Corona discharge system

Abstract

The utility model provides a corona discharge system, which is used for processing a base material, and comprises a roller device and a corona discharge device, the corona discharge device is arranged above the roller device and is used for performing corona discharge operation on the base material positioned on the roller device; the adjusting mechanism is connected between the roller device and the corona discharge device and used for adjusting the distance between the corona discharge device and the roller device to meet a preset value after the corona discharge device moves to a preset position in the direction close to the roller device; the measuring mechanism is used for measuring the actual value of the adjusted distance between the corona discharge device and the roller device; wherein the actual value is used for being compared with a preset value. After the corona discharge device moves to the preset position, the corona discharge device and the roller device are not flush, the corona discharge effect of the electric field on the base material is further affected, the distance between the corona discharge device and the roller device is adjusted through the arrangement of the adjusting mechanism, the corona discharge device and the roller device are kept flush, and the electric field evenly acts on the base material.

Description

Technical Field

[0001] This application relates to the field of substrate processing technology, and in particular to a corona discharge system. Background Technology

[0002] In the process of substrate processing, corona discharge devices are usually used to change the surface properties of the substrate material. By treating the substrate with corona discharge, the chemical bonds of its molecules are broken and degraded, increasing the surface roughness and surface area. At the same time, ozone is generated to oxidize the molecules and produce highly polar groups, thereby improving the surface properties of the substrate.

[0003] In current applications, the corona discharge device is first installed above the rollers. The substrate is then passed between the two and placed on the rollers. The corona discharge device is then activated, moving it closer to the rollers to process the substrate. However, due to the heavy weight and low movement precision of the corona discharge device, it may become misaligned when it reaches the position above the rollers. For example, one end of the device may be higher than the other, resulting in inconsistent distances between the two ends and the rollers. This leads to uneven electric field forces on the substrate, which is detrimental to improving the surface properties of the substrate.

[0004] Therefore, how to maintain a constant distance between the corona discharge device and the roller is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] This application provides a corona discharge system to solve one or more technical problems existing in the prior art.

[0006] In the solution, a corona discharge system is used for processing a substrate, the corona discharge system comprising:

[0007] Roller assembly;

[0008] A corona discharge device is disposed above the roller assembly and is used to perform corona discharge operation on the substrate located on the roller assembly;

[0009] An adjustment mechanism, connected between the roller device and the corona discharge device, is used to adjust the distance between the corona discharge device and the roller device to meet a preset value after the corona discharge device moves to a preset position in a direction close to the roller device.

[0010] A measuring mechanism for measuring the actual value of the adjusted distance between the corona discharge device and the roller device;

[0011] The actual value is used to compare with the preset value.

[0012] Preferably, the adjusting mechanism includes a blocking member, a fixing member, and a buffer member. The blocking member is disposed on the side wall of the corona discharge device, and the fixing member is disposed on the side wall of the roller device for fixing the buffer member. The buffer member includes a body and a piston member disposed on the body.

[0013] When the corona discharge device reaches the preset position, the piston and the blocking member abut against each other to withstand the pressure applied by the corona discharge device.

[0014] Preferably, the piston is telescopic relative to the body.

[0015] Preferably, the adjustment mechanism further includes an adjustment member disposed on the body and connected to the piston member, for controlling the piston member to extend or retract from the body to adjust the distance between the corona discharge device and the roller device.

[0016] Preferably, the roller assembly includes at least two side plates and a roller disposed between the opposing side plates, the roller having conductive properties for supporting and guiding the transfer of the substrate.

[0017] Preferably, the corona discharge device includes a gaseous medium and an electrode located in the gaseous medium. The electrode extends circumferentially along the roller in a slightly curved structure and is located above the roller radially, for exciting molecules in the gaseous medium through corona discharge of an electric field to form corona plasma on the surface of the substrate.

[0018] Preferably, there are multiple electrodes, and different electrodes are arranged along the axial direction of the roller, with a preset distance maintained between adjacent electrodes.

[0019] Preferably, the corona discharge system further includes a displacement power device connected to the corona discharge device, which is used to drive the corona discharge device to move to the preset position along the direction close to the roller, or to reset to the initial position along the direction away from the roller.

