Photoresist preparation waste gas treatment device

Abstract

The utility model relates to the technical field of photoresist preparation equipment, in particular to a photoresist preparation waste gas treatment device which comprises a reaction box and a filter box, a gas-liquid mixing area and a light degradation area are arranged in the reaction box, gas-liquid mixing is firstly carried out after the waste gas is pumped in so as to remove particulate matters and soluble substances in the waste gas, and then residual toxic substances are degraded through the light degradation area; wastewater generated in the gas-liquid mixing area can be recycled after being filtered through a filter box, a rotary absorption filter is arranged in the filter box, and desorption and combustion treatment can be automatically completed through an air heater and a combustion chamber; according to the utility model, the filler does not need to be replaced, the desorption and combustion treatment of toxic substances can be automatically completed in the equipment, the internal space is sealed from the outside in the whole course, and the risk of toxic substance leakage is completely eradicated.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoresist preparation equipment technical field, specifically for a kind of photoresist preparation waste gas treatment device. BACKGROUND

[0002] Photoresist is one of the key materials in micro pattern processing in microelectronics technology, and has a wide range of uses in chip manufacturing and printing industry;In the process of producing photoresist, a large amount of chemical materials need to be added, including a variety of toxic organic solvents;With the production of these toxic substances will evaporate into the air, form waste gas with toxic, if not to photoresist preparation waste gas is handled and discharged, it will cause serious pollution to the environment, and pose a deadly threat to human health.

[0003] The present application No. CN202323063059.9 discloses a kind of positive photoresist preparation process waste gas treatment device, including waste gas treatment box, multiple supporting legs, bottom plate, gas outlet pipe and air inlet mechanism, the bottom end of waste gas treatment box is fixedly installed with multiple supporting legs, the bottom end of multiple supporting legs is fixedly installed at the top of bottom plate, waste gas treatment box is supported, the top right of waste gas treatment box is fixedly connected with gas outlet pipe, air inlet mechanism is installed on the right side of waste gas treatment box, and waste gas is collected;It also includes spraying mechanism, filtering mechanism and recovery mechanism, spraying mechanism is installed at the top left side of bottom plate, and the output end of spraying mechanism is located in the inside of waste gas treatment box, to cool the input waste gas and retain dust impurity particles in waste gas, filtering mechanism is installed in the inside of waste gas treatment box;But the replacement of the packing plate needs to open the sealing plate, so that the waste gas in the waste gas treatment box is not treated and there is a risk of leakage. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of photoresist preparation waste gas treatment device using wheel rotation type absorption filter structure, can automatically complete the rotation of absorption filter plate and handle the toxic substance absorbed.

[0005] Based on the above purpose, the utility model adopts the following technical scheme:

[0006] A kind of photoresist preparation waste gas treatment device, including reaction box, with the cooperation of reaction box, filtering box is arranged, the lower half of reaction box is set as gas-liquid mixing zone, and the upper half is set as photodegradation zone;The bottom of gas-liquid mixing zone is communicated with the bottom of filtering box by water inlet pipe, and the top of gas-liquid mixing zone is communicated with the top of filtering box by water outlet pipe, and absorption filter structure is arranged in filtering box;Gas delivery mechanism is arranged in the bottom of gas-liquid mixing zone, and suction fan is connected to gas delivery mechanism by air inlet pipe;Photodegradation mechanism is arranged in photodegradation zone, and exhaust port is arranged on the top of reaction box.

[0007] Preferably, the gas feeding mechanism comprises a plurality of gas feeding pipes arranged in parallel, and the gas feeding pipes are uniformly provided with one-way gas feeding holes.

[0008] Preferably, the bottom of the gas-liquid mixing area is provided with a submersible pump connected with the water inlet pipe.

[0009] Preferably, a plurality of baffle plates are arranged in the gas-liquid mixing area, and the baffle plates are all arranged in an inclined upward manner; the submersible pump and the gas feeding pipe are both arranged below the baffle plates.

[0010] Preferably, the light degradation mechanism comprises a plurality of groups of light degradation catalyst plates arranged alternately, and a fluorescent lamp is arranged above each light degradation catalyst plate.

