Seed crystal detection device

Abstract

The utility model discloses a seed crystal detection device, which relates to the technical field of monocrystalline silicon production and comprises a base and a light shield connected with the base, and a bearing cavity is formed between the base and the light shield. A transmission chain wheel and a driven chain wheel are arranged on the two sides in the bearing cavity respectively and sleeved with a chain, the chain is sleeved with a plurality of bearing strips, the transmission chain wheel is connected with the output end of a driving motor arranged on one side of the machine base, and an industrial camera, an electronic back scattering diffractometer and a light source are arranged at the top end in the light shielding cover and matched with the bearing strips. And the driving motor, the industrial camera, the electronic back scattering diffractometer and the light source are electrically connected with a control panel arranged in the machine base through wires respectively. The seed crystal screening efficiency and reliability are improved, the human input is reduced, the production cost is reduced, and meanwhile, the situations of fatigue, misjudgment and the like possibly caused by manual detection are also avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to monocrystalline silicon production technical field, specifically, relate to a seed crystal detection device. BACKGROUND

[0002] Monocrystalline silicon will be put into seed crystal to full melt material before production, then carries out seeding operation. The quality and specification requirement of seed crystal is very important, they are closely related to the quality and performance of the final output monocrystalline silicon. The diameter of seed crystal should match the wafer size of the required monocrystalline silicon, the orientation of seed crystal must be accurate to ensure the ideal crystalline structure is grown, and the surface of seed crystal must be smooth and flat to form high-quality monocrystalline silicon crystal.

[0003] At present, monocrystalline silicon is often selected by artificial seed crystal in production, and artificial seed crystal has certain defects, such as high cost, time consumption, error possibility, labor demand, consistency problem, resource waste and limited technology. These factors together cause the instability of artificial selection process and potential quality hidden danger, which affects the efficiency and reliability of monocrystalline silicon production process.

[0004] For the problems in the related art, no effective solution has been proposed so far. SUMMARY

[0005] For the problems in the related art, the purpose of the utility model is to provide a seed crystal detection device to overcome the above technical problems existing in the prior art.

[0006] The technical scheme of the utility model is as follows:

[0007] A seed crystal detection device, comprising: a machine base and a light shield connected with the machine base, a bearing cavity is formed between the machine base and the light shield, wherein;

[0008] Transmission sprocket and driven sprocket are arranged on both sides of the bearing cavity, a chain is sleeved on the transmission sprocket and the driven sprocket, a plurality of bearing strips are sleeved on the outside of the chain, and the transmission sprocket is connected with the output end of the driving motor arranged on one side of the machine base,

[0009] An industrial camera, an electron backscatter diffraction instrument and a light source are arranged on the top end of the light shield and matched with the bearing strips, and the driving motor, the industrial camera, the electron backscatter diffraction instrument and the light source are electrically connected with the control panel arranged in the machine base through wires.

[0010] Further, the transmission sprocket is movably connected with the inner side of the light shield through a rotating shaft.

[0011] Further, the transmission sprocket is sleeved with a rotating shaft, one end of the rotating shaft is movably connected to the inner side of the base, and the other end of the rotating shaft is connected to the output end of the driving motor.

[0012] Further, the rotating shafts are movably sleeved with a support frame, the support frame is located in the chain, and a plurality of support sprockets are respectively sleeved in the support frame, and the plurality of support sprockets are respectively matched with the chain.

[0013] Further, the control panel is electrically connected with a wireless signal transmitter.

[0014] The beneficial effects of the present application are as follows:

[0015] The worker places the seed crystal on the bearing strip in advance, controls the driving motor, the driving sprocket and the driven sprocket through the control panel, realizes that the chain cooperates with the bearing strip to send the seed crystal into the light shield, controls the industrial camera, the electron backscattering diffractometer and the light source through the control panel to detect the seed crystal, and after the detection is completed, the bearing strip is transported to the starting position, whether the seed crystal meets the growth requirement can be judged in a short time, the qualified seed crystal is quickly screened out for production, the screening efficiency and the reliability of the seed crystal are greatly improved, the manpower investment is reduced, the production cost is reduced, and the fatigue and misjudgment of manual detection are avoided.

[0016] Other features and advantages of the present application will be described in the following description, and some of them will become apparent from the description, or will be understood by those skilled in the art through implementation of the present application. The purpose and other advantages of the present application are realized and obtained by the structure specifically pointed out in the description and the drawings.

[0017] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.

[0019] Fig. 1 It is a structure schematic view of the seed crystal detection device according to the embodiment of the present application.

[0020] Fig. 2 It is a light shield schematic view of the seed crystal detection device according to the embodiment of the present application.

[0021] Fig. 3 This is a schematic diagram of the support frame of the seed crystal detection device according to an embodiment of the present utility model.

[0022] In the picture:

[0023] 1. Base; 2. Light shield; 3. Load-bearing cavity; 4. Drive sprocket; 5. Driven sprocket; 6. Chain; 7. Load-bearing bar; 8. Drive motor; 9. Industrial camera; 10. Electron backscatter diffractometer; 11. Light source; 12. Control panel; 13. Support frame; 14. Support sprocket. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0025] According to an embodiment of the present invention, a seed crystal detection device is provided.

