Split type rack of exposure machine

Abstract

The utility model discloses a split type frame of an exposure machine, which comprises a feeding frame and an exposure frame, one side of the exposure frame is provided with a first supporting seat and a second supporting seat, and the first supporting seat and the second supporting seat are respectively provided with a first positioning groove and a second positioning groove. A first fixed supporting leg and a second fixed supporting leg are fixedly installed on one side of the feeding rack, the first fixed supporting leg and the second fixed supporting leg are embedded into the first positioning groove and the second positioning groove correspondingly and are in positioning fit with each other, and a first adjusting supporting leg and a second adjusting supporting leg are installed on the other side of the feeding rack. The first fixed supporting leg, the second fixed supporting leg, the first adjusting supporting leg and the second adjusting supporting leg jointly support the feeding machine frame, the four adjusting supporting legs are installed at the bottom of the exposure machine frame, the split type machine frame can better adjust the relative height and the distance between the feeding machine frame and the exposure machine frame, and adjustment is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of exposure machines, in particular to a split frame of an exposure machine. Background Art

[0002] The exposure machine, also known as a photolithography machine, is a crucial piece of equipment in the semiconductor manufacturing process. Its main structure consists of an exposure head assembly, an automatic wafer loader and loading robot, a wafer adjustment table, and a plate frame assembly. The exposure head assembly, wafer adjustment table, and plate frame assembly are all mounted on the exposure rack, while the wafer loader and loading robot are mounted on the loading rack. Since all components of the exposure machine are mounted on the loading rack and exposure rack, the relative positional relationship between the loading rack and exposure rack directly affects the accuracy with which the loading robot delivers the wafer onto the wafer adjustment table. Current equipment generally requires the loading rack and exposure rack to be transported to the site separately for assembly. The loading rack and exposure rack require separate height adjustments to ensure they are aligned. Once aligned, they need to be brought closer together to ensure proper spacing. Therefore, the current split racks are very troublesome to debug. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a split frame of an exposure machine, which can better adjust the relative height and spacing between the loading frame and the exposure frame, and the adjustment is more convenient.

[0004] In order to solve the above technical problems, the technical solution of the utility model is: a split frame of an exposure machine, including a loading frame for supporting a wafer loading device and an exposure frame for installing an exposure head, a first support seat and a second support seat are installed on one side of the exposure frame, and the first support seat and the second support seat are respectively provided with a first positioning groove and a second positioning groove, a first fixed support foot and a second fixed support foot are fixedly installed on one side of the loading frame, the first fixed support foot and the second fixed support foot are respectively embedded in the first positioning groove and the second positioning groove and positioned and matched with each other; a first adjustment support foot and a second adjustment support foot are installed on the other side of the loading frame, the first fixed support foot, the second fixed support foot, the first adjustment support foot and the second adjustment support foot jointly support the loading frame, and four adjustment support feet are installed at the bottom of the exposure frame.

[0005] The first positioning groove includes a first coarse positioning groove and a first fine positioning groove, the first coarse positioning groove is provided on the first support seat, a side surface of the first coarse positioning groove is provided with a first side opening for facilitating the entry of the first fixed support leg, and the first fine positioning groove is provided on the groove bottom surface of the first coarse positioning groove; the side wall of the first fixed support leg is positioned and matched with the first coarse positioning groove, and the bottom of the first fixed support leg is positioned and matched with the first fine positioning groove;

[0006] The second positioning groove includes a second coarse positioning groove and a second fine positioning groove. The second coarse positioning groove is arranged on the second support seat. The side of the second coarse positioning groove is provided with a second side opening for facilitating the entry of the second fixed support foot. The second fine positioning groove is arranged on the bottom surface of the second coarse positioning groove; the second side opening and the first side opening face different sides, the side wall of the second fixed support foot is positioned and matched with the second coarse positioning groove, and the bottom of the second fixed support foot is positioned and matched with the second fine positioning groove.

[0007] As a preferred solution, the first coarse positioning groove and the second coarse positioning groove are both tapered grooves, and the first fine positioning groove and the second fine positioning groove are both circular grooves.

[0008] As a preferred solution, an auxiliary guide structure is further provided between the exposure frame and the loading frame.

[0009] As a preferred solution, the auxiliary guide structure includes auxiliary guide seats respectively fixed on the exposure frame and located on both sides of the loading frame, and the auxiliary guide seats are rotatably mounted with outer auxiliary guide rollers that cooperate with the outer wall of the loading frame for guidance.

