Ultrahigh vacuum interconnection system

Abstract

The utility model provides an ultrahigh vacuum interconnection system, and relates to the technical field of ultrahigh vacuum. The ultrahigh vacuum interconnection system comprises at least one processing device, a data acquisition module and a control module, each processing device comprises two sample chambers which are selectively communicated, each sample chamber is sequentially connected with an ion gauge, a molecular pump and an electromagnetic valve, and the two electromagnetic valves of each processing device are communicated and connected with a precursor pump. The two sample chambers are respectively a sample introduction chamber and an analysis chamber, the data acquisition module is arranged to be connected with each ion gauge, the molecular pump, the electromagnetic valve and the precursor pump through serial communication interfaces, and the control module is connected to the data acquisition module. And the control module is configured to receive monitoring data of the data acquisition module and issue a control signal through the data acquisition module, so that the control module can automatically monitor the operation state of the processing device. The ultrahigh vacuum interconnection system provided by the utility model can realize automatic start and stop, and is higher in system integration level and use safety.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of ultrahigh vacuum technology, specifically relates to an ultrahigh vacuum interconnection system. BACKGROUND

[0002] In the field of modern scientific research and high-end manufacturing, experiments and process operations under ultrahigh vacuum environment have a very critical position. As the core infrastructure for connecting different ultrahigh vacuum equipment or experimental cavities, working together and integrating complex experimental processes, the development process of the ultrahigh vacuum interconnection system is closely related to the demand for multi-disciplinary integration.

[0003] The existing ultrahigh vacuum interconnection system usually includes a vacuum chamber, a transmission pipeline, an interface valve, a vacuum pump and a control system. However, the traditional control system still relies on manual control, lacks automation, reduces operation efficiency and safety, and the communication protocols of pump valve components from different manufacturers are usually different, resulting in poor integration of the control system of the ultrahigh vacuum interconnection system, making it difficult to achieve unified control and hindering the development of automation of the ultrahigh vacuum interconnection system. SUMMARY

[0004] One object of the utility model is to provide an ultrahigh vacuum interconnection system to solve the technical problem of low automation and poor system integration of the ultrahigh vacuum interconnection system in the prior art.

[0005] Another object of the utility model is to further improve the system integration of the ultrahigh vacuum interconnection system.

[0006] According to the purpose of the utility model, the utility model provides an ultrahigh vacuum interconnection system, comprising:

[0007] At least one processing device, each processing device comprising two sample chambers in selective communication, each sample chamber being connected in turn with an ion gauge, a molecular pump and a solenoid valve, the two solenoid valves of each processing device being arranged to communicate and connected with a fore pump, the two sample chambers being a sample inlet chamber and an analysis chamber respectively;

[0008] A data acquisition module is arranged to be connected with each ion gauge, molecular pump, solenoid valve and fore pump through a serial communication interface;

[0009] A control module is connected to the data acquisition module, and the control module is arranged to receive monitoring data from the data acquisition module and issue control signals through the data acquisition module, so that the control module can automatically monitor the running state of the processing device.

[0010] Optionally, each processing device further comprises:

[0011] A gate valve is located between the injection chamber and the analysis chamber, and the gate valve is configured to selectively open or close.

[0012] Optionally, the processing apparatus further includes:

[0013] A resistance gauge is located between the pre-pump and the solenoid valve, and the resistance gauge is configured to detect the vacuum level between the pre-pump and the solenoid valve.

[0014] Optionally, the serial communication interface of the molecular pump is configured to receive a preset DC voltage.

[0015] Optionally, each of the ion gauges, molecular pumps, solenoid valves, precursor pumps, gate valves, and resistance gauges in the processing device has its own independent address code.

[0016] Optionally, the solenoid valve connected to the injection chamber is configured to remain closed during the increase of vacuum in the injection chamber.

[0017] Optionally, the solenoid valve connected to the analysis chamber is configured to remain closed until the vacuum level detected by the resistance gauge reaches a preset vacuum level.

[0018] Optionally, the gate valve is configured to open when the pressure difference between the injection chamber and the analysis chamber is less than a preset pressure.

[0019] Optionally, the number of processing devices may be two.

[0020] This invention involves sequentially installing a molecular pump and a solenoid valve between each sample chamber and the precursor pump, and an ion gauge within each sample chamber. A data acquisition module is connected to each molecular pump, solenoid valve, ion gauge, and precursor pump via a serial communication interface to collect real-time monitoring data from each pump, gauge, and valve component in each processing device. This monitoring data is then transmitted to a control module. When the monitoring data acquired by the control module for each pump, gauge, and valve component meets the corresponding preset conditions, the module automatically starts or stops the corresponding pump, gauge, and valve. This achieves real-time data detection and automatic start / stop protection for each pump, gauge, and valve component in each processing device within the ultra-high vacuum interconnected system, thereby improving both the automation level and system integration of the ultra-high vacuum interconnected system.

