Pump-valve integrated miniature vacuum pump

Abstract

The utility model provides a pump-valve integrated miniature vacuum pump, which comprises a pump body, a vacuum pump, a vacuum pump, a vacuum pump, a vacuum pump, a pump valve and a vacuum pump, and is characterized in that the pump body is provided with a fluid inlet, a vacuum port and a fluid outlet; the pumping component or / and the pump body form a pump cavity, the fluid inlet is in fluid communication with the pump cavity and forms an inflow channel, and the pump cavity is in fluid communication with the fluid outlet and forms an outflow channel. A power part; the back pressure mechanism is arranged on the outflow channel and comprises a back pressure part, a back pressure section located on the outflow channel is formed between the pump cavity and the back pressure part, and the back pressure part is constructed to be capable of maintaining the fluid pressure of the back pressure section when the pumping component acts; the valve mechanism comprises a vacuum valve, and the vacuum valve is provided with a shut-off position for shutting off fluid communication between the fluid inlet and the vacuum port and a communication position for allowing fluid communication between the fluid inlet and the vacuum port; wherein the vacuum valve is in fluid communication with the back pressure section, and when the pumping component acts, the vacuum valve can be switched to the turn-off position from the communication position and maintained at the turn-off position under the action of the fluid pressure of the back pressure section.

Description

Technical Field

[0001] This utility model relates to the field of micro fluid pump technology, and in particular to a micro vacuum pump that integrates a pump and valve. Background Technology

[0002] There is a type of miniature vacuum pump that integrates a pump and valve, meaning that a vacuum valve capable of changing the direction of fluid flow is integrated into the miniature vacuum pump. This type of miniature vacuum pump is commonly used in devices that require periodic changes in the direction of fluid flow, such as breast pumps and massage chairs.

[0003] Chinese utility model patent application No. 202310943696.0 discloses a miniature vacuum pump and valve integrated machine, which includes a pump body 1, a pump cover 2 having a fluid inlet 211, a fluid outlet 221 and a vent 231, a diaphragm having a pump chamber, and a vacuum valve 23 disposed within the pump cover 2. The fluid inlet 211, the pump chamber and the fluid outlet 221 are sequentially fluidly connected, the vent 231 is fluidly connected to the fluid inlet 221, and the vacuum valve 23 can selectively close the vent 231 or block the fluid path between the pump chamber and the fluid outlet 221.

[0004] Typically, the fluid inlet 211 of this integrated machine is sealed to a deformable airbag. When the integrated machine starts, the pump chamber pressure rises and pushes the vacuum valve 23 upward, closing the vent 231. Fluid flows from the fluid inlet 211 to the fluid outlet 221, and the airbag contracts due to the decrease in internal pressure. When the integrated machine stops, the pump chamber pressure drops, the vacuum valve 23 returns to its original position and opens the vent 231. Fluid flows back from the vent 231 to the fluid inlet 221, and the airbag expands due to the increase in internal pressure.

[0005] However, in actual use, during the initial startup of the all-in-one machine, the fluid pressure rises and opens the vacuum valve 23, allowing fluid flow between the pump chamber and the fluid outlet 221, and the fluid pressure in the pump chamber begins to drop. Subsequently, after the fluid pressure drops to a certain level, the vacuum valve 23 descends under the action of elastic force and shuts off the fluid connection between the pump chamber and the fluid outlet 221, and the fluid pressure in the pump chamber begins to rise again. As a result, the vacuum valve 23 of the all-in-one machine exhibits a constantly rising and falling oscillating motion, resulting in unstable fluid discharge and a loud valve-slapping noise, leading to a poor user experience. Utility Model Content

[0006] To address the aforementioned technical problems, the purpose of this utility model is to provide a miniature vacuum pump in which the vacuum valve can maintain fluid communication between the fluid inlet and the vacuum port when the pumping component is working.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a miniature vacuum pump integrating a pump and valve, comprising: a pump body having a fluid inlet for fluid entry, a vacuum port for fluid entry, and a fluid outlet for fluid outflow, wherein the fluid inlet is fluidly connected to the vacuum port; a pumping component installed within the pump body, wherein the pumping component and / or the pump body form a pump chamber, the fluid inlet being fluidly connected to the pump chamber and forming an inflow channel, the pump chamber being fluidly connected to the fluid outlet and forming an outflow channel, and a valve restricting unidirectional fluid movement is disposed on the inflow channel, the pump chamber, and / or the outflow channel; a power component for driving the pumping component; and a back pressure unit. The device includes a back pressure member disposed on the outflow channel, a back pressure section formed between the pump chamber and the back pressure member on the outflow channel, the back pressure member being configured to maintain the fluid pressure of the back pressure section when the pumping component is actuated; and a valve mechanism including a vacuum valve having a closed position that shuts off fluid communication between the fluid inlet and the vacuum port and an open position that allows fluid communication between the fluid inlet and the vacuum port; wherein the vacuum valve is fluidly connected to the back pressure section, and when the pumping component is actuated, the vacuum valve can switch from the open position to the closed position and remain in the closed position under the action of the fluid pressure of the back pressure section.