[0020] Preferably, the displacement power device includes a cylinder and a connecting member, the cylinder is disposed on the side wall of the corona discharge device, and the first output shaft of the cylinder is connected to the side plate through the connecting member.

[0021] Preferably, the displacement power device includes a synchronous pulley, a motor, a slide rail, and a slider disposed on the slide rail. One side of the slider is connected to the side wall of the corona discharge device. The motor is indirectly connected to the slider through a plurality of the synchronous pulleys. The rotational motion of the second output shaft of the motor is converted into linear motion of the slider on the slide rail through the synchronous pulleys.

[0022] According to the specific embodiments provided in this application, the following technical effects are disclosed:

[0023] This application provides a corona discharge system for processing substrates. The corona discharge system includes: a roller assembly; a corona discharge device disposed above the roller assembly for performing corona discharge operations on the substrate located on the roller assembly; an adjustment mechanism connected between the roller assembly and the corona discharge device for adjusting the distance between the corona discharge device and the roller assembly to meet a preset value after the corona discharge device moves to a preset position along a direction close to the roller assembly; and a measuring mechanism for measuring the actual value of the adjusted distance between the corona discharge device and the roller assembly; wherein the actual value is compared with the preset value. After the corona discharge device moves to the preset position, the corona discharge device and the roller assembly may become uneven, which affects the corona discharge effect of the electric field on the substrate. By setting up the adjustment mechanism, the distance between the corona discharge device and the roller assembly is adjusted to keep them level, so that the electric field acts uniformly on the substrate. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a side view schematic diagram of the corona discharge system provided in the embodiments of this application;

[0026] Figure 2 This is a schematic diagram showing the relative positions between the electrode and the roller provided in an embodiment of this application.

[0027] Reference numerals: 10, roller assembly; 20, corona discharge device; 30, adjusting mechanism; 40, cylinder; 50, connecting piece; 100, side plate; 101, roller; 200, electrode; 301, blocking piece; 302, fixing piece; 303, buffer piece; 304, adjusting piece; 400, first output shaft; 3030, piston piece. Detailed Implementation

[0028] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0029] As described in the background art, in current applications, a corona discharge device is first installed above a roller, and the substrate is passed between the two and placed on the roller. Then, the corona discharge device is activated, moving it towards the roller to process the substrate. Because the corona discharge device is heavy and has low movement precision, it may become misaligned when it reaches the position above the roller. For example, one end of the device may be higher than the other, resulting in inconsistent distances between the two ends and the roller. This leads to uneven electric field forces on the substrate, which is detrimental to improving the surface properties of the substrate.

[0030] To address one or more of the aforementioned technical problems, this application provides a corona discharge system designed to balance the distance between the corona discharge device and the roller device, thereby maintaining a constant distance between the corona discharge device and the roller to more effectively improve the surface properties of the substrate.

[0031] refer to Figure 1 The diagram shows a side view of the corona discharge system. The corona discharge system in this design is used to process a substrate. The system includes: a roller assembly 10; a corona discharge device 20, positioned above the roller assembly 10, for performing corona discharge on the substrate (not shown) located on the roller assembly 10; and an adjustment mechanism 30 connected between the roller assembly 10 and the corona discharge device 20, for adjusting the distance between the corona discharge device 20 and the roller assembly 10 after the corona discharge device 20 moves to a preset position in a direction close to the roller assembly 10. The actual value is used to make it conform to the preset value; a measuring mechanism (not shown in the figure) is used to measure the actual value of the distance between the adjusted corona discharge device 20 and the roller device 10; wherein the actual value is used to compare with the preset value; a controller (not shown in the figure) is used to determine whether the actual value is equal to the preset value. If they are equal, the corona discharge device 20 is controlled to perform corona discharge operation on the substrate located on the roller device 10. If they are not equal, the adjusting mechanism 30 is controlled to continue to adjust the distance between the corona discharge device 20 and the roller device 10 until the actual value is equal to the preset value.