[0021] Furthermore, the serial communication interface of the molecular pump of this invention is configured to receive a preset DC voltage. That is, when the serial communication interface is powered, the molecular pump is powered by a preset DC voltage through the serial communication interface, so that the molecular pump is integrated with the data acquisition module through DC power supply, eliminating the instrument controller of the molecular pump itself in the control module, thereby further improving the system integration of the ultra-high vacuum interconnection system.

[0022] The above description is only a summary of the technical scheme of the present application. In order to make the technical means of the present application more clearly understood and implemented according to the content of the specification, the preferred embodiments of the present application are described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] Some specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. The same reference signs in the drawings represent the same or similar components or parts. It should be understood by those skilled in the art that the drawings are not necessarily drawn to scale. In the drawings:

[0024] Figure 1 is a schematic structural connection diagram of an ultrahigh vacuum interconnection system according to an embodiment of the present application;

[0025] Figure 2 is a control logic diagram of automatic control start of an ultrahigh vacuum interconnection system according to an embodiment of the present application;

[0026] Figure 3 is a control logic diagram of automatic control stop of an ultrahigh vacuum interconnection system according to an embodiment of the present application.

[0027] Reference signs:

[0028] 100 - ultrahigh vacuum interconnection system, 10 - processing device, 11 - ion gauge, 12 - molecular pump, 13 - electromagnetic valve, 14 - backing pump, 15 - sample chamber, 16 - analysis chamber, 17 - plug valve, 18 - resistance gauge, 20 - data acquisition module, 30 - control module. DETAILED DESCRIPTION

[0029] The specific embodiments of the present application will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0030] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that only the parts related to the present application are shown in the drawings, not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0031] The terms "comprises", "comprising", "includes", "including", "has", "having" and their conjugates, as used herein, are intended to cover the situation where individual steps or elements have been joined together to form a process, method, system, product or apparatus, as well as the situation where individual steps or elements have been excluded therefrom. The term "may" is used in this document to mean that one or more features of the application can or can not be used or can or can not be present, and that no determination can be made whether these features will be used and present, or not.

[0032] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase "in an embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. It is expressly understood that any of the embodiments described herein can be incorporated in to other embodiments.

[0033] Figure 1 is a schematic structural connection diagram of an ultrahigh vacuum interconnection system according to an embodiment of the present application, Figure 2 is a control logic diagram of automatic control start of an ultrahigh vacuum interconnection system according to an embodiment of the present application, Figure 3 is a control logic diagram of automatic control stop of an ultrahigh vacuum interconnection system according to an embodiment of the present application.

[0034] As shown in Figure 1 The present application provides an ultrahigh vacuum interconnection system 100, which comprises at least one processing device 10, a data acquisition module 20 and a control module 30. Each processing device 10 comprises two sample chambers in selective communication, each sample chamber is sequentially connected with an ion gauge 11, a molecular pump 12 and a solenoid valve 13, and the two solenoid valves 13 of each processing device 10 are arranged in communication and connected with a fore pump 14. The two sample chambers are respectively a sample inlet chamber 15 and an analysis chamber 16. The data acquisition module 20 is arranged to be connected with each ion gauge 11, molecular pump 12, solenoid valve 13 and fore pump 14 through a serial communication interface. The control module 30 is connected to the data acquisition module 20, and is arranged to receive monitoring data of the data acquisition module 20 and issue control signals through the data acquisition module 20, so that the control module 30 can automatically monitor the running state of the processing device 10. In the embodiment, the processing device 10 of the ultrahigh vacuum interconnection system 100 can be one, two or more. Each processing device 10 comprises two sample chambers, two ion gauges 11, two molecular pumps 12, two solenoid valves 13 and one fore pump 14. The control module 30 is an industrial all-in-one machine, an upper computer or an industrial computer.

[0035] In the embodiment, the molecular pump 12 and the electromagnetic valve 13 are sequentially arranged between each sample chamber and the precursor pump 14, the ion gauge 11 is arranged in each sample chamber, and the data acquisition module 20 is connected to each molecular pump 12, electromagnetic valve 13, ion gauge 11 and precursor pump 14 through a serial communication interface to collect real-time monitoring data of each pump-gauge-valve component in each processing device 10 and transmit the monitoring data to the control module 30, so that the control module 30 controls the corresponding pump-gauge-valve to automatically start or stop when the monitoring data of each pump-gauge-valve component obtained by the control module 30 meets the corresponding preset condition, thereby realizing real-time data detection and automatic start-stop protection of each pump-gauge-valve component in each processing device 10 in the ultrahigh vacuum interconnection system 100, and improving the system integration of the ultrahigh vacuum interconnection system 100 while improving the degree of automation of the ultrahigh vacuum interconnection system 100.

