Power supply circuit and chemical vapor deposition equipment

Abstract

The utility model discloses a power supply circuit and chemical vapor deposition equipment. According to the power supply circuit, a transformer comprises a primary winding and a secondary winding; the secondary winding comprises a first sub-winding and a second sub-winding, the first sub-winding comprises a first end and a second end, and the second sub-winding comprises a third end and a fourth end; the second end and the third end are connected in series and grounded; a load is connected in series between the first end and the fourth end; the sum of the turns of the first sub-winding and the second sub-winding is smaller than the turns of the primary winding. According to the technical scheme of the utility model, the transformer is arranged in the power supply circuit, and the second end and the third end are connected in series and grounded, so that the load of the supplied voltage under the transformer structure is ensured, the reduction of the single-line voltage is facilitated, and the safety is improved; the voltage supplied to the load is reduced through the transformer, personal potential safety hazards are reduced, contact risks are reduced, the safety of equipment is improved, and safe power supply is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to power supply technical field especially relates to a power supply circuit and chemical vapor deposition equipment. BACKGROUND

[0002] Metal-organic source gas and other process gas participating in reaction in metal-organic chemical vapor deposition (MOCVD) equipment need to maintain certain temperature when transmitting in pipeline to avoid gas solidification and blockage, so heating band is used to wind pipeline and provide certain temperature.

[0003] At present, the heating band product of MOCVD equipment uses the design scheme of alternating current 220V voltage power supply, so that if the heating band line is touched by mistake in the use process, irreversible harm will be caused to the human body, and certain danger exists. UTILITY MODEL CONTENTS

[0004] The utility model provides a kind of power supply circuit and chemical vapor deposition equipment to solve the problem of high voltage of power supply circuit in prior art, dangerousness exists in working process, security.

[0005] According to an aspect of the utility model, a kind of power supply circuit is provided, comprising: transformer;

[0006] The transformer includes primary winding and secondary winding;

[0007] The secondary winding includes first sub-winding and second sub-winding, the first sub-winding includes first end and second end, and the second sub-winding includes third end and fourth end;Second end and third end are connected in series and grounded;Load is connected in series between first end and fourth end;

[0008] The sum of the number of turns of the first sub-winding and the second sub-winding is less than the number of turns of the primary winding.

[0009] Optionally, the first voltage difference between the first end and the second end is less than 36V;The second voltage difference between the fourth end and the third end is less than 36V.

[0010] Optionally, the number of turns of the first sub-winding and the number of turns of the second sub-winding are the same.

[0011] Optionally, the third voltage difference between the two ends of the primary winding is 220V;

[0012] The first voltage difference is 30V, and the second voltage difference is 30V.

[0013] Optionally, the power supply circuit further comprises a circuit breaker;

[0014] The circuit breaker comprises a fifth end, a sixth end, a seventh end and an eighth end;

[0015] The fifth end is electrically connected with the first end of the first sub-winding, the sixth end is electrically connected with one end of the load, the seventh end is electrically connected with the fourth end of the second sub-winding, and the eighth end is electrically connected with the other end of the load.

[0016] The circuit breaker is used for controlling the circuit between the secondary winding and the load to be disconnected when the leakage current is greater than the preset current.

[0017] Optionally, the circuit breaker further comprises a first switch and a second switch.

[0018] The first switch is arranged in series between the first end and the fifth end, and the second switch is arranged in series between the fourth end and the eighth end.

[0019] The circuit breaker is used for controlling the first switch and the second switch to be disconnected when the leakage current is greater than the preset current.

[0020] Optionally, the power supply circuit further comprises a detection button and a detection resistance.

[0021] The sixth end is grounded, and the detection button and the detection resistance are arranged in series between the sixth end and the ground end.

[0022] Optionally, a relationship among the resistance value R of the detection resistance, the first voltage difference V1 between the first end and the second end and the preset current I0 satisfies V1 / R>I0.

[0023] Optionally, the load comprises a heating belt.

[0024] According to another aspect of the utility model, a kind of chemical vapor deposition equipment is provided, wherein including power supply circuit;Further including gas delivery pipeline;

[0025] The load is arranged around the gas delivery pipeline, for changing the temperature of the gas delivery pipeline.

