Multi-magnification industrial lens with coaxial light

Abstract

The utility model discloses a multi-magnification industrial lens with coaxial light, which comprises an objective lens, a half-reflecting mirror, a first image mirror, a second image mirror, a first image sensor, a first light source, a third image mirror, a fourth image mirror, a second image sensor, a second light source and a reflecting element, a first light path is formed when the first light source emits light, and a second light path is formed when the second light source emits light. The reflection element can control on-off of the first light path and the second light path. According to the optical path system, the coaxial light half-reflecting mirror and the multiplying power switching half-reflecting mirror are combined into one reflecting element, so that the coaxial light and the multiplying power can be quickly switched, the reflection and transmission times of the light are reduced, the overall optical efficiency of the optical path system is improved, the light intensity received by the image sensor is improved, the imaging quality is improved, and the imaging quality is improved. Therefore, the imaging at different multiplying powers is clearer.

Description

Technical Field

[0001] This utility model belongs to the field of industrial lenses, and specifically relates to a multi-magnification industrial lens with coaxial light. Background Technology

[0002] Multi-magnification industrial lenses are optical components specifically designed for industrial inspection and imaging. Their primary function is to enable high-precision observation and measurement of object surfaces through various magnification levels. These lenses are widely used in semiconductor manufacturing, electronic component inspection, precision machining, and materials analysis, meeting diverse needs from macroscopic observation to microscopic detail. Adjusting the magnification allows for flexible image acquisition and more precise inspection.

[0003] High-efficiency multi-magnification industrial lenses with coaxial lighting combine a multi-magnification optical system with coaxial illumination technology. The role of coaxial illumination: By illuminating along the optical axis, coaxial light provides uniform, shadow-free illumination, making it particularly suitable for inspecting highly reflective surfaces, minute features, and complex textures. Integrating multi-magnification functionality with coaxial lighting reduces the complexity of the optical system, improving inspection efficiency and image quality. This design optimizes adaptability to surfaces of different scales and materials in industrial inspection processes, meeting the demands of high speed, high precision, and diverse application scenarios.

[0004] Currently, conventional industrial lenses with coaxial light and using beam splitters to achieve multiple magnification typically require two semi-reflective mirrors to separate and guide the light rays in their optical path design. While this optical system can achieve multiple magnification imaging and integrate coaxial light, it suffers from the following main problems:

[0005] Reduced optical efficiency: Because each semi-reflective mirror causes a loss of light intensity, the optical efficiency of the entire optical path system is significantly reduced. This loss is particularly noticeable under conditions of high magnification switching and high-brightness illumination, affecting image quality and overall detection performance.

[0006] Increased complexity: The design of multiple mirrors not only makes the optical path system more complex, but also places higher demands on the lens manufacturing process and assembly precision, thereby increasing costs and technical barriers.

[0007] Therefore, existing technologies cannot simultaneously meet the requirements of high efficiency and multi-functional integration, which provides room for improvement in the further research and development of high-efficiency multi-magnification industrial lenses with coaxial light. Summary of the Invention

[0008] The purpose of this invention is to provide a multi-magnification industrial lens with coaxial light. By integrating the half-reflector used for coaxial light and the half-reflectors used for the two magnification optical paths into one unit, one reflector is eliminated, thereby improving the optical efficiency of the optical path system and reducing the complexity of the optical path system.

[0009] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0010] A multi-magnification industrial lens with coaxial light includes an objective lens, a semi-reflective mirror, a first image mirror, a second image mirror, a first image sensor, a first light source, a third image mirror, a fourth image mirror, a second image sensor, a second light source, and a reflective element; when the first light source emits light, it forms a first optical path, and when the second light source emits light, it forms a second optical path; the reflective element can control the on / off state of the first and second optical paths.

[0011] The first optical path is as follows: The first light source emits a light beam, which is reflected by a reflective element, passes through a third image mirror, is reflected by a half-reflective mirror, passes through an objective lens, and illuminates the object under test. The light beam reflected by the object under test passes sequentially through the objective lens, the half-reflective mirror, the first image mirror, and the second image mirror, and enters the image sensor. The first image sensor is conjugate with the object under test.