[0036] In the embodiment, the number of precursor pumps 14 in each processing device 10 is one, each precursor pump 14 is connected to the molecular pump 12 through the electromagnetic valve 13, thereby being connected to the sample chamber 15 and the analysis chamber 16, and the precursor pump 14 is arranged to perform pre-evacuation low vacuum on the sample chamber 15 and the analysis chamber 16 when the electromagnetic valve 13 is opened, and the molecular pump 12 of the corresponding pipeline is opened when the vacuum degree between the electromagnetic valve 13 and the precursor pump 14 reaches a preset vacuum degree, so as to perform ultrahigh vacuum evacuation on the sample chamber 15 and / or the analysis chamber 16. That is, the presence of the precursor pump 14 in the embodiment can provide a front-stage vacuum for the opening of the molecular pump 12 and remove high-pressure gas and impurities in the pipeline, thereby significantly shortening the time for the sample chamber 15 and the analysis chamber 16 to reach an ultrahigh vacuum state, further improving the working efficiency of the ultrahigh vacuum interconnection system 100, and by arranging two molecular pumps 12 in each processing device 10 to share one precursor pump 14, the manufacturing cost of the ultrahigh vacuum interconnection system 100 is further reduced.

[0037] In the embodiment, the data acquisition module 20 is a compatible data acquisition device that can be applied to different communication protocols in different pump-gauge-valve components, thereby improving the system integration of the ultrahigh vacuum interconnection system 100. Here, the serial data acquisition device can simultaneously adapt to hardware layer protocols and software layer protocols of different communication protocols, for example, hardware layer protocols RS232 and RS485, and software layer protocols MODBUS and TCP / IP.

[0038] Further, in one embodiment, each processing device 10 further comprises a plug valve 17 located between the sample inlet chamber 15 and the analysis chamber 16, and the plug valve 17 is configured to be selectively opened or closed. In this embodiment, the plug valve 17 of each processing device 10 is arranged between the two sample chambers, i.e. one plug valve 17 is arranged between the sample inlet chamber 15 and the analysis chamber 16 of each processing device 10, and the plug valve 17 is configured to be opened to connect the sample inlet chamber 15 and the analysis chamber 16, and closed to isolate the sample inlet chamber 15 and the analysis chamber 16, i.e. the plug valve 17 is opened to allow the sample to pass between the sample inlet chamber 15 and the analysis chamber 16, facilitating the sample inlet and subsequent analysis process, and the plug valve 17 is closed to maintain the vacuum independence of the sample inlet chamber 15 and the analysis chamber 16.

[0039] In this embodiment, the ion gauge 11 and the molecular pump 12 in each processing device 10 are arranged to be mounted on the flange of the corresponding sample chamber, i.e. the ion gauge 11 is generally used for pressure measurement in high vacuum, and its mounting on the flange helps to stabilize and accurately monitor the vacuum state of the system, while the molecular pump 12 is responsible for removing molecular-level gas molecules in the sample chamber, ensuring that the molecular pump 12 is effectively connected to the analysis chamber 16 or the sample inlet chamber 15, and ensuring the continuity and efficiency of the pumping process, to accurately control the vacuum degree of the ultra-high vacuum interconnection system 100, and to ensure that each pump gauge valve component operates within the correct pressure range.

[0040] Further, in one embodiment, the processing device 10 further comprises a resistance gauge 18 located between the precursor pump 14 and the electromagnetic valve 13, and the resistance gauge 18 is configured to detect the vacuum degree between the precursor pump 14 and the electromagnetic valve 13. In this embodiment, by mounting the resistance gauge 18 between the precursor pump 14 and the electromagnetic valve 13, and arranging it at the gas inlet of the precursor pump 14, the gas inlet pressure of the precursor pump 14 can be monitored in real time to feedback the vacuum degree between the precursor pump 14 and the molecular pump 12, so that the working state of the molecular pump 12 can be adjusted according to the feedback vacuum degree, so that the molecular pump 12 can be turned on under optimal conditions, improving the working efficiency of the molecular pump 12.