[0026] The technical scheme of the utility model, by being provided with transformer in power supply circuit, transformer includes primary winding and secondary winding;Secondary winding includes first sub-winding and second sub-winding, the second end of first sub-winding is connected in series with the third end of second sub-winding and is grounded, first end and fourth end connect load, using the mode that second end and third end are connected in series and grounded, it is guaranteed that load voltage supplied under this transformer structure can also help the drop of single-line voltage, improve safety;By transformer, the voltage supplied to load is reduced, reduces personal safety hidden danger, reduces contact risk, improves the safety of equipment, realizes safe power supply.

[0027] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0029] Figure 1 is a structural schematic diagram of a transformer according to an embodiment of the present application;

[0030] Figure 2 is a circuit connection schematic diagram of a power supply circuit according to an embodiment of the present application. DETAILED DESCRIPTION

[0031] In order to make the person skilled in the art better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0032] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0033] Figure 1 is a structural schematic diagram of a transformer according to an embodiment of the present application, Figure 2 is a circuit connection schematic diagram of a power supply circuit according to an embodiment of the present application. In combination with Figure 1 and Figure 2 It is shown that the power supply circuit comprises a transformer 1;

[0034] The transformer 1 comprises a primary winding 11 and a secondary winding 12;

[0035] The secondary winding 12 comprises a first sub-winding 121 and a second sub-winding 122, the first sub-winding 121 comprises a first end c and a second end d, and the second sub-winding 122 comprises a third end e and a fourth end f; the second end d and the third end e are connected in series and grounded; a load is connected in series between the first end c and the fourth end f.

[0036] The sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11.

[0037] The transformer 1 functions as a voltage converter. The primary winding 11 can be connected to a power supply, and receives energy from the power supply end. The primary winding 11 can be connected to a 220V alternating voltage, so that the power supply circuit can be directly connected to the mains. The secondary winding 12 can be connected to a load, and can provide energy for the load. The voltage of the secondary winding 12 is related to the ratio of the number of turns of the primary winding 11 and the secondary winding 12.

[0038] The transformer 1 functions as a voltage converter. The primary winding 11 can be connected to a power supply, and receives energy from the power supply end. The primary winding 11 can be connected to a 220V alternating voltage, so that the power supply circuit can be directly connected to the mains. The secondary winding 12 can be connected to a load, and can provide energy for the load. The voltage of the secondary winding 12 is related to the ratio of the number of turns of the primary winding 11 and the secondary winding 12.

[0039] The second end d of the first sub-winding 121 and the third end e of the second sub-winding 122 are connected in series and grounded, so that the potentials of the second end d and the third end e are 0. Assuming that the voltage difference of the first sub-winding 121 is a, then the potential of the first end c of the first sub-winding 121 is +a. Assuming that the voltage difference of the second sub-winding 122 is b, then the potential of the fourth end f of the second sub-winding 122 is -b. Since the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, when the primary winding 11 has a 220V alternating voltage across its ends, the voltage difference a+b of the first sub-winding 121 and the second sub-winding 122 is less than 220V, i.e., the voltage across the load is less than 220V.

[0040] It can be understood that directly applying a large voltage of 220V to power the load may have certain safety hazards, causing the staff to mistakenly touch the power supply circuit and causing irreversible harm to the human body, which is dangerous. Through the technical scheme of the embodiment of the utility model, by using the transformer 1 to set the secondary winding 12 including the first sub-winding 121 and the second sub-winding 122, the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, so that the voltage output to the load is reduced, the probability of irreversible harm to the human body is reduced, and the danger is reduced. At the same time, the second end d and the third end e of the embodiment of the utility model are connected in series and grounded, on the one hand, the first sub-winding 121 and the second sub-winding 122 are combined into one winding, and the first end c and the fourth end f are connected in series to realize power supply; on the other hand, the second end d and the third end e are both grounded, so that the first end c is a positive voltage and the fourth end f is a negative voltage, so that the single wire corresponding to the first end c and the fourth end f can share the voltage to the load, ensuring the minimization of single wire voltage under fixed power supply voltage, which helps to improve safety.

