Rapid detection device for seed crystal angle inclination in CZ method crystal growth

Abstract

The utility model discloses a rapid detection device for seed crystal angle inclination in CZ method crystal growth in the technical field of monocrystalline silicon. The rapid detection device comprises a base; the digital magnifying lens is suspended on the base through a bracket, and the visual angle of the digital magnifying lens faces right downwards; the clamping device is arranged below the digital magnifier and is used for clamping the seed crystal to be detected; the first gear motor is mounted on the base, the clamping device is in transmission connection with a rotating shaft of the gear motor, and the first gear motor is used for driving the clamping device to rotate. According to the rapid detection device, the inclination of the fine grain position of the seed crystal is converted into the left-right offset under the lens of the digital magnifying lens, and the inclination degree of the fine grain position of the seed crystal can be calibrated through quantitative measurement of the left-right offset, so that the risk of crystal orientation deviation of a product is rapidly judged, intervention as early as possible is realized, and more losses are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon, in particular to a device for quickly detecting the tilt angle of a seed crystal in a CZ method crystal growth process. Background Art

[0002] There are two methods for growing single crystal silicon: the CZ method and the FZ method. The CZ method, also known as the Cromer transport method, is the most important growth method for single crystal silicon production. The principle is to melt high-purity silicon material into a small cylindrical ingot, and then insert a controlled boron-doped quartz rod. At the interface between the ingot and the quartz rod, a Mach point (melt-meniscus) of the semiconductor material is formed. This Mach point is used to gradually lengthen the distance between the ingot and the rod, thereby growing single crystal silicon. The CZ method can produce single crystal silicon with large diameters.

[0003] The advantages of the CZ method are: fast growth rate, ability to grow large-sized single crystal silicon, and mature production technology; the disadvantages are: uneven stress distribution, which easily leads to crystal defects.

[0004] Single crystal orientation is a fundamental control parameter in CZ single crystal growth. Seed crystal tilt during seeding is one of the main causes of orientation deviation in grown single crystals. Therefore, quickly determining whether the seed crystal is skewed is an important measure to prevent single crystal orientation deviation. Utility Model Content

[0005] The present application solves the problem of how to quickly determine whether the seed crystal is skewed in the prior art by providing a rapid detection device for the tilt angle of the seed crystal in the CZ method of crystal growth. By quickly identifying whether the fine grain of the seed crystal is skewed after seeding, the risk of crystal orientation deviation of the product can be quickly determined, and early intervention can be achieved to avoid further losses.

[0006] The embodiment of the present application provides a device for quickly detecting the tilt angle of a seed crystal in CZ method crystal growth, comprising:

[0007] base;

[0008] A digital magnifying glass is suspended on the base via a bracket, and the viewing angle of the digital magnifying glass faces directly downward;

[0009] A clamping device is provided below the digital magnifying glass, and is used to clamp the seed crystal to be measured;

[0010] A first reduction motor is installed on the base, the clamping device is in transmission connection with the rotating shaft of the reduction motor, and the first reduction motor is used to drive the clamping device to rotate.

[0011] The beneficial effect of the above embodiment is that: the seed crystal to be tested is installed in the clamping device and is perpendicular to the line of sight of the digital magnifying glass. The first reduction motor drives the clamping device to rotate and drives the seed crystal to rotate slowly. The tilt (non-concentricity) of the seed crystal fine crystal is converted into left and right offset under the digital magnifying glass lens. The degree of tilt of the seed crystal fine crystal can be calibrated through quantitative measurement of the offset, so as to quickly judge the risk of product crystal orientation deviation, realize early intervention, and avoid more losses.

[0012] Based on the above embodiments, the present application can be further improved as follows:

[0013] In one embodiment of the present application, the clamping device is mounted at the front end of the first reduction motor, which is mounted to the base via a displacement mechanism, allowing the first reduction motor to move horizontally on the base. The displacement mechanism facilitates the position of the clamping device, allowing for more space to be reserved for installing the seed crystal to be measured. When measuring fine crystals using a digital magnifying glass, the observation position can be adjusted at any time for convenient observation.

