Temperature control system

Abstract

The embodiment of the utility model provides a temperature control system, and relates to the technical field of semiconductor temperature control. The temperature control system comprises a refrigerating system, a cooling water system, a cold carrying system and a circulating system. The cold carrying system comprises a first heat exchanger, a liquid storage tank, a booster pump, a second heat exchanger, a three-way valve and a third heat exchanger. The first heat exchanger, the liquid storage tank, the pressure pump and the second heat exchanger are sequentially communicated. The second heat exchanger communicates with an inlet of the three-way valve. Two outlets of the three-way valve communicate with the first heat exchanger and the third heat exchanger correspondingly. The first heat exchanger is used for exchanging heat with a refrigerating system. The third heat exchanger is used for exchanging heat with a cooling water system. The second heat exchanger is used for exchanging heat with the circulating system. According to the temperature control system, the cooling water system and the refrigerating system can be selected to work in a switching mode according to temperature control requirements, load circulating liquid is cooled, different temperature control requirements of loads can be met, and system energy consumption is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor temperature control, specifically, a temperature control system. BACKGROUND

[0002] In the production process of the chip, the circulating liquid with stable temperature needs to be provided to the load, and the circulating liquid temperature required by the chip processing process is different according to the different temperature requirements of the process.

[0003] However, the existing semiconductor temperature control system circulating liquid refrigeration mode is single, and in the case that the load temperature requirement is low, the continuous refrigeration energy consumption of the refrigeration system to the circulating liquid is high. UTILITY MODEL CONTENTS

[0004] The utility model discloses a temperature control system can select cooling water system and refrigeration system switching work according to temperature control requirement, carries out cooling to load circulating liquid, can satisfy the different temperature control demand of load, reduces system energy consumption.

[0005] The embodiment of the utility model can be realized as follows:

[0006] A temperature control system, comprising:

[0007] A refrigeration system;

[0008] A cooling water system, the cooling water system comprises a first cooling circuit;

[0009] A load carrying system, the load carrying system comprises a first heat exchanger, a liquid storage tank, a power device, a second heat exchanger, a three-way valve and a third heat exchanger, the first side of the first heat exchanger is communicated with the refrigeration system, the second side outlet of the first heat exchanger is communicated with the inlet of the liquid storage tank, the outlet of the liquid storage tank is communicated with the inlet of the pressure pump, the outlet of the pressure pump is communicated with the first side inlet of the second heat exchanger, the first side outlet of the second heat exchanger is communicated with the inlet of the three-way valve, one outlet of the three-way valve is communicated with the second side inlet of the first heat exchanger, the other outlet of the three-way valve is communicated with the first side inlet of the third heat exchanger, the first side outlet of the third heat exchanger is communicated with the second side inlet of the first heat exchanger, and the second side of the third heat exchanger is communicated with the first cooling circuit.

[0010] A circulating system, the circulating system comprises a circulating circuit, the circulating circuit comprises an expansion tank, a circulating pump and a load connected in sequence, the second side outlet of the second heat exchanger is communicated with the inlet of the expansion tank, and the outlet of the load is communicated with the second side inlet of the second heat exchanger.

[0011] The temperature control system provided by the embodiment of the utility model has the beneficial effects of:

[0012] The temperature control system of the utility model through the additional cold carrier system between the refrigeration system and the circulation system, the three-way valve is arranged in the cold carrier system, so that the cold carrier in the cold carrier system can be selected to flow into the first heat exchanger or the third heat exchanger. Among them, the first heat exchanger is used to carry out heat exchange between the refrigerant of the refrigeration system and the cold carrier of the cold carrier system. The third heat exchanger is used for the cold carrier of the cold carrier system and the cooling water of the cooling water system to carry out heat exchange. The temperature control system can selectively make the cold carrier and the refrigerant or the cooling water carry out heat exchange. When the temperature requirement of the load is lower, the refrigeration system works at this time, can pass through the adjustment three-way valve and make the cold carrier flow through the first heat exchanger and the refrigerant heat exchange. When the temperature requirement of the load is higher, the refrigeration system can not work at this time, can pass through the adjustment three-way valve and make the cold carrier flow through the third heat exchanger and the first heat exchanger in turn, wherein the third heat exchanger and the cooling water exchange heat, the first heat exchanger does not carry out heat exchange, at this time, the load is cooled by the cooling water. The temperature control system of the utility model can select the cooling water system and the refrigeration system switching work according to the temperature control requirement, and the circulating liquid of the load is cooled, can satisfy the different temperature control demand of the load, and reduce the system energy consumption. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be briefly introduced to the drawing needed to be used in the embodiment, should be understood, the following drawings only show some embodiments of the utility model, therefore should not be regarded as the limitation to the range, for the ordinary skilled person in the art, under the premise of not paying the creative labor, can also obtain other related drawings according to these drawings.