[0012] The second optical path is as follows: the second light source emits a light beam, which is reflected by the reflective element and passes through the first image mirror, is projected through the half-reflective mirror, passes through the objective lens and illuminates the object to be measured. The light beam reflected by the object to be measured passes through the objective lens, is reflected by the half-reflective mirror, passes through the third and fourth image mirrors, and enters the second image sensor. The second image sensor is conjugate with the object to be measured.

[0013] By adopting the above technical solution, the coaxial light half-reflector is integrated with the half-reflectors used in the two magnification optical paths, using only a single reflective element to complete the coaxial light and magnification switching. Compared to traditional systems that require two half-reflectors, this reduces the number of light reflections and transmissions, improves the overall optical efficiency of the optical path system, increases the light intensity received by the image sensor, and thus improves image quality. The combined half-reflector reduces the number of components in the optical path, making the optical path system more compact and simpler, reducing the difficulty of installing and adjusting optical components, and lowering the risk of assembly errors. It enables rapid switching between the first and second optical paths, meeting the needs of multi-magnification industrial lenses for different working modes, supporting multi-magnification imaging. Users can obtain clear images at different magnifications as needed without additional complex adjustments.

[0014] Furthermore, the reflective element can switch between positions between the first and second image mirrors and between the third and fourth image mirrors. When the reflective element is between the third and fourth image mirrors, it connects to the first optical path; when the reflective element is between the first and second image mirrors, it connects to the second optical path.

[0015] By adopting the above technical solution and switching the position of the reflective element, the system can quickly switch between different optical paths as needed, thereby adapting to various industrial inspection requirements. Users can flexibly select different optical paths and magnifications according to specific application needs, enabling different operating modes and achieving optical paths required by different optical systems, supporting seamless conversion between high-magnification and low-magnification imaging. Switching the reflective element between different positions avoids the use of multiple independent mirrors or other optical elements, simplifying the optical system and reducing redundant components in the optical path.

[0016] Further configuration: the reflective element includes a first reflector and a second reflector. The first reflector is located between the third and fourth image mirrors and controls the on / off state of the first optical path. The second reflector is located between the first and second image mirrors and controls the on / off state of the second optical path.

[0017] By employing the above technical solution, and using a first and a second reflecting mirror, independent control of the first and second optical paths is achieved. Each reflecting mirror has a clear and independent function, enabling precise control of the optical path's on / off state without requiring additional adjustments to other optical components, thus improving the system's operational accuracy and stability. Each reflecting mirror controls the on / off state of its own optical path, making the function of the mirrors simpler and more efficient compared to traditional solutions using multiple complex components. In each optical path, the beam only needs to pass through its matching reflecting mirror, avoiding unnecessary optical path crossings or reflections and reducing complexity in the optical path. Furthermore, the independent control of the reflecting mirrors reduces unnecessary beam refraction, reflection, and transmission times in the system, contributing to improved optical efficiency and thus enhancing imaging effects.

[0018] In a further configuration, the reflective element is a glass plate or a prism.

[0019] By adopting the above technical solutions, the glass plate manufacturing process is simple and inexpensive, suitable for scenarios with low requirements for reflectivity, and its lightweight nature makes it suitable for miniaturized designs and applications sensitive to system weight. The prism has high reflection and refraction efficiency, effectively reducing light loss. Through precision machining, the prism provides a more stable optical path, suitable for high-precision imaging needs. The choice of material and type of reflective element has minimal impact on light transmission, further improving the stability of the optical system. By limiting the reflective element material, an appropriate solution can be selected based on the specific needs of the lens system, reducing the complexity caused by differences in material properties during assembly and debugging. The prism's structural design makes it easier to install and less susceptible to external environmental influences such as temperature changes or vibrations. After coating treatment, the glass plate and prism can be used long-term in various environments, exhibiting properties such as scratch resistance, dust resistance, or anti-reflection.

[0020] Furthermore, the semi-reflective mirror is a non-polarizing beam-splitting reflector.

