Temperature control system
By setting up multiple circulation loops in the temperature control system to selectively exchange heat with cooling water and refrigeration system, the problem of high energy consumption in the temperature control system is solved, and low-energy cooling and precise temperature control are achieved under high temperature conditions.
Patent Information
- Application Number
- CN202423234520.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-12-05
- Estimated Expiration
- 2034-12-25
AI Technical Summary
Existing temperature control systems in panel production require the simultaneous control of the temperature of multiple loads, resulting in high energy consumption and difficulty in reducing energy consumption while meeting temperature control accuracy requirements.
Multiple circulation loops are used to exchange heat with the cooling water system and the refrigeration system respectively. Heat exchange is selectively performed according to load requirements, including low temperature, medium temperature and high temperature circulation loops. The cooling water system is used for cooling under high temperature conditions to reduce the energy consumption of the refrigeration system.
While meeting temperature control accuracy, the energy consumption of the temperature control system is reduced by optimizing the heat exchange method of the circulation loop, especially in high-temperature conditions, where the cooling water system is effectively utilized to prevent the cooling water from freezing.
Smart Images
Figure CN223636420U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor temperature control, specifically, relates to a temperature control system. BACKGROUND
[0002] In the production process of the panel, circulating liquid with stable temperature needs to be provided to the load end, and the circulating liquid temperature required by the panel processing process is different according to different process temperature requirements. Meanwhile, the load changes in the specific process are also various, and the device needs to stably output temperature control precision of ±0.1 DEG C to the load end.
[0003] However, the temperature control system for display panel production needs to control the temperature points of multiple loads at the same time, and the energy consumption is large. UTILITY MODEL CONTENTS
[0004] The utility model discloses a temperature control system can use cooling water to cool under the condition that circulating liquid demand temperature is higher, reduce refrigeration system energy consumption, can reduce energy consumption while satisfying temperature control precision.
[0005] The embodiment of the utility model can be realized as follows:
[0006] The utility model provides a temperature control system, comprising:
[0007] Refrigeration system, the refrigeration system is used for circulating refrigerant, and the refrigerant is condensed;
[0008] Cooling water system, the cooling water system is used for circulating cooling water;
[0009] Circulating system, the circulating system comprises a plurality of circulating loops, and a plurality of circulating loops respectively carry out temperature regulation to a plurality of loads;
[0010] At least one circulating loop only exchanges heat with the cooling water system; At least one circulating loop exchanges heat with the refrigeration system and the cooling water system simultaneously; At least one circulating loop selectively exchanges heat with the refrigeration system and / or the cooling water system.
[0011] The temperature control system provided by the utility model embodiment has the beneficial effects of:
[0012] The temperature control system of the utility model carries out temperature control to multiple loads through multiple circulating loops. At least one circulating loop exchanges heat with cooling water of the cooling water system, and the circulating liquid temperature is high. At least one circulating loop exchanges heat with refrigerant of the refrigeration system and exchanges heat with cooling water of the cooling water system at the same time, and the circulating liquid temperature is medium. At least one circulating loop selectively exchanges heat with refrigerant of the refrigeration system only or exchanges heat with refrigerant of the refrigeration system and exchanges heat with cooling water of the cooling water system at the same time, and the circulating liquid temperature is low. Since the circulating liquid temperature on the low-temperature circulating loop is low, it can be below 0 degrees Celsius, and the cooling water has the risk of freezing. At this time, the circulating liquid of the low-temperature circulating loop can exchange heat with refrigerant of the refrigeration system only, so that the cooling water is prevented from freezing. The temperature control system of the utility model can use cooling water to cool under the condition that the circulating liquid demand temperature is high, reduce the energy consumption of the refrigeration system, and reduce the energy consumption while meeting the temperature control precision. BRIEF DESCRIPTION OF DRAWINGS
[0013] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiments, it should be understood, the following drawings only shows some embodiments of the utility model, therefore should not be regarded as the limited range, for the ordinary skilled person in the art, under the premise of not paying the creative labor, can also obtain other related drawings according to these drawings.
