Vacuum pump

Abstract

The embodiment of the utility model provides a vacuum pump, and relates to the technical field of vacuum pump cooling. The vacuum pump comprises a shell, a heat conduction piece and an air cooling assembly. A cavity is formed in the shell. The shell is provided with an air inlet and an air outlet which are communicated with the cavity. And a pumping device is arranged in the cavity. The pump is used for moving gas from the gas inlet to the gas outlet. The heat conduction piece is embedded in the outer side of the shell and corresponds to the cavity. The air cooling assembly is fixed to the outer side of the shell and used for cooling the shell. According to the vacuum pump, the temperature of the pump body can be controlled, the temperature of the pump body is prevented from being out of control, pollution to vacuum pump oil caused by leakage of cooling liquid is avoided, and the production and operation cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum pump cooling technical field, specifically, relate to a kind of vacuum pump. BACKGROUND

[0002] Vacuum pump refers to the device or equipment that is used to pump the container to obtain vacuum by mechanical, physical, chemical or physical-chemical method, and is used to improve, generate and maintain vacuum in a certain closed space.

[0003] Vacuum pump generates heat in working process. The existing vacuum pump is cooled by setting pipeline to pass in cooling liquid inside. However, when cooling liquid leaks, it will pollute the oil in the vacuum pump, and then cause shutdown maintenance, and the production operation cost is high. SUMMARY

[0004] The utility model discloses a vacuum pump, which can control the temperature of the pump body, prevent the temperature of the pump body from being out of control, avoid the pollution of cooling liquid leakage to the oil of the vacuum pump, and reduce the production operation cost.

[0005] The embodiment of the utility model can be realized as follows:

[0006] The utility model provides a kind of vacuum pump, comprising:

[0007] Shell, the cavity is provided in the shell, the shell is provided with the gas inlet and the gas outlet that communicate with the cavity, the pump is provided in the cavity, and the pump is used to move gas from the gas inlet to the gas outlet;

[0008] Thermal conductive part, the thermal conductive part is embedded in the outside of the shell, and is correspondingly arranged with the cavity;

[0009] Air-cooled assembly, the air-cooled assembly is fixed on the outside of the shell, for cooling the shell.

[0010] The vacuum pump provided by the embodiment of the utility model has the beneficial effects of:

[0011] The vacuum pump of the utility model embeds thermal conductive part on shell, can improve the heat conduction effect of the pump body of vacuum pump, so that the heat in the vacuum pump is quickly transferred to the thermal conductive part, so that the heat is dissipated through the thermal conductive part;Air-cooled assembly is arranged on the outside of the shell, so that the temperature of the pump body of the vacuum pump can be quickly reduced. The vacuum pump of the utility model replaces the traditional liquid cooling with air cooling, increases the heat dissipation efficiency of the vacuum pump by arranging thermal conductive part, can control the temperature of the pump body, prevent the temperature of the pump body from being out of control, avoid the pollution of cooling liquid leakage to the oil of the vacuum pump, and reduce the production operation cost. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, based on the embodiments in the present application, all other embodiments obtained without creative labor are within the scope of protection of the present application.

[0013] Figure 1 The structural schematic diagram of the vacuum pump under the first perspective provided for the present embodiment is shown in the figure.

[0014] Figure 2 The structural schematic diagram of the vacuum pump under the second perspective provided for the present embodiment is shown in the figure.

[0015] Figure 3 The structural schematic diagram of the pump under the first perspective provided for the present embodiment is shown in the figure.

[0016] Figure 4 The structural schematic diagram of the gas flow under the second perspective provided for the present embodiment is shown in the figure.

[0017] Icon: 100-vacuum pump; 10-housing; 11-cavity; 12-inlet; 13-outlet; 20-pumper; 21-rotating shaft; 231-rotor; 232-blade; 23-rotor assembly; 30-heat conduction strip; 31-first connecting part; 32-second connecting part; 40-air cooling assembly; 41-fan; 42-shield; 141-first temperature sensor; 142-second temperature sensor; 143-third temperature sensor; 15-housing body; 16-front pump cover; 17-rear pump cover; 33-third connecting part. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0020] It should be noted that like numerals and letters refer to like items throughout the several views, and once an item is defined in one view, it should not have to be further defined and explained in the subsequent views.