[0021] By adopting the above technical solution, the reflection and transmission characteristics of the non-polarized beam splitter are independent of the polarization state of the light, achieving uniform optical splitting performance. In a coaxial optical path, regardless of the beam's polarization direction, the beam splitter maintains consistent transmittance and reflectivity, thereby minimizing light loss and improving the overall optical efficiency of the system. Because the non-polarized beam splitter treats light with consistent polarization, it avoids uneven image brightness and contrast caused by differences in polarization direction. This characteristic results in clearer images of the object under test and more accurate detail representation, making it suitable for high-precision industrial inspection needs. The non-polarized beam splitter can adapt to various light sources (such as lasers and LEDs) and different light propagation states, providing wider applicability. Maintaining consistent optical performance during multi-magnification switching or light source switching simplifies system design and makes debugging easier. Since the non-polarized beam splitter is unaffected by the light polarization direction, no special attention to the light polarization state is required during system assembly, simplifying calibration work.

[0022] Furthermore, the semi-reflective mirror is a polarizing beam-splitting mirror.

[0023] By employing the above technical solutions, polarizing beam splitters can efficiently split light according to its polarization state. They exhibit high transmission or high reflectivity for specific polarization directions, thus utilizing light source energy more effectively. When the polarization characteristics of certain light sources are significant, they can maximize light transmission efficiency and reduce light loss. Polarizing beam splitters offer controllable splitting ratios for beams with different polarization directions, allowing engineers to design more precise optical paths according to actual needs. In multi-magnification optical path systems, polarization characteristics can be used to distinguish different optical paths, avoiding interference between them and improving the stability and repeatability of the optical system. Polarizing beam splitting effectively filters stray light from non-target polarization directions, thereby reducing noise interference in the optical system. For industrial inspection scenarios, this characteristic can improve the signal-to-noise ratio of images, making the imaging of the object under test clearer and more reliable.

[0024] In a further configuration, a waveplate is placed between the objective lens and the object under test.

[0025] By employing the above technical solution, waveplates can alter the polarization state of light beams. By adjusting the phase difference of light (e.g., converting linearly polarized light into circularly polarized or elliptically polarized light), the polarization state of light reflected or transmitted through a polarizing beam splitter can be changed. In optical systems, different polarized light illuminating an object may produce different reflected images. Waveplates can convert polarized light into circularly polarized light, thus increasing compatibility for illuminating objects with different characteristics and for image acquisition.

[0026] Furthermore, the first, second, third, and fourth image mirrors are each a single lens or a combination of multiple lenses. One of the first and second image mirrors can perform its function, while the other can be removed; similarly, one of the third and fourth image mirrors can perform its function, while the other can be removed.

[0027] By adopting the above technical solution, and by setting the first image mirror, second image mirror, third image mirror and fourth image mirror as a combination of one or more lenses, the distortion and aberration of the image (such as spherical aberration, chromatic aberration, etc.) can be better controlled, thereby improving the clarity and accuracy of the image.

[0028] Further, the first light source includes a first light-emitting element and a first optical element, which are arranged sequentially along the direction of light propagation.

[0029] Furthermore, the second light source includes a second light-emitting element and a second optical element, which are arranged sequentially along the direction of light propagation.

[0030] By employing the above technical solutions, optical components can precisely adjust the beam shape emitted by the light source, enabling the light source to be more accurately focused onto the surface of the object under test or into the optical path system. Optical components typically include lenses, mirrors, and optical fibers, which effectively improve the output quality of the light source. This ensures that the output beam of the light source has good spatial distribution and focusing effect, thereby improving the optical efficiency of the system. By designing the light-emitting components and optical components independently and coordinating their operation, more precise control can be achieved for different types of light sources in the optical path. Optical components can effectively suppress light source fluctuations, enhance the stability of the light source, and reduce problems such as uneven light spot or energy fluctuations in the output light source. When high light source uniformity is required, it can significantly improve imaging quality.

[0031] Furthermore, both the first and second light-emitting elements are LED lights or other light-emitting components.

[0032] By adopting the above technical solutions, LED lights can provide high brightness with low power consumption, which is particularly important for the application of multi-magnification industrial lenses. The high energy efficiency of LED light sources means that less electrical energy is consumed for the same brightness, thereby reducing the energy consumption and heat dissipation requirements of the equipment. LEDs have high stability, especially during long-term continuous use, and can provide relatively stable light output, avoiding the performance degradation caused by overheating or lifespan issues of traditional light sources.

