Novel single crystal furnace filtering tank

Abstract

The utility model relates to the technical field of filtering tanks, and discloses a novel single crystal furnace filtering tank which comprises a tank body, a cooling sleeve is fixedly connected to the outer side of the tank body, a water storage tank is fixedly connected to the middle of the outer side of the cooling sleeve, and semiconductor coolers are fixedly connected to the front side and the rear side of the water storage tank. Sealing gaskets are fixedly connected to the upper side and the lower side of the cooling sleeve, mounting frames are evenly and slidably connected to the periphery of the inner wall of the tank body, filter screens are fixedly connected to the opposite sides of the mounting frames, a circulating assembly is arranged on the upper portion of the right side of the cooling sleeve and used for recycling cooling water, and a quick-release assembly is arranged on the upper portion of the tank body. The quick dismounting device is used for quickly dismounting the filter screen. According to the single crystal furnace filtering tank, the semiconductor cooler, the water storage tank, the water pump, the water pumping pipe, the water conveying pipe, the cooling sleeve, the water guide pipe and other structures are matched, so that the single crystal furnace filtering tank is convenient to circularly cool, and the practicability of the single crystal furnace filtering tank is improved.

Description

Technical Field

[0001] This utility model relates to the field of filter tank technology, and in particular to a novel single crystal furnace filter tank. Background Technology

[0002] Single crystal furnaces, widely used in semiconductor manufacturing and crystal growth processes, employ filter tanks to remove impurities and ensure crystal quality. Traditionally, single crystal furnace filter tanks are water-cooled to maintain a stable operating temperature and prevent overheating. However, in practice, the cooling water in the filter tank may heat up over time, reducing its cooling effect and impacting normal operation and filtration. Furthermore, traditional filter screens often require disassembly of the filter tank for maintenance and cleaning, a complex and time-consuming process that is difficult to ensure sealing, potentially affecting equipment efficiency. Therefore, improving cooling efficiency and simplifying the cleaning and replacement process of filter screens has become a key technological challenge. Utility Model Content

[0003] To overcome the above shortcomings, this utility model provides a novel single crystal furnace filter canister, which aims to improve the problem that the existing single crystal furnace filter canisters are not convenient for circulating cooling, resulting in the general practicality of the single crystal furnace filter canister.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a novel single crystal furnace filter tank, comprising a tank body, a cooling sleeve fixedly connected to the outer side of the tank body, a water storage tank fixedly connected to the middle of the outer side of the cooling sleeve, semiconductor coolers fixedly connected to both the front and rear sides of the water storage tank, sealing gaskets fixedly connected to both the upper and lower sides of the cooling sleeve, mounting brackets evenly and slidably connected to the inner wall of the tank body, a filter screen fixedly connected to the opposite side of the mounting bracket, a circulation component provided on the upper right side of the cooling sleeve for recycling cooling water, and a quick-release component provided on the upper part of the tank body for quick disassembly of the filter screen.

[0005] As a further description of the above technical solution:

[0006] The circulation component includes a support plate, which is fixedly connected to the upper right side of the cooling sleeve. A water pump is fixedly connected to the upper wall of the support plate. A water pumping pipe is fixedly connected to the input end of the water pump, and a water delivery pipe is fixedly connected to the output end of the water pump. A water guide pipe is fixedly connected to the rear side of the cooling sleeve.

[0007] As a further description of the above technical solution:

[0008] The quick-release assembly includes a limiting sleeve, which is fixedly connected to the upper part of the front and rear sides of the tank. A limiting block is slidably connected inside the limiting sleeve. A cover plate is fixedly connected to the opposite side of the limiting block. A handle is fixedly connected to the upper part of the cover plate.

[0009] As a further description of the above technical solution:

[0010] The cooling sleeve has mounting blocks evenly fixedly connected around its lower outer perimeter, and the mounting blocks have supporting legs fixedly connected to their lower parts.

[0011] As a further description of the above technical solution:

[0012] A discharge pipe is fixedly connected to the lower middle part of the tank, and a valve is fixedly connected to the outside of the discharge pipe.

[0013] As a further description of the above technical solution:

[0014] The end of the water pipe furthest from the cooling sleeve is fixedly connected to the water storage tank.

[0015] As a further description of the above technical solution:

[0016] The end of the pumping pipe away from the water pump is fixedly connected to the water storage tank, and the end of the water delivery pipe away from the water pump is fixedly connected to the cooling sleeve.

[0017] This utility model has the following beneficial effects:

[0018] 1. In this utility model, the semiconductor cooler is started by controlling the semiconductor cooler to cool the cooling water inside the water storage tank. Then, the water pump is started to drive the water pump to draw the cooling water inside the water storage tank into the water pump. The cooling water is then fed into the cooling jacket through the water delivery pipe. The cooling water exchanges heat with the tank body through the cooling jacket. Finally, the water is discharged into the water storage tank through the water guide pipe for cooling again. This makes it easy to circulate and cool the single crystal furnace filter tank, thus improving the practicality of the single crystal furnace filter tank.