[0041] It can be understood that the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, and also indicates that the number of turns of the first sub-winding 121 is less than the number of turns of the primary winding 11, and the number of turns of the second sub-winding 122 is less than the number of turns of the primary winding 11, and the voltage of the first end c and the fourth end f is reduced, which also reduces the harm of single wire mistaken touch.

[0042] In some embodiments, the load includes a heating band. The power supply circuit can power the heating band so that the heating band generates heat and provides a corresponding temperature. It can be understood that when the rated working voltage of the heating band is 220V, the transformer 1 of the embodiment of the utility model reduces 220V, which will reduce the heating efficiency of the heating band, so when setting the number of turns of the secondary winding 12, it is necessary to consider whether the heating efficiency of the heating band is suitable for the current working scene, while meeting the working scene, the safety of the power supply circuit is maximized.

[0043] Specifically, the load is set as a heating belt. The potentials at the two ends of the primary winding 11 are 0V and 220V respectively, and 220V alternating voltage is input into the primary winding 11. The first sub-winding 121 and the second sub-winding 122 with the same number of turns are arranged in the secondary winding 12, the second end d of the first sub-winding 121 and the third end e of the second sub-winding 122 are grounded, the first end c of the first sub-winding 121 is +30V, and the fourth end f of the second sub-winding 122 is -30V, so that the voltage supplied to the heating belt is 60V, which meets the demand of the heating efficiency in the current application scenario, and the voltage on the single line of the power supply circuit is only 30V, which is less than the human body safety voltage 36V, so even if the worker touches the single line by mistake during the working process of the heating belt, it will not cause harm to the human body, and the safety hazard is eliminated, and the safety of the whole set of equipment is improved.

[0044] The technical scheme of the embodiment of the utility model, through setting transformer in power supply circuit, transformer includes primary winding and secondary winding;The secondary winding includes a first sub-winding and a second sub-winding, the second end of the first sub-winding and the third end of the second sub-winding are connected in series and grounded, and the first end and the fourth end are connected to the load, by the way of connecting the second end and the third end in series and grounding, it is guaranteed that the voltage supplied to the load under this transformer structure can also help the voltage drop of single line, and the safety is improved;By transformer, the voltage supplied to the load is reduced, the personal safety hazard is reduced, the contact risk is reduced, the safety of equipment is improved, and safe power supply is realized.

[0045] Optionally, continuing to refer to Figure 1 and Figure 2 As shown, the first voltage difference between the first end c and the second end d is less than 36V;The second voltage difference between the fourth end f and the third end e is less than 36V.

[0046] Wherein, since the human body safety voltage is 36V, the first voltage difference between the first end c and the second end d is less than 36V, and the second voltage difference between the fourth end f and the third end e is less than 36V, so that even if the worker touches the single line by mistake during the power supply process of the load, it will not cause the problem of personal safety.

[0047] Exemplarily, it is set that the minimum voltage required to ensure the working efficiency of the load in the current scenario is 60V, and the voltage difference between the first end c and the fourth end f is set as 60V, in order to ensure that the first voltage difference and the second voltage difference are both less than 36V, so that the first voltage difference is 30V and the second voltage difference is 30V, so that the two single lines of the power supply circuit are both less than 36V, and the power supply efficiency is ensured, and the personal safety hazard is eliminated, and the safety during the working process of the load is improved.

[0048] The technical scheme of the embodiment of the utility model, through setting first voltage difference between first end and second end is less than, second voltage difference between fourth end and third end is less than, make first voltage difference and second voltage difference are less than human body safety voltage, guarantee the safety of each single line, eliminate the security risk.

[0049] Optionally, with reference to Figure 1 And Figure 2 As shown, the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are the same.

[0050] When the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are the same, the potential of the first end c and the fourth end f is the same, and the electrical properties are opposite, so that the voltage of each single line on the power supply circuit is the same, which helps to share the power supply voltage of the load and improves the safety.