[0041] In this embodiment, each molecular pump 12 in each processing device 10 is connected to the electromagnetic valve 13 through a bellows, and the electromagnetic valve 13 is connected to the resistance gauge 18 through a bellows, and the bellows connection allows the connection between the molecular pump 12 and the electromagnetic valve 13 or the electromagnetic valve 13 and the resistance gauge 18 to have a certain displacement and shock absorption function, avoiding structural damage of the precursor pump 14 of the ultra-high vacuum interconnection system 100 due to vibration and other factors during vacuum pumping, thereby further improving the air tightness between the molecular pump 12 and the electromagnetic valve 13 and the electromagnetic valve 13 and the resistance gauge 18. Moreover, the electromagnetic valve 13 is arranged between the precursor pump 14 and the molecular pump 12, which can accurately control the inflow or outflow of gas, ensuring the stability of the working state of the ultra-high vacuum interconnection system 100.

[0042] In a further embodiment, the serial communication interface of the molecular pump 12 is set to a preset direct current voltage, i.e. the molecular pump 12 is powered by the preset direct current voltage through the serial communication interface in the case of power supply of the serial communication interface, so as to integrate the molecular pump 12 with the data acquisition module 20 in a direct current power supply mode, and abandon the instrument controller of the molecular pump 12 itself in the control module 30, thereby further improving the system integration of the ultrahigh vacuum interlocking system 100.

[0043] In a further embodiment, each ion gauge 11, molecular pump 12, electromagnetic valve 13, backing pump 14, plug valve 17 and resistance gauge 18 of the processing device 10 has a respective independent address code. In this embodiment, each pump gauge valve component of each processing device 10 is provided with an independent address code, i.e. each ion gauge 11, molecular pump 12, electromagnetic valve 13, backing pump 14, plug valve 17 and resistance gauge 18 in each processing device 10 has a respective independent address code, so that when the control module 30 issues a control signal to each pump gauge valve component through the data acquisition module 20, each pump gauge valve component can obtain the corresponding control signal through the corresponding address code and implement the corresponding start-stop operation, thereby ensuring that the data acquisition module 20 can adapt to different communication protocols while ensuring that each pump gauge valve component obtains the corresponding control signal.

[0044] In a further embodiment, the electromagnetic valve 13 connected to the sample chamber 15 is set to remain closed during the process of increasing the vacuum degree of the sample chamber 15, preventing the molecular pump 12 connected to the analysis chamber 16 from entering self-protection when the backing pressure is too high, thereby improving the structural safety of the molecular pump 12 in the ultrahigh vacuum interlocking system 100.

[0045] In a further embodiment, the electromagnetic valve 13 connected to the analysis chamber 16 is set to remain closed until the vacuum degree detected by the resistance gauge 18 reaches a preset vacuum degree. In this embodiment, when the sample chamber 15 is being evacuated, the electromagnetic valve 13 of the analysis chamber 16 needs to be closed to prevent the molecular pump 12 of the analysis chamber 16 from entering self-protection due to excessive backing pressure, thereby further improving the structural safety of the molecular pump 12 in the ultrahigh vacuum interlocking system 100. Here, the preset vacuum degree is any value less than 10 mbar, i.e. the vacuum degree of the resistance gauge 18 before the molecular pump 12 is turned on needs to be less than 10 mbar to ensure that the molecular pump 12 is turned on in the best state.

[0046] In a further embodiment, the insertion valve 17 is configured to open when the pressure difference between the sample inlet chamber 15 and the analysis chamber 16 is less than a predetermined pressure, ensuring that the pressure difference between the two chambers is small enough when the valve is opened to avoid sudden pressure changes that can cause air flow surges in the system, effectively protecting sensitive equipment from air flow fluctuations and maintaining the stability of the ultrahigh vacuum interconnection system 100. At the same time, it ensures the accuracy and consistency of sample transfer from the sample inlet chamber 15 to the analysis chamber 16, avoiding the sample from deviating from the intended trajectory or being unnecessarily disturbed due to a large pressure difference. Here, the pressure difference between the sample inlet chamber 15 and the analysis chamber 16 in the processing device 10 is less than 10 -8 mbar.

[0047] In a further embodiment, the number of processing devices 10 can be two. In this embodiment, the number of processing devices 10 is two, and the number of pump gauge valve components in the ultrahigh vacuum interconnection system 100 is correspondingly increased. By assigning different address codes to each pump gauge valve component, each pump gauge valve can obtain the corresponding control signal, thereby achieving the interconnection of multiple ultrahigh vacuum systems and the automatic control and system integration of the ultrahigh vacuum interconnection system 100.