[0021] In the description of the utility model, it needs to be explained that if the terms such as "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the utility model product in common use, it is only for the convenience of describing the utility model and simplifying the description, and it is not indicated or implied that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore it cannot be understood as a limitation on the utility model.

[0022] In addition, if the terms "first", "second" and the like are used only for differentiation in description and cannot be understood as indicating or implying relative importance.

[0023] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.

[0024] Please refer to Figure 1 and Figure 2 The utility model provides a vacuum pump 100 is applied to the scene of vacuumizing container.

[0025] The vacuum pump 100 includes a shell 10, a heat conducting piece and a air cooling assembly 40. The shell 10 is provided with a cavity 11. The shell 10 is provided with an air inlet 12 and an air outlet 13 communicated with the cavity 11. The cavity 11 is provided with a pump 20. The pump 20 is used to move the gas from the air inlet 12 to the air outlet 13. It can be understood that when the container needs to be vacuumized, the air inlet 12 is connected with the container, and the vacuum pump 100 is operated, so that the gas in the container is removed from the container by the pump 20, thereby the container is pumped.

[0026] In the embodiment, in order to increase the heat conduction efficiency of the shell 10, the heat conducting piece is embedded on the outside of the shell 10. The heat conducting piece is arranged corresponding to the cavity 11. It can be understood that when the vacuum pump 100 works, the temperature of the vacuum pump 100 gradually rises, and the temperature of the cavity 11 in the shell 10 is transmitted to the shell 10, the heat conducting piece is arranged on the shell 10, the heat conducting piece can quickly transmit heat, and the heat conducting piece is in contact with the outside, thereby the heat is dissipated.

[0027] In order to further make the vacuum pump 100 quickly cool, the air cooling assembly 40 is further arranged in the embodiment. The air cooling assembly 40 is fixed on the outside of the shell 10. The air cooling assembly 40 is used to cool the shell 10 quickly. It can be understood that the air cooling assembly 40 blows the shell 10, thereby the heat of the shell 10 is quickly dissipated.

[0028] In some embodiments, the air cooling assembly 40 is arranged adjacent to the heat conducting member and air cools the heat conducting member. That is, the air cooling assembly 40 is arranged corresponding to the heat conducting member, and the air cooling assembly 40 can blow air towards the heat conducting member to achieve air cooling, so that the excess heat can be taken away through the heat conducting member, and the heat emitted by the heat conducting member can be taken away through the air cooling system, so as to accelerate the heat dissipation of the heat conducting member and the shell 10, thereby further improving the heat dissipation effect.

[0029] Specifically, in the embodiment, the heat conducting member includes a plurality of heat conducting strips 30. The plurality of heat conducting strips 30 are arranged at intervals along the axial direction of the vacuum pump 100. It can be understood that the axial direction of the vacuum pump 100 refers to the axis direction of the rotating shaft 21 in the vacuum pump 100.

[0030] In the embodiment, a plurality of placement grooves are arranged at intervals along the axial direction of the vacuum pump 100 on the shell 10. The heat conducting strips 30 are arranged in the placement grooves in sequence. Specifically, the heat conducting strips 30 are bonded to the shell 10 by glue. By applying glue in the placement grooves, the heat conducting strips 30 are pressed into the placement grooves, so as to fix the heat conducting strips 30 on the shell 10. When the heat conducting strips 30 are embedded on the shell 10, the heat conducting strips 30 are flush with the surface of the shell 10.

[0031] In other embodiments, the heat conducting strips 30 can be fixed in different ways according to needs. For example, the heat conducting strips 30 can be welded to the shell 10, or connected to the shell 10 by screws, etc. As long as the heat conducting strips 30 can be fixed on the shell 10, the fixing method of the heat conducting strips 30 is not limited in the utility model.

[0032] The heat conducting strips 30 are made of high-thermal-conductivity materials. The high-thermal-conductivity materials refer to materials with high thermal conductivity, which can effectively transfer heat and improve the heat dissipation effect. In the embodiment, the material of the heat conducting strips 30 can be carbon fiber with high thermal conductivity, which has a thermal conductivity of 600-1300 W / mk and good mechanical properties. The material of the heat conducting strips 30 can be selected according to needs, such as HCH high-thermal-conductivity silica gel sheet, etc.