[0051] For example, in the current application scenario, the minimum power supply voltage that guarantees the load power is 60V. When the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are different, the voltage of the first end c is +40V, and the voltage of the fourth end f is -20V, which ensures the working efficiency of the load, but the single line corresponding to the first end c is +40V, which is greater than the human body safety voltage 36V, so the safety of this setting mode is not good; when the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are the same, the voltage of the first end c is +30V, and the voltage of the fourth end f is -30V, which ensures the working efficiency of the load while the two groups of single lines are less than the human body safety voltage 36V, thereby improving the safety during the working process of the load.

[0052] The technical scheme of the embodiment of the utility model, through setting the number of turns of the first sub-winding and the number of turns of the second sub-winding are the same, so that under the condition of fixed power supply voltage, the same number of turns can ensure that the voltage on the single line is divided, which helps to improve the safety during the working process of the load.

[0053] Optionally, with reference to Figure 1 And Figure 2 As shown, the third voltage difference between the two ends of the primary winding 11 is 220V;

[0054] The first voltage difference is 30V, and the second voltage difference is 30V.

[0055] Among them, the primary winding 11 can be connected to the mains, so that the third voltage difference is 220V, and by using the number of turns of the primary winding 11 and the secondary winding 12, the first voltage difference is set to 30V, and the second voltage difference is set to 30V, which ensures the working efficiency of the load while eliminating the contact hazard and improving the safety during the working process of the load.

[0056] Optionally, with reference to Figure 2As shown, the power supply circuit further comprises a circuit breaker RCD;

[0057] The circuit breaker RCD comprises a fifth terminal g, a sixth terminal h, a seventh terminal i and an eighth terminal j.

[0058] The fifth terminal g is electrically connected to the first terminal c of the first sub-coil 121; the sixth terminal h is electrically connected to one end of the load; the seventh terminal i is electrically connected to the fourth terminal f of the second sub-coil 122; and the eighth terminal j is electrically connected to the other end of the load.

[0059] The circuit breaker RCD is used to control the disconnection of the loop between the secondary coil 12 and the load when the leakage current is greater than the preset current.

[0060] The circuit breaker RCD can be used for leakage protection, and the circuit breaker RCD can comprise four terminals arranged on two single lines connected to the load, the fifth terminal g is electrically connected to the first terminal c of the first sub-coil 121; the sixth terminal h is electrically connected to one end of the load; the seventh terminal i is electrically connected to the fourth terminal f of the second sub-coil 122; and the eighth terminal j is electrically connected to the other end of the load, the circuit breaker RCD can detect whether the current entering the circuit breaker RCD is balanced with the current leaving the circuit breaker RCD, and then detect whether the circuit has a leakage.

[0061] When the circuit breaker RCD detects that the current of the fifth terminal g to the seventh terminal i and the sixth terminal h and the eighth terminal j is unbalanced, at this time, the leakage current is greater than the preset current, indicating that the power supply circuit has a leakage at this time, and the loop between the secondary coil 12 and the load is controlled to be disconnected, that is, the line connected between the first terminal c and the load is disconnected, and the line connected between the fourth terminal f and the load is also disconnected.

[0062] The technical scheme of the embodiment of the utility model, through setting the circuit breaker in the power supply circuit, when the power supply circuit has a leakage, the circuit breaker can control the loop between the load and the second coil to be disconnected in time, play the role of leakage protection, improve the safety of the power supply circuit.

[0063] Optionally, with reference to Figure 2 As shown, the circuit breaker RCD further comprises a first switch 21 and a second switch 22.

[0064] The first switch 21 is connected in series between the first terminal c and the fifth terminal g; and the second switch 22 is connected in series between the fourth terminal f and the eighth terminal j.

[0065] The circuit breaker RCD is used to control the disconnection of the first switch 21 and the second switch 22 when the leakage current is greater than the preset current.

[0066] Wherein, since the circuit breaker RCD can detect whether the current of the fifth end g to the seventh end i and the sixth end h and the eighth end j is balanced, and further determine whether there is electric leakage, when there is electric leakage, the circuit connected with the first end c and the load is disconnected, and the circuit connected with the fourth end f and the load is also disconnected, therefore, the first switch 21 and the second switch 22 can be arranged, the first switch 21 is arranged between the first end c and the fifth end g, and the second switch 22 is arranged between the fourth end f and the eighth end j, so that when electric leakage is detected, the first switch 21 and the second switch 22 are controlled to switch at the same time, and the circuit connected with the first end c and the load is disconnected, and the circuit connected with the fourth end f and the load is also disconnected.