[0010] As a preferred solution, an inner auxiliary guide roller is also rotatably installed on the loading frame, and the inner auxiliary guide roller is guided and cooperated with the inner wall of the auxiliary guide seat, and there is a height difference between the inner auxiliary guide roller and the outer auxiliary guide roller.

[0011] As a preferred solution, a strip-shaped guide step is provided on the auxiliary guide seat, and the inner auxiliary guide wheel is in rolling engagement with the side wall of the guide step.

[0012] After adopting the above technical scheme, the effect of the utility model is as follows: since the first support seat and the second support seat are installed on one side of the exposure frame, the first support seat and the second support seat are respectively provided with a first positioning groove and a second positioning groove, the first fixed support foot and the second fixed support foot are fixedly installed on one side of the loading frame, and the first fixed support foot and the second fixed support foot are respectively embedded in the first positioning groove and the second positioning groove and positioned and matched with each other; the other side of the loading frame is provided with a first adjustment support foot and a second adjustment support foot, and the first fixed support foot, the second fixed support foot, the first adjustment support foot and the second adjustment support foot jointly support the loading frame, and four adjustment support feet are installed at the bottom of the exposure frame. Therefore, after adjusting the exposure frame by adjusting the support feet, the first fixed support foot and the second fixed support foot on the loading frame are directly embedded in the first positioning groove and the second positioning groove and positioned and matched with each other, and then the height of the first adjustment support foot and the second adjustment support foot are adjusted, so that the height and spacing between the loading frame and the exposure frame can be matched through positioning and matching, so that the adjustment and matching of the two frames are faster and the operation is simpler.

[0013] Furthermore, since the first positioning groove includes a first coarse positioning groove and a first fine positioning groove, the first coarse positioning groove is arranged on the first support seat, and the side surface of the first coarse positioning groove is provided with a first side opening for facilitating the lateral entry of the first fixed support leg, and the first fine positioning groove is provided on the groove bottom surface of the first coarse positioning groove; the side wall of the first fixed support leg is positioned and matched with the first coarse positioning groove, and the bottom of the first fixed support leg is positioned and matched with the first fine positioning groove; the second positioning groove includes a second coarse positioning groove and a second fine positioning groove, and the second coarse positioning groove is provided on the second support seat, and the side surface of the second coarse positioning groove is provided with a second side opening for facilitating the lateral entry of the second fixed support leg, The second fine positioning groove is arranged on the bottom surface of the second rough positioning groove; the second side opening and the first side opening face different sides, the side wall of the second fixed support foot is positioned and matched with the second rough positioning groove, and the bottom of the second fixed support foot is positioned and matched with the second fine positioning groove. Therefore, the first fixed support foot and the second fixed support foot can both be accurately matched with the first positioning groove and the second positioning groove through rough positioning and fine positioning, thereby ensuring the accuracy when assembling the loading rack and the exposure rack. In particular, the second side opening and the first side opening face different sides, which can not only facilitate the insertion of the first fixed support foot and the second fixed support foot, but also further limit the position of the first fixed support foot and the second fixed support foot so that they cannot shake.

[0014] Furthermore, since the first coarse positioning groove and the second coarse positioning groove are both tapered grooves, and the first fine positioning groove and the second fine positioning groove are both circular grooves, the tapered grooves can facilitate the placement of the first fixed support leg and the second fixed support leg.

[0015] Furthermore, since the auxiliary guide structure includes auxiliary guide seats respectively fixed on the exposure frame and located on both sides of the loading frame, the auxiliary guide seats are rotatably mounted with outer auxiliary guide rollers that cooperate with the outer wall guides of the loading frame. Therefore, the outer auxiliary guide rollers can better constrain the two sides of the loading frame, thereby ensuring the accurate position of the two sides of the loading frame.

[0016] Since an inner auxiliary guide roller is also rotatably installed on the loading rack, the inner auxiliary guide roller is guided and cooperated with the inner wall of the auxiliary guide seat, and there is a height difference between the inner auxiliary guide roller and the outer auxiliary guide roller. In this way, the loading rack is further constrained by the inner auxiliary guide roller to ensure that the relative position between the loading rack and the exposure rack is accurate when the loading rack is placed. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 It is a structural schematic diagram of an embodiment of the utility model;

[0019] Figure 2 It is a partial structural diagram of an embodiment of the utility model;

[0020] Figure 3 This is a partial structural diagram of an exposure frame according to an embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram of the bottom structure of the loading rack according to an embodiment of the present utility model;

[0022] Figure 5 This is an enlarged view of a portion of the structure of the auxiliary guide seat of the embodiment of the utility model;

[0023] In the accompanying drawings: 1. Loading rack; 2. Exposure rack; 3. First support seat; 4. Second support seat; 5. First positioning groove; 51. First coarse positioning groove; 52. First fine positioning groove; 6. Second positioning groove; 61. Second coarse positioning groove; 62. Second fine positioning groove; 7. First fixed support foot; 8. Second fixed support foot; 9. First adjustable support foot; 10. Second adjustable support foot; 11. Auxiliary guide seat; 12. Outer auxiliary guide wheel; 13. Inner auxiliary guide wheel. DETAILED DESCRIPTION

[0024] The present invention will be described in further detail below through specific embodiments.

