Substrate correction device and coating machine

By setting fixing components and positioning components on both sides of the coating platform and using fixed top plates and positioning components to clamp the substrate, the problem of inaccurate positioning caused by the bending of traditional ejector pins is solved, and high-precision positioning of the substrate and improvement of coating accuracy are achieved.

CN223393647UActive Publication Date: 2025-09-30LG DISPLAY HIGH-TECH (CHINA) CO LTD
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Patent Information

Application Number
CN202422490554.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-15
Publication Date
2025-09-30
Estimated Expiration
2034-10-15

AI Technical Summary

Technical Problem

In traditional substrate correctors, the ejector pin structure is prone to bending, resulting in inaccurate substrate positioning, poor coating and contamination, and speed differences between multiple drive components affect positioning accuracy.

Method used

The fixing assembly and positioning assembly are respectively arranged on both sides of the coating platform. The substrate is clamped by the fixed top plate and positioning component. The positioning component is driven separately in combination with the driving part to avoid the bending error of the ejector pin. The accurate positioning of the substrate is ensured by the positioning sensor and the correction assembly.

Benefits of technology

It achieves high-precision positioning of the substrate, avoids errors caused by bending of the ejector pin, ensures coating accuracy and reduces pollution, and improves the working efficiency of the coating machine.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of electronic display substrate processing, and discloses a substrate correcting device which comprises a fixing assembly and a positioning assembly which are sequentially arranged in the first direction of a coating platform, the fixing assembly and the positioning assembly are arranged on the two opposite sides of the coating platform respectively, and the fixing assembly comprises a fixing top plate arranged on one side of the coating platform. One end of the fixed top plate is connected with the coating platform, the side, connected with the coating platform, of the fixed top plate is perpendicular to the coating platform, and the positioning assembly is arranged on the side, opposite to the fixed top plate, of the coating platform and comprises a positioning component and a first driving part; the first driving piece is in transmission connection with the positioning component to drive the positioning component to move in the first direction. The utility model also discloses a coating machine comprising the substrate correcting device, the substrate correcting device and the coating machine can effectively realize the positioning and correction of the substrate on a coating platform, and the positioning accuracy is high.
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Description

Technical Field

[0001] The utility model relates to the technical field of electronic display substrate processing, in particular to a substrate correction device and a coating machine. Background Art

[0002] In the manufacturing process of electronic displays, glass substrates need to be coated. Specifically, the substrates are placed on the coating platform of a coating machine through a conveyor belt or a robot. At this time, the position of the substrate is not square, and the substrate needs to be corrected and positioned so that the coating machine can apply photoresist to the corresponding position of the substrate.

[0003] In the prior art, Figure 1 As shown, the corrector commonly used in conventional coating operations consists of two movable ejector pins 1′ and two fixed ejector pins 2′. During the correction process, the two movable ejector pins 1′ move toward one side of the two fixed ejector pins 2′, allowing the movable ejector pins 1′ and the fixed ejector pins 2′ to clamp the substrate 3′ from both sides, completing the correction. However, conventional correctors have several drawbacks: the two movable ejector pins 1′ are driven by two independent slide rails 4′, each of which has a different operating speed. Furthermore, the ejector pin structure can bend under prolonged stress, making it impossible to accurately position the substrate 3′. This often causes the substrate 3′ to shift, and some photoresist to be coated onto the outside of the substrate 3′. This not only results in poor coating of the substrate 3′ but also contaminates the coating machine. Utility Model Content

[0004] The purpose of the utility model is to provide a substrate correction device and a coating machine, which can effectively realize the positioning and correction of the substrate on the coating platform with high positioning accuracy.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A substrate correction device is provided, comprising a fixing assembly and a positioning assembly arranged in sequence along a first direction of a coating platform, the fixing assembly and the positioning assembly being respectively arranged on opposite sides of the coating platform, the fixing assembly comprising a fixed top plate arranged on one side of the coating platform, one end of the fixed top plate being connected to the coating platform, a side of the fixed top plate connected to the coating platform being perpendicular to the coating platform, the positioning assembly being arranged on a side of the coating platform opposite to the fixed top plate, the positioning assembly comprising a positioning member and a first driving member, the first driving member being transmission-connected to the positioning member to drive the positioning member to move along the first direction.

[0007] In one embodiment, the positioning assembly further includes a second driving member, which is transmission-connected to the positioning member to drive the positioning member to move along a second direction, and the second direction is perpendicular to the first direction.