[0033] Furthermore, both the first optical element and the second optical element are lenses or other optical systems with adjustable beams.

[0034] By adopting the above technical solution, the lens, as an optical element, has a good focusing function, which can effectively adjust the shape and size of the beam and ensure that the beam can be accurately focused on the object to be measured.

[0035] In summary, this utility model has the following beneficial effects:

[0036] 1. This utility model combines a coaxial light half-reflector and a magnification switching half-reflector into a single reflective element, thereby achieving rapid switching between coaxial light and magnification, reducing the number of light reflections and transmissions, thus improving the overall optical efficiency of the optical path system, thereby increasing the light intensity received by the image sensor, improving the imaging quality, and making the imaging clearer at different magnifications.

[0037] 2. By merging the semi-reflective mirror, this utility model reduces the number of components in the optical path, making the optical path system more compact and simpler. It also reduces the difficulty of installing and debugging optical components, reduces the complexity of the optical system, reduces the risk of assembly errors, simplifies calibration work, and improves the stability and reliability of the system.

[0038] 3. This invention, by precisely adjusting the beam shape emitted by the light source and adjusting the position of the optical elements, enables the light source to be more accurately focused on the surface of the object under test, further improving the stability and optical efficiency of the optical system. The LED light source and lens or optical system ensure that the light source has high brightness, low power consumption, and stability, thereby improving image quality and optimizing energy efficiency. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 1;

[0040] Figure 2 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 2;

[0041] Figure 3 This is a schematic diagram of the first optical path in Embodiment 1;

[0042] Figure 4 This is a schematic diagram of the second optical path in Example 2;

[0043] Figure 5 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 3;

[0044] Figure 6 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 4;

[0045] Figure 7 This is a schematic diagram of the first optical path in Embodiment 3;

[0046] Figure 8 This is a schematic diagram of the second optical path in Example 4;

[0047] Figure 9 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 5;

[0048] Figure 10 This is a schematic diagram of the first optical path in Embodiment 5;

[0049] Figure 11 This is a schematic diagram of the second optical path in Example 5;

[0050] Figure 12 This is a schematic diagram of the structure of the multi-magnification industrial lens with coaxial light in Example 6;

[0051] Figure 13 This is a schematic diagram of the first optical path in Embodiment 6;

[0052] Figure 14 This is a schematic diagram of the second optical path in Example 6.

[0053] The attached figures are labeled as follows: 1. Object under test; 2. Objective lens; 3. Semi-reflecting mirror; 4-1. First image mirror; 4-2. Second image mirror; 5. First image sensor; 6. First light source; 6-1. First light-emitting element; 6-2. First optical element; 7-1. Third image mirror; 7-2. Fourth image mirror; 8. Second image sensor; 9. Second light source; 9-1. Second light-emitting element; 9-2. Second optical element; 10. Reflecting element; 10-1. First reflecting mirror; 10-2. Second reflecting mirror; 11. Wave plate. Detailed Implementation

[0054] The preferred embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0055] Example 1

[0056] like Figure 1 As shown, this embodiment of a multi-magnification industrial lens with coaxial light includes an objective lens 2, a semi-reflective mirror 3, a first image mirror 4-1, a second image mirror 4-2, a first image sensor 5, a first light source 6, a third image mirror 7-1, a fourth image mirror 7-2, a second image sensor 8, a second light source 9, and a reflective element 10. The reflective element 10 is located between the third image mirror 7-1 and the fourth image mirror 7-2, forming a first optical path.

[0057] The semi-reflecting mirror 3 is a polarizing beam-splitting mirror. A waveplate 11 is placed between the objective lens 2 and the object under test.

[0058] like Figure 3As shown, the first optical path in Embodiment 1 is as follows: A light beam is emitted from a first light source 6. The beam is reflected by a reflecting element 10, passes through a third image mirror 7-1, is reflected by a semi-reflecting mirror 3, passes through an objective lens 2, and then passes through a wave plate 11 to illuminate the object under test. The beam reflected from the object under test passes sequentially through the wave plate 11, objective lens 2, semi-reflecting mirror 3, first image mirror 4-1, and second image mirror 4-2, and enters the image sensor 5. The first image sensor 5 is conjugate with the object under test, thereby enabling it to capture a clear image. When either the first image mirror 4-1 or the second image mirror 4-2 can perform the required function, only the image mirror that can perform the required function is retained.

