Electronic-grade germanium tetrafluoride reactor device
By integrating flow meters and temperature sensors into the reactor, the problem of difficult process conditions control was solved, enabling precise control of the germanium tetrafluoride production process and improving product quality.
Patent Information
- Application Number
- CN202423280885.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In the production of electronic-grade germanium tetrafluoride, process conditions such as pressure, temperature and inlet fluorine flow rate in the reactor are difficult to control precisely, which affects product quality.
An electronic-grade germanium tetrafluoride reactor device was designed, which integrates instruments such as flow meter, thermometer and pressure gauge. By precisely controlling the fluorine gas flow rate and reaction temperature, the reaction conditions are kept stable.
This enabled precise control of the reactor, improving product quality and production efficiency.
Smart Images
Figure CN223732722U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of germanium tetrafluoride production, specifically relating to an electronic-grade germanium tetrafluoride reactor device. Background Technology
[0002] The key technologies for producing electronic-grade germanium tetrafluoride are of significant strategic importance to the development of my country's high-end electronic chip manufacturing and electronic information industry. Electronic-grade germanium tetrafluoride is the main raw material for producing Ge72 and germanium76 isotopes. Ge72 isotope is used as a chemical reagent for etching and performance optimization in the production of 10nm-level DRAM chips, while germanium76 isotope is a key material for high-purity germanium76 detectors used in dark matter detection.
[0003] In the production process of electronic-grade germanium tetrafluoride, the process conditions such as pressure, temperature and inlet fluorine flow rate in the reactor during the reaction of high-purity germanium with high-purity fluorine gas are subject to very high control requirements. Summary of the Invention
[0004] To address the aforementioned problems, this utility model provides an electronic-grade germanium tetrafluoride reactor device, comprising a reactor, a thermal oil heater, an oil tank, an oil pump, a collection tank, and a frequency converter. The reactor inlet is connected to a first valve and a second valve; the first valve is connected to a nitrogen inlet, and the second valve is connected to a fluorine inlet. The reactor outlet is connected to a fourth valve and a seventh valve; the fourth valve is connected to the collection tank. The thermal oil inlet of the reactor is connected to the oil pump, which is connected to the oil tank via a third valve. The oil tank is connected to the thermal oil heater via a fifth valve, and the thermal oil heater is connected to the reactor's thermal oil outlet via a sixth valve. The oil pump is equipped with a frequency converter. A flow meter is installed after the first valve. The reactor is equipped with a first temperature sensor. The reactor outlet is equipped with a pressure sensor and a second temperature sensor. The oil tank is equipped with a third temperature sensor. The pressure sensor detects the reactor outlet pressure, and the flow meter measures the amount of fluorine flowing into the reactor. Adjusting the opening of the fluorine inlet regulating valve controls the fluorine flow rate and the intensity of the reaction between fluorine and germanium. The third thermometer is used to detect the temperature of the oil tank and control the heating oil temperature of the thermal oil heater to ensure the required temperature of the reactor; the first thermometer is used to detect the temperature of the reactor and, by controlling the frequency of the frequency converter, changes the speed of the oil supply pump, thereby controlling the amount of oil supplied and stabilizing the temperature of the reactor; the germanium tetrafluoride generated by the reactor is collected in a collection tank.
[0005] The above-mentioned technical solution of this utility model has the following beneficial technical effects: by reading the values of the flow meter, temperature sensor and pressure sensor, the product quality can be accurately controlled and improved. Attached Figure Description
[0006] Figure 1This is a schematic diagram of an electronic-grade germanium tetrafluoride reactor. Detailed Implementation
[0007] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.
[0008] like Figure 1 As shown, an electronic-grade germanium tetrafluoride reactor device is provided, comprising a reactor, a thermal oil heater, an oil tank, an oil pump, a collection tank, and a frequency converter. The reactor inlet is connected to a first valve and a second valve; the first valve is connected to a nitrogen inlet, and the second valve is connected to a fluorine inlet. The reactor outlet is connected to a fourth valve and a seventh valve; the fourth valve is connected to the collection tank. The thermal oil inlet of the reactor is connected to the oil pump, which is connected to the oil tank via a third valve. The oil tank is connected to the thermal oil heater via a fifth valve, and the thermal oil heater is connected to the thermal oil outlet of the reactor via a sixth valve. The oil pump is equipped with a frequency converter. A flow meter is installed after the first valve. The reactor is equipped with a first temperature sensor. The reactor outlet is equipped with a pressure sensor and a second temperature sensor. The oil tank is equipped with a third temperature sensor. The pressure sensor is used to detect the reactor outlet pressure, and the flow meter is used to measure the amount of fluorine gas flowing into the reactor. Adjusting the opening of the fluorine inlet regulating valve controls the fluorine gas flow rate and the intensity of the reaction between fluorine and germanium. The third thermometer is used to detect the temperature of the oil tank and control the heating oil temperature of the thermal oil heater to ensure the required temperature of the reactor; the first thermometer is used to detect the temperature of the reactor and, by controlling the frequency of the frequency converter, changes the speed of the oil supply pump, thereby controlling the amount of oil supplied and stabilizing the temperature of the reactor; the germanium tetrafluoride generated by the reactor is collected in a collection tank.
[0009] Open the second and seventh valves and purge with nitrogen.
[0010] Open valves three, five, and six to start the oil pump, allowing the heat transfer oil to circulate internally within the reactor. Under a preset inverter frequency, oil is supplied to the reactor, heating it. The instruments, based on the temperature reading from the first thermometer, adjust the inverter's output frequency, thereby changing the oil pump's speed and regulating the heat transfer oil flow rate to achieve the required reactor temperature of 200 degrees Celsius.
[0011] The reactor is loaded with germanium granules (99.9999% purity). Fluorine gas enters the reactor through the first valve and a flow meter. The opening of the first valve is adjusted based on the pressure reading from the pressure gauge, thus regulating the fluorine gas flow rate. At a high temperature (200 degrees Celsius), germanium and fluorine gas undergo a chemical reaction to produce germanium tetrafluoride. The fourth valve is then opened, and the gas is collected in a collection tank. The reactor outlet temperature is measured using a second thermometer.
[0012] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.
Claims
1. An electronic grade germanium tetrafluoride reactor apparatus, characterized by, The utility model relates to a kind of fluorine-nitrogen reaction device, including reactor, heat conducting oil heater, oil tank, oil pump, collection tank and frequency converter;The reactor gas inlet is connected with first valve and second valve, first valve is connected with nitrogen gas inlet, and second valve is connected with fluorine gas inlet;Reactor gas outlet is connected with fourth valve and seventh valve, and fourth valve is connected with collection tank;The heat conducting oil import of reactor is connected with oil pump, and oil pump is connected with oil tank by third valve, and oil tank is connected with heat conducting oil heater by fifth valve, and heat conducting oil heater is connected with the heat conducting oil export of reactor by sixth valve;The oil pump is provided with frequency converter;Flowmeter is arranged after the first valve;The reactor is provided with first temperature detector;Pressure gauge and second temperature detector are arranged in the reactor gas outlet;The oil tank is provided with third temperature detector.