[0014] Figure 1 The structure schematic view of the temperature control system provided for the embodiment is shown in the figure;

[0015] Figure 2 The structure schematic view of the cold carrier system, the flow dividing plate and the flow collecting plate provided for the embodiment is shown in the figure;

[0016] Figure 3 The structure schematic view of the circulation system and the second heat exchanger provided for the embodiment is shown in the figure;

[0017] Figure 4 The structure schematic view of the refrigeration system provided for the embodiment is shown in the figure.

[0018] Icon: 100 - temperature control system; 110 - refrigeration system; 120 - cooling water system; 121 - first cooling circuit; 122 - second cooling circuit; 130 - load cooling system; 131 - distribution plate; 132 - collection plate; 140 - circulation system; 141 - circulation circuit; 1 - compressor; 2 - first temperature sensor; 3 - first pressure sensor; 4 - fourth heat exchanger; 5 - liquid accumulator; 6 - expansion valve; 7 - first heat exchanger; 8 - second temperature sensor; 9 - second pressure sensor; 10 - liquid tank; 11 - third temperature sensor; 12 - pressure pump; 13 - solenoid valve; 14 - second heat exchanger; 15 - expansion tank; 16 - fifth temperature sensor; 17 - circulation pump; 18 - heater; 19 - sixth temperature sensor; 20 - load; 44 - fourth temperature sensor; 45 - three-way valve; 46 - third heat exchanger. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0021] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0022] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the product of the present application is usually placed, which is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0023] In addition, if the terms "first", "second" and the like appear, they are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0024] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.

[0025] Please refer to Figure 1 The utility model provides a temperature control system 100 is applied to semiconductor temperature control equipment.

[0026] The temperature control system 100 includes a refrigeration system 110, a cooling water system 120, a cooling medium system 130 and a circulation system 140.

[0027] The refrigeration system 110 is used to circulate refrigerant. The cooling water system 120 includes a first cooling circuit 121. The first cooling circuit 121 is used to circulate cooling water. The cooling medium system 130 is used to circulate cooling medium. The circulation system 140 is used to circulate circulating liquid and make the circulating liquid flow through the load 20 to control the temperature of the load 20. The temperature control system 100 is related to the heat exchange among the above-mentioned refrigerant, cooling water, cooling medium and circulating liquid.

[0028] Please refer to Figure 1 And Figure 2 The cooling medium system 130 includes a first heat exchanger 7, a liquid storage tank 10, a power device, a second heat exchanger 14, a three-way valve 45 and a third heat exchanger 46. The first heat exchanger 7, the liquid storage tank 10, the power device and the second heat exchanger 14 are communicated in sequence. The second heat exchanger 14 is communicated with the inlet of the three-way valve 45. The two outlets of the three-way valve 45 are communicated with the first heat exchanger 7 and the third heat exchanger 46 respectively. The first heat exchanger 7 is used to exchange heat with the refrigeration system 110. The third heat exchanger 46 is used to exchange heat with the cooling water system 120. The second heat exchanger 14 is used to exchange heat with the circulation system 140.