[0032] A substrate is placed between the roller device 10 and the corona discharge device 20. The roller device 10 holds the substrate and rotates during startup to guide and transfer it. Initially, there is a large distance between the corona discharge device 20 and the roller device 10. During startup, the corona discharge device 20 moves towards the roller device 10 and stops at a preset position. At the preset position, the electric field exerted by the corona discharge device 20 on the substrate is effective. However, the corona discharge device 20 and the roller device 10 may not be aligned. For example, after reaching the preset position, one end of the corona discharge device 20 may be higher than the other, resulting in inconsistent distances from both ends to the roller device 10. This leads to an uneven distribution of the electric field on the substrate, with a strong electric field in closer areas and a weak electric field in farther areas. Consequently, the electric force on the substrate is uneven, resulting in imperfect processing and hindering the improvement of the substrate's surface properties. Therefore, an adjustment mechanism 30 is set between the corona discharge device 20 and the roller device 10. By adjusting the distance between the corona discharge device 20 and the roller device 10, the two are kept flush and the distance is kept at a preset value so that the electric field is uniformly applied to the substrate, thereby improving and enhancing the surface properties of the substrate.

[0033] In some embodiments of this application, the measuring mechanism includes a radar sensor that measures the actual value of the distance between the adjusted corona discharge device 20 and the roller device 10, and feeds the actual value back to the controller, which receives the actual value and compares it with a preset value.

[0034] In some embodiments of this application, the measuring mechanism includes a feeler gauge or a gap gauge. The operator places the feeler gauge or gap gauge between the adjusted corona discharge device 20 and the roller device 10 to obtain the actual value of the gap. The actual value is recorded and input into the computer, and the host controller compares the actual value with the preset value.

[0035] Preferably, refer to Figure 1 The side view of the corona discharge system shown indicates that the roller device 10 includes at least two side plates 100 and a roller 101 disposed between the opposing side plates 100. The roller 101 has conductive properties and is used to support and guide the transfer substrate.

[0036] Since the roller 101 is conductive, the electric field of the corona discharge device 20 acts on the roller 101, causing the temperature of the roller 101 to rise. When the corona discharge device 20 and the roller device 10 are not aligned, the electric field is uneven, resulting in temperature differences between different parts of the roller 101. The hotter parts cause the substrate film to expand due to heat, while the colder parts cause the substrate film to tighten. This results in inconsistent surface tension of the substrate, which easily leads to wrinkles. Therefore, by setting the adjustment mechanism 30, the distance between the corona discharge device 20 and the roller device 10 is adjusted to keep them aligned, so that the electric field acts evenly on the roller 101, making the roller 101 heat evenly. As a result, the substrate will not have temperature differences, and the surface will not have wrinkles, thus improving the reliability of substrate processing.

[0037] In some embodiments of this application, the roller device 10 consists of two side plates 100 and a roller 101 between the side plates 100, and the rotation direction of the roller 101 is consistent with the running direction of the production line.

[0038] In some embodiments of this application, the corona discharge system further includes a traction device, which is located in front of the roller 101 along the production line running direction and is used to traction the substrate to move along the production line running direction.

[0039] In some embodiments of this application, roller 101 is a guide roller.

[0040] Preferably, refer to Figure 1 The side view of the corona discharge system shown indicates that the adjustment mechanism 30 includes a blocking member 301, a fixing member 302, and a buffer member 303. The blocking member 301 is disposed on the side wall of the corona discharge device 20, and the fixing member 302 is disposed on the side wall of the roller device 10 for fixing the buffer member 303. The buffer member 303 includes a body and a piston member 3030 disposed on the body. When the corona discharge device 20 reaches the preset position, the piston member 3030 and the blocking member 301 abut against each other to withstand the pressure applied by the corona discharge device 20.

[0041] When the corona discharge device 20 is not activated, i.e., when it is in the initial position, there is a certain distance between the blocking member 301 and the piston member 3030 at the end away from the main body. When the corona discharge device 20 is activated and moves toward the roller 101 to the preset position, the piston member 3030 and the blocking member 301 abut against each other to withstand the pressure applied by the corona discharge device 20.

[0042] In some embodiments of this application, there are multiple adjustment mechanisms 30, with at least two adjustment mechanisms 30 provided on the same side of the corona discharge device 20 and the roller device 10.