[0014] Figure 1 The structural schematic diagram of the temperature control system provided for the embodiment is shown in the figure.
[0015] Figure 2 The structural schematic diagram of the circulating system provided for the embodiment is shown in the figure.
[0016] Figure 3 The structural schematic diagram of the refrigeration system provided for the embodiment is shown in the figure.
[0017] Figure 4 The structural schematic diagram of the cooling water system provided for the embodiment is shown in the figure.
[0018] Icon: 100 - temperature control system; 10 - circulation system; 11 - first circulation loop; 111 - three-way valve; 1111 - first inlet; 1112 - first outlet; 1113 - second outlet; 112 - first heat exchanger; 113 - second heat exchanger; 114 - first expansion tank; 1141 - fourth temperature sensor; 115 - first circulation pump; 116 - first heater; 1161 - first temperature sensor; 117 - first load; 12 - second circulation loop; 121 - third heat exchanger; 122 - fourth heat exchanger; 123 - second expansion tank; 1231 - fifth temperature sensor; 124 - second circulation pump; 125 - second heater; 1251 - second temperature sensor; 126 - second load; 13 - third circulation loop; 131 - fifth heat exchanger; 132 - third expansion tank; 1321 - sixth temperature sensor; 133 - third circulation pump; 134 - third heater; 1341 - third temperature sensor; 135 - third load; 20 - refrigeration system; 21 - compressor; 22 - sixth heat exchanger; 23 - liquid accumulator; 241 - first expansion valve; 242 - second expansion valve; 25 - gas-liquid separator; 251 - seventh temperature sensor; 252 - first pressure sensor; 253 - eighth temperature sensor; 254 - second pressure sensor; 30 - cooling water system; 31 - first cooling loop; 32 - second cooling loop; 33 - second flow divider; 34 - first flow combiner; 35 - solenoid valve; 36 - ninth temperature sensor. DETAILED DESCRIPTION
[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0020] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.
[0021] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0022] In the description of the utility model, it needs to be explained that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, it is only for the convenience of describing the utility model and simplifying the description, and it does not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation on the utility model.
[0023] In addition, if the terms "first", "second" and the like are used only for differentiation, they cannot be understood as indicating or implying relative importance.
[0024] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.
[0025] Please refer to Figure 1 The temperature control system 100 provided by the utility model is applied to the production of display panels in the semiconductor field. In the production process of the panel, temperature-stable circulating liquid needs to be provided to the load end. At the same time, due to the different temperature requirements of the circulating liquid required in the panel processing process, the load varies in the specific process, and the cooling capacity of the temperature control system 100 has greater requirements. The temperature control system 100 for display panel production consumes a lot of energy.
[0026] Specifically, the temperature control system 100 comprises a refrigeration system 20, a cooling water system 30 and a circulating system 10.
[0027] The refrigeration system 20 is used for introducing refrigerant and condensing the refrigerant, so that the refrigerant exchanges heat with the circulating liquid of the circulating system 10 and cools the circulating liquid.
[0028] The cooling water system 30 is used for introducing cooling water. The cooling water can exchange heat with the circulating liquid of the circulating system 10 and cool the circulating liquid. Specifically, in this embodiment, the cooling water is factory water, and the cooling water system 30 is the internal water supply system of the factory.
[0029] Please refer to Figure 1 and Figure 2 The circulating system 10 in this embodiment is used for introducing circulating liquid and controlling the temperature of the load. Specifically, the circulating system 10 comprises a plurality of circulating loops, and the plurality of circulating loops respectively adjust the temperature of a plurality of loads. At least one circulating loop only exchanges heat with the cooling water system 30. At least one circulating loop simultaneously exchanges heat with the refrigeration system 20 and the cooling water system 30. At least one circulating loop selectively exchanges heat with the refrigeration system 20 and / or the cooling water system 30.