[0029] Specifically, the first side of the first heat exchanger 7 is communicated with the refrigeration system 110. The second side outlet of the first heat exchanger 7 is communicated with the inlet of the liquid storage tank 10. The outlet of the liquid storage tank 10 is communicated with the inlet of the power device. The outlet of the power device is communicated with the first side inlet of the second heat exchanger 14. The three-way valve 45 includes an inlet and two outlets. The three-way valve 45 can selectively make the cooling medium entering from the inlet flow out from one of the outlets. The first side outlet of the second heat exchanger 14 is communicated with the inlet of the three-way valve 45. One outlet of the three-way valve 45 is communicated with the second side inlet of the first heat exchanger 7. The other outlet of the three-way valve 45 is communicated with the first side inlet of the third heat exchanger 46. The first side outlet of the third heat exchanger 46 is communicated with the second side inlet of the first heat exchanger 7. The second side of the third heat exchanger 46 is communicated with the first cooling circuit 121.

[0030] It can be understood that the heat exchangers in the embodiments all include a first side and a second side. The first side and the second side of the heat exchanger exchange heat.

[0031] Specifically, in the present embodiment, the power device is the pressurizing pump 12. In other embodiments, the power device can be configured as other devices for transporting the coolant, such as a hose pump, a screw pump, or the like.

[0032] The flow direction of the coolant in the cooling system 130 of the present embodiment is as follows: the coolant flows from the coolant tank 10 into the pressurizing pump 12 to be pressurized, and then flows into the second heat exchanger 14 to exchange heat with the circulating liquid. The heated coolant flows into the three-way valve 45. At this time, there are two cases. In one case, the coolant flows into the first heat exchanger 7 to be cooled, and then flows into the coolant tank 10 to be stored. In the other case, the coolant flows into the third heat exchanger 46, and then flows from the third heat exchanger 46 into the first heat exchanger 7, and then flows into the coolant tank 10 to be stored.

[0033] Please refer to Figure 1 and Figure 3 The circulating system 140 includes a circulating loop 141. The circulating loop 141 includes the expansion tank 15, the circulating pump 17, and the load 20 connected in sequence. The second side outlet of the second heat exchanger 14 is in communication with the inlet of the expansion tank 15. The outlet of the load 20 is in communication with the second side inlet of the second heat exchanger 14.

[0034] It can be understood that the flow direction of the circulating liquid in the circulating system 140 is as follows: the circulating liquid is cooled by the second heat exchanger 14, and then flows into the expansion tank 15, and then flows from the expansion tank 15 into the circulating pump 17, and is pumped by the circulating pump 17 to flow into the load 20 to control the temperature of the load 20, and then flows from the load 20 to the second heat exchanger 14, so as to realize the circulating flow of the circulating liquid.

[0035] The temperature control system 100 can realize indirect heat transfer of refrigerant and circulating liquid through the cold carrier by adding the cold carrier system 130 in the refrigeration system 110 and the circulating system 140. The three-way valve 45 is arranged to make the cold carrier selectively pass through the first heat exchanger 7 or pass through the third heat exchanger 46 and the first heat exchanger 7 in sequence. When the load 20 needs circulating liquid with lower temperature, the refrigeration system 110 works, at this time, the three-way valve 45 directly leads the cold carrier of the cold carrier system 130 into the first heat exchanger 7, the cold carrier exchanges heat with the refrigerant, and then exchanges heat with the circulating liquid of the circulating system 140 through the second heat exchanger 14, and finally the circulating liquid controls the temperature of the load 20. When the load 20 needs circulating liquid with higher temperature, the cooling water of the cooling water system 120 can also meet the temperature demand of the load 20, and the refrigeration system 110 can be closed, at this time, the refrigeration system 110 does not work, and the three-way valve 45 is controlled to lead the cold carrier of the cold carrier system 130 into the third heat exchanger 46. In the third heat exchanger 46, the cold carrier exchanges heat with the cooling water system 120. After heat exchange, the cold carrier passes through the first heat exchanger 7. Since the refrigeration system 110 does not work, the first heat exchanger 7 does not exchange heat, the cold carrier flows into the second heat exchanger 14 to exchange heat with the circulating liquid, and the circulating liquid controls the temperature of the load 20.