[0008] In one embodiment, the positioning member includes a first sliding bracket, a second sliding bracket and a pressing member, the first driving member includes a first slide rail, the first sliding bracket is slidably set on the first slide rail, the second driving member includes a second slide rail, the second slide rail is fixed on the first sliding bracket, the second sliding bracket is slidably set on the second slide rail, and the pressing member is set on the side of the second sliding bracket facing the coating platform.

[0009] In one embodiment, the pressing member is a roller, the roller is connected to the second sliding bracket via a connecting rod, and the roller is rotatably connected to the connecting rod.

[0010] In one embodiment, the connecting rod is an elastic telescopic rod.

[0011] In one embodiment, two positioning members are provided, and the two positioning members are arranged sequentially along the second direction.

[0012] In one embodiment, the substrate correction device further includes a detection component, the positioning component includes a positioning sensor disposed on the coating platform, and a sensing portion for sensing and identifying by the positioning sensor is provided at a position on the substrate corresponding to the positioning sensor.

[0013] In one embodiment, the substrate correction device also includes a correction component, which is connected to the detection component. The correction component is arranged on both sides of the coating platform along the second direction, and is used to adjust the position of the substrate along the second direction, and the second direction is arranged perpendicular to the first direction.

[0014] In one embodiment, the fixed top plate includes a vertical plate and an inclined plate, one end of the vertical plate is connected to the coating platform and is perpendicular to the coating platform, and the other end of the vertical plate is connected to the inclined plate, and the inclined plate is inclined toward the side away from the coating platform.

[0015] On the other hand, a coating machine is also provided, comprising the above-mentioned substrate correction device, and also comprising a coating platform for placing the substrate, a coating drive assembly being provided on one side of the coating platform, a coating nozzle being transmission-connected to the coating drive assembly, and the coating nozzle being arranged directly above the coating platform and facing the substrate.

[0016] Beneficial effects of the utility model:

[0017] The utility model provides a substrate correction device, which is provided with a fixing component and a positioning component on two opposite sides of a coating platform, wherein the positioning component includes a fixed top plate connected to the coating platform, and the side of the fixed top plate connected to the coating platform is perpendicular to the coating platform. During the process of substrate correction, the substrate is first placed on the coating platform, and the first driving member drives the positioning member to push the substrate toward the fixed top plate in a first direction, thereby clamping the substrate by the positioning member and the fixed top plate so that the substrate is placed squarely on the coating platform, thereby achieving the positioning of the substrate. This device adopts a fixed top plate to ensure that the side of the substrate that abuts the fixed top plate can be completely fitted with the fixed top plate, and can avoid the situation in which the ejector pin used in traditional technology is easily bent and produces errors, effectively ensuring the flatness of the substrate positioning, and the positioning member is driven separately by the first driving member, avoiding the errors between multiple drives in traditional technology, further ensuring the positioning accuracy of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural diagram of substrate correction in the background art;

[0019] Figure 2 It is another structural schematic diagram of substrate correction in the background art;

[0020] Figure 3 is a schematic top view of the structure of a substrate correction device in one embodiment;

[0021] Figure 4 is a schematic diagram of the main structure of a substrate correction device in one embodiment;

[0022] Figure 5 is a schematic structural diagram of a positioning component in one embodiment;

[0023] Figure 6 is a schematic structural diagram of a substrate correction device in another embodiment;

[0024] Figure 7 is a schematic diagram of the sensing state of the positioning sensor and the sensing portion in one embodiment;

[0025] Figure 8 Schematic diagram of the structure of a coating machine in one embodiment.

[0026] Figures 1 to 2 middle:

[0027] 1′, movable ejector pin; 2′, fixed ejector pin; 3′, base plate; 4′, slide rail.

[0028] Figures 3 to 8 middle:

[0029] 1. Fixing assembly; 11. Fixed top plate; 111. Vertical plate; 112. Inclined plate; 2. Positioning assembly; 21. First slide rail; 22. Positioning member; 221. First sliding bracket; 222. Second sliding bracket; 223. Roller; 224. Connecting rod; 225. Pressure sensor; 23. Second slide rail; 3. Base plate; 31. Sensing unit; 4. Positioning sensor; 5. Correction assembly; 51. Third slide rail; 52. Correction head; 6. Coating machine; 61. Chassis; 62. Coating platform; 63. Fourth slide rail; 64. Coating bracket; 641. Vertical frame; 642. Horizontal frame; 65. Coating nozzle. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0031] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0032] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0034] like Figures 3 to 7 As shown, a substrate correction device of this embodiment includes a fixing component 1 and a positioning component 2 arranged in sequence along a first direction of a coating platform 62, and the fixing component 1 and the positioning component 2 are respectively arranged on opposite sides of the coating platform 62. The fixing component 1 includes a fixed top plate 11 arranged on one side of the coating platform 62, one end of the fixed top plate 11 is connected to the coating platform 62, and the side where the fixed top plate 11 is connected to the coating platform 62 is perpendicular to the coating platform 62. The positioning component 2 is arranged on the side of the coating platform 62 opposite to the fixed top plate 11, and the positioning component 2 includes a positioning member 22 and a first driving member. The first driving member is transmission-connected to the positioning member 22 to drive the positioning member 22 to move along the first direction.