[0059] The reflective element 10 is a glass plate or a prism.

[0060] The third image mirror 7-1 and the fourth image mirror 7-2 are both a single lens or a combination of multiple lenses.

[0061] The first light source 6 includes a first light-emitting element 6-1 and a first optical element 6-2, which are arranged sequentially along the direction of light propagation. The second light source 9 includes a second light-emitting element 9-1 and a second optical element 9-2, which are also arranged sequentially along the direction of light propagation. Both the first light-emitting element 6-1 and the second light-emitting element 9-1 are LEDs or other light-emitting elements. Both the first optical element 6-2 and the second optical element 9-2 are lenses or other optical systems with adjustable beams.

[0062] The reflective element 10 can be a glass plate or a prism. Glass plates are suitable for small systems, have low manufacturing costs, and are suitable for general imaging needs. Prisms have superior optical performance, are suitable for high-precision applications, and their stability can be further improved through coating treatment.

[0063] The semi-reflective mirror 3 is a polarizing beam-splitting mirror that selectively transmits or reflects beams with specific polarization directions, thereby improving light energy utilization. The waveplate 11 is used in conjunction with the polarizing beam-splitting mirror to adjust the polarization state of the beam, thereby optimizing the polarization performance of the system, reducing interference fringes, and improving the clarity and uniformity of the image.

[0064] Both the first light source 6 and the second light source 9 include light-emitting elements and optical components: the light-emitting elements are LED lamps or other light-emitting elements, which have high brightness, low power consumption and high stability; the optical components, such as lenses, can adjust the beam shape, so that the light is uniformly focused on the surface of the object, thereby improving the optical efficiency of the system.

[0065] Example 2

[0066] like Figure 2 As shown, this embodiment of a multi-magnification industrial lens with coaxial light differs from Embodiment 1 in that the reflective element 10 is located between the first image mirror 4-1 and the second image mirror 4-2, forming a second optical path.

[0067] like Figure 4 As shown, the second optical path in Embodiment 2 is as follows: The second light source 9 emits a light beam, which is reflected by the reflecting element 10, passes through the first image mirror 4-1, is transmitted through the half-reflecting mirror 3, passes through the objective lens 2, and then passes through the wave plate 11 before illuminating the object under test. The light beam reflected by the object under test passes through the wave plate 11, then through the objective lens 2, is reflected by the half-reflecting mirror 3, passes through the third image mirror 7-1 and the fourth image mirror 7-2, and enters the second image sensor 8. The second image sensor 8 is conjugate with the object under test. When either the third image mirror 7-1 or the fourth image mirror 7-2 can perform the required function, only the image mirror that can perform the required function is retained.

[0068] The position of the reflective element 10 is adjusted. The reflective element 10 is positioned between the first image mirror 4-1 and the second image mirror 4-2 to reflect the light beam from the second light source 9. After adjusting the position of the reflective element 10, the optical path changes, and image detection at different magnifications can be achieved by switching the position of the reflective element 10.

[0069] The semi-reflective mirror 3 functions the same as in Embodiment 1, separating the propagation path of the light beam and allowing the beam to be transmitted or reflected at a certain ratio. The second light source 9 includes a second light-emitting element 9-1 and a second optical element 9-2, which can adjust the direction, divergence angle, or uniformity of the light beam to ensure that the light can uniformly cover the object under test. The second image sensor 8, by being conjugate with the object under test, can accurately acquire the image formed by the light reflected from the object. By optimizing the optical combination of the third image mirror 7-1 and the fourth image mirror 7-2, aberrations are reduced and image clarity is improved.

[0070] During use, the second light source 9 acts as the light source, emitting a highly stable light beam. The reflecting element 10 is switched to a position between the first image mirror 4-1 and the second image mirror 4-2, forming a second optical path. The light beam emitted by the second light source 9 passes through the reflecting element 10, the first image mirror 4-1, and the half-reflecting mirror 3, then through the objective lens 2, and finally through the wave plate 11 to illuminate the surface of the object under test 1. The light beam reflected by the object under test 1 passes through the wave plate 11, then through the objective lens 2, is reflected by the half-reflecting mirror 3, passes through the third image mirror 7-1 and the fourth image mirror 7-2, and finally enters the second image sensor 8. The second image sensor 8 converts the optical signal into an electrical signal for subsequent image analysis and processing.