[0030] In the present embodiment, since the temperatures of three loads need to be controlled simultaneously, the circulating system 10 comprises a first circulating loop 11, a second circulating loop 12 and a third circulating loop 13.
[0031] The first circulating loop 11, the second circulating loop 12 and the third circulating loop 13 pass through the loads respectively. It can be understood that the first circulating loop 11, the second circulating loop 12 and the third circulating loop 13 respectively pass through circulating liquid, and the circulating liquid cools the loads when passing through the loads.
[0032] Specifically, the first circulating loop 11 comprises a first expansion tank 114, a first circulating pump 115, a first heater 116, a first load 117, a three-way valve 111, a second side of a first heat exchanger 112 and a first side of a second heat exchanger 113. The first circulating loop 11 selectively exchanges heat with the cooling water system 30 through the first heat exchanger 112 and / or exchanges heat with the refrigeration system 20 through the second heat exchanger 113 via the three-way valve 111. The three-way valve 111 comprises a first inlet 1111, a first outlet 1112 and a second outlet 1113. The outlet of the first load 117 is in communication with the first inlet 1111. The first outlet 1112 is in communication with the second side inlet of the first heat exchanger 112. The second outlet 1113 is in communication with the first side inlet of the second heat exchanger 113. The second side outlet of the first heat exchanger 112 and the first side outlet of the second heat exchanger 113 are both in communication with the inlet of the first expansion tank 114. The outlet of the first expansion tank 114 is in communication with the inlet of the first circulating pump 115. The outlet of the first circulating pump 115 is in communication with the inlet of the first heater 116. The outlet of the first heater 116 is in communication with the inlet of the first load 117.
[0033] It can be understood that in the first circulation loop 11, the circulating liquid is cooled by the first load 117 and then the temperature is increased, and enters the first inlet 1111 of the three-way valve 111. At this time, the circulating liquid can be discharged from the first outlet 1112 by controlling the three-way valve 111, and the circulating liquid is sequentially cooled by the first heat exchanger 112 and the second heat exchanger 113, and then enters the first expansion tank 114; or the circulating liquid is discharged from the second outlet 1113 by controlling the three-way valve 111, and is directly cooled by the second heat exchanger 113. In the embodiment, by providing the three-way valve 111, the circulating liquid in the first circulation loop 11 can be simultaneously cooled by the cooling water system 30 and the refrigeration system 20, or only by the refrigeration system 20. Since the circulating liquid in the first circulation loop 11 has a low temperature, specifically -20℃-60℃, when the circulating liquid is cooled by the cooling water system 30, the cooling water in the cooling water system 30 may freeze, therefore, when the temperature of the circulating liquid is low, the circulating liquid in the first circulation loop 11 is only cooled by the refrigeration system 20 by controlling the three-way valve 111, which can avoid the freezing of the cooling water. Further, the circulating liquid enters the first expansion tank 114 after passing through the first heat exchanger 112 and / or the second heat exchanger 113, and then is pressurized by the first circulation pump 115. The first heater 116 heats the circulating liquid to the target temperature, and then the circulating liquid flows into the first load 117 to control the temperature of the first load 117.
[0034] The second circulation loop 12 includes a second expansion tank 123, a second circulation pump 124, a second heater 125, a second load 126, a second side of the third heat exchanger 121, and a first side of the fourth heat exchanger 122. The second circulation loop 12 exchanges heat with the cooling water system 30 through the third heat exchanger 121. The second circulation loop 12 exchanges heat with the refrigeration system 20 through the fourth heat exchanger 122. The outlet of the second load 126 is in communication with the second side inlet of the third heat exchanger 121. The second side outlet of the third heat exchanger 121 is in communication with the first side inlet of the fourth heat exchanger 122. The first side outlet of the fourth heat exchanger 122 is in communication with the inlet of the second expansion tank 123. The outlet of the second expansion tank 123 is in communication with the inlet of the second circulation pump 124. The outlet of the second circulation pump 124 is in communication with the inlet of the second heater 125. The outlet of the second heater 125 is in communication with the inlet of the second load 126.