[0011] Preferably, the absorption filter structure comprises a rotary absorption filter, and a rotating mechanism is arranged in cooperation with the rotary absorption filter; the rotary absorption filter comprises a rotating shaft, two isolation plates are symmetrically arranged on the rotating shaft, two groups of absorption filter plates are symmetrically arranged on the two side surfaces of the isolation plates, and the two groups of absorption filter plates are both arranged perpendicularly to the isolation plate.

[0012] Preferably, the filter box is divided into an absorption filter cavity and a desorption cavity by the two isolation plates, a water inlet is arranged at the top of the absorption filter cavity, the water inlet is communicated with a water outlet pipe, and the water inlet pipe is communicated with the bottom of the absorption filter cavity of the filter box.

[0013] Preferably, a hot air mechanism is arranged at the top of the desorption cavity, and an air inlet is arranged in cooperation with the top surface of the filter box; one side of the desorption cavity is connected with a combustion chamber, an ignition mechanism is arranged in the combustion chamber, and a waste gas pipe is arranged on the combustion chamber.

[0014] Preferably, the rotating mechanism comprises a rotating disc arranged outside the filter box, the rotating disc is fixedly connected with the rotating shaft in a coaxial manner, a rotating mark is arranged on the front side surface of the absorption filter plate, and an observation window matched with the rotating mark is arranged on the filter box.

[0015] Preferably, the rotating mechanism comprises a servo motor, and the output shaft of the servo motor is connected with the rotating shaft through a shaft coupling.

[0016] The beneficial effects of the utility model include:

[0017] The utility model discloses a reaction box is arranged to the reaction treatment of collected waste gas, and the lower half of the reaction box is gas-liquid mixing area, and the waste gas is passed into the water in the gas-liquid mixing area from the bottom, so that the soluble material and particulate matter in it are dissolved in the water, and the remaining toxic and harmful gases that can not be dissolved in water are subjected to photocatalytic degradation in the light degradation area of the upper half of the reaction box, and finally become clean air and are discharged from the exhaust port.

[0018] The utility model discloses a gas -liquid mixing structure of recycling is provided, and the water in the gas -liquid mixing area is extracted from the bottom of the filter box and is discharged into the filter box from the top, absorption filter plate is arranged in the filter box, the particulate matter and organic matter dissolved in the water are absorbed and filtered through various filler plates, and finally clean water reenters the gas -liquid mixing area to complete the cycle, the whole process does not need to add new water, the recycled water is used to the maximum extent, a large amount of water resource is saved, and the environmental protection production requirement is met.

[0019] The utility model discloses a gas -liquid mixing area is provided with the gas conveying mechanism that is formed by multiple gas conveying pipes, and the one-way gas conveying hole is densely distributed on the gas conveying pipe, can avoid the water into the gas conveying pipe, and can form a large amount of bubble when conveying gas to the gas -liquid mixing area, thereby greatly increasing the contact area of waste gas and water, increasing the rate of reaction and dissolution, and multiple baffle plates are arranged in the gas -liquid mixing area, further increasing the travel of gas in water, and increasing the reaction and dissolution time, in order to avoid the bubble on the baffle plate aggregation to form big bubble even cavity, and the baffle plate is all arranged to the structure of upward inclination, can help bubble to smoothly pass through the baffle plate and discharge upward.

[0020] The utility model discloses a rotary absorption filter, which can be rotated by a rotating mechanism to rotate two sets of absorption filter plates alternately, and the rotary absorption filter further divides the filter box into two parts by a partition plate, the absorption filter cavity is only used for water absorption and filtration, and the desorption cavity can desorb toxic substances and particulate matter absorbed in the absorption filter plate after rotation by hot air and discharge them into the combustion chamber for combustion treatment, a fireproof partition plate is arranged at the inlet of the combustion chamber to prevent the flame from entering the filter box when the combustion chamber is closed, and the non-toxic and harmless gas after combustion is discharged through the waste gas pipe, and the absorption filter plate after completing the above self-cleaning process can be rotated to the working state by the rotating mechanism, thereby realizing continuous operation without shutdown of the utility model. DRAWINGS

[0021] Figure 1 It is the whole structure schematic diagram of the utility model;

[0022] Figure 2 It is the inside structure section view of the reaction box of the utility model;

[0023] Figure 3 It is the inside structure section view of the filter box of the utility model.