[0071] Example 3

[0072] like Figure 5 As shown, this embodiment is a multi-magnification industrial lens with coaxial light. The difference from embodiment 1 is that the semi-reflective mirror 3 is a non-polarizing beam-splitting mirror, and no waveplate 11 is set between the objective lens 2 and the object to be measured.

[0073] like Figure 7As shown, the first optical path in Embodiment 3 is as follows: The first light source 6 emits a light beam, which is reflected by the reflective element 10, passes through the third image mirror 7-1, is reflected by the half-reflective mirror 3, passes through the objective lens 2, and illuminates the object under test. The light beam reflected by the object under test passes through the objective lens 2, the half-reflective mirror 3, the first image mirror 4-1, and the second image mirror 4-2 in sequence, and enters the image sensor 5. The first image sensor 5 is conjugate with the object under test, thereby enabling the capture of a clear image.

[0074] Example 4

[0075] like Figure 6 As shown, this embodiment is a multi-magnification industrial lens with coaxial light. The difference between this embodiment and embodiment 2 is that the semi-reflective mirror 3 is a non-polarizing beam-splitting mirror, and no waveplate 11 is set between the objective lens 2 and the object to be measured.

[0076] like Figure 8 As shown, the second optical path in Embodiment 4 is as follows: The second light source 9 emits a light beam, which is reflected by the reflective element 10 and passes through the first image mirror 4-1, is transmitted through the half-reflective mirror 3, passes through the objective lens 2 and illuminates the object to be measured. The light beam reflected by the object to be measured passes through the objective lens 2, is reflected by the half-reflective mirror 3, passes through the third image mirror 7-1 and the fourth image mirror 7-2, and enters the second image sensor 8; the second image sensor 8 is conjugate with the object to be measured.

[0077] During use, the second light source 9 acts as the light source, emitting a highly stable light beam. The reflective element 10 is switched to a position between the first image mirror 4-1 and the second image mirror 4-2, forming a second optical path. The light beam emitted by the second light source 9 passes through the reflective element 10, the first image mirror 4-1, and the half-reflecting mirror 3, and then passes through the objective lens 2 to finally illuminate the surface of the object under test 1. The light beam reflected by the object under test 1 passes through the objective lens 2, is reflected by the half-reflecting mirror 3, passes through the third image mirror 7-1 and the fourth image mirror 7-2, and finally enters the second image sensor 8. The second image sensor 8 converts the optical signal into an electrical signal for subsequent image analysis and processing.

[0078] Example 5

[0079] like Figure 9 As shown, this embodiment of a multi-magnification industrial lens with coaxial light differs from Embodiment 1 in that the reflecting element 10 includes a first reflecting mirror 10-1 and a second reflecting mirror 10-2. The first reflecting mirror 10-1 is located between the third image mirror 7-1 and the fourth image mirror 7-2, and controls the on / off state of the first optical path. The second reflecting mirror 10-2 is located between the first image mirror 7-1 and the second image mirror 7-2, and controls the on / off state of the second optical path. The first optical path is as follows: Figure 10 As shown, the second optical path is as follows Figure 11 As shown.

[0080] Example 6

[0081] like Figure 12 As shown, this embodiment of a multi-magnification industrial lens with coaxial light differs from embodiment 5 in that the semi-reflective mirror 3 is a non-polarizing beam-splitting mirror, and no waveplate 11 is placed between the objective lens 2 and the object to be measured. The first optical path is as follows: Figure 13 As shown, the second optical path is as follows Figure 14 As shown.

[0082] Embodiments 1 and 3 form a first optical path, with the light beam entering the first image sensor 5 through the first image mirror 4-1 and the second image mirror 4-2; Embodiments 2 and 4 form a second optical path, with the light beam mainly entering the second image sensor 8 through the third image mirror 7-1 and the fourth image mirror 7-2. Embodiments 2 and 4, by adjusting the optical path design and optical parameters, are more suitable for detection applications with low magnification or large field of view.