[0008] In the above technical solution, preferably, the back pressure component is a valve that is fixedly installed on the outflow channel and has an opening pressure.

[0009] In the preferred embodiment described above, and even more preferably, the back pressure mechanism further includes a back pressure valve seat fixedly installed on the outflow channel, the back pressure valve seat having a plurality of openings that fluidly communicate with the back pressure section. Even more preferably, the back pressure member is configured as a diaphragm valve that curves radially inward and toward the back pressure valve seat, the back pressure member being annular; when the back pressure member is closed, the back pressure member and the back pressure valve seat together define an annular back pressure chamber, the plurality of openings being fluidly connected to the back pressure chamber.

[0010] In the preferred embodiment described above, and even more preferably, the back pressure valve seat is provided with a pressure relief hole that simultaneously connects the back pressure section and the fluid outlet, the pressure relief hole being independent of the back pressure chamber; when the back pressure component is closed, the fluid in the back pressure section can flow to the fluid outlet through the pressure relief hole. Further, the inner diameter of the pressure relief hole is located in the range of 0.2-0.6 mm.

[0011] In the preferred embodiment described above, and even more preferably, the back pressure mechanism further includes a flow-blocking element located between the back pressure valve seat and the fluid outlet, wherein the flow-blocking element is a porous structure that allows fluid to pass through. Even more preferably, the flow-blocking element is installed on the side of the back pressure element opposite to the back pressure valve seat and limits the maximum opening of the back pressure element.

[0012] In the above preferred embodiment, it is further preferred that the back pressure member is composed of a closable multi-lobed elastic sheet.

[0013] In the above technical solution, preferably, the back pressure member is a porous structure that allows fluid to pass through, and the back pressure member is fixedly installed on the outflow channel.

[0014] In the above technical solution, preferably, the back pressure mechanism further includes a support base, and a micro-pressure reduction channel is formed between the back pressure component and the support base.

[0015] In the above technical solution, preferably, the miniature vacuum pump is a diaphragm vacuum pump. More preferably, the pump body includes, from bottom to top, a motor base, a diaphragm base, a lower valve seat, an upper valve seat, and a pump cover. The motor base defines a transmission cavity, and the miniature vacuum pump further includes a transmission component arranged within the transmission cavity for driving the connection between the power component and the pumping component.

[0016] In the preferred embodiment described above, and even more preferably, the fluid inlet, the transmission chamber, and the pump chamber are sequentially fluidly connected to form the inflow channel.

[0017] In the above preferred embodiment, more preferably, the back pressure section is an exhaust chamber formed between the upper valve seat and the lower valve seat. Even more preferably, the pump cover and the upper valve seat together form a vacuum chamber, the vacuum valve is arranged within the vacuum chamber and divides the vacuum chamber into an independent upper chamber and a lower chamber, the upper chamber being fluidly connected to both the fluid inlet and the vacuum port, and the lower chamber being fluidly connected to the exhaust chamber.

[0018] In the preferred embodiment described above, and even more preferably, the miniature vacuum pump further includes a diaphragm made of flexible material, the diaphragm being clamped between the upper valve seat and the pump cover, and the vacuum valve and the back pressure component being integrated onto the diaphragm.

[0019] Compared to existing technologies, the miniature vacuum pump provided by this invention maintains the fluid pressure in the back pressure section at a constant value without fluctuation due to the back pressure component during pumping operation. Therefore, the vacuum valve, which switches to the off position under the influence of the back pressure section fluid pressure, will not experience oscillating motion. Attached Figure Description

[0020] Figure 1 A schematic diagram of the structure of the miniature vacuum pump according to the first embodiment of this utility model;

[0021] Figure 2 The diagram shows the structure of several embodiments of the back pressure mechanism provided by this utility model.

[0022] Figure 3 A perspective view of the miniature vacuum pump according to the second embodiment of this utility model;

[0023] Figure 4 for Figure 3 A top view of the miniature vacuum pump shown;

[0024] Figure 5 for Figure 4 The cross-sectional view of the miniature vacuum pump shown is obtained along the AA section line.

[0025] Figure 6 for Figure 5 A magnified view of a portion of the image;

[0026] Figure 7 for Figure 3 A 3D view of the motor mount of the miniature vacuum pump shown.