[0067] The technical scheme of the embodiment of the utility model, through setting first switch and second switch in circuit breaker, when electric leakage occurs in power supply circuit, circuit breaker can control first switch and second switch to disconnect in time, make the circuit between load and second winding disconnect, play the role of electric leakage protection, improve the safety of power supply circuit.

[0068] Optionally, continuing to refer to Figure 2 As shown in the figure, the power supply circuit further comprises a detection button PB and a detection resistor R;

[0069] The sixth end h is grounded, and the detection button PB and the detection resistor R are connected in series between the sixth end h and the ground end.

[0070] Wherein, since the rated voltage of the normal circuit breaker RCD on the market is fixed, generally 220V, and in the embodiment of the utility model, the load power supply voltage is reduced at the same time, and the working voltage of the circuit breaker RCD needs to be adaptively changed, so as to ensure that the circuit breaker RCD can work normally when electric leakage occurs, therefore, the detection button PB and the detection resistor R are arranged in the power supply circuit, the detection button PB and the detection resistor R are connected in series between the sixth end h and the ground end, when the detection button PB is pressed, the sixth end h and the ground end are conducted, since the detection resistor R exists, a corresponding current will be generated, when the current is greater than the preset current, the circuit breaker RCD carries out electric leakage protection, and disconnects the circuit between the secondary winding 12 and the load, the circuit between the detection resistor R, the detection button PB and the sixth end h is used for detecting whether the circuit breaker RCD is effective under the current voltage and whether it can operate normally.

[0071] It can be understood that the resistance value of the detection resistor R determines the current between the sixth terminal h and the ground terminal, and since the current affects whether the circuit breaker RCD can work normally, the resistance value of the detection resistor R has a certain range.

[0072] For example, the preset current I0 of the circuit breaker RCD is set to 30 mA, the first voltage difference is 30 V, and the second voltage difference is 30 V. When there is a current greater than 30 mA on either side of the circuit breaker RCD, the circuit breaker RCD can determine that there is a leakage, and the circuit between the secondary winding 12 and the load is disconnected.

[0073] It can be understood that the size of the detection resistor R can be adjusted according to different single-line voltages, so that the circuit breaker RCD can work normally under the corresponding voltage. However, when the circuit breaker RCD cannot work, the specifications of the circuit breaker RCD need to be replaced and reconfirmed.

[0074] The technical scheme of the utility model embodiment, by setting detection button and detection resistance in power supply circuit, can adjust the size of the detection resistance according to the single-line voltage, to ensure that the circuit breaker RCD can work normally under the current single-line voltage, and play a role in leakage protection, improve the safety of the load during operation.

[0075] Based on the same utility model concept, the utility model embodiment provides a chemical vapor deposition equipment, which comprises a power supply circuit, and further comprises a gas delivery pipeline.

[0076] The load is arranged around the gas delivery pipeline, and is used for changing the temperature of the gas delivery pipeline.

[0077] The chemical vapor deposition equipment can be a MOCVD equipment, which can be used for preparing corresponding film layers according to metal organic source gas and other process gases. The other process gases can be ammonia NH3, phosphine PH3, arsine AsH3 and the like, but the working process of the MOCVD equipment is that the metal organic source gas and the other process gases are delivered to the reaction chamber through the gas delivery pipeline. Since the reaction needs to have a corresponding temperature, a heating belt is wound on the gas delivery pipeline to maintain the temperature in the pipeline, so as to avoid the gas solidification or liquefaction to block the gas delivery pipeline, for example, the metal organic source gas. In the embodiment of the utility model, the heating belt is arranged on the gas delivery pipeline, and the power supply circuit supplies power to the heating belt, so as to maintain the temperature of the metal organic source gas and the other process gases, and ensure that the supply gas is transmitted at the optimal delivery temperature. It can be understood that the chemical vapor deposition equipment includes a plurality of gas delivery pipelines, the surface of the gas delivery pipeline can be made of stainless steel pipe material, and the gas delivery pipeline can further include solenoid valves, pressure gauges and concentration meters and the like. When the power supply is 220V and the heating belt line is damaged, the damaged heating line can be conducted to other stainless steel pipes or solenoid valves, pressure gauges and concentration meters and the like electronic devices through the stainless steel pipe, which affects the normal work of the devices in the chemical vapor deposition equipment. Therefore, the minimum voltage of the heating belt can be determined according to the working efficiency of the MOCVD equipment and the working efficiency of the heating belt, the transformer 1 is used to change the voltage on the power supply line, even if the heating belt line is touched by mistake during the working process of the MOCVD equipment, the risk of electric shock is reduced, the safe power supply is realized, the personal safety is protected, and the normal operation of the MOCVD equipment is ensured.