[0024] In the figure: reaction box 1; exhaust pipe 11; water outlet pipe 12; air supply pipe 13; submersible pump 14; baffle 15; photodegradation catalyst plate 16; fluorescent lamp 17; exhaust fan 2; air inlet pipe 21; filter box 3; rotating disk 31; water inlet pipe 32; air inlet 33; isolation plate 34; absorption filter plate 35; water inlet 36; hot air blower 37; combustion chamber 4; exhaust pipe 41. DETAILED DESCRIPTION

[0025] Example 1

[0026] The following is a further explanation of the present invention in conjunction with specific embodiments. Figure 1 As shown, this embodiment is a waste gas treatment device for photoresist preparation, which mainly includes a reaction box 1 and a filter box 3; the reaction box 1 is connected to the exhaust fan 2 through the air inlet pipe 21, and the exhaust fan 2 collects the waste gas through the air inlet pipe 21 to pass it into the reaction box 1; a gas-liquid mixing zone is provided in the reaction box 1, which is mainly used to mix the waste gas with water to remove soluble toxic substances and particulate matter in the waste gas, and then the remaining toxic substances in the waste gas are degraded through the photodegradation zone to obtain clean air, which is discharged from the exhaust pipe 11.

[0027] The filter box 3 is used to restore the water containing toxic substances dissolved in the reaction box 1 into clean water through absorption filtration; the water in the reaction box 1 is introduced into the filter box 3 through the outlet pipe 12 at the top, and then pumped from the filter box 3 into the reaction box 1 through the inlet pipe 32 to complete the water circulation.

[0028] The structure inside the reaction box 1 is as follows Figure 2 As shown, a submersible pump 14 is provided at the bottom for connecting to the water inlet pipe 32 to pump clean water into the reaction box 1; an air pipe 13 is also provided at the bottom, and multiple air pipes 13 are provided in parallel and are all connected to the air inlet pipe 21, so that the exhaust gas in the air inlet pipe 21 can be discharged into the reaction box 1; a plurality of one-way air holes are evenly distributed on the air pipe 13, which can only allow air to be discharged from the air pipe 13, but cannot allow water to enter the air pipe 13; since a large number of small air holes are provided, the exhaust gas entering the reaction box 1 will form a large number of small bubbles in the water, thereby increasing the contact area between the exhaust gas and water and increasing the dissolution rate of toxic substances in the water.

[0029] A plurality of groups of baffles 15 are also provided in the gas-liquid mixing zone. The baffles 15 are baffle structures that are alternately arranged. By providing the baffles 15, the length of the movement path of the bubbles is greatly increased during the upward movement, thereby increasing the residence time of the bubbles in the water, which is beneficial for the toxic substances in the exhaust gas to be more fully dissolved in the water; in order to prevent the bubbles from gathering at the bottom of the baffles 15 to form large bubbles or produce cavities, the baffles 15 are all provided with an inclined upward structure, that is, the height of the connection with the side wall of the reaction box 1 is less than the height of the other end, so that the bubbles are not prone to blockage and aggregation when moving upward along the baffles 15, thereby improving the passage efficiency of the bubbles.

[0030] The upper half of the reaction box 1 is set as a photodegradation zone, in which multiple groups of alternating photodegradation catalyst plates 16 are set; a fluorescent lamp 17 is set above each photodegradation catalyst plate 16. When the air from which most of the toxic substances and particulate matter have been removed after gas-liquid mixing enters the photodegradation zone, the remaining toxic substances therein are degraded under the action of the photodegradation catalyst plates 16, and finally clean air is obtained and discharged from the exhaust pipe 11.

[0031] The internal structure of the filter box 3 is as follows: Figure 3 As shown, a rotary absorption filter is provided therein, comprising a horizontally arranged rotating shaft, on which two isolation plates 34 are symmetrically arranged; the two isolation plates 34 cooperate with the baffle structure inside the filter box 3 to divide the internal space of the filter box 3 into two parts, the right half of which is the absorption filter chamber and the left half of which is the desorption chamber in this embodiment; the water inlet 36 of the filter box 3 is provided at the top of the absorption filter chamber, and the water discharged from the reaction box 1 is discharged into the absorption filter chamber through the water inlet 36; the water inlet pipe 32 is also connected to the bottom of the absorption filter chamber, and the clean water after absorption and filtration by the rotary absorption filter can be pumped back into the reaction box 1 through the water inlet pipe 32 at the bottom under the action of the submersible pump 14.