[0027] Figure 8 for Figure 3 A three-dimensional view of the diaphragm seat of the miniature vacuum pump shown.

[0028] Figure 9 for Figure 3 A three-dimensional view of the diaphragm component of the miniature vacuum pump shown.

[0029] Figure 10 Figure 3 A three-dimensional view of the lower valve seat of the miniature vacuum pump shown.

[0030] Figure 11 for Figure 3 A three-dimensional view of the upper valve seat of the miniature vacuum pump shown.

[0031] Figure 12 for Figure 3 The top view of the upper valve seat of the miniature vacuum pump shown.

[0032] Figure 13 for Figure 3 A three-dimensional view of the diaphragm component of the miniature vacuum pump shown.

[0033] Figure 14 for Figure 3 The three-dimensional pump cover of the miniature vacuum pump shown Figure 1 ;

[0034] Figure 15 for Figure 3 The three-dimensional pump cover of the miniature vacuum pump shown Figure 2 .

[0035] The image is labeled as follows:

[0036] 100. Miniature vacuum pump; 200. Miniature vacuum pump;

[0037] 1. Pump body; 11. Fluid inlet; 12. Vacuum port; 13. Fluid outlet; 14. Vacuum chamber; 15. Back pressure section; 16. Pressure reduction section;

[0038] 2. Pumping component; 21. Pump chamber; 22. Bell-shaped bladder; 23. Skirt; 24. Second front through hole; 25. Second rear through hole;

[0039] 3. Power components;

[0040] 4. Vacuum valve;

[0041] 51. Back pressure component; 52. Opening; 53. Back pressure valve seat; 54. Flow resistance component;

[0042] 6. Transmission components;

[0043] 71. Intake chamber; 72. Exhaust chamber;

[0044] 10; Motor mount; 101. Transmission chamber; 102. Shaft hole; 103. Bolt hole;

[0045] 20. Diaphragm seat; 201. Mounting hole; 202. First front through hole; 203. First rear through hole;

[0046] 30. Lower valve seat; 301. Exhaust seat; 302. Intake seat; 303. Exhaust port; 304. Intake port; 305. Third front through hole; 306. Third rear through hole;

[0047] 40. Upper valve seat; 401. Through hole; 402. Groove; 403. Boss; 404. Pressure relief hole;

[0048] 50. Pump cover; 501. Air nozzle; 502. Connecting port;

[0049] 60. Diaphragm. Detailed Implementation

[0050] To explain in detail the technical content, structural features, achieved objectives and effects of this application, the technical solutions in the embodiments of this application will be described below with reference to the accompanying drawings.

[0051] In this application, spatial relative terms such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side” (e.g., as in a “sidewall”) are used to describe the relationship between one element and another (other) element as shown in the accompanying drawings. Spatial relative terms are intended to include different orientations of the device in use, operation, and / or manufacture other than those depicted in the drawings. For example, if the device in the drawings is flipped, an element described as “below” or “under” another element or feature would then be positioned “above” said other element or feature. Thus, the exemplary term “below” can include both above and below orientations. Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or in other orientations), thus interpreting the spatial relative descriptive terms used herein accordingly.

[0052] In this application, the term "fluid connectivity" used to describe the relative relationship between two fluid spaces (such as cavities, flows, or holes) means that there is a fluid path between the two fluid spaces that allows fluid to flow from one fluid space to the other. The two fluid spaces can be directly connected or connected through several fluid spaces. It should be understood that the description of a physical object being fluidly connected to another fluid space (or physical object) in this application is a brief description of the fluid connectivity between the space where the physical object is located (on one side) and another fluid space (or the space where the physical object is located).

[0053] In this application, the term "independent" used to describe the relative relationship between two fluid spaces means that the two fluid spaces are not directly connected, but does not exclude the possibility that they are connected through several fluid spaces.

[0054] This utility model provides a miniature vacuum pump with integrated pump and valve, which aims to solve the technical problem of continuous oscillation of the vacuum valve during the operation of such vacuum pumps in the prior art, so as to achieve at least one of the technical effects of stable exhaust and reduced noise.

[0055] Specifically, see Figure 1This illustration shows a miniature vacuum pump 100 according to a first embodiment of the present invention. The miniature vacuum pump 100 includes a pump body 1, a valve mechanism disposed inside the pump body 1 for switching the fluid flow direction, a back pressure mechanism arranged within the pump body 1, a pumping component 2 for pumping fluid, and a driving component 3 for driving the pumping component 2. It should be noted that the valve mechanism and back pressure mechanism provided by the present invention can undoubtedly be applied to diaphragm type, electromagnetic type, axial flow type, flexible impeller type, etc. (the main difference between these types of miniature pumps lies in the types of pumping components and power components). Therefore, the specific type of miniature vacuum pump does not limit the scope of protection of this invention.