[0026] like Figs. 1-3 As shown, a seed crystal detection device includes: a base 1 and a light shield 2 connected to the base 1, wherein a bearing cavity 3 is formed between the base 1 and the light shield 2;

[0027] A drive sprocket 4 and a driven sprocket 5 are respectively provided on both sides of the bearing cavity 3. A chain 6 is fitted on the drive sprocket 4 and the driven sprocket 5. Several bearing bars 7 are fitted on the outside of the chain 6. The drive sprocket 4 is connected to the output end of the drive motor 8 located on one side of the machine base 1.

[0028] The top of the light shield 2 is fitted with a support strip 7, which houses an industrial camera 9, an electron backscatter diffractometer 10, and a light source 11. The drive motor 8, the industrial camera 9, the electron backscatter diffractometer 10, and the light source 11 are electrically connected to the control panel 12 located inside the base 1 via wires.

[0029] The transmission sprocket 4 is movably connected to the inside of the sunshade 2 via a rotating shaft. A rotating shaft is inserted inside the driven sprocket 5, with one end of the rotating shaft movably connected to the inside of the base 1 and the other end of the rotating shaft connected to the output end of the drive motor 8.

[0030] In addition, a support frame 13 is movably sleeved between the rotating shafts. The support frame 13 is located inside the chain 6, and several support sprockets 14 are inserted inside the support frame 13. The several support sprockets 14 are adapted to the chain 6 respectively.

[0031] Additionally, the control panel 12 is electrically connected to a wireless signal transmitter.

[0032] The technical scheme, the worker places the seed crystal on the bearing strip 7 in advance, controls the driving motor 8 to drive the driving chain wheel 4 and cooperates with the driven chain wheel 5 through the control panel 12, realizes that the chain 6 cooperates with the bearing strip 7 to send the seed crystal into the light shield 2, and detects the seed crystal through the control panel 12 to control the industrial camera 9 and the electron backscatter diffraction instrument 10 and the light source 11, after detection is completed, is transported to the starting position through the bearing strip 7, whether the seed crystal meets the growth requirement can be judged in a short time, the qualified seed crystal is quickly screened out for production, the screening efficiency and the reliability of the seed crystal are greatly improved, the manpower investment is reduced, the production cost is reduced, and the fatigue and misjudgment of manual detection and the like are avoided.

[0033] In addition, for the above-mentioned industrial camera 9, the overhead angle image of the seed crystal is shot and is transmitted to the external preset visual detection system to detect the diameter of the seed crystal and whether there is a defect; meanwhile, the EBSD is collected by the electron backscatter diffraction instrument 10, after the EBSD image collection is completed, the diffraction image is transmitted to the external preset analysis system by the wireless signal transmitter, the crystal direction map and the orientation distribution map are generated to obtain whether the crystal direction meets the preset value.

[0034] Specifically, the diameter of the seed crystal and whether there is a defect can be analyzed by the external preset visual detection system, and whether the judgment result meets the preset value is judged. The electron backscatter diffraction instrument 10 can judge whether the crystal direction meets the preset value, so as to obtain whether the seed crystal meets the production.

[0035] It should be particularly pointed out that the preset visual detection system and the preset analysis system diffraction image are prior art in the field, which is not described here.

[0036] In summary, by means of the above technical scheme of the utility model, the following effects can be realized: whether the seed crystal meets the growth requirement can be judged in a short time, the qualified seed crystal is quickly screened out for production, the screening efficiency and the reliability of the seed crystal are greatly improved, the manpower investment is reduced, the production cost is reduced, and the fatigue and misjudgment of manual detection and the like are avoided.

[0037] The above only describes preferred embodiments of the utility model, and does not limit the utility model, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A seed crystal detection device, characterized in that, include: A base (1) and a light shield (2) connected to the base (1), wherein a bearing cavity (3) is formed between the base (1) and the light shield (2); The bearing cavity (3) is provided with a drive sprocket (4) and a driven sprocket (5) on both sides. The drive sprocket (4) and the driven sprocket (5) are fitted with a chain (6). Several bearing strips (7) are fitted on the outside of the chain (6). The drive sprocket (4) is connected to the output end of the drive motor (8) located on one side of the base (1). The top of the light shield (2) is fitted with the support strip (7) and is equipped with an industrial camera (9), an electron backscatter diffractometer (10) and a light source (11). The drive motor (8), the industrial camera (9), the electron backscatter diffractometer (10) and the light source (11) are electrically connected to the control panel (12) located in the base (1) through wires.

2. The seed crystal detection device according to claim 1, characterized in that, The transmission sprocket (4) is movably connected to the inside of the light shield (2) via a rotating shaft.

3. The seed crystal detection device according to claim 2, characterized in that, A rotating shaft is inserted inside the driven sprocket (5), and one end of the rotating shaft is movably connected to the inside of the machine base (1), while the other end of the rotating shaft is connected to the output end of the drive motor (8).

4. The seed crystal detection device according to claim 3, characterized in that, A support frame (13) is movably sleeved between the rotating shafts. The support frame (13) is located inside the chain (6), and several support sprockets (14) are inserted inside the support frame (13). The several support sprockets (14) are respectively adapted to the chain (6).

5. The seed crystal detection device according to claim 1, characterized in that, The control panel (12) is electrically connected to a wireless signal transmitter.

Images