[0032] Two groups of absorption filter plates 35 are symmetrically arranged on both sides of the two isolation plates 34; the absorption filter plates 35 are composed of multiple parallel filler plates. Different types of fillers can be selected according to the type of substance to be absorbed, such as zeolite, activated carbon or other desorbable absorption fillers; when one group of absorption filter plates 35 is located in the absorption filter chamber and is in working state, the other group of absorption filter plates 35 will be located in the desorption chamber for desorption.

[0033] A hot air blower 37 is provided at the top of the desorption chamber, and an air inlet 33 is provided at the top of the filter box 3 to cooperate with it; the hot air blower 37 can blow hot air into the desorption chamber to desorb the absorption filter plate 35 that has absorbed and concentrated toxic substances and particulate matter, and the absorbed toxic substances and particulate matter will be passed into the combustion chamber 4 set on one side of the filter box 3; an ignition mechanism is provided in the combustion chamber 4, which can uniformly burn the desorbed concentrated toxic substances to obtain harmless combustion exhaust gas, and discharge it through the exhaust pipe 41; a fireproof partition is provided between the filter box 3 and the combustion chamber 4. When ignition is ignited for combustion, the fireproof partition can prevent the flame from entering the filter box 3 to avoid combustion in the filter box 3.

[0034] The rotary absorption filter cooperates with the rotating mechanism to rotate; when the absorption filter plate 35 needs to be switched, the rotating shaft is rotated by the rotating mechanism, which can drive the rotary absorption filter to rotate together, so that the absorption filter plate 35 on the other side that has completed desorption is rotated from the desorption chamber to the absorption filter chamber to start absorption and filtration work, and the absorption filter plate 35 on the side that has absorbed the toxic substances is rotated to the desorption chamber for desorption; in this embodiment, the rotating mechanism is a rotating disk 31 connected to the rotating shaft through a coupling, such as Figure 1 As shown; the rotating disk 31 is connected to the rotating shaft through a speed reducer, and the rotary absorption filter can be manually rotated by the rotating disk 31, thereby realizing manual rotation and switching of the absorption filter plate 35; in order to determine the position during rotation, a rotation mark is provided on the front side of the absorption filter plate 35, and an observation window is provided at the corresponding position on the front side of the filter box 3; when the rotating mark wheel can be observed from the observation window, it means that the rotary absorption filter is at the correct rotation angle.

[0035] When this embodiment is actually used, first, a sufficient amount of water is poured into the reaction box 1 to ensure that the total amount of water in the system can maintain a certain speed of circulation; the rotating disk 31 is rotated until the rotating mark can be seen through the observation window; after turning on the submersible pump 14 and the fluorescent lamp 17, the exhaust fan 2 can be turned on to start drawing in toxic waste gas.

[0036] The exhaust gas forms a large number of fine bubbles through the air holes on the air supply pipe 13 and enters the water in the reaction box 1, so that the soluble toxic substances and particulate matter in the air are dissolved in the water; then it enters the photodegradation zone, and the remaining toxic substances are degraded under the action of the photodegradation catalyst plate 16, and then the clean air can be discharged through the exhaust pipe 11.

[0037] The water containing toxic substances is discharged from the water outlet pipe 12 into the filter box 3, is absorbed and filtered by the absorption filter plate 35, and then clean water is obtained at the bottom of the absorption filter cavity and is returned to the reaction box 1 through the water inlet pipe 32 under the action of the submersible pump 14; after a certain period of work, the absorption filter plate 35 can be rotated by rotating the rotating disc 31; the rotating disc 31 is rotated until the rotating mark is observed from the observation window again, which indicates that the rotation is in place; then the hot air blower 37 is turned on to blow hot air into the desorption cavity for desorption; the ignition mechanism in the combustion chamber 4 is turned on during desorption, the hot air blower 37 blows the air containing toxic substances in the combustion chamber 4 for combustion treatment, and finally harmless combustion exhaust gas is generated and is discharged from the exhaust pipe 41.