[0019] 2. In this utility model, when it is necessary to disassemble the filter screen, turn the handle to make the handle drive the cover plate to rotate, the cover plate drives the limiting block to rotate and disengage from the limiting sleeve, then pull the handle to make the handle drive the cover plate to disengage from the tank, and finally pull the mounting bracket to make the mounting bracket drive the filter screen to disengage from the tank. In this way, the filter screen of the single crystal furnace filter tank can be quickly disassembled, reducing the difficulty of cleaning the filter screen. Attached Figure Description

[0020] Figure 1 This is a perspective view of a novel single-crystal furnace filter tank proposed in this utility model;

[0021] Figure 2This is a right view of a novel single-crystal furnace filter tank proposed in this utility model;

[0022] Figure 3 This is a schematic diagram of the structure of a novel single crystal furnace filter tank proposed in this utility model.

[0023] Legend:

[0024] 1. Tank body; 2. Cooling jacket; 3. Sealing gasket; 4. Mounting block; 5. Support leg; 6. Water storage tank; 7. Semiconductor cooler; 8. Support plate; 9. Water pump; 10. Pumping pipe; 11. Water delivery pipe; 12. Water guide pipe; 13. Limiting sleeve; 14. Limiting block; 15. Cover plate; 16. Handle; 17. Filter screen; 18. Mounting bracket; 19. Discharge pipe; 20. Valve. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Reference Figures 1-3 This utility model provides an embodiment of a novel single-crystal furnace filter tank, comprising a tank body 1, a cooling sleeve 2 fixedly connected to the outer side of the tank body 1, a water storage tank 6 fixedly connected to the middle of the outer side of the cooling sleeve 2, semiconductor coolers 7 fixedly connected to both the front and rear sides of the water storage tank 6, sealing gaskets 3 fixedly connected to both the upper and lower sides of the cooling sleeve 2, mounting blocks 4 evenly fixedly connected around the lower outer side of the cooling sleeve 2, support legs 5 fixedly connected to the lower part of the mounting blocks 4, a discharge pipe 19 fixedly connected to the lower middle of the tank body 1, a valve 20 fixedly connected to the outer side of the discharge pipe 19, and a valve 20 fixedly connected to the upper right side of the cooling sleeve 2. A circulation assembly is provided for recycling cooling water. The circulation assembly includes a support plate 8, which is fixedly connected to the upper right side of the cooling sleeve 2. A water pump 9 is fixedly connected to the upper wall of the support plate 8. A water pump 10 is fixedly connected to the input end of the water pump 9, and a water delivery pipe 11 is fixedly connected to the output end of the water pump 9. A water guide pipe 12 is fixedly connected to the rear side of the cooling sleeve 2. The end of the water guide pipe 12 away from the cooling sleeve 2 is fixedly connected to the water storage tank 6. The end of the water pump 10 away from the water pump 9 is fixedly connected to the water storage tank 6. The end of the water delivery pipe 11 away from the water pump 9 is fixedly connected to the cooling sleeve 2.

[0027] By controlling the start of the semiconductor cooler 7, the cooling water inside the water storage tank 6 is cooled down, ensuring effective control of the cooling water temperature. Subsequently, by starting the water pump 9, the water pump 9 drives the water extraction pipe 10 to extract the cooling water from the water storage tank 6. The water pump 9 delivers this cooling water to the cooling jacket 2 through the water delivery pipe 11. In the jacket, the cooling water exchanges heat with the tank body 1, absorbing the heat generated by the tank body 1, thereby achieving a cooling effect. Finally, the water after heat exchange is discharged through the water guide pipe 12 and returned to the water storage tank 6 for cooling circulation. The whole process effectively realizes the circulating cooling system of the single crystal furnace filter tank, which not only improves the cooling efficiency of the equipment, but also enhances its stability and practicality under long-term operation. This allows the single crystal furnace filter tank to maintain a low operating temperature under high load conditions, extending the service life of the equipment and improving the overall working performance.

[0028] A mounting bracket 18 is evenly and slidably connected around the inner wall of the tank body 1. A filter screen 17 is fixedly connected to the opposite side of the mounting bracket 18. A quick-release assembly is provided on the upper part of the tank body 1 for quick disassembly of the filter screen 17. The quick-release assembly includes a limiting sleeve 13, which is fixedly connected to the upper part of the front and rear sides of the tank body 1. A limiting block 14 is slidably connected inside the limiting sleeve 13. A cover plate 15 is fixedly connected to the opposite side of the limiting block 14. A handle 16 is fixedly connected to the upper part of the cover plate 15.