[0043] In some embodiments of this application, the corona discharge system is provided with four adjustment mechanisms 30. The volume of the corona discharge device 20 is smaller than that of the roller device 10. The adjustment mechanisms 30 are located near the four end corners of the corona discharge device 20. In a side view of the system, the blocking member 301 is located at the end corner of the housing of the corona discharge device 20. The buffer member 303 is located on the side plate 100 of the roller device 10 in a direction away from the blocking member 301. The fixing member 302 is arranged perpendicular to the buffer member 303 to fix the buffer member 303 to the side plate 100. The piston member 3030 extends from the buffer member 303. When the corona discharge device 20 moves toward the roller device 10 to a preset position, the device that drives the corona discharge device 20 to move stops running, so that the corona discharge device 20 is held in the preset position. The piston member 3030 and the blocking member 301 abut against each other and remain relatively stationary. The piston member 3030 bears the pressure of the corona discharge device 20.

[0044] Preferably, the piston 3030 can extend or retract relative to the body.

[0045] With the buffer 303 and the blocking 301 both fixed, the piston 3030 is configured to be telescopic, which can change the distance between the corona discharge device 20 and the roller device 10.

[0046] Preferably, refer to Figure 1 The side view of the corona discharge system shown shows that the adjustment mechanism 30 also includes an adjustment member 304, which is located on the main body and connected to the piston member 3030. The adjustment member 304 is used to control the piston member 3030 to extend or retract from the main body to adjust the distance between the corona discharge device 20 and the roller device 10.

[0047] In some embodiments of this application, by adjusting the four adjusting members 304 located at the corona discharge device 20, the piston members 3030 at the corresponding positions are extended or retracted from the body, so that the lengths of the four piston members 3030 are kept consistent, thereby achieving the goal of keeping the corona discharge device and the roller device 10 flush.

[0048] Preferably, refer to Figure 1 The schematic diagram of the corona discharge system shown shows that the corona discharge device 20 includes a gas medium (not shown) and an electrode 200 located in the gas medium. The electrode 200 extends circumferentially along the roller 101 in a slightly curved structure and is located above the roller 101 radially. It is used to excite the molecules in the gas medium through corona discharge of the electric field to form corona plasma on the surface of the substrate.

[0049] The inferior arc structure of electrode 200 is matched with the cylindrical structure of roller 101, which improves the uniformity of electric field action and the coverage of electric field.

[0050] In some embodiments of this application, a high voltage is applied by electrode 200 to form a high electric field between electrode 200 and roller 101. When the electric field strength reaches a certain value, electrons in the gas medium are extracted to form an electron cloud, forming an electron cloud region and a positive ion region. Due to the Coulomb force, the electron cloud and positive ions collide to generate secondary electrons. The secondary electrons then collide with the gas medium to form more electrons and positive ions, thereby forming a corona layer on the surface of the substrate. The surface properties of the substrate are improved by using the corona layer.

[0051] Preferably, there are multiple electrodes 200, and different electrodes 200 are arranged and distributed along the axial direction of roller 101, with a preset distance maintained between adjacent electrodes 200.

[0052] In some embodiments of this application, reference is made to Figure 2 The diagram shows the relative positions of the electrodes and rollers. The number of electrodes 200 is set to 5. At least one substrate can be set between each electrode 200 and the roller 101 to process multiple substrates.

[0053] Preferably, the corona discharge system further includes a displacement power device, which is connected to the corona discharge device 20 and is used to drive the corona discharge device 20 to move to a preset position in the direction close to the roller 101, or to reset to the initial position in the direction away from the roller 101.

[0054] In some embodiments of this application, reference is made to Figure 1 The side view of the corona discharge system shown includes a displacement power device comprising a cylinder 40 and a connector 50. The cylinder 40 is located on the side wall of the corona discharge device 20, and the first output shaft 400 of the cylinder 40 is connected to the side plate 100 via the connector 50.

[0055] The main body of the cylinder 40 is fixed to the side wall of the corona discharge device 20. The first output shaft 400 extends along the direction from the corona discharge device 20 to the roller device 10 and is fixed to the side plate 100 by the connector 50. When the cylinder 40 is started, the first output shaft 400 reciprocates to move the corona discharge device 20 toward or away from the roller device 10.