[0038] Embodiment 2

[0039] The technical solution used in the embodiment is not substantially different from that of Embodiment 1, and the main difference is that the rotating mechanism in the embodiment is an automatic device, which includes a servo motor controlled by a PLC; the output shaft of the servo motor is connected with the rotating shaft through a shaft coupling, and can drive the rotating absorption filter to rotate.

[0040] The rotating absorption filter is rotated 180° by the PLC-controlled servo motor to rotate the absorption filter plate 35 every certain time interval; then the hot air blower 37 is controlled to start, and the combustion chamber 4 is ignited for combustion, so that the rotation of the absorption filter plate 35 is automatically completed, without manual operation, and the degree of automation of the device is greatly improved.

[0041] The above description is only a further explanation and description of the present application combined with specific embodiments, and all the descriptions do not represent a limitation on the protection scope of the present application, any changes or alternative solutions that can be easily thought of by any person skilled in the art within the technical scope disclosed by the present application should be covered in the protection scope of the present application, therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A photoresist preparation exhaust gas treatment device comprising a reaction tank, and a filter tank provided in cooperation with the reaction tank, characterized in that: The lower half of the reaction box is provided as a gas-liquid mixing area, and the upper half is provided as a photodegradation area; the bottom of the gas-liquid mixing area is communicated with the bottom of the filter box through a water inlet pipe, the top of the gas-liquid mixing area is communicated with the top of the filter box through a water outlet pipe, and an absorption filter structure is arranged in the filter box; the bottom of the gas-liquid mixing area is provided with a gas conveying mechanism, and the gas conveying mechanism is connected with an air extractor through an air inlet pipe; a photodegradation mechanism is arranged in the photodegradation area, and an exhaust port is arranged at the top of the reaction box; the absorption filter structure comprises a rotating absorption filter, and a rotating mechanism is arranged in cooperation with the rotating absorption filter; the rotating absorption filter comprises a rotating shaft, and two isolation plates are symmetrically arranged on the rotating shaft; two groups of absorption filter plates are symmetrically arranged on the two side surfaces of the isolation plate, and the two groups of absorption filter plates are arranged perpendicularly to the isolation plate.

2. The photoresist preparation exhaust gas treatment device according to claim 1, characterized by: The gas conveying mechanism comprises a plurality of gas conveying pipes arranged in parallel, and the gas conveying pipes are uniformly and densely provided with one-way gas conveying holes.

3. The photoresist preparation exhaust gas treatment device according to claim 2, characterized by: A submersible pump is arranged at the bottom of the gas-liquid mixing area, and the submersible pump is connected with the water inlet pipe.

4. The photoresist preparation exhaust gas treatment device according to claim 3, characterized by: A plurality of baffle plates are arranged in the gas-liquid mixing area, and the baffle plates are all arranged in an upward inclination; the submersible pump and the gas conveying pipe are both arranged below the baffle plates.

5. The photoresist preparation exhaust gas treatment device according to claim 1, characterized by: The photodegradation mechanism comprises a plurality of groups of alternately arranged photodegradation catalyst plates, and a daylight lamp is arranged above each photodegradation catalyst plate.

6. The photoresist preparation exhaust gas treatment device according to claim 1, wherein: The filter box is divided into an absorption filter cavity and a desorption cavity by two isolation plates, a water inlet is arranged at the top of the absorption filter cavity, and the water inlet is communicated with the water outlet pipe; the water inlet pipe is communicated with the bottom of the absorption filter cavity of the filter box.

7. The photoresist preparation exhaust gas treatment device according to claim 6, characterized by: A hot air mechanism is arranged at the top of the desorption cavity, and an air inlet is arranged in cooperation with the top surface of the filter box; a combustion chamber is connected to one side of the desorption cavity, an ignition mechanism is arranged in the combustion chamber, and a waste gas pipe is arranged on the combustion chamber.

8. The photoresist preparation exhaust gas treatment device according to claim 1, characterized by: The rotating mechanism comprises a rotating disc arranged outside the filter box, and the rotating disc is fixedly connected with the rotating shaft in a coaxial manner; a rotating mark is arranged on the front side of the absorption filter plate, and an observation window matched with the rotating mark is arranged on the filter box.

9. The photoresist preparation exhaust gas treatment device according to claim 1, wherein: The rotating mechanism comprises a servo motor, and the output shaft of the servo motor is connected with the rotating shaft through a coupling.

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