[0025] like Figure 1-5 As shown, a split-type frame of an exposure machine includes a loading frame 1 for supporting a wafer loading device and an exposure frame 2 for installing an exposure head, a first support seat 3 and a second support seat 4 are installed on one side of the exposure frame 2, and a first positioning groove 5 and a second positioning groove 6 are respectively provided on the first support seat 3 and the second support seat 4, a first fixed support foot 7 and a second fixed support foot 8 are fixedly installed on one side of the loading frame 1, the first fixed support foot 7 and the second fixed support foot 8 are respectively embedded in the first positioning groove 5 and the second positioning groove 6 and positioned and matched with each other, a first adjustment support foot 9 and a second adjustment support foot 10 are installed on the other side of the loading frame 1, the first fixed support foot 7, the second fixed support foot 8, the first adjustment support foot 9 and the second adjustment support foot 10 jointly support the loading frame 1, and four adjustment support feet are installed at the bottom of the exposure frame 2.

[0026] In this embodiment, the first positioning groove 5 includes a first coarse positioning groove 51 and a first fine positioning groove 52. The first coarse positioning groove 51 is provided on the first support seat 3. The side surface of the first coarse positioning groove 51 is provided with a first side opening for facilitating the entry of the first fixed support leg 7. The first fine positioning groove 52 is provided on the bottom surface of the first coarse positioning groove 51. The side wall of the first fixed support leg 7 is positioned and matched with the first coarse positioning groove 51, and the bottom of the first fixed support leg 7 is positioned and matched with the first fine positioning groove 52.

[0027] The second positioning groove 6 includes a second rough positioning groove 61 and a second fine positioning groove 62. The second rough positioning groove 61 is provided on the second support seat 4. A second side opening is provided on the side of the second rough positioning groove 61 for easy entry of the second fixed support leg 8. The second fine positioning groove 62 is provided on the bottom surface of the second rough positioning groove 61. The second side opening and the first side opening face different sides. The side wall of the second fixed support leg 8 is positioned and matched with the second rough positioning groove 61, and the bottom of the second fixed support leg 8 is positioned and matched with the second fine positioning groove 62.

[0028] The first coarse positioning groove 51 and the second coarse positioning groove 61 are both tapered grooves, and the first fine positioning groove 52 and the second fine positioning groove 62 are both circular grooves.

[0029] In this embodiment, an auxiliary guide structure is also provided between the exposure frame 2 and the loading frame 1. The auxiliary guide structure includes auxiliary guide seats 11 respectively fixed on the exposure frame 2 and located on both sides of the loading frame 1. The auxiliary guide seats 11 are rotatably mounted with outer auxiliary guide rollers 12 that cooperate with the outer wall guide of the loading frame 1. The auxiliary guide seats 11 are provided with strip-shaped guide steps.

[0030] An inner auxiliary guide roller 13 is also rotatably mounted on the loading frame 1, and the inner auxiliary guide roller 13 is guided in cooperation with the inner wall of the auxiliary guide seat 11. There is a height difference between the inner auxiliary guide roller 13 and the outer auxiliary guide roller 12, and the inner auxiliary guide wheel is in rolling cooperation with the side wall of the above-mentioned guide step.

[0031] As can be seen from the accompanying drawings, the first fixed support leg 7 and the second fixed support leg 8 are both mounted on a side away from the exposure frame 2. The first adjustable support leg 9 and the second adjustable support leg 10 have the same structure and both utilize a screw-nut mechanism. Of course, the first adjustable support leg 9 and the second adjustable support leg 10 may also utilize other structures as needed.

[0032] In this embodiment, the first positioning groove 5 and the second positioning groove 6 have substantially the same structure except that the directions of the first side opening and the second side opening are different.

