the production equipment and the other end extends outside the clean room.

2. The cleanroom equipment according to claim 1, characterized in that, The plurality of fins are inclined at the same angle with respect to a plane orthogonal to the central axis of the air supply outlet.

3. The cleanroom equipment according to claim 1, characterized in that, The air-conditioning unit includes a compressor, a first heat exchanger, a throttling device, a four-way valve, a plurality of sets of blowers, and a second heat exchanger connected by pipelines. Refrigerant is filled in the pipelines. Among them, the compressor, the first heat exchanger, the throttling device, and the four-way valve are installed outdoors, and the plurality of sets of blowers and the second heat exchanger are installed indoors and above the air circulation unit. The air outlet of the second heat exchanger serves as the air outlet of the air-conditioning unit.

4. The cleanroom equipment according to claim 3, wherein The refrigerant outlet of the compressor is connected to the refrigerant inlet of the first heat exchanger through a pipeline via the four-way valve. The refrigerant outlet of the first heat exchanger is connected to the refrigerant inlet of the throttling device through a pipeline. The refrigerant outlet of the throttling device is connected to the refrigerant inlets of the second heat exchangers through a first pipeline. The refrigerant outlets of the second heat exchangers are connected to the refrigerant inlet of the compressor through a second pipeline via the four-way valve. The air outlet of the blower faces the second heat exchanger.

5. The cleanroom equipment according to claim 1, characterized in that, The air circulation unit includes a housing, a second exhaust fan provided in the housing, and a wind deflector provided below the second exhaust fan. A filter is also provided below the wind deflector.

6. The cleanroom equipment according to claim 5, characterized in that, A plurality of the air supply outlets are provided on the front surface of the air circulation unit. One end of the wind deflector is fixed to the housing on the side of the air supply outlet, and the other end extends horizontally to at least above the position of the filter, and an opening is formed between the other end and the housing.

7. The cleanroom equipment according to claim 1, characterized in that The fins are formed by punching from a flat plate.

8. The cleanroom equipment according to claim 2, characterized in that, The vortex components of the air blown out from adjacent air supply outlets are opposite.

9. The cleanroom equipment according to claim 5, characterized in that, The exhaust pipe is connected to a first exhaust fan outside the clean room, and the air volume at the air outlet of the air-conditioning unit is greater than the exhaust volume of the first exhaust fan.

10. The clean room equipment according to claim 9, characterized in that, The second exhaust fan and the first exhaust fan are variable-frequency fans.

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