[0014] In one embodiment of the present application, the displacement mechanism includes a mounting plate, a connecting plate, a ball screw, a ball nut, and a second reduction motor; the base is provided with a transverse mounting slot, the upper end surface of which is provided with a through slot, the ball screw is mounted within the mounting slot, the ball nut is sleeved on the ball screw, and the ball nut can slide axially on the ball screw, the ball nut is provided with a connecting plate on the side wall, the connecting plate extends to the outside of the through slot and is connected to the mounting plate, the second reduction motor is mounted on the side wall of the base, and the rotating shaft of the second reduction motor is rotatably connected to the ball screw and rotates coaxially. The movement is highly precise and easy to control.

[0015] In one embodiment of the present application, a background plate is further provided on the mounting plate, and the background plate is located below the clamping device. The background plate has a significant color difference from the seed crystal to be measured, which facilitates observation.

[0016] In one embodiment of the present application, a center reference line is provided on the background plate, and the center reference line and the clamping center line of the clamping device are located in the same vertical plane. After the background plate is adjusted and installed, the center reference line can be seen simultaneously when observing the seed crystal, thereby assisting observation.

[0017] In one embodiment of the present application, the clamping device is a three-jaw chuck.

[0018] In one embodiment of the present application, the digital magnifying glass has a magnification of 1200-1600 times. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly describes the drawings required for the specific embodiments or the description of the prior art. Similar elements or parts are generally identified by similar reference numerals throughout the drawings. Elements or parts in the drawings are not necessarily drawn to scale.

[0020] Figure 1 This is a schematic structural diagram of a device for rapidly detecting the tilt of a seed crystal in a CZ method crystal growth process according to an embodiment of the present application;

[0021] Figure 2 This is a structural diagram of the background board in the embodiment of the present application;

[0022] Among them, 1. base, 11. mounting slot, 12. through slot, 2. digital magnifying glass, 21. bracket, 3. clamping device, 4. first reduction motor, 5. displacement mechanism, 51. mounting plate, 52. connecting plate, 53. ball screw, 54. ball nut, 55. second reduction motor, 6. background plate, 61. center reference line, 7. seed crystal. DETAILED DESCRIPTION

[0023] The present invention will be further explained below in conjunction with specific implementation methods. It should be understood that these implementation methods are only used to illustrate the present invention and are not used to limit the scope of the present invention. After reading the present invention, modifications of various equivalent forms of the present invention made by those skilled in the art all fall within the scope defined by the claims attached to this application.

[0024] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0025] In the description of this utility model, it should be noted that the terms "vertical" and "peripheral surface" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely for distinction and should not be construed as indicating or implying relative importance.

[0026] In addition, the term "vertical" does not mean that the component must be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0028] In the description of the present invention, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and integrate different embodiments or examples described in the present invention, as well as features of different embodiments or examples, unless they are mutually inconsistent.

[0029] The embodiments of the present application solve the problem of how to quickly determine whether the seed crystal is skewed in the prior art by providing a rapid detection device for the tilt angle of the seed crystal in the CZ method of crystal growth. By quickly identifying whether the fine grain of the seed crystal is skewed after seeding, the risk of crystal orientation deviation of the product can be quickly determined, and early intervention can be achieved to avoid further losses.

[0030] The technical solution in the embodiments of the present application is to solve the above problems, and the overall idea is as follows:

[0031] Example:

[0032] like Figure 1-2 As shown, a rapid detection device for the tilt angle of a seed crystal in a CZ method crystal growth process includes: a base 1, a digital magnifying glass 2, a clamping device 3, a first reduction motor 4 and a displacement mechanism 5.

[0033] The digital magnifying glass 2 is suspended above the base 1 by a bracket 21, and the viewing angle of the digital magnifying glass 2 is facing directly downward; the clamping device 3 is arranged below the digital magnifying glass 2, and the clamping device 3 is installed at the front end of the first reduction motor 4, and the clamping device 3 is used to clamp the seed crystal 7 to be tested; the first reduction motor 4 is installed on the base 1 through the displacement mechanism 5, and the first reduction motor 4 can move horizontally on the base 1. The clamping device 3 is connected to the rotating shaft of the reduction motor, and the first reduction motor 4 is used to drive the clamping device 3 to rotate.