[0035] In this embodiment, a fixing assembly 1 and a positioning assembly 2 are respectively provided on opposite sides of the coating platform 62, wherein the positioning assembly 2 includes a fixed top plate 11 connected to the coating platform 62, and the side of the fixed top plate 11 connected to the coating platform 62 is perpendicular to the coating platform 62. During the correction of the substrate 3, the substrate 3 is first placed on the coating platform 62, and the first driving member drives the positioning member 22 to push the substrate 3 toward the fixed top plate 11 along the first direction, so that the substrate 3 is clamped by the positioning member 22 and the fixed top plate 11 so that the substrate 3 is placed squarely on the coating platform 62, thereby achieving the positioning of the substrate 3. The present device adopts a fixed top plate 11 to ensure that the side of the substrate 3 that abuts the fixed top plate 11 can be completely fitted with the fixed top plate 11, and can avoid the situation in which the ejector pin used in the traditional technology is easily bent and causes errors, effectively ensuring the flatness of the positioning of the substrate 3, and the positioning member 22 is driven separately by the first driving member, avoiding the errors between multiple drives in the traditional technology, further ensuring the positioning accuracy of the substrate 3.

[0036] In one embodiment, the positioning assembly 2 further includes a second drive member, which is in transmission connection with the positioning member 22 to drive the positioning member 22 to move in a second direction, which is perpendicular to the first direction. This allows the positioning member 22 to move in the first and second directions, respectively, to push the substrate 3 at various positions, ensuring that the substrate 3 is aligned and placed squarely on the coating platform 62.

[0037] Specifically, the positioning member 22 includes a first sliding bracket 221, a second sliding bracket 222, and a pressing member. The first driving member includes a first slide rail 21, the first sliding bracket 221 is slidably arranged on the first slide rail 21, the second driving member includes a second slide rail 23, the second slide rail 23 is fixed to the first sliding bracket 221, the second sliding bracket 222 is slidably arranged on the second slide rail 23, and the pressing member is arranged on the side of the second sliding bracket 222 facing the coating platform 62. Therefore, the pressing member can move in the first direction and the second direction respectively through the first slide rail 21 and the second slide rail 23 to abut against various positions of the substrate 3 and push toward the side of the fixed top plate 11, ensuring that one side of the substrate 3 is in contact with the fixed top plate 11, so as to correct the substrate 3 to a square state on the coating platform 62.

[0038] In one embodiment, the abutting member is a roller 223, which is connected to the second sliding bracket 222 via a connecting rod 224. The roller 223 is rotatably connected to the connecting rod 224. The roller 223 abuts against one side of the substrate 3 and pushes the substrate 3 in a first direction. Simultaneously, the roller 223 rolls along the side of the substrate 3 in a second direction, thereby effectively pushing the entire substrate 3 toward the side of the fixed top plate 11 and ensuring that the side of the substrate 3 adjacent to the fixed top plate 11 is completely in contact with the fixed top plate 11, thereby ensuring that the substrate 3 is corrected to a square position on the coating platform 62.

[0039] In one embodiment, the connecting rod 224 is an elastic telescopic rod. On the one hand, it can prevent the roller 223 from directly contacting and colliding with the base plate 3 through rigid contact, which could easily cause damage to the base plate 3. The connecting rod 224 with an elastic telescopic rod structure can achieve a certain degree of buffering, reducing the impact force between the roller 223 and the base plate 3. On the other hand, by using the elastic connecting rod 224, the roller 223 can always maintain the thrust on the base plate 3 when pushing the base plate 3, ensuring that the roller 223 fully contacts and pushes the base plate 3 toward the fixed top plate 11, and making one side of the base plate 3 press against the fixed top plate 11.