[0033] It can be understood that, in the embodiment, the shell 10 is made of metal material. The heat transfer efficiency of the heat conducting member is higher than the heat dissipation efficiency of the shell 10. Embedding the heat conducting member in the shell 10 can effectively improve the heat conducting efficiency of the vacuum pump 100 and avoid the temperature of the vacuum pump 100 from being too high due to heat accumulation.

[0034] Further, the heat conducting strips 30 can extend along the circumferential direction of the shell 10, that is, the heat conducting strips 30 can be arranged at least partially along the circumferential direction of the shell 10 to ensure the effective heat dissipation area and heat dissipation effect of the heat conducting strips 30. Alternatively, the heat conducting strips 30 can be arranged along at least half of the circumferential direction of the shell 10.

[0035] In some specific examples, as shown in FIG. 4, the heat conducting strips 30 are arranged along the circumferential direction of the shell 10. Figure 1As shown, the heat-conducting strip 30 comprises a first connecting portion 31, a second connecting portion 32 and a third connecting portion 33 connected in sequence. The first connecting portion 31, the second connecting portion 32 and the third connecting portion 33 are respectively embedded in three side surfaces of the housing 10 connected in sequence. That is, the heat-conducting strip 30 forms a "C" shape to surround the housing 10 along the circumference of the housing 10.

[0036] Specifically, in the embodiment, the first connecting portion 31 and the third connecting portion 33 are respectively embedded in two opposite side surfaces of the housing 10. The second connecting portion 32 is embedded in the bottom surface of the housing 10. It can be understood that the heat-conducting strip 30 is wrapped around the housing 10. Specifically, in the embodiment, the first connecting portion 31, the second connecting portion 32 and the third connecting portion 33 are arranged at an angle, so that the heat-conducting strip 30 forms a "C" shape. Correspondingly, the placement groove on the housing 10 is arranged in a "C" shape and is arranged on two side surfaces and a bottom surface of the housing 10. Thus, the heat of the cavity 11 inside the housing 10 can be transferred to the heat-conducting strip 30 through the two side surfaces and the bottom surface of the housing 10, and then dissipated from the heat-conducting strip 30, thereby increasing the area of the heat-conducting strip 30 in the housing 10 and improving the heat dissipation efficiency of the heat-conducting strip 30. Among them, the two side surfaces are respectively located on both sides of the bottom surface, and the compression area of the rotor 231 of each stage of the vacuum pump 100 is generally located at the lower part, and the heat-conducting strip 30 is arranged at the lower part of the vacuum pump 100, so that the heat-conducting strip 30 can also dissipate heat in the high-heat accumulation area and improve the heat dissipation effect.

[0037] It should be noted that the heat-conducting member can adopt different specific structures as needed. In the embodiment, the heat-conducting member is arranged as the heat-conducting strip 30, which is wrapped around the side surfaces and the bottom surface of the housing 10. In other embodiments, the heat-conducting member can be arranged as a heat-conducting ring, which is arranged around the housing 10 and is arranged at intervals on the housing 10. It can be understood that the area covered by the heat-conducting ring on the housing 10 is larger than the area covered by the heat-conducting strip 30 on the housing 10. In the embodiment, in order to facilitate the installation of the heat-conducting member, the heat-conducting member is arranged as the heat-conducting strip 30. In other embodiments, when the heat-conducting member is made of elastic material, the heat-conducting member can be arranged as a heat-conducting ring. Alternatively, the placement groove on the housing 10 is arranged in a ring shape, the heat-conducting strip 30 is arranged around the housing 10 and placed in the placement groove, and the heat-conducting strip 30 is connected end to end and fixed on the housing 10. The area ratio of the heat-conducting member on the housing 10 can be freely set as needed, so that different heat transfer efficiencies can be set according to different vacuum pumps 100.