[0048] As shown in Figure 2 In this embodiment, when the number of processing devices 10 in the ultrahigh vacuum interconnection system 100 is one, the control logic for the automatic control and start-up of the ultrahigh vacuum interconnection system 100 is as follows: the ultrahigh vacuum interconnection system 100 first performs a system self-check to check the equipment status of the ultrahigh vacuum interconnection system 100. When the equipment status is confirmed to be normal, the control of the backing pump 14 is started, the electromagnetic valve 13 is opened, and when the vacuum level of the resistive gauge 18 is detected to be less than 10 mbar, the molecular pump 12 in the sample inlet chamber 15 and the analysis chamber 16 is started to perform ultrahigh vacuum pumping on the sample inlet chamber 15 and the analysis chamber 16. When the rotational speed of the molecular pump 12 is detected to reach full speed, the ion gauge 11 in the sample inlet chamber 15 and the analysis chamber 16 is opened to detect the vacuum level in the sample inlet chamber 15 and the analysis chamber 16. Subsequently, when the pressure difference between the analysis chamber 16 and the sample inlet chamber 15 is detected to be less than 10 -8 mbar, the insertion valve 17 is controlled to open, thereby achieving the automatic start-up of the ultrahigh vacuum interconnection system 100.

[0049] As shown in Figure 3As shown, when the number of the processing device 10 of the ultra-high vacuum interlocking system 100 is one in the embodiment, the control logic of the automatic control stop operation of the ultra-high vacuum interlocking system 100 is as follows: when the system self-checking of the ultra-high vacuum interlocking system 100 is in the normal state, the plug valve 17 and the ion gauge 11 in the sample chamber 15 and the analysis chamber 16 are all closed, after detecting that the ion gauge 11 in the sample chamber 15 and the analysis chamber 16 is completely closed, the molecular pump 12 connected with the sample chamber 15 and the analysis chamber 16 is controlled to be closed, after confirming that the rotating speed of the molecular pump 12 is zero, the electromagnetic valve 13 in the sample chamber 15 and the analysis chamber 16 is continuously controlled to be closed, after confirming that the electromagnetic valve 13 is completely closed, the front drive pump 14 is controlled to be closed, so as to realize the automatic control stop operation of the ultra-high vacuum interlocking system 100.

[0050] The technical features of the above-described embodiments can be combined arbitrarily, and for the sake of brevity, all possible combinations of the technical features in the above-described embodiments are not described, however, as long as the combinations of the technical features do not contradict, they should be considered as the scope of the present application.

[0051] The above-described embodiments only express several implementation manners of the present application, the description is relatively specific and detailed, however, it should not be understood as the limitation of the scope of the present application. It should be pointed out that, for the ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. An ultrahigh vacuum interlock system characterized by, The system comprises: at least one processing device, each of which comprises two sample chambers in selective communication, each of which is connected with an ion gauge, a molecular pump and a solenoid valve in turn, and two solenoid valves of each processing device are arranged in communication and connected with a fore pump, and the two sample chambers are respectively a sample inlet chamber and an analysis chamber; a data acquisition module arranged in connection with each ion gauge, molecular pump, solenoid valve and fore pump through a serial communication interface; a control module connected to the data acquisition module, which is arranged to receive monitoring data of the data acquisition module and issue control signals through the data acquisition module, so that the control module can automatically monitor the running state of the processing device.

2. The ultrahigh vacuum interlock system of claim 1, wherein, Each of the processing devices further comprises: a plug valve between the sample inlet chamber and the analysis chamber, which is arranged to be selectively opened or closed.

3. The ultrahigh vacuum interlock system of claim 2, wherein, The processing device further comprises: a resistance gauge between the fore pump and the solenoid valve, which is arranged to detect the vacuum degree between the fore pump and the solenoid valve.

4. The ultra-high vacuum interconnection system according to claim 3, wherein the serial communication interface of the molecular pump is arranged to input a preset direct current voltage.

5. The ultra-high vacuum interconnection system according to claim 4, wherein each of the ion gauges, molecular pumps, solenoid valves, fore pumps, plug valves and resistance gauges of the processing device has a respective independent address code.

6. The ultra-high vacuum interconnection system according to claim 5, wherein the solenoid valve connected with the sample inlet chamber is arranged to remain closed during the process of increasing the vacuum degree of the sample inlet chamber.

7. The ultra-high vacuum interconnection system according to claim 6, wherein the solenoid valve connected with the analysis chamber is arranged to remain closed before the vacuum degree detected by the resistance gauge reaches a preset vacuum degree.

8. The ultra-high vacuum interconnection system according to claim 7, wherein the plug valve is arranged to be opened when the pressure difference between the sample inlet chamber and the analysis chamber is less than a preset pressure.

9. The ultra-high vacuum interconnection system according to any one of claims 1-8, wherein the number of processing devices can be two.

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