[0056] The pump body 1 has a fluid inlet 11 for fluid to enter the pump body 1, a vacuum port 12 for fluid to enter the pump body 1, and a fluid outlet 13 for fluid to leave the pump body 1. A pumping component 2 is arranged inside the pump body 1, and a pump chamber 21 is formed inside the pumping component 2 or between the pumping component 2 and the pump body 1. The fluid inlet 11 is in fluid communication with the vacuum port 12. The fluid inlet 11 is in fluid communication with the pump chamber 21, forming an inflow channel (not shown in the figure), and the pump chamber 21 is in fluid communication with the fluid outlet 13, forming an outflow channel. Typically, valves restricting unidirectional fluid movement are installed on the inflow channel, outflow channel, and / or the pump chamber. Figure 1 (Not shown).

[0057] A vacuum chamber 14 for housing a valve mechanism is also formed within the pump body 1. The valve mechanism includes a vacuum valve 4 installed within the vacuum chamber 14. The vacuum valve 4 divides the vacuum chamber 14 into an independent upper chamber (not shown in the figure) and a lower chamber (not shown in the figure). The fluid inlet 11, the upper chamber, and the vacuum port 12 are sequentially fluidly connected, and the lower chamber is fluidly connected to the pump chamber 21. The vacuum valve 4 has a closed position that shuts off the fluid connection between the fluid inlet 11 and the vacuum port 12, and a connected position that allows the fluid inlet 11 and the vacuum port 12 to communicate (e.g., ...). Figure 1 , Figure 6 (Position), and can switch between the above-mentioned off position and connected position.

[0058] The fluid inlet 11 of the miniature vacuum pump 100 is typically sealed with an air bladder. When the miniature vacuum pump 100 is operating, the power unit 3 drives the pumping unit 2 to pump fluid. The fluid pressure in the pump chamber 21 rises, forcing the vacuum valve 4 to switch to the off position, thus shutting off the fluid connection between the fluid inlet 11 and the vacuum port 12. After entering the pump body 1 through the fluid inlet 11, the fluid in the air bladder passes through the inflow channel, the pump chamber 21, the outflow channel, and the fluid outlet 13, and is finally discharged from the miniature vacuum pump 100, causing the pressure inside the air bladder to drop.

[0059] After the miniature vacuum pump 100 stops working, valve 4 is reset to the connected position under the action of atmospheric pressure, its own elastic force, and / or a reset component (not shown in the figure), and the vacuum port 12 and fluid inlet 11 are restored to fluid communication. External fluid enters the air bladder after passing through the vacuum port 12 and fluid inlet 11, causing the pressure inside the air bladder to rise and expand outward. Thus, the periodic contraction and expansion of the air bladder can be achieved through the periodic operation of the miniature vacuum pump 100.

[0060] Combination Figure 2 The back pressure mechanism includes a back pressure member 51 disposed on the outflow channel, which divides the outflow channel into a back pressure section 15 extending from the pump chamber 21 to the back pressure member 51 and a pressure-reducing section 16 extending from the back pressure member 51 to the fluid outlet 13. The back pressure member 51 is configured to maintain the air pressure in the back pressure section 15 at a certain range higher than the air pressure in the fluid outlet 13 in a manner that can generate an opening pressure in the back pressure section or increase the resistance of the outflow channel. In other embodiments, the back pressure member may also be directly disposed at the fluid outlet, i.e., the design of the pressure-reducing section is omitted.

[0061] The lower chamber of vacuum chamber 14 is in fluid communication with back pressure section 15. When the miniature vacuum pump 100 is operating, vacuum valve 4 is switched from the connected position to the closed position by the fluid pressure of back pressure section 15. Due to the action of the back pressure mechanism, when the miniature vacuum pump 100 is operating, the pressure drop in back pressure section 15 does not occur as in the prior art, but is maintained at a relatively high level. Therefore, vacuum valve 4 also does not exhibit the continuous oscillation as in the prior art, but remains in the closed position.

[0062] Furthermore, in diaphragm-type and electromagnetic-type miniature vacuum pumps, the pumping components periodically draw in and discharge fluid. Consequently, periodic air ripples are generated in the outlet channel of existing miniature vacuum pumps, which are a major source of noise. The back pressure mechanism provided in this embodiment maintains a stable fluid pressure in the back pressure section, thereby eliminating the aforementioned air ripple generation and reducing the exhaust noise of the miniature vacuum pump 100.