[0038] Please refer to Figure 2 and Figure 3Further, the vacuum pump 100 in the embodiment is a Roots vacuum pump 100. Specifically, the pump 20 includes a rotating shaft 21 and a plurality of rotor assemblies 23 arranged along the rotating shaft 21. The rotating shaft 21 includes a driving shaft and a driven shaft arranged in parallel. The rotor assembly 23 includes two rotors 231. The two rotors 231 are arranged on the driving shaft and the driven shaft respectively. In the embodiment, the driving shaft and the driven shaft are driven in engagement through a pair of gears, so that the driving shaft and the driven shaft rotate reversely, thereby driving the two rotors 231 to rotate reversely. The two rotors 231 are provided with blades 232. The two rotors 231 rotate reversely to compress and move the gas from an inlet area of the rotor assembly 23 to an outlet area of the rotor assembly 23. It can be understood that the inlet area is generally located at the top of the cavity 11, and the outlet area is formed at the bottom of the cavity 11. The gas flows from the inlet area to the outlet area, and the outlet area can be a compression area with more heat generation. The heat conduction strip 30 can surround the outlet area in the circumferential direction and extend towards the inlet area, i.e., the heat conduction strip 30 covers the bottom wall and the side wall connected with the bottom wall of the housing 10 as shown in Figure 1 Thus, the heat conduction strip 30 is arranged corresponding to the position with more heat generation, thereby further improving the heat dissipation effect.

[0039] Further, part of the heat conduction strip 30 corresponds to the rotor assembly 23 and surrounds part of the rotor assembly 23 in the circumferential direction. Specifically, in the axial direction, the heat conduction strip 30 is arranged corresponding to the rotor assembly 23, i.e., the width of the heat conduction strip 30 in the axial direction can cover the thickness of the rotor assembly 23 in the axial direction. The rotor assembly 23 rotates, and the corresponding position generates more heat. The heat conduction strip 30 arranged corresponding to the rotor assembly 23 can further improve the heat dissipation effect.

[0040] Alternatively, in the embodiment, the vacuum pump 100 is a Roots vacuum pump 100, which compresses and moves the gas through the two rotors 231 rotating reversely. In other embodiments, the vacuum pump 100 can be of other types as needed, such as a rotary vane vacuum pump 100, a screw vacuum pump 100, a water ring vacuum pump 100, etc. The above-mentioned vacuum pumps 100 are all of the types of vacuum pumps 100 in the prior art. The present application aims to improve the heat dissipation structure of the vacuum pump 100. As long as the heat dissipation structure of the heat conduction member and the air cooling assembly 40 can be achieved, the present application does not limit the specific type of the vacuum pump 100.

[0041] Please refer to Figure 4Further, in the embodiment, a plurality of rotor assemblies 23 are arranged along the axial direction of the vacuum pump 100. The communication mode of the cavity 11 is that the upper part of the rotor assembly 23 is the gas inlet direction, and the lower part of the rotor assembly 23 is the gas outlet direction. The lower part of the former rotor assembly 23 is communicated with the upper part of the latter rotor assembly 23, so that the gas entering the cavity 11 from the gas inlet 12 passes through the rotor assemblies 23 in turn and is finally discharged through the gas outlet 13. It can be understood that the pressure of the gas gradually increases as the gas gradually passes through the rotor assemblies 23. Correspondingly, the heat generated by the vacuum pump 100 gradually increases in the direction from the gas inlet 12 to the gas outlet 13.

[0042] Optionally, in the embodiment, the gas inlet 12 and the gas outlet 13 are arranged on both sides of the shell 10 along the axial direction of the vacuum pump 100. In other embodiments, the gas inlet 12 and the gas outlet 13 can be arranged at other positions on the shell 10, for example, the direction from the gas inlet 12 to the gas outlet 13 is perpendicular to the axial direction of the vacuum pump 100. The positions of the gas inlet 12 and the gas outlet 13 can be set according to the type of the vacuum pump 100, which is not limited in the utility model.

[0043] Please refer to Figure 1 The shell 10 is further provided with a plurality of temperature sensors. The plurality of temperature sensors are arranged at intervals along the axial direction of the vacuum pump 100. It can be understood that the temperature sensors are arranged to detect the working temperature of the vacuum pump 100, so as to monitor the working state of the vacuum pump 100 and prevent the vacuum pump 100 from overheating.

[0044] Specifically, the temperature sensors include a first temperature sensor 141, a second temperature sensor 142 and a third temperature sensor 143. The first temperature sensor 141, the second temperature sensor 142 and the third temperature sensor 143 are arranged in sequence along the axial direction of the vacuum pump 100. The shell 10 in the embodiment includes a front pump cover 16, a shell body 15 and a rear pump cover 17 which are connected in sequence along the axial direction of the vacuum pump 100. It can be understood that the front pump cover 16 and the rear pump cover 17 are used to cover the bearings and transmission parts of the rotating shaft 21 of the rotor 231. The front pump cover 16 and the rear pump cover 17 form oil chambers with the shell 10 respectively, which are used to fill oil and play a lubricating and cooling role.