[0029] By turning the handle 16, the handle 16 drives the cover plate 15 to rotate. The cover plate 15 is connected to the limiting block 14. During the rotation, the limiting block 14 disengages from the limiting sleeve 13, ensuring that the firm connection between the cover plate 15 and the tank body 1 can be smoothly released. Then, the operator continues to pull the handle 16 to drive the cover plate 15 away from the tank body 1, opening the top of the tank body 1 and providing convenient access space for subsequent maintenance operations. Finally, the mounting bracket 18 is pulled, and the mounting bracket 18 lifts and removes the filter screen 17 from the tank body 1. Through this simple disassembly process, not only can the filter screen 17 be quickly disassembled, but the labor intensity and operation difficulty of cleaning the filter screen 17 are also greatly reduced. This design greatly improves the maintenance efficiency of the single crystal furnace filter tank and ensures the long-term stable operation of the equipment.

[0030] Working principle: When cooling of the single crystal furnace filter tank is required, the semiconductor cooler 7 is activated to cool the cooling water inside the water storage tank 6. Then, the water pump 9 is activated to drive the water pumping pipe 10 to pump the cooling water from the water storage tank 6 into the water pump 9. The cooling water is then fed into the cooling jacket 2 through the water delivery pipe 11. The cooling water in the cooling jacket 2 exchanges heat with the tank body 1. Finally, the water is discharged into the water storage tank 6 through the water guide pipe 12 for further cooling. This achieves the cooling of the single crystal furnace filter tank. The circulating cooling system improves the practicality of the single crystal furnace filter tank. When the filter screen 17 needs to be disassembled, the handle 16 is turned to rotate the cover plate 15. The cover plate 15 rotates the limiting block 14 to disengage from the limiting sleeve 13. Then, the handle 16 is pulled to disengage the cover plate 15 from the tank body 1. Finally, the mounting bracket 18 is pulled to disengage the filter screen 17 from the tank body 1. This allows for quick disassembly of the filter screen 17 in the single crystal furnace filter tank, reducing the difficulty of cleaning the filter screen 17.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A novel single-crystal furnace filter tank, comprising a tank body (1), characterized in that: A cooling sleeve (2) is fixedly connected to the outside of the tank (1). A water storage tank (6) is fixedly connected to the middle of the outside of the cooling sleeve (2). Semiconductor coolers (7) are fixedly connected to both the front and rear sides of the water storage tank (6). Sealing gaskets (3) are fixedly connected to both the upper and lower sides of the cooling sleeve (2). An installation bracket (18) is evenly slidably connected to the inner wall of the tank (1). A filter screen (17) is fixedly connected to the opposite side of the installation bracket (18). A circulation component is provided on the upper right side of the cooling sleeve (2) for recycling the cooling water. A quick-release component is provided on the upper part of the tank (1) for quickly disassembling the filter screen (17).

2. The novel single-crystal furnace filter tank according to claim 1, characterized in that: The circulation component includes a support plate (8), which is fixedly connected to the upper right side of the cooling sleeve (2). A water pump (9) is fixedly connected to the upper wall of the support plate (8). A water pump (10) is fixedly connected to the input end of the water pump (9). A water delivery pipe (11) is fixedly connected to the output end of the water pump (9). A water guide pipe (12) is fixedly connected to the rear side of the cooling sleeve (2).

3. The novel single-crystal furnace filter tank according to claim 1, characterized in that: The quick-release assembly includes a limiting sleeve (13), which is fixedly connected to the upper front and rear sides of the tank body (1). A limiting block (14) is slidably connected inside the limiting sleeve (13). A cover plate (15) is fixedly connected to the opposite side of the limiting block (14). A handle (16) is fixedly connected to the upper part of the cover plate (15).

4. A novel single-crystal furnace filter tank according to claim 1, characterized in that: The cooling sleeve (2) has mounting blocks (4) evenly fixedly connected around the lower outer side, and the mounting blocks (4) have support legs (5) fixedly connected to the lower part.

5. A novel single-crystal furnace filter tank according to claim 1, characterized in that: A discharge pipe (19) is fixedly connected to the lower middle part of the tank (1), and a valve (20) is fixedly connected to the outside of the discharge pipe (19).

6. A novel single-crystal furnace filter tank according to claim 2, characterized in that: The end of the water pipe (12) away from the cooling sleeve (2) is fixedly connected to the water storage tank (6).

7. A novel single-crystal furnace filter tank according to claim 2, characterized in that: The end of the water pump (10) away from the water pump (9) is fixedly connected to the water storage tank (6), and the end of the water delivery pipe (11) away from the water pump (9) is fixedly connected to the cooling sleeve (2).

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