[0056] In some embodiments of this application, the displacement power device includes a synchronous pulley, a motor, a slide rail, and a slider (all shown in the figure) disposed on the slide rail. One side of the slider is connected to the side wall of the corona discharge device 20. The motor is indirectly connected to the slider through several synchronous pulleys. The rotational motion of the second output shaft of the motor is converted into the linear motion of the slider on the slide rail through the synchronous pulleys.

[0057] The slide rail is arranged along the direction from the corona discharge device 20 to the roller device 10. The motor can be located on the side plate 100 of the roller device 10 or the side wall of the corona discharge device 20. The synchronous pulley can also be located on the side plate 100 of the roller device 10 or the side wall of the corona discharge device 20. The transmission belt passes between different synchronous pulleys. The motor is connected to the slider through several different synchronous pulleys. When the second output shaft of the motor rotates in the first direction, the slider rises along the slide rail so that the corona discharge device 20 rises synchronously. When the second output shaft of the motor rotates in the second direction, the slider descends along the slide rail so that the corona discharge device 20 descends synchronously.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0060] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A corona discharge system for processing substrates, characterized in that, The corona discharge system includes: Roller assembly (10); A corona discharge device (20) is disposed above the roller device (10) for performing corona discharge operation on the substrate located on the roller device (10); An adjustment mechanism (30) is connected between the roller device (10) and the corona discharge device (20) for adjusting the distance between the corona discharge device (20) and the roller device (10) to meet a preset value after the corona discharge device (20) moves to a preset position in a direction close to the roller device (10). A measuring mechanism is used to measure the actual value of the adjusted distance between the corona discharge device (20) and the roller device (10); The actual value is used to compare with the preset value.

2. The corona discharge system according to claim 1, characterized in that, The adjustment mechanism (30) includes a blocking member (301), a fixing member (302), and a buffer member (303). The blocking member (301) is disposed on the side wall of the corona discharge device (20), and the fixing member (302) is disposed on the side wall of the roller device (10) for fixing the buffer member (303). The buffer member (303) includes a body and a piston member (3030) disposed on the body. When the corona discharge device (20) reaches the preset position, the piston (3030) and the blocking member (301) abut against each other to withstand the pressure applied by the corona discharge device (20).

3. The corona discharge system according to claim 2, characterized in that, The piston (3030) can extend and retract relative to the body.

4. The corona discharge system according to claim 3, characterized in that, The adjustment mechanism (30) further includes an adjustment member (304), which is disposed on the body and connected to the piston member (3030) for controlling the piston member (3030) to extend or retract from the body to adjust the distance between the corona discharge device (20) and the roller device (10).

5. The corona discharge system according to any one of claims 1 to 4, characterized in that, The roller assembly (10) includes at least two side plates (100) and a roller (101) disposed between the opposing side plates (100), the roller (101) having conductive properties for supporting and guiding the transfer of the substrate.

6. The corona discharge system according to claim 5, characterized in that, The corona discharge device (20) includes a gas medium and an electrode (200) located in the gas medium. The electrode (200) extends circumferentially along the roller (101) in a slightly curved structure and is located above the roller (101) radially. It is used to excite the molecules in the gas medium by corona discharge through an electric field to form a corona plasma on the surface of the substrate.

7. The corona discharge system according to claim 6, characterized in that, The number of electrodes (200) is multiple, and different electrodes (200) are arranged and distributed along the axial direction of the roller, with a preset distance maintained between adjacent electrodes (200).

8. The corona discharge system according to claim 5, characterized in that, The corona discharge system further includes a displacement power device, which is connected to the corona discharge device (20) and is used to drive the corona discharge device (20) to move to the preset position in the direction close to the roller (101), or to reset to the initial position in the direction away from the roller (101).

9. The corona discharge system according to claim 8, characterized in that, The displacement power device includes a cylinder (40) and a connector (50). The cylinder (40) is located on the side wall of the corona discharge device (20). The first output shaft (400) of the cylinder (40) is connected to the side plate (100) through the connector (50).

10. The corona discharge system according to claim 8, characterized in that, The displacement power device includes a synchronous pulley, a motor, a slide rail, and a slider disposed on the slide rail. One side of the slider is connected to the side wall of the corona discharge device (20). The motor is indirectly connected to the slider through several synchronous pulleys. The rotational motion of the second output shaft of the motor is converted into the linear motion of the slider on the slide rail through the synchronous pulleys.

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