[0035] It can be understood that in the second circulation loop 12, the circulating liquid is cooled by the second load 126, and then the temperature is increased, and then the circulating liquid is cooled by the third heat exchanger 121 and the fourth heat exchanger 122 in turn, and then the circulating liquid enters the second expansion tank 123, and then the circulating liquid is pressurized by the second circulating pump 124, and then the circulating liquid is heated to the target temperature by the second heater 125, and then the circulating liquid is used to control the temperature of the second load 126. The second circulation loop 12 is used to exchange heat between the circulating liquid and the refrigerant of the refrigeration system 20 and the cooling water of the cooling water system 30. The temperature of the circulating liquid of the second circulation loop 12 is a medium temperature range, specifically 10℃-90℃.
[0036] Further, the third circulation loop 13 includes a third expansion tank 132, a third circulating pump 133, a third heater 134, a third load 135, and a second side of the fifth heat exchanger 131. The third circulation loop 13 exchanges heat with the cooling water system 30 through the fifth heat exchanger 131. The outlet of the third load 135 is in communication with the second side inlet of the fifth heat exchanger 131. The second side outlet of the fifth heat exchanger 131 is in communication with the inlet of the third expansion tank 132. The outlet of the third expansion tank 132 is in communication with the inlet of the third circulating pump 133. The outlet of the third circulating pump 133 is in communication with the inlet of the third heater 134. The outlet of the third heater 134 is in communication with the inlet of the third load 135.
[0037] It can be understood that in the third circulation loop 13, the circulating liquid is cooled by the third load 135, and then the temperature is increased, and then the circulating liquid is cooled by the fifth heat exchanger 131 and the cooling water system 30, and then the circulating liquid enters the third expansion tank 132, and then the circulating liquid is pressurized by the third circulating pump 133, and then the circulating liquid is heated to the target temperature by the third heater 134, and then the circulating liquid enters the third load 135, and then the circulating liquid is used to control the temperature of the third load 135. It can be understood that the circulating liquid temperature requirement of the third load 135 is high, and the specific temperature of the circulating liquid is 30℃-150℃, so that the circulating liquid can be exchanged with the cooling water system 30 only, without the need of exchanging heat with the refrigeration system 20. The circulation loop arrangement in the embodiment can preferentially use the cooling water system 30 to exchange heat when the temperature of the circulating liquid is high, thereby reducing the system energy consumption.
[0038] In the embodiment, the circulating liquid temperature of the first circulation loop 11 is a low temperature range, specifically -20℃-60℃. The circulating liquid temperature of the second circulation loop 12 is a medium temperature range, specifically 10℃-90℃. The circulating liquid temperature of the third circulation loop 13 is a high temperature range, specifically 30℃-150℃.
[0039] Alternatively, the circulating liquid temperature of the first circulation loop 11, the second circulation loop 12 and the third circulation loop 13 can be set to other values as required, and the specific value of the circulating liquid temperature in the circulation system 10 is not limited in the utility model.