[0045] The first temperature sensor 141 is arranged on the front pump cover 16. The third temperature sensor 143 is arranged on the rear pump cover 17. The second temperature sensor 142 is arranged on the shell body 15. The first temperature sensor 141 is used to detect the oil temperature in the front pump cover 16. The second temperature sensor 142 is used to detect the temperature of the shell body 15. The third temperature sensor 143 is used to detect the oil temperature in the rear pump cover 17.

[0046] In addition, the partial heat conduction strips 30 are arranged on the housing body 15 and correspond to the rotor assembly 23. The other partial heat conduction strips 30 are arranged on the front pump cover 16 and the rear pump cover 17.

[0047] In the embodiment, the air cooling assembly 40 comprises a cover 42 and a fan 41. The cover 42 is arranged on the housing 10. The cover 42 and the housing 10 form an air cooling channel. The fan 41 is arranged at one end of the cover 42 and is used to blow air into the air cooling channel. Specifically, in the embodiment, the cover 42 surrounds at least part of the outer wall of the housing 10, and the cover 42 and the outer wall of the housing 10 form the air cooling channel.

[0048] Specifically, the air cooling assembly 40 is arranged on the side of the housing 10 where the heat conduction member is embedded, and the heat conduction member is at least partially located in the air cooling channel. The heat conduction member is embedded in the outer wall of the housing 10. The cover 42 covers the housing 10 and also covers the heat conduction member. When the fan 41 blows air into the air cooling channel, the housing 10 and the heat conduction member exchange heat with the flowing air, and when the air flows out of the air cooling channel, it carries away the heat of the housing 10 and the heat conduction member, thereby cooling the housing 10 and the heat conduction member.

[0049] Further, the fan 41 is a variable frequency fan 41, which is used to adjust the frequency of the fan 41 according to the detection value of the temperature sensor on the housing 10. Specifically, for example, the frequency of the fan 41 can be adjusted according to the detection value of the first temperature sensor 141, the second temperature sensor 142 and the third temperature sensor 143. The temperature of the measurement target area is sensed by the first temperature sensor 141, the second temperature sensor 142 and the third temperature sensor 143, and is fed back to the control system of the vacuum pump 100 in real time. By comparing with the temperature demand preset range written in the control system, a predetermined control signal is sent to the control system of the vacuum pump 100 to control the opening, adjustment and closing of the fan 41. Specifically, when the value of the temperature sensor is higher than the highest preset value, the controller controls the fan 41 to increase the frequency and the speed of the fan 41, so as to increase the flow speed of the air in the air cooling channel, improve the heat exchange efficiency, and reduce the temperature of the housing 10. When the value of the temperature sensor is lower than the lowest preset value, the frequency of the fan 41 is reduced or the fan 41 is stopped, so that the temperature rises to the preset temperature range.

[0050] The working principle and process of the vacuum pump 100 of the embodiment of the utility model are as follows:

[0051] The air inlet 12 of the vacuum pump 100 is connected with a container to be vacuumized.

[0052] The vacuum pump 100 is started, and as the vacuum pump 100 works, the temperature of the vacuum pump 100 gradually rises. The heat of the cavity 11 is transmitted to the heat conduction member through the shell 10. In the embodiment, the heat conduction member is arranged to accelerate the heat transfer efficiency of the heat conduction member from the inside of the shell 10 to the outer surface and the heat transfer efficiency of the heat conduction member from the heat conduction member to the external environment.

[0053] According to the comparison between the detection value of the temperature sensor and the preset temperature range, when the value of the temperature sensor is higher than the highest preset value, the controller controls the fan 41 to increase the frequency, increases the rotating speed of the fan 41, accelerates the gas flow speed of the air cooling channel, improves the heat exchange efficiency, and reduces the temperature of the shell 10. When the value of the temperature sensor is lower than the lowest preset value, the frequency of the fan 41 is reduced or stopped, so that the temperature rises to the preset temperature range, thereby precisely controlling the temperature of the target area of the shell 10 in the required temperature range. The above-mentioned target area refers to the cooling area of the shell 10 by the air cooling assembly 40.