[0034] Further, the displacement mechanism 5 comprises a mounting plate 51, a connecting plate 52, a ball screw 53, a ball nut 54 and a second speed reducer motor 55. The base 1 is provided with a transverse mounting groove 11, and a through groove 12 is formed in the upper end surface of the mounting groove 11. The ball screw 53 is mounted in the mounting groove 11, and the ball nut 54 is sleeved on the ball screw 53. A plurality of balls are arranged in the spherical groove between the ball screw 53 and the ball nut 54. The ball nut 54 is in slidable tight connection with the ball screw 53 through the balls. The ball nut 54 can axially slide on the ball screw 53. The connecting plate 52 is arranged on the side wall of the ball nut 54 and extends to the outside of the through groove 12 and is connected with the mounting plate 51. The second speed reducer motor 55 is mounted on the side wall of the base 1. The rotating shaft of the second speed reducer motor 55 is rotatably connected with the ball screw 53 and rotates coaxially.

[0035] Further, the mounting plate 51 is further provided with a background plate 6, and the background plate 6 is located below the clamping device 3. The background plate 6 is provided with a center reference line 61, and the center reference line 61 is located in the same vertical plane as the clamping center line of the clamping device 3, that is, in the same vertical plane as the default center line of the seed crystal 7 to be measured.

[0036] Optionally, the clamping device 3 is a three-jaw chuck.

[0037] Optionally, the digital magnifying glass 2 has a magnification of 1200-1600 times.

[0038] The technical solutions in the embodiments of the present application have at least the following technical effects or advantages:

[0039] 1. The rapid detection device converts the inclination of the seed crystal fine crystal into left and right offset under the digital magnifying glass lens, and the inclination of the seed crystal fine crystal can be calibrated through the quantitative measurement of the left and right offset, so that the risk of product crystal direction deviation can be quickly judged, early intervention can be realized, and more losses can be avoided.

[0040] 2. The rapid detection device can conveniently move the position of the clamping device through the displacement device, and a larger space is reserved for installation of the seed crystal to be measured, and the observation position can be adjusted at any time for convenient observation when the fine crystal is measured through the digital magnifying glass.

[0041] 3. The background plate of the rapid detection device has a clear color difference with the seed crystal to be measured, which is convenient for observation. After the position of the background plate is adjusted and installed, the center reference line can be seen at the same time when the seed crystal is observed, which assists the observation.

[0042] Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and cannot be understood as limiting the present application. Those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A rapid detection device for seed crystal tilt in CZ crystal growth, characterized in that: include: base; A digital magnifying glass is suspended on the base via a bracket, and the viewing angle of the digital magnifying glass faces directly downward; A clamping device is provided below the digital magnifying glass, and is used to clamp the seed crystal to be measured; The first reduction motor is installed on the base, the clamping device is connected to the rotating shaft of the reduction motor, and the first reduction motor is used to drive the clamping device to rotate.

2. The rapid detection device according to claim 1, characterized in that: The clamping device is installed at the front end of the first reduction motor. The first reduction motor is installed on the base through a displacement mechanism. The first reduction motor can move horizontally on the base.

3. The rapid detection device according to claim 2, characterized in that: The displacement mechanism includes a mounting plate, a connecting plate, a ball screw, a ball nut, and a second reduction motor; the base is provided with a transverse mounting groove, the upper end surface of the mounting groove is provided with a through groove, the ball screw is installed in the mounting groove, the ball nut is sleeved on the ball screw, the ball nut can slide axially on the ball screw, the ball nut is provided with a connecting plate on the side wall, the connecting plate extends to the outside of the through groove and is connected to the mounting plate, the second reduction motor is installed on the side wall of the base, and the rotating shaft of the second reduction motor is rotatably connected to the ball screw and rotates coaxially.

4. The rapid detection device according to claim 3, characterized in that: A background plate is also provided on the mounting plate, and the background plate is located below the clamping device.

5. The rapid detection device according to claim 4, characterized in that: A center reference line is provided on the background plate, and the center reference line and the clamping center line of the clamping device are located in the same vertical plane.

6. The rapid detection device according to claim 1, characterized in that: The clamping device is a three-jaw chuck.

7. The rapid detection device according to claim 1, characterized in that: The digital magnifying glass has a magnification of 1200-1600 times.

Images