[0040] To further realize precise temperature control, a first temperature sensor 1161 is arranged between the first heater 116 and the first load 117. A second temperature sensor 1251 is arranged between the second heater 125 and the second load 126. A third temperature sensor 1341 is arranged between the third heater 134 and the third load 135. It can be understood that in the first circulation loop 11, the circulating liquid is pressurized by the first circulation pump 115 and then enters the first heater 116. When the temperature of the circulating liquid is lower than the required temperature of the first load 117, the first heater 116 heats the circulating liquid so that the circulating liquid meets the temperature requirement of the first load 117. In the second circulation loop 12, the circulating liquid is pressurized by the second circulation pump 124 and then enters the second heater 125. When the temperature of the circulating liquid is lower than the required temperature of the second load 126, the second heater 125 heats the circulating liquid so that the circulating liquid meets the temperature requirement of the second load 126. In the third circulation loop 13, the circulating liquid is pressurized by the third circulation pump 133 and then enters the third heater 134. When the temperature of the circulating liquid is lower than the required temperature of the third load 135, the third heater 134 heats the circulating liquid so that the circulating liquid meets the temperature requirement of the third load 135. The first temperature sensor 1161 is used to detect the temperature of the circulating liquid entering the first load 117. The second temperature sensor 1251 is used to detect the temperature of the circulating liquid entering the second load 126. The third temperature sensor 1341 is used to detect the temperature of the circulating liquid entering the third load 135. By arranging the first temperature sensor 1161, the second temperature sensor 1251 and the third temperature sensor 1341, it can be detected whether the temperature of the circulating liquid meets the temperature requirements of the first load 117, the second load 126 and the third load 135, so as to control the power of the first heater 116, the second heater 125 and the third heater 134 to adjust the temperature of the circulating liquid.
[0041] Further, a fourth temperature sensor 1141 is arranged between the first expansion tank 114 and the first circulation pump 115. A fifth temperature sensor 1231 is arranged between the second expansion tank 123 and the second circulation pump 124. A sixth temperature sensor 1321 is arranged between the third expansion tank 132 and the third circulation pump 133. It can be understood that the fourth temperature sensor 1141 is used to detect the temperature of the circulating liquid flowing out of the first expansion tank 114. The fifth temperature sensor 1231 is used to detect the temperature of the circulating liquid flowing out of the second expansion tank 123. The sixth temperature sensor 1321 is used to detect the temperature of the circulating liquid flowing out of the third expansion tank 132. By detecting whether the temperature of the circulating liquid is within a preset range, it can be judged whether the circulating system 10 is working normally.
[0042] Please refer to Figure 1 and Figure 3The refrigeration system 20 of the embodiment specifically comprises a compressor 21, a sixth heat exchanger 22, a liquid accumulator 23, a second side of a second heat exchanger 113, a second side of a fourth heat exchanger 122, and a gas-liquid separator 25. An outlet of the compressor 21 is in communication with an inlet of a first side of the sixth heat exchanger 22. An outlet of the first side of the sixth heat exchanger 22 is in communication with an inlet of the liquid accumulator 23. An outlet of the liquid accumulator 23 is in communication with an inlet of the second side of the second heat exchanger 113 and an inlet of the second side of the fourth heat exchanger 122, respectively. An outlet of the second side of the second heat exchanger 113 and an outlet of the second side of the fourth heat exchanger 122 are both in communication with an inlet of the gas-liquid separator 25. An outlet of the gas-liquid separator 25 is in communication with an inlet of the compressor 21.
[0043] It can be understood that the high-temperature and high-pressure gas formed after the refrigerant passes through the compressor 21 enters the sixth heat exchanger 22 to condense into liquid and enters the liquid accumulator 23. Specifically, the sixth heat exchanger 22 is a condenser. The refrigerant then enters the second heat exchanger 113 and the fourth heat exchanger 122 from the liquid accumulator 23, and exchanges heat with the circulating liquid of the first circulating loop 11 and the second circulating loop 12, respectively. During the process, the temperature of the circulating liquid decreases, and the temperature of the refrigerant increases. Then, the refrigerant enters the gas-liquid separator 25 for gas-liquid separation, and finally the gaseous refrigerant returns to the compressor 21 to prevent liquid from entering the compressor 21 and damaging the compressor 21.