[0063] Understandably, the vacuum chamber 14 described above is only for the convenience of arranging the valve mechanism. In other embodiments, the vacuum chamber can be omitted, and the vacuum valve can be fixed by directly mounting it onto the outflow channel (meaning it is fixedly mounted on the physical object forming the fluid channel). As long as the vacuum valve can be subjected to the fluid pressure of the back pressure section to switch from the connected position to the closed position and maintain the closed position, the specific structure and installation method of the valve mechanism do not limit the scope of protection of this utility model.

[0064] Figure 2Examples of several possible back pressure mechanisms provided by this invention are shown. For ease of explanation, the various embodiments are distinguished below by adding English letters after the corresponding component labels.

[0065] like Figure 2 As shown in (a), the back pressure mechanism includes a back pressure member 51a made of flexible material and a back pressure valve seat 53a with an opening 52a. The back pressure member 51a is configured as a diaphragm valve that is fixedly mounted on the exhaust passage and can selectively close the opening 52a. When the fluid pressure in the back pressure section 15 is higher than the opening pressure of the diaphragm valve (i.e., the valve is opened after exceeding this pressure), the back pressure member 51a opens the opening 52a, and the fluid flows through the flow port (not shown in the figure) of the back pressure member 51a to the fluid outlet 13.

[0066] like Figure 2 As shown in (b), the back pressure mechanism includes a back pressure member 51b and a back pressure valve seat 53b with an opening 52b. The back pressure member 51b is configured to have a metal plate valve fixedly mounted on the exhaust passage and having a constant elastic force. When the fluid pressure in the back pressure section 15 is higher than the opening pressure of the metal plate valve, the back pressure member 51b opens the opening 52b, and the fluid flows to the fluid outlet 13.

[0067] like Figure 2 As shown in (c), the back pressure mechanism includes a back pressure member 51c, which is composed of multiple flexible blades fixedly installed on the exhaust channel and capable of closing (meaning capable of closing the fluid channel) (closed state as shown in the figure). When the fluid in the back pressure section 15 exceeds the opening pressure of the back pressure member 51c, the back pressure member 51c is opened, and a gap is formed between the aforementioned multiple flexible blades to allow fluid flow, and the fluid flows to the fluid outlet 13.

[0068] Understandably, in the three embodiments described above, the back pressure component 51 is a valve with a certain opening pressure. Only after the air pressure in the back pressure section 15 exceeds the opening pressure can the fluid flow to the fluid outlet 13. Thus, the back pressure component 51 can maintain the fluid pressure in the back pressure section 15 at least at the opening pressure of the back pressure component 51.

[0069] Continue reading Figure 2 ,like Figure 2 As shown in (d), the back pressure mechanism includes a back pressure member 51d and a support 54d with an opening 52d. The back pressure member 51d is configured as a porous structure that allows fluid to pass through. When the micro vacuum pump 100 is in operation, the fluid flows to the fluid outlet 13 after passing through the opening 52d and the back pressure member 51d.

[0070] like Figure 2As shown in (e), the back pressure mechanism includes a back pressure member 51e with a clearance fit to the wall of the outflow channel and a support seat 54e with an opening 52e. A micro-pressure reduction channel 55e is formed between the back pressure member 51e and the back pressure valve seat 54e. The aforementioned micro-pressure reduction channel 55e can be formed directly by providing a rough contact surface on the back pressure member 51e and / or the back pressure valve seat 54e, or it can be formed by opening a tiny flow channel. When the micro vacuum pump 100 is operating, the fluid flows to the fluid outlet 13 after passing through the opening 52e and the micro-pressure reduction channel 55e.

[0071] Understandably, in both embodiments described above, the back pressure mechanism increases the friction resistance of the fluid at this location (i.e., increases the pressure drop of the fluid at this location) through the back pressure member 51 and / or the support 54, thereby maintaining the back pressure section 15 at a certain fluid pressure. Furthermore, a small fluid channel can be formed between the two back pressure members 51 and / or the outflow channel, allowing for multiple reflections of noise, thus effectively reducing noise.

[0072] See Figure 3-5 The illustration shows a miniature vacuum pump 200, which is an embodiment of the specific application of the aforementioned miniature vacuum pump 100 provided by this utility model in a diaphragm miniature pump. To avoid redundancy, structures with the same function will not be described again, and the labeling of the previous embodiment will continue to be used.

[0073] The pump body 1 of the miniature vacuum pump 200 includes a motor seat 10, a diaphragm seat 20, a lower valve seat 30, an upper valve seat 40, and a pump cover 50 arranged sequentially from bottom to top. The motor seat 10, the diaphragm seat 20, the lower valve seat 30, the upper valve seat 40, and the pump cover 50 are firmly fixed together by a number of fastening bolts (not shown in the figure).