[0033] During operation, first adjust the exposure frame 2 by adjusting the four adjustment support feet at the bottom of the exposure frame 2, and then directly embed the first fixed support foot 7 and the second fixed support foot 8 on the loading frame 1 into the first positioning groove 5 and the second positioning groove 6 respectively. The first fixed support foot 7 is accurately matched with the first rough positioning groove 51 and the first fine positioning groove 52, and the second fixed support foot 8 is accurately matched with the second rough positioning groove 61 and the second fine positioning groove 62. Then adjust the height of the first adjustment support foot 9 and the second adjustment support foot 10, so that the height and spacing between the loading frame 1 and the exposure frame 2 can be matched through positioning. In addition, the outer auxiliary guide roller 12 and the inner auxiliary guide roller 13 can better constrain the accuracy and stability of the loading frame 1 during the matching positioning process, ensure the accurate position of both sides of the loading frame 1, and make the operation simpler and the adjustment faster.

[0034] The air circuit system, servo motor and other actuators, gear transmission mechanism, and screw-nut mechanism mentioned in this embodiment are all current conventional technologies. The specific structure and principle and other designs of the cylinder, motor and other transmission mechanisms are disclosed in detail in the "Mechanical Design Manual, Fifth Edition", the 28th printing of the fifth edition in Beijing in April 2008. They belong to the existing technology and their structure is clear. The book "Motor Drive and Speed ​​Regulation" published by Chemical Industry Press on July 1, 2015 also introduces the control of the motor and the travel switch in detail. Therefore, the circuit and air circuit connections are clear.

[0035] The above-described embodiments are merely descriptions of preferred implementations of the present invention and are not intended to limit the scope of the invention. Various modifications and alterations to the technical solutions of the present invention, without departing from the spirit of the present invention, should fall within the scope of protection defined in the claims of the present invention.

Claims

1. A split-type exposure machine frame, characterized in that: The invention comprises a loading rack for supporting a wafer loading device and an exposure rack for installing an exposure head, wherein a first support seat and a second support seat are installed on one side of the exposure rack, and a first positioning groove and a second positioning groove are respectively provided on the first support seat and the second support seat, and a first fixed support foot and a second fixed support foot are fixedly installed on one side of the loading rack, and the first fixed support foot and the second fixed support foot are respectively embedded in the first positioning groove and the second positioning groove and positioned and matched with each other, and a first adjustment support foot and a second adjustment support foot are installed on the other side of the loading rack, and the first fixed support foot, the second fixed support foot, the first adjustment support foot and the second adjustment support foot jointly support the loading rack, and four adjustment support feet are installed on the bottom of the exposure rack.

2. The split-type exposure machine frame according to claim 1, wherein: The first positioning groove includes a first coarse positioning groove and a first fine positioning groove, the first coarse positioning groove is provided on the first support seat, a side surface of the first coarse positioning groove is provided with a first side opening for facilitating the entry of the first fixed support leg, and the first fine positioning groove is provided on the groove bottom surface of the first coarse positioning groove; the side wall of the first fixed support leg is positioned and matched with the first coarse positioning groove, and the bottom of the first fixed support leg is positioned and matched with the first fine positioning groove; The second positioning groove includes a second coarse positioning groove and a second fine positioning groove. The second coarse positioning groove is arranged on the second support seat. The side of the second coarse positioning groove is provided with a second side opening for facilitating the entry of the second fixed support foot. The second fine positioning groove is arranged on the bottom surface of the second coarse positioning groove; the second side opening and the first side opening face different sides, the side wall of the second fixed support foot is positioned and matched with the second coarse positioning groove, and the bottom of the second fixed support foot is positioned and matched with the second fine positioning groove.

3. The split-type exposure machine frame according to claim 2, wherein: The first coarse positioning groove and the second coarse positioning groove are both tapered grooves, and the first fine positioning groove and the second fine positioning groove are both circular grooves.

4. The split-type exposure machine frame according to any one of claims 1 to 3, characterized in that: An auxiliary guide structure is also provided between the exposure frame and the loading frame.

5. The split-type exposure machine frame according to claim 4, characterized in that: The auxiliary guide structure includes auxiliary guide seats respectively fixed on the exposure frame and located on both sides of the loading frame, and outer auxiliary guide rollers that are rotatably mounted on the auxiliary guide seats and cooperate with the outer side wall of the loading frame for guidance.

6. The split-type exposure machine frame according to claim 5, characterized in that: An inner auxiliary guide roller is also rotatably mounted on the loading frame. The inner auxiliary guide roller is guided and matched with the inner wall of the auxiliary guide seat. There is a height difference between the inner auxiliary guide roller and the outer auxiliary guide roller.

7. The split-type exposure machine frame according to claim 6, characterized in that: The auxiliary guide seat is provided with a strip-shaped guide step, and the inner auxiliary guide roller is in rolling cooperation with the side wall of the guide step.

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