[0044] Further, the outlet of the liquid accumulator 23 is connected with a first flow divider. The first flow divider is provided with a first flow outlet and a second flow outlet. The first flow outlet is in communication with the inlet of the second side of the second heat exchanger 113. The second flow outlet is in communication with the inlet of the second side of the fourth heat exchanger 122. It can be understood that after the refrigerant comes out of the liquid accumulator 23, it enters the second side of the second heat exchanger 113 and the second side of the fourth heat exchanger 122 in two paths, respectively, and then flows out of the second heat exchanger 113 and the fourth heat exchanger 122, respectively, and finally flows into the compressor 21.
[0045] In order to adjust the flow of the refrigerant flowing to the first circulating loop 11 and the second circulating loop 12, respectively, the first flow outlet is provided with a first expansion valve 241, and the second flow outlet is provided with a second expansion valve 242.
[0046] In the embodiment, the inlet of the compressor 21 is provided with a seventh temperature sensor 251 and a first pressure sensor 252. The outlet of the compressor 21 is provided with an eighth temperature sensor 253 and a second pressure sensor 254. It can be understood that the seventh temperature sensor 251 and the eighth temperature sensor 253 detect the refrigerant temperature entering the compressor 21 and the refrigerant temperature flowing out of the compressor 21 respectively. The first pressure sensor 252 and the second pressure sensor 254 detect the refrigerant pressure entering the compressor 21 and the refrigerant pressure flowing out of the compressor 21 respectively. Through the comparison of the temperature and the pressure before and after, the working state of the compressor 21 can be monitored.
[0047] Specifically, the seventh temperature sensor 251 is arranged between the gas-liquid separator 25 and the compressor 21. The eighth temperature sensor 253 is arranged between the compressor 21 and the sixth heat exchanger 22. The first pressure sensor 252 is arranged between the gas-liquid separator 25 and the compressor 21. The second pressure sensor 254 is arranged between the compressor 21 and the sixth heat exchanger.
[0048] Please refer to Figure 1 and Figure 4 , the cooling water system 30 of the embodiment specifically includes a first cooling circuit 31 and a second cooling circuit 32. The first cooling circuit 31 communicates with the second side of the sixth heat exchanger 22. The second cooling circuit 32 respectively communicates with the first side of the first heat exchanger 112, the first side of the third heat exchanger 121 and the first side of the fifth heat exchanger 131.
[0049] It can be understood that the first cooling circuit 31 is used for heat exchange with the refrigeration system 20. The sixth heat exchanger 22 in the refrigeration system 20 realizes the heat exchange between the refrigerant and the cooling water. The second cooling circuit 32 is used for heat exchange with the circulating system 10. The first heat exchanger 112, the third heat exchanger 121 and the fifth heat exchanger 131 in the circulating system 10 realize the heat exchange between the cooling water and the circulating liquid.
[0050] Specifically, the second cooling circuit 32 is provided with a second flow divider 33 and a first flow collector 34. The second flow divider 33 is provided with three flow outlets, which respectively correspond to the first side inlet of the first heat exchanger 112, the first side inlet of the third heat exchanger 121 and the first side inlet of the fifth heat exchanger 131. The first flow collector 34 is provided with three flow inlets. The three flow inlets respectively correspond to the first side outlet of the first heat exchanger 112, the first side outlet of the third heat exchanger 121 and the first side outlet of the fifth heat exchanger 131.
[0051] Further, the three flow outlets of the second flow divider 33 are respectively provided with electromagnetic valves 35. The second flow divider 33 is provided with a ninth temperature sensor 36.