[0040] Furthermore, in actual operation, a pressure sensor 225 is provided on the connecting rod 224 to measure and determine whether the connecting rod 224 is in a compressed state, that is, to measure and determine whether the roller 223 is pressed against the substrate 3 and always has a certain thrust on the substrate 3, to ensure that the roller 223 applies sufficient thrust to one side of the substrate 3 to push the substrate 3 toward the fixed top plate 11, and to ensure that the other side of the substrate 3 is completely in contact with the fixed top plate 11.

[0041] In one embodiment, Figure 6As shown, two positioning members 22 are provided, and the two positioning members 22 are arranged sequentially along the second direction. The two positioning members 22 move synchronously to push the substrate 3, which helps to ensure the smooth movement of the substrate 3 during the pushing process, and further improves the smoothness and accuracy of the correction of the substrate 3. Of course, in other embodiments, according to actual conditions, when the substrate 3 is large, a design with three, four, or more than two positioning members 22 can also be adopted to ensure the smooth pushing of the substrate 3. Such designs all fall within the scope of protection of the present utility model.

[0042] In one embodiment, the substrate 3 correction device further includes a detection assembly, which includes a positioning sensor 4 disposed on the coating platform 62. A sensing portion 31 for sensing and identifying the positioning sensor 4 is provided at a position on the substrate 3 corresponding to the positioning sensor 4. Specifically, when the positioning member 22 is driven by the first driving member to push and correct the substrate 3, the positioning sensor 4 is activated for detection. When the positioning sensor 4 detects the corresponding sensing portion 31 on the substrate 3, it indicates that the substrate 3 has been corrected to a predetermined position. At this time, the driving of the positioning member 22 can be stopped, and the coating machine 6 can be activated to coat the substrate 3.

[0043] Furthermore, if Figure 7 As shown, in actual operation, the substrate 3 is typically rectangular, and four sensing portions 31 are provided on the substrate 3, one adjacent to each of the four corners of the substrate 3. Correspondingly, four positioning sensors 4 are provided, one corresponding to each of the four sensing portions 31. During the calibration process, when all four positioning sensors 4 simultaneously detect the four sensing portions 31, it indicates that the substrate 3 has been calibrated to the preset position. Sensing and identifying at four points helps improve the accuracy of sensing and identification, ensuring that the substrate 3 is fully calibrated to the preset position.

[0044] In one embodiment, Figure 6 As shown, the substrate correction device also includes a correction component 5, which is connected to the detection component. The correction component 5 is arranged on both sides of the coating platform 62 along the second direction, and is used to adjust the position of the substrate 3 along the second direction, and the second direction is arranged perpendicular to the first direction. Specifically, when the positioning member 22 abuts and pushes the substrate 3 to completely abut the fixed top plate 11, and the positioning sensor 4 does not recognize that the substrate 3 is in the preset position, the substrate 3 is already in a square state at this time, and the correction component 5 is started to adjust the substrate 3 to perform translational movement along the second direction until the positioning sensor 4 senses the corresponding sensing part 31, which indicates that the substrate 3 is in the preset position. The positioning sensor 4 feeds back the detection signal to the correction component 5, and the correction component 5 stops driving, completing further correction adjustment, so that the substrate 3 remains in the preset position.

[0045] In actual operation, during this correction process, the positioning member 22 always exerts a certain thrust on the substrate 3 to prevent the position of the substrate 3 from changing in the first direction when the correction component 5 adjusts the position of the substrate 3 along the second direction, resulting in the inability to complete the correction.

[0046] Specifically, the correcting assembly 5 includes a third slide rail 51 respectively arranged on both sides of the coating platform 62 along the second direction, and a correcting head 52 is slidably arranged on the third slide rail 51. The correcting head 52 moves along the second direction on the third slide rail 51. The correcting head 52 pushes the substrate 3 to move along the second direction from both sides of the substrate 3 to achieve the effect of adjusting the position of the substrate 3 in the second direction.

[0047] Of course, in other embodiments, the structure of the correction component 5 can also be adopted, such as a structure such as a robot arm or a clamp, and the substrate 3 can be adjusted by directly clamping it. As long as the position of the substrate 3 can be adjusted along the second direction, thereby ensuring that the substrate 3 is corrected to a preset position, such designs all fall within the scope of protection of the present utility model.

[0048] In one embodiment, the fixed top plate 11 includes a vertical plate 111 and an inclined plate 112. One end of the vertical plate 111 is connected to the coating platform 62 and is arranged perpendicular to the coating platform 62. The other end of the vertical plate 111 is connected to the inclined plate 112, and the inclined plate 112 is arranged to be inclined toward the side away from the coating platform 62. When one side of the substrate 3 falls onto the fixed bottom plate, due to the action of the inclined plate 112, the substrate 3 will slide back onto the coating platform 62 along with the inclined plate 112, preventing the substrate 3 from being partially stuck on the fixed top plate 11. This helps ensure that the substrate 3 can accurately fall within the range of the coating platform 62 when it is loaded, facilitating subsequent positioning and correction operations.