[0078] The technical scheme of the embodiment of the utility model discloses that a transformer is arranged in the power supply circuit, the transformer includes a primary winding and a secondary winding, the secondary winding includes a first sub-winding and a second sub-winding, the second end of the first sub-winding and the third end of the second sub-winding are connected in series and grounded, the first end and the fourth end are connected to the load, the second end and the third end are connected in series and grounded, which ensures that the voltage supplied to the load can also help to reduce the single-line voltage under this transformer structure, and the safety is improved, the voltage supplied to the load is reduced by the transformer, the personal safety hazard is reduced, the risk of contact is reduced, the safety of the equipment is improved, and the safe power supply is realized.

[0079] The above specific embodiment does not constitute a limitation on the protection scope of the utility model. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A power supply circuit, characterized by comprising: Comprising: a transformer; the transformer comprises a primary winding and a secondary winding; the secondary winding comprises a first sub-winding and a second sub-winding, the first sub-winding comprises a first end and a second end, the second sub-winding comprises a third end and a fourth end; the second end and the third end are connected in series and grounded; a load is connected in series between the first end and the fourth end; the sum of the number of turns of the first sub-winding and the second sub-winding is less than the number of turns of the primary winding.

2. The power supply circuit according to claim 1, characterized in that, a first voltage difference between the first end and the second end is less than 36V; a second voltage difference between the fourth end and the third end is less than 36V.

3. The power supply circuit of claim 2, wherein, the number of turns of the first sub-winding and the number of turns of the second sub-winding are the same.

4. The power supply circuit according to claim 3, characterized in that, a third voltage difference between the two ends of the primary winding is 220V; the first voltage difference is 30V, and the second voltage difference is 30V.

5. The power supply circuit of claim 1, wherein, the power supply circuit further comprises a circuit breaker; the circuit breaker comprises a fifth end, a sixth end, a seventh end and an eighth end; the fifth end is electrically connected to the first end of the first sub-winding; the sixth end is electrically connected to one end of the load; the seventh end is electrically connected to the fourth end of the second sub-winding; the eighth end is electrically connected to the other end of the load; the circuit breaker is used to control the disconnection of the loop between the secondary winding and the load when the leakage current is greater than the preset current.

6. The power supply circuit of claim 5, wherein, the circuit breaker further comprises a first switch and a second switch; the first switch is connected in series between the first end and the fifth end; the second switch is connected in series between the fourth end and the eighth end; the circuit breaker is used to control the disconnection of the first switch and the second switch when the leakage current is greater than the preset current.

7. The power supply circuit of claim 5, wherein, the power supply circuit further comprises a detection button and a detection resistor; the sixth end is grounded, and the detection button and the detection resistor are connected in series between the sixth end and the ground end.

8. The power supply circuit of claim 7, wherein, the relationship between the resistance value R of the detection resistor, the first voltage difference V1 between the first end and the second end, and the preset current I0 satisfies V1 / R>I0.

9. The power supply circuit of claim 1, wherein, the load comprises a heating belt.

10. A chemical vapor deposition apparatus characterized by comprising: comprising the power supply circuit as claimed in any one of claims 1-9; further comprising a gas delivery pipeline; the load is wrapped around the gas delivery pipeline to change the temperature of the gas delivery pipeline.

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