[0054] The vacuum pump 100 has the following beneficial effects:

[0055] The vacuum pump 100 comprises a shell 10, a heat conduction member and an air cooling assembly 40. The shell 10 is internally provided with a cavity 11. The shell 10 is provided with an air inlet 12 and an air outlet 13 which are in communication with the cavity 11. The cavity 11 is internally provided with a pump 20. The pump 20 is used to move the gas from the air inlet 12 to the air outlet 13. The heat conduction member is embedded on the outer side of the shell 10 and is correspondingly arranged with the cavity 11. The air cooling assembly 40 is fixed on the outer side of the shell 10 and is used to cool the shell 10.

[0056] The vacuum pump 100 can improve the heat conduction effect of the pump body of the vacuum pump 100 by embedding the heat conduction member on the shell 10, so that the heat in the vacuum pump 100 is quickly transmitted to the heat conduction member, thereby dissipating the heat through the heat conduction member. The temperature of the pump body of the vacuum pump 100 can be quickly reduced by arranging the air cooling assembly 40 on the outer side of the shell 10. The vacuum pump 100 replaces the traditional liquid cooling with air cooling, increases the heat dissipation efficiency of the vacuum pump 100 by arranging the heat conduction member, can control the temperature of the pump body, prevents the temperature of the pump body from being out of control, avoids the pollution of the cooling liquid leakage to the oil of the vacuum pump 100, and reduces the production and operation cost.

[0057] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A vacuum pump (100), characterized in that The vacuum pump (100) comprises a shell (10) in which a cavity (11) is arranged, an air inlet (12) and an air outlet (13) are arranged on the shell (10) and communicate with the cavity (11), and a pump (20) is arranged in the cavity (11) and used to move the gas from the air inlet (12) to the air outlet (13). A heat conduction member is embedded on the outer side of the shell (10) and corresponds to the cavity (11). An air cooling assembly (40) is fixed on the outer side of the shell (10) and used to cool the shell (10).

2. The vacuum pump (100) according to claim 1, wherein the heat conduction member comprises a plurality of heat conduction strips (30) embedded on the outer side of the shell (10), and the heat conduction strips (30) are arranged in the axial direction of the vacuum pump (100). The heat conduction strip (30) comprises a first connecting portion (31), a second connecting portion (32) and a third connecting portion (33) connected in sequence, and the first connecting portion (31), the second connecting portion (32) and the third connecting portion (33) are embedded on three side surfaces of the shell (10) connected in sequence. The pump (20) comprises a plurality of rotor assemblies (23), and part of the heat conduction strips (30) correspond to the rotor assemblies (23) and are arranged around the rotor assemblies (23) in the circumferential direction of the rotor assemblies (23).

3. Vacuum pump (100) according to claim 2, characterized in that A plurality of temperature sensors are arranged on the shell (10) and arranged in the axial direction of the vacuum pump (100).

4. The vacuum pump (100) according to claim 2, characterized in that The temperature sensors comprise a first temperature sensor (141), a second temperature sensor (142) and a third temperature sensor (143), the shell (10) comprises a front pump cover (16), a shell body (15) and a rear pump cover (17) connected in sequence in the axial direction of the shell (10), the first temperature sensor (141) is arranged on the front pump cover (16), the second temperature sensor (142) is arranged on the shell body (15), and the third temperature sensor (143) is arranged on the rear pump cover (17).

5. The vacuum pump (100) according to claim 1, characterized in that The air cooling assembly (40) is arranged adjacent to the heat conduction member and air cools the heat conduction member.

6. Vacuum pump (100) according to claim 5, characterized in that The air cooling assembly (40) comprises a cover shell (42) and a fan (41), the cover shell (42) is arranged on the shell (10), an air cooling channel is formed between the cover shell (42) and the shell (10), and the fan (41) is arranged at one end of the cover shell (42) and used to blow air into the air cooling channel.

7. The vacuum pump (100) according to claim 1, characterized in that The air cooling assembly (40) is arranged on the side of the shell (10) where the heat conduction member is embedded, and the heat conduction member is at least partially located in the air cooling channel.

8. Vacuum pump (100) according to claim 7, characterized in that The shell (10) is provided with a temperature sensor, and the fan (41) is a variable frequency fan (41) used to adjust the frequency of the fan (41) according to the detection value of the temperature sensor.

9. Vacuum pump (100) according to claim 8, characterized in that ​ 10. Vacuum pump (100) according to claim 8, characterized in that ​

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