[0074] Combination Figure 7 The motor housing 10 defines a transmission cavity 101 with an upper opening, and the diaphragm housing 20 closes the upper opening of the transmission cavity 101. The miniature vacuum pump 200 also includes a transmission component 6 disposed within the transmission cavity 101, which is used to realize the transmission connection between the power component 3 and the pumping component 2.

[0075] The power component 3 of the miniature vacuum pump 200 is an electric motor, which has a motor housing (not shown in the figure) and an output shaft (not shown in the figure) protruding outward relative to the motor housing. The bottom of the motor base 10 has a shaft hole 102 for the output shaft to pass through and several bolt holes 103 for fastening bolts to pass through. The fastening bolts pass through the bolt holes 103 and are threaded onto the motor housing to fix the power component 3 to the motor base 10. The output shaft of the power component 3 passes through the shaft hole 102 and is connected to the transmission component 6.

[0076] See Figure 5 , Figure 8 and Figure 9The pumping component 2 of the miniature vacuum pump 200 is a diaphragm component, which is clamped between the diaphragm seat 20 and the lower valve seat 30. The pumping component 2 has a plurality of bell-shaped bladders 22 and a skirt 23 connecting the bell-shaped bladders 22 into one piece. The pump chamber 21 is formed on the bell-shaped bladders 22. The diaphragm seat 20 has mounting holes 201 for placing the bell-shaped bladders 22, a first front through hole 202 for fluid communication transmission chamber 101, and a plurality of first rear through holes 203 for fluid communication transmission chamber 101. The mounting holes 201, the first front through holes 202, and each of the first rear through holes 203 all axially penetrate the diaphragm seat 20.

[0077] The pumping component 2 is also provided with a second front through hole 24 that connects to the first front through hole 202 and a second rear through hole 25 that connects to each of the second rear through holes 203 respectively. The second front through hole 24 and each of the second rear through holes 25 are axially connected to the pumping component 2.

[0078] Continue reading Figure 5 and Figure 10 The lower valve seat 30 is mounted on the upper side of the pumping component 2 and covers each pump chamber 21. The lower valve seat 30 is provided with an exhaust seat 301 for placing an exhaust valve (not shown in the figure) and several intake seats 302 for placing an intake valve (not shown in the figure). The lower valve seat 30 is also provided with an exhaust hole 303 that is fluidly connected to each pump chamber 21 and arranged near the exhaust seat 301, an intake hole 304 that is fluidly connected to each pump chamber 21 and arranged near the intake seat 302, a third front through hole 305 that is fluidly connected to the second front through hole 24, and a third rear through hole 306 that is fluidly connected to each second rear through hole 25.

[0079] Combination Figure 6 , Figure 11 and Figure 12 The upper valve seat 40 and the lower valve seat 30 together define an independent air inlet chamber 71, an exhaust chamber 72, and a side chamber (not shown in the figure). The fluid inlet 11, side chamber, third front through hole 305, second front through hole 24, first front through hole 202, transmission chamber 101, first rear through hole 203, second rear through hole 25, third rear through hole 306, air inlet chamber 71, and each air inlet hole 304 of the micro vacuum pump 200 are sequentially fluidly connected and constitute the inflow channel of the micro vacuum pump 200. This fluid channel extends the fluid path through the transmission chamber 101 and uses the transmission chamber 101 to reduce pressure, which helps to reduce the suction noise of the micro vacuum pump 200.

[0080] Continue reading Figure 5 and Figure 14-15 An air nozzle 501 is formed on the pump cover 50 to facilitate connection to an external air bag or pipe. A fluid inlet 11 is integrated on the outer end of the air nozzle 501, while a vacuum port 12 and a fluid outlet 13 are directly opened on the pump cover 50.

[0081] Combination Figure 6 In this embodiment, the vacuum chamber 14 is defined by the pump cover 50 and the upper valve seat 40. The vacuum port 12 is directly connected to the vacuum chamber 14, and the nozzle 501 has a communication port 502 that directly connects to the vacuum chamber 14. The vacuum valve 4 has a plunger portion (not shown in the figure) that can close the communication port 502, a deformable deformation portion (not shown in the figure), and a mounting portion (not shown in the figure) that is clamped between the pump cover 50 and the upper valve seat 40. The plunger portion, deformation portion, and mounting portion are integrally formed. When the vacuum valve 4 is in the closed position, its plunger portion closes the communication port 502, thereby cutting off the fluid communication between the air inlet 11 and the vacuum port 12; when the vacuum valve 4 is in the connected position, the plunger portion disengages from the communication port 502, and the fluid communication between the air inlet 11 and the vacuum port 12 is restored.