[0036] Specifically, in the embodiment, when the circulating liquid supply temperature of the load 20 is greater than or equal to 30 DEG C, the inlet of the three-way valve 45 is communicated with the outlet connected with the third heat exchanger 46, so that the cold carrier enters the third heat exchanger 46 to exchange heat with the cooling water system 120. After heat exchange, the cold carrier passes through the first heat exchanger 7, and since the refrigeration system 110 does not work at this time, the first heat exchanger 7 does not exchange heat, the cold carrier flows into the second heat exchanger 14 to exchange heat with the circulating liquid. At this time, the cold quantity of the cold carrier comes from the cooling water system 120, which can meet the temperature demand of the circulating liquid of the load 20 above 30 DEG C. When the circulating liquid supply temperature of the load 20 is less than 30 DEG C, the inlet of the three-way valve 45 is communicated with the outlet connected with the first heat exchanger 7, so that the cold carrier directly enters the first heat exchanger 7 to exchange heat. At this time, the cold quantity of the cold carrier comes from the refrigeration system 110, which can obtain circulating liquid with lower temperature. In other embodiments, other temperature thresholds can be set to control the three-way valve 45, for example, when the circulating liquid supply temperature is greater than or equal to 35 DEG C, the inlet of the three-way valve 45 is communicated with the outlet connected with the third heat exchanger 46, and when the circulating liquid supply temperature is less than 35 DEG C, the inlet of the three-way valve 45 is communicated with the outlet connected with the first heat exchanger 7. The above specific temperature values are only exemplary, and the circulating liquid temperature condition for the three-way valve 45 is not limited in the utility model.

[0037] Please refer to Figure 1 and Figure 4Furthermore, the refrigeration system 110 includes a compressor 1, a fourth heat exchanger 4, a liquid receiver 5, and an electronic expansion valve 6 connected in sequence. The outlet of the electronic expansion valve 6 is connected to the first inlet of the first heat exchanger 7. The first outlet of the first heat exchanger 7 is connected to the inlet of the compressor 1.

[0038] In this embodiment, the refrigerant flow of the refrigeration system 110 is as follows: after being pressurized by the compressor 1, the high-temperature and high-pressure refrigerant enters the fourth heat exchanger 4 for condensation. After cooling, the refrigerant enters the liquid receiver 5, and after being throttled and depressurized by the electronic expansion valve 6, it enters the first heat exchanger 7 to exchange heat with the heat transfer fluid. The refrigerant, after being heated, enters the compressor 1 again, completing the circulation of the refrigerant.

[0039] In this embodiment, the first heat exchanger 7, the second heat exchanger 14, the third heat exchanger 46, and the fourth heat exchanger 4 are all plate heat exchangers. In other embodiments, the first heat exchanger 7, the second heat exchanger 14, the third heat exchanger 46, and the fourth heat exchanger 4 can be configured as needed, such as tubular heat exchangers. As long as heat exchange between the refrigerant, cooling water, coolant, and circulating fluid can be achieved, this invention does not limit the specific structure and type of the heat exchangers.

[0040] Furthermore, the cooling water system 120 also includes a second cooling circuit 122. The second cooling circuit 122 is connected to the second side of the fourth heat exchanger 4. It is understood that in this embodiment, the cooling water in the cooling water system 120 can exchange heat with both the refrigerant and the refrigerant in the refrigeration system 110. It should be noted that the first cooling circuit 121 and the second cooling circuit 122 are different pipelines, and the cooling water in them does not affect each other. Furthermore, the cooling water in the first cooling circuit 121 and the second cooling circuit 122 can be plant water, which facilitates pipeline connection and eliminates the need for a separate cooling water source.

[0041] In some embodiments, such as Figure 1 As shown, a first temperature sensor 2 and a first pressure sensor 3 are installed between compressor 1 and the fourth heat exchanger 4. A second temperature sensor 8 and a second pressure sensor 9 are installed between the first heat exchanger 7 and compressor 1. It can be understood that the first temperature sensor 2 is used to detect the temperature of the refrigerant entering compressor 1. The second temperature sensor 8 is used to detect the temperature of the refrigerant flowing out of compressor 1. By detecting the temperature of the refrigerant, it is possible to determine whether the refrigeration system 110 is operating normally. The first pressure sensor 3 is used to detect the pressure of the refrigerant entering compressor 1. The second temperature sensor 8 is used to detect the pressure of the refrigerant flowing out of compressor 1. By detecting the pressure of the refrigerant, it is possible to determine whether the refrigeration system 110 is operating normally. Simultaneously, the detected temperature and pressure values ​​can also serve as references for the temperature control system 100, for example, as reference values ​​for adjusting the opening degree of each valve.