[0083] This invention allows for optical path switching by adjusting the position of the reflective element 10, meeting the needs of multi-magnification detection. Different optical paths can be adapted to different magnifications and field of view ranges, improving the applicability of the detection system. Optimization of the optical system and components minimizes light loss during propagation. It is suitable for various scenarios in industrial inspection, including high-magnification detail observation and low-magnification large-field-of-view detection.

[0084] The above-described embodiments are merely explanations of the present invention and are not intended to limit the present invention. After reading this specification, those skilled in the art can make modifications to the embodiments without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of the claims of the present invention.

Claims

1. A multi-magnification industrial lens with coaxial light, characterized in that, It includes an objective lens (2), a semi-reflecting mirror (3), a first image mirror (4-1), a second image mirror (4-2), a first image sensor (5), a first light source (6), a third image mirror (7-1), a fourth image mirror (7-2), a second image sensor (8), a second light source (9), and a reflective element (10). The first light source (6) forms a first optical path when it emits light, and the second light source (9) forms a second optical path when it emits light. The reflective element (10) can control the opening and closing of the first and second optical paths. The first optical path is as follows: the first light source (6) emits a light beam, which is reflected by the reflective element (10) and passes through the third image mirror (7-1), then reflected by the half-reflective mirror (3), and passes through the objective lens (2) to illuminate the object to be measured. The light beam reflected by the object to be measured passes through the objective lens (2), the half-reflective mirror (3), the first image mirror (4-1), and the second image mirror (4-2) in sequence, and enters the image sensor (5); the first image sensor (5) is conjugate with the object to be measured. The second optical path is as follows: the second light source (9) emits a light beam, which is reflected by the reflective element (10) and passes through the first image mirror (4-1), is projected by the half-reflective mirror (3), passes through the objective lens (2) and illuminates the object to be measured. The light beam reflected by the object to be measured passes through the objective lens (2), is reflected by the half-reflective mirror (3), passes through the third image mirror (7-1) and the fourth image mirror (7-2), and enters the second image sensor (8); the second image sensor (8) is conjugate with the object to be measured.

2. The multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The reflective element (10) can switch between the position between the first image mirror (4-1) and the second image mirror (4-2) and between the third image mirror (7-1) and the fourth image mirror (7-2). When the reflective element (10) is between the third image mirror (7-1) and the fourth image mirror (7-2), it connects to the first optical path. When the reflective element (10) is between the first image mirror (4-1) and the second image mirror (4-2), it connects to the second optical path.

3. A multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The reflecting element (10) includes a first reflecting mirror (10-1) and a second reflecting mirror (10-2). The first reflecting mirror (10-1) is located between the third image mirror (7-1) and the fourth image mirror (7-2). The first reflecting mirror (10-1) controls the opening and closing of the first optical path. The second reflecting mirror (10-2) is located between the first image mirror (4-1) and the second image mirror (4-2). The second reflecting mirror (10-2) controls the opening and closing of the second optical path.

4. A multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The reflective element (10) is a glass plate or a prism.

5. A multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The semi-reflective mirror (3) is a non-polarizing beam splitter.

6. A multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The semi-reflective mirror (3) is a polarizing beam-splitting mirror.

7. A multi-magnification industrial lens with coaxial light according to claim 6, characterized in that, A waveplate (11) is placed between the objective lens (2) and the object to be measured.

8. A multi-magnification industrial lens with coaxial light according to claim 1, characterized in that, The first image mirror (4-1), the second image mirror (4-2), the third image mirror (7-1), and the fourth image mirror (7-2) are all a single lens or a combination of multiple lenses.

9. A multi-magnification industrial lens with coaxial light according to any one of claims 1-8, characterized in that, The first light source (6) includes a first light-emitting element (6-1) and a first optical element (6-2), which are arranged sequentially along the direction of light propagation.

10. A multi-magnification industrial lens with coaxial light according to claim 9, characterized in that, The second light source (9) includes a second light-emitting element (9-1) and a second optical element (9-2), which are arranged sequentially along the direction of light propagation.

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