[0082] Combination Figure 11 The upper valve cover 40 has a through hole 401 that allows fluid communication between the lower chamber of the vacuum chamber 14 and the exhaust chamber 72. The back pressure valve seat 53 of the micro vacuum pump 200 is formed on the upper valve seat 40. This back pressure valve seat 53 also has an annular groove 402 and a boss 403 located inside the groove 402. The openings 52 are directly connected to the groove 402. It can be understood that the exhaust chamber 72 of the micro vacuum pump 200 is the back pressure section of the micro vacuum pump 200.

[0083] The back pressure member 51 of the miniature vacuum pump 200 is an annular valve fixedly mounted on the exhaust channel. The back pressure member 51 is made of a flexible material and is configured to bend radially inward toward the back pressure valve seat 53. When the back pressure member 51 is closed, the free end of the back pressure member 51 contacts the boss 403, forming an annular back pressure cavity (not shown in the figure) between the back pressure member 51 and the back pressure valve seat 53. The opening 52 is in fluid communication with this back pressure cavity. Understandably, the groove 402 forms part of the back pressure cavity.

[0084] Compared to Figure 2 The various valves provided, and the back pressure component 51 provided with the miniature vacuum pump 200, offer the advantage of stable airflow at small openings. Furthermore, Figure 2When the fluid flow rate of the various valves provided by the miniature vacuum pump 200 is low, due to differences in back pressure and wall thickness at different points, extremely narrow gaps inevitably form between the valve body and the valve seat at certain locations when the valve opening is small. These extremely narrow gaps are the main cause of the whistling sound produced by this type of vacuum valve. The back pressure component 51 provided by the miniature vacuum pump 200 is actually a ring-shaped curved diaphragm with a central hole, without any other complex structure. Therefore, the back pressure component 51 is easy to manufacture and its wall thickness can be well controlled. Consequently, when the fluid flow rate of the miniature vacuum pump 200 is low, the opening of the back pressure component 51 is consistent in all radial directions (due to the same back pressure and small manufacturing errors in wall thickness), preventing extremely narrow gaps at certain points and effectively suppressing the whistling sound.

[0085] Further, see Figure 6 The aforementioned back pressure mechanism has the following technical problem: After the pumping component 2 stops working, the back pressure component 51 closes, and the fluid in the lower chamber of the vacuum chamber 14 and the exhaust chamber 72 is blocked by the back pressure component 51. Under the combined action of the fluid pressure difference and the restoring force of the vacuum valve 4 from the closed position to the open position (such as the elastic force of the vacuum valve 4 itself, the return spring, magnetic force, etc.), the fluid slowly deflates. Therefore, this back pressure mechanism makes the speed at which the vacuum valve 4 returns from the closed position to the open position slow, that is, the response speed of the vacuum valve 4 decreases.

[0086] Therefore, in combination Figure 11-12 The back pressure valve seat 53 is also provided with a pressure relief hole 404 that simultaneously connects the exhaust chamber 72 and the fluid outlet 13. This pressure relief hole 404 is independent of the aforementioned back pressure chamber. When the back pressure member 51 is closed, the pressure relief hole 404 is not covered by the back pressure member 51 (i.e., the pressure relief hole 404 is still in fluid connection with the exhaust port). When the pumping component 2 stops operating, the vacuum valve 4 switches from the closed position back to the open position, and the residual fluid in the lower chamber of its vacuum chamber 14 and the exhaust chamber 72 reaches the exhaust port 13 through the pressure relief hole 404.

[0087] The aforementioned pressure relief hole 404 provides a fluid path to the exhaust port 13 in the lower chamber of the vacuum chamber 14 when the back pressure member 51 is closed, thus improving the response speed of the vacuum valve 4 from the closed position back to the open position. Because the pressure relief hole 404 is a fine orifice with a pressure-reducing effect (such as...), Figure 2 (e) The micro-pressure reduction channel 55e) ensures that the back pressure mechanism can maintain the fluid pressure in the exhaust chamber 72 when the pumping component 2 is in operation. According to actual tests, the inner diameter of the pressure relief hole 404 can be selected from any value between 0.2-0.6 mm.

[0088] Furthermore, the back pressure mechanism of the miniature vacuum pump 200 also includes a flow resistance element 54 disposed between the back pressure element 51 and the outlet 13. The flow resistance element 54 is fixedly mounted on the exhaust channel and is configured as a porous structure that allows fluid to pass through.

[0089] Furthermore, in order to prevent the back pressure component 51 of the micro vacuum pump 200 from bending in the opposite direction under the action of fluid pressure, the aforementioned flow resistance component 54 is placed on the upper side of the back pressure component 51 and limits the maximum opening of the back pressure component 51.

[0090] Furthermore, combined Figure 13 The miniature vacuum pump 200 is also equipped with a diaphragm 60 that is clamped between the pump cover 50 and the upper valve seat 40. The vacuum valve 4 and the back pressure component 51 are both integrated on the diaphragm 60 to reduce the number of parts and assembly cost of the miniature vacuum pump 200.