[0042] Specifically, the liquid accumulator 5 comprises a gas-liquid separator. The gas-liquid separator is used to separate the refrigerant entering the liquid accumulator 5 into gas and liquid. It can be understood that the refrigerant is pressurized after passing through the compressor 1, forming a high-temperature and high-pressure gas, and then condensed into a liquid after passing through the fourth heat exchanger 4. After the refrigerant enters the liquid accumulator 5, the condensed liquid refrigerant flows out.

[0043] Please refer to Figure 1 and Figure 2 The temperature control system 100 of the embodiment comprises a plurality of loads 20, and can control the temperature of the plurality of loads 20. The temperature control system 100 is connected with the plurality of second heat exchangers 14 through a plurality of circulating loops 141, so as to control the temperature of the plurality of loads 20.

[0044] Specifically, the outlet of the pressurizing pump 12 is connected with a flow dividing plate 131. The inlet of the three-way valve 45 is connected with a flow collecting plate 132. The second heat exchanger 14 is a plurality of second heat exchangers. The first side inlets of the plurality of second heat exchangers 14 are respectively connected with the outlets of the flow dividing plate 131. The first side outlets of the plurality of second heat exchangers 14 are respectively connected with the inlets of the flow collecting plate 132. The circulating system 140 comprises a plurality of circulating loops 141. The plurality of circulating loops 141 are respectively connected with the second sides of the plurality of second heat exchangers 14.

[0045] It can be understood that the plurality of second heat exchangers 14 are connected in parallel, and exchange heat with the plurality of circulating loops 141, so as to control the temperature of the plurality of loads 20. In this way, the same refrigeration system 110 can be used to accurately control the temperature of the plurality of circulating loops 141, and the structure can be simplified and the cost can be reduced compared with using a plurality of refrigeration systems 110.

[0046] Optionally, in the embodiment, the circulating system 140 can comprise four circulating loops 141, and the number of loads 20 is four, and the second heat exchanger 14 is also provided with four second heat exchangers. In other embodiments, the specific number of circulating loops 141 and the number of loads 20 are set according to needs, and only a plurality of second heat exchangers 14 need to be correspondingly provided, and the second heat exchangers 14 are connected in parallel.

[0047] Further, the third temperature sensor 11 is arranged on the flow dividing plate 131. The fourth temperature sensor 44 is arranged on the flow collecting plate 132. It can be understood that the third temperature sensor 11 is used to detect the temperature of the cold carrier flowing out of the pressurizing pump 12, and the fourth temperature sensor 44 is used to detect the temperature of the cold carrier flowing into the three-way valve 45. Through the third temperature sensor 11 and the fourth temperature sensor 44, the heat exchanged by the second heat exchanger 14 can be detected.

[0048] Further, an electromagnetic valve 13 is arranged between the pressurizing pump 12 and the second heat exchanger 14. In the embodiment, a plurality of electromagnetic valves 13 are arranged between each second heat exchanger 14 and the flow divider 131. It can be understood that the electromagnetic valve 13 is adjustable, and by controlling the electromagnetic valve 13, the flow of the coolant through the second heat exchanger 14 can be controlled, so as to control the heat exchanged between the coolant and the circulating liquid, so as to further realize the temperature control effect.

[0049] Please refer to Figure 1 and Figure 3 A fifth temperature sensor 16 is arranged between the expansion tank 15 and the circulating pump 17. A heater 18 is arranged between the circulating pump 17 and the load 20. A sixth temperature sensor 19 is arranged between the heater 18 and the load 20. The heater 18 can heat the circulating liquid to meet the temperature requirement of the load 20. The fifth temperature sensor 16 is used to detect the temperature of the circulating liquid flowing out of the expansion tank 15. The sixth temperature sensor 19 is used to detect the temperature of the circulating liquid flowing into the load 20, so as to determine whether the temperature of the circulating liquid flowing into the load 20 meets the requirement, wherein the heating power of the heater 18 can be adjusted according to the temperature value detected by the fifth temperature sensor 16.