[0052] The temperature control system 100 has the following advantages:
[0053] The temperature control system 100 controls the temperature of the multiple loads through the multiple circulating loops. The circulating liquid temperature of the at least one circulating loop is high temperature, which is obtained by heat exchange between the at least one circulating loop and the cooling water of the cooling water system 30. The circulating liquid temperature of the at least one circulating loop is medium temperature, which is obtained by heat exchange between the at least one circulating loop and the refrigerant of the refrigeration system 20 and heat exchange between the at least one circulating loop and the cooling water of the cooling water system 30. The circulating liquid temperature of the at least one circulating loop is low temperature, which is obtained by heat exchange between the at least one circulating loop and the refrigerant of the refrigeration system 20 or heat exchange between the at least one circulating loop and the refrigerant of the refrigeration system 20 and heat exchange between the at least one circulating loop and the cooling water of the cooling water system 30. The circulating liquid of the low-temperature circulating loop is only heat exchanged with the refrigerant of the refrigeration system 20, so that the freezing of the cooling water is avoided. The temperature control system 100 can use the cooling water to cool under the condition that the circulating liquid demand temperature is high, the energy consumption of the refrigeration system 20 is reduced, and the energy consumption is reduced while the temperature control precision is met.
[0054] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.
Claims
1. A temperature control system (100), characterized in that, include: A refrigeration system (20) for introducing refrigerant and condensing the refrigerant; Cooling water system (30), the cooling water system (30) is used to supply cooling water; A circulation system (10) includes multiple circulation loops, each of which regulates the temperature of a multiple load; wherein, At least one of the circulation loops exchanges heat only with the cooling water system (30); at least one of the circulation loops exchanges heat with both the refrigeration system (20) and the cooling water system (30); at least one of the circulation loops selectively exchanges heat with the refrigeration system (20) and / or the cooling water system (30).
2. The temperature control system (100) according to claim 1, characterized in that, The loop includes a first loop (11), a second loop (12), and a third loop (13); The first circulation loop (11) includes a first expansion tank (114), a first circulation pump (115), a first heater (116), a first load (117), a three-way valve (111), a second side of a first heat exchanger (112), and a first side of a second heat exchanger (113). The first circulation loop (111) selectively exchanges heat with the cooling water system (30) via the first heat exchanger (112) through the three-way valve (111), and / or the first circulation loop (111) exchanges heat with the refrigeration system (20) via the second heat exchanger (113). The three-way valve (111) includes a first inlet (1111), a first outlet (1112), and a second outlet (1113). The first load (114) includes a first expansion tank (114), a first circulation pump (115), a first heater (116), a first load (117), a three-way valve (111), a second side of a first heat exchanger (112), and a first side of a second heat exchanger (113). The outlet of 17) is connected to the first inlet (1111), the first outlet (1112) is connected to the second side inlet of the first heat exchanger (112), the second outlet (1113) is connected to the first side inlet of the second heat exchanger (113), the second side outlet of the first heat exchanger (112) and the first side outlet of the second heat exchanger (113) are both connected to the inlet of the first expansion tank (114), the outlet of the first expansion tank (114) is connected to the inlet of the first circulating pump (115), the outlet of the first circulating pump (115) is connected to the inlet of the first heater (116), and the outlet of the first heater (116) is connected to the inlet of the first load (117); The second circulation loop (12) includes a second expansion tank (123), a second circulation pump (124), a second heater (125), a second load (126), a second side of a third heat exchanger (121), and a first side of a fourth heat exchanger (122). The second circulation loop (12) exchanges heat with the cooling water system (30) through the third heat exchanger (121) and with the refrigeration system (20) through the fourth heat exchanger (122). The outlet of the second load (126) is connected to the third heat exchanger. The second side inlet of (121) is connected, the second side outlet of the third heat exchanger (121) is connected to the first side inlet of the fourth heat exchanger (122), the first side outlet of the fourth heat exchanger (122) is connected to the inlet of the second expansion tank (123), the outlet of the second expansion tank (123) is connected to the inlet of the second circulating pump (124), the outlet of the second circulating pump (124) is connected to the inlet of the second heater (125), and the outlet of the second heater (125) is connected to the inlet of the second load (126); The third circulation loop (13) includes a third expansion tank (132), a third circulation pump (133), a third heater (134), a third load (135), and the second side of a fifth heat exchanger (131). The third circulation loop (13) exchanges heat with the cooling water system (30) through the fifth heat exchanger (131). The outlet of the third load (135) is connected to the inlet of the second side of the fifth heat exchanger (131). The outlet of the second side of the fifth heat exchanger (131) is connected to the inlet of the third expansion tank (132). The outlet of the third expansion tank (132) is connected to the inlet of the third circulation pump (133). The outlet of the third circulation pump (133) is connected to the inlet of the third heater (134). The outlet of the third heater (134) is connected to the inlet of the third load (135).