[0091] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be construed as limiting the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit of this application should be included within the scope of protection of this application.

Claims

1. A micro vacuum pump of a pump-valve integrated type, characterized by comprising: The utility model relates to a micro vacuum pump, comprising: a pump body having a fluid inlet, a vacuum port and a fluid outlet, the fluid inlet being in fluid communication with the vacuum port; a pumping component installed in the pump body, the pumping component and / or the pump body forming a pump cavity, the fluid inlet being in fluid communication with the pump cavity and forming an inflow channel, the pump cavity being in fluid communication with the fluid outlet and forming an outflow channel, the inflow channel, the pump cavity or / and the outflow channel being provided with a valve for limiting the one-way movement of fluid; a power component for driving the pumping component; a back pressure mechanism provided on the outflow channel and comprising a back pressure element, a back pressure section being formed between the pump cavity and the back pressure element on the outflow channel, the back pressure element being configured to maintain the fluid pressure of the back pressure section when the pumping component is in operation; a valve mechanism comprising a vacuum valve having a closed position for closing the fluid communication between the fluid inlet and the vacuum port and an open position for allowing the fluid communication between the fluid inlet and the vacuum port; wherein the vacuum valve is in fluid communication with the back pressure section, and the vacuum valve can be switched from the open position to the closed position and maintained in the closed position under the action of the fluid pressure of the back pressure section when the pumping component is in operation. The back pressure element is a valve having an opening pressure and being fixedly installed on the outflow channel.

2. The micropump of claim 1, wherein The back pressure mechanism further comprises a back pressure valve seat fixedly installed on the outflow channel, and a plurality of openings are formed in the back pressure valve seat and in fluid communication with the back pressure section.

3. The micropump of claim 2, wherein, The back pressure element is a diaphragm valve bent radially inward and toward the back pressure valve seat, and the back pressure element is annular; when the back pressure element is closed, the back pressure element and the back pressure valve seat together define an annular back pressure cavity, and the plurality of openings are in fluid communication with the back pressure cavity.

4. The micropump of claim 3, wherein A relief hole is formed in the back pressure valve seat and in fluid communication with the back pressure section and the fluid outlet, and the relief hole is independent of the back pressure cavity; when the back pressure element is closed, the fluid in the back pressure section can flow to the fluid outlet through the relief hole.

5. The micropump of claim 4, wherein, The inner diameter of the relief hole is in the range of 0.2-0.6 mm.

6. The micropump of claim 5, wherein, The back pressure mechanism further comprises a flow resistance element between the back pressure valve seat and the fluid outlet, and the flow resistance element is a porous structure allowing fluid to pass through.

7. The micropump of claim 4, wherein, The flow resistance element is installed on the side of the back pressure element away from the back pressure valve seat and defines the maximum opening of the back pressure element.

8. The micropump of claim 7, wherein, The back pressure element is composed of a plurality of elastic petals that can be closed.

9. The micropump of claim 2, wherein, The back pressure element is a porous structure allowing fluid to pass through, and the back pressure element is fixedly installed on the outflow channel.

10. The micropump of claim 1, wherein, The back pressure mechanism further comprises a support seat, and a micro pressure reduction channel is formed between the back pressure element and the support seat.

11. The micropump of claim 1, wherein, The micro vacuum pump is a diaphragm type vacuum pump.

12. The micropump according to any one of claims 1 to 11, characterized in that ​ 13. The micropump of claim 12, wherein, The pump body comprises, from bottom to top, a motor base, a diaphragm base, a lower valve base, an upper valve base and a pump cover, the motor base defines a transmission cavity, and the micro vacuum pump further comprises a transmission component arranged in the transmission cavity and used for achieving transmission connection between the power component and the pumping component.

14. The micropump of claim 13, wherein, The fluid inlet, the transmission cavity and the pump cavity are sequentially fluidly connected and form the inflow channel.

15. The micropump of claim 13, wherein, The back pressure section is an exhaust cavity formed between the upper valve base and the lower valve base.

16. The micropump of claim 15, wherein, The pump cover and the upper valve base jointly form a vacuum cavity, the vacuum valve is arranged in the vacuum cavity and separates the vacuum cavity into an upper chamber and a lower chamber which are independent of each other, the upper chamber is in fluid communication with the fluid inlet and the vacuum port at the same time, and the lower chamber is in fluid communication with the exhaust cavity.

17. The micropump of claim 13, wherein, Further comprising a diaphragm made of flexible material, the diaphragm is clamped between the upper valve base and the pump cover, and the vacuum valve and the back pressure component are both integrated on the diaphragm.

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