[0049] On the other hand, Figure 8As shown, a coating machine 6 is also provided, comprising the above-mentioned substrate correction device, and also comprising a coating platform 62 for placing the substrate 3, a coating drive assembly being provided on one side of the coating platform 62, a coating nozzle 65 being transmission-connected to the coating drive assembly, and the coating nozzle 65 being arranged directly above the coating platform 62 and facing the substrate 3. Specifically, the coating machine 6 also comprises a chassis 61, the substrate correction device and the coating platform 62 are both arranged on the chassis 61, the coating drive assembly further comprises a fourth slide rail 63 arranged on the chassis 61, a coating bracket 64 is slidably arranged on the fourth slide rail 63, the coating bracket 64 comprises a vertical frame 641 and a horizontal frame 642, the horizontal frame 642 being movably arranged on the vertical frame 641, and the coating platform 62 is located within the motion range of the horizontal frame 642, so that one side of the horizontal frame 642 can be erected directly above the coating platform 62. The coating nozzle 65 is movably arranged on the horizontal frame 642 , that is, the coating platform 62 is located within the movement range of the coating nozzle 65 , so that the coating nozzle 65 can coat the substrate 3 placed on the coating platform 62 .

[0050] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A substrate correction device, characterized in that: The coating platform comprises a fixing assembly and a positioning assembly which are sequentially arranged along a first direction of the coating platform, wherein the fixing assembly and the positioning assembly are respectively arranged on opposite sides of the coating platform, the fixing assembly comprises a fixed top plate which is arranged on one side of the coating platform, one end of the fixed top plate is connected to the coating platform, and a side of the fixed top plate which is connected to the coating platform is perpendicular to the coating platform, the positioning assembly is arranged on a side of the coating platform which is opposite to the fixed top plate, the positioning assembly comprises a positioning member and a first driving member, and the first driving member is transmission-connected to the positioning member to drive the positioning member to move along the first direction.

2. The substrate correction device according to claim 1, wherein: The positioning assembly further includes a second driving member, which is in transmission connection with the positioning member to drive the positioning member to move along a second direction, and the second direction is arranged perpendicular to the first direction.

3. The substrate correction device according to claim 2, characterized in that: The positioning member includes a first sliding bracket, a second sliding bracket and a pressing member, the first driving member includes a first slide rail, the first sliding bracket is slidably set on the first slide rail, the second driving member includes a second slide rail, the second slide rail is fixed on the first sliding bracket, the second sliding bracket is slidably set on the second slide rail, and the pressing member is set on the side of the second sliding bracket facing the coating platform.

4. The substrate correction device according to claim 3, characterized in that: The pressing member is a roller, which is connected to the second sliding bracket via a connecting rod, and the roller is rotatably connected to the connecting rod.

5. The substrate correction device according to claim 4, characterized in that: The connecting rod is an elastic telescopic rod.

6. The substrate correction device according to claim 2, wherein: There are two positioning members, and the two positioning members are arranged in sequence along the second direction.

7. The substrate correction device according to any one of claims 1 to 5, characterized in that: It also includes a detection component, the positioning component includes a positioning sensor arranged on the coating platform, and a sensing part for the positioning sensor to sense and identify is provided at a position corresponding to the positioning sensor on the substrate.

8. The substrate correction device according to claim 7, wherein: It also includes a correction component, which is connected to the detection component. The correction component is arranged on both sides of the coating platform along the second direction and is used to adjust the position of the substrate along the second direction. The second direction is arranged perpendicular to the first direction.

9. The substrate correction device according to any one of claims 1 to 5, characterized in that: The fixed top plate includes a vertical plate and an inclined plate, one end of the vertical plate is connected to the coating platform and is perpendicular to the coating platform, the other end of the vertical plate is connected to the inclined plate, and the inclined plate is inclined toward the side away from the coating platform.

10. A coating machine, characterized in that: It includes a substrate correction device as described in any one of claims 1 to 9, and also includes a coating platform for placing the substrate, a coating drive assembly is provided on one side of the coating platform, a coating nozzle is transmission-connected to the coating drive assembly, and the coating nozzle is arranged directly above the coating platform and facing the substrate.