3. The temperature control system (100) according to claim 2, characterized in that, A first temperature sensor (1161) is provided between the first heater (116) and the first load (117); a second temperature sensor (1251) is provided between the second heater (125) and the second load (126); and a third temperature sensor (1341) is provided between the third heater (134) and the third load (135).
4. The temperature control system (100) according to claim 2, characterized in that, A fourth temperature sensor (1141) is provided between the first expansion tank (114) and the first circulation pump (115); a fifth temperature sensor (1231) is provided between the second expansion tank (123) and the second circulation pump (124); and a sixth temperature sensor (1321) is provided between the third expansion tank (132) and the third circulation pump (133).
5. The temperature control system (100) according to claim 2, characterized in that, The refrigeration system (20) includes a compressor (21), a sixth heat exchanger (22), a liquid receiver (23), a second side of a second heat exchanger (113), a second side of a fourth heat exchanger (122), and a gas-liquid separator (25). The outlet of the compressor (21) is connected to the first side inlet of the sixth heat exchanger (22), and the first side outlet of the sixth heat exchanger (22) is connected to the inlet of the liquid receiver (23). The outlet of the liquid receiver (23) is connected to the second side inlet of the second heat exchanger (113) and the second side inlet of the fourth heat exchanger (122). The second side outlet of the second heat exchanger (113) and the second side outlet of the fourth heat exchanger (122) are both connected to the inlet of the gas-liquid separator (25) of the compressor (21), and the outlet of the gas-liquid separator (25) is connected to the inlet of the compressor (21).
6. The temperature control system (100) according to claim 5, characterized in that, The outlet of the liquid reservoir (23) is connected to a first diversion component, which is provided with a first diversion outlet and a second diversion outlet. The first diversion outlet is connected to the second side inlet of the second heat exchanger (113), and the second diversion outlet is connected to the second side inlet of the fourth heat exchanger (122).
7. The temperature control system (100) according to claim 6, characterized in that, A first expansion valve (241) is provided between the first diversion outlet and the second side inlet of the second heat exchanger (113), and a second expansion valve (242) is provided between the second diversion outlet and the second side inlet of the fourth heat exchanger (122).
8. The temperature control system (100) according to claim 5, characterized in that, The compressor (21) is equipped with a seventh temperature sensor (251) and a first pressure sensor (252) at its inlet, and an eighth temperature sensor (253) and a second pressure sensor (254) at its outlet.
9. The temperature control system (100) according to claim 5, characterized in that, The cooling water system (30) includes a first cooling circuit (31) and a second cooling circuit (32). The first cooling circuit (31) is connected to the second side of the sixth heat exchanger (22), and the second cooling circuit (32) is connected to the first side of the first heat exchanger (112), the first side of the third heat exchanger (121), and the first side of the fifth heat exchanger (131), respectively.
10. The temperature control system (100) according to claim 9, characterized in that, The second cooling circuit (32) is provided with a second diverter (33) and a first confluencer (34). The second diverter (33) is provided with three diverter outlets, which are respectively connected to the first side inlet of the first heat exchanger (112), the first side inlet of the third heat exchanger (121), and the first side inlet of the fifth heat exchanger (131). The first confluencer (34) is provided with three confluence inlets, which are respectively connected to the first side outlet of the first heat exchanger (112), the first side outlet of the third heat exchanger (121), and the first side outlet of the fifth heat exchanger (131).