[0050] The beneficial effects of the temperature control system 100 of the utility model are:

[0051] The temperature control system 100 of the utility model adds the cooling system 130 between the refrigeration system 110 and the circulating system 140, and re-arranges the three-way valve 45 in the cooling system 130, so that the coolant in the cooling system 130 can selectively flow into the first heat exchanger 7 or the third heat exchanger 46. The first heat exchanger 7 is used for the heat exchange between the refrigerant of the refrigeration system 110 and the coolant of the cooling system 130. The third heat exchanger 46 is used for the heat exchange between the coolant of the cooling system 130 and the cooling water of the cooling water system 120. The temperature control system 100 can selectively make the coolant exchange with the refrigerant or the cooling water. When the temperature requirement of the load 20 is low, the refrigeration system 110 works at this time, and the coolant can be made to flow through the first heat exchanger 7 to exchange heat with the refrigerant by adjusting the three-way valve 45. When the temperature requirement of the load 20 is high, the refrigeration system 110 can not work at this time, and the coolant can be made to flow through the third heat exchanger 46 and the first heat exchanger 7 in turn, wherein the third heat exchanger 46 exchanges heat with the cooling water, and the first heat exchanger 7 does not exchange heat, and the load 20 is cooled by the cooling water at this time. The temperature control system 100 of the utility model can switch the work of the cooling water system 120 and the refrigeration system 110 according to the temperature control requirement, and cool the circulating liquid of the load 20, so as to meet the different temperature control requirements of the load 20 and reduce the system energy consumption.

[0052] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A temperature control system (100), characterized by, The application relates to a refrigeration system (110), a cooling water system (120) and a circulating system (140). The refrigeration system (110) comprises a compressor (1), a fourth heat exchanger (4), a liquid accumulator (5) and an electronic expansion valve (6) connected in sequence, wherein the electronic expansion valve (6) is connected to the first side inlet of the first heat exchanger (7), and the first side outlet of the first heat exchanger (7) is connected to the inlet of the compressor (1). The cooling water system (120) further comprises a second cooling circuit (122) connected to the second side of the fourth heat exchanger (4). A first temperature sensor (2) and a first pressure sensor (3) are arranged between the compressor (1) and the fourth heat exchanger (4). A second temperature sensor (8) and a second pressure sensor (9) are arranged between the first heat exchanger (7) and the compressor (1).

2. The temperature control system (100) according to claim 1, characterized in that The liquid accumulator (5) comprises a gas-liquid separator.

3. The temperature control system (100) according to claim 2, characterized in that The outlet of the power device is connected to a shunt plate (131), the inlet of the three-way valve (45) is connected to a flow plate (132), the second heat exchanger (14) is a plurality of, the first side inlets of the plurality of second heat exchangers (14) are respectively connected to the outlets of the shunt plate (131), and the first side outlets of the plurality of second heat exchangers (14) are respectively connected to the inlets of the flow plate (132).

4. The temperature control system (100) according to claim 2, characterized in that ​ 5. The temperature control system (100) of claim 2, wherein, ​ 6. The temperature control system (100) of claim 2, wherein, ​ 7. The temperature control system (100) of claim 1, wherein, ​ The circulating system (140) comprises a plurality of circulating loops (141), and the plurality of circulating loops (141) are connected with the second sides of the plurality of second heat exchangers (14) respectively.

8. The temperature control system (100) according to claim 7, characterized in that A third temperature sensor (11) is arranged on the shunt plate (131), and a fourth temperature sensor (44) is arranged on the bus plate (132).

9. The temperature control system (100) according to claim 1 or 7, characterized in that An electromagnetic valve (13) is arranged between the power device and the second heat exchanger (14).

10. The temperature control system (100) of claim 1, wherein, A fifth temperature sensor (16) is arranged between the expansion tank (15) and the circulating pump (17), a heater (18) is arranged between the circulating pump (17) and the load (20), and a sixth temperature sensor (19) is arranged between the heater (18) and the load (20).

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