Micron-sized objective table based on servo system

Abstract

The utility model discloses a micron-sized objective table based on a servo system, which belongs to the technical field of precise motion control and comprises a shell, a rotating component is mounted on the shell, a Y-axis motion component and an X-axis motion component are mounted below the shell in a crossed manner, and an electrical control box is mounted on one side of the X-axis motion component. The shell provides powerful physical support for the system, so that all moving components stably operate on the objective table. Through high-precision mechanical connection and precise sliding rail design, vibration and errors can be effectively avoided, and the stability and reliability of the objective table in long-time operation are ensured. The X-axis and Y-axis independent movement system enables the objective table to flexibly and independently move on two planes through cross installation and servo control. By means of the design, the objective table can be rapidly adjusted to the needed position in the operation process, the overall working efficiency is improved, and delay and errors caused by manual adjustment are reduced.

Description

Technical Field

[0001] This utility model relates to the field of precision motion control technology, and more specifically, to a micron-level stage based on a servo system. Background Technology

[0002] In modern precision manufacturing, microscopic observation, nanotechnology, photolithography, and other fields, micrometer-level positioning and motion control have become a fundamental requirement. While traditional stage systems can meet basic motion control requirements to some extent with technological advancements, they still have many shortcomings in terms of high precision, stability, and flexibility. Especially under the demand for micrometer-level precision control, existing technologies generally struggle to provide sufficient accuracy and reliability.

[0003] Currently available micron-level stages typically rely on traditional electric or stepper motor drive systems for precise motion control, but these systems often face the following problems:

[0004] 1) Unstable accuracy: Under high-precision requirements, existing mechanical connections and drive methods are prone to vibration or errors, resulting in insufficient positioning accuracy.

[0005] 2) Slow response speed: Traditional motion systems often have a slow response speed due to their reliance on manual adjustment or bulky drive mechanisms, making it difficult to meet the needs of rapid adjustment.

[0006] 3) Control system complexity: Existing control systems are usually quite complex, not intuitive to operate, and require a lot of manual intervention, resulting in low operating efficiency.

[0007] 4) Limitations on the range of motion: Existing stages mostly rely on a single direction or a relatively simple motion mode, making it difficult to achieve high-precision bidirectional independent motion.

[0008] To address the above issues, the market urgently needs a micron-level stage system that offers higher precision, greater stability, greater flexibility, and higher efficiency, applicable to fields such as microscopy, nanotechnology, and other high-precision control. To solve these technical challenges, this invention provides a servo-based micron-level stage. By employing high-precision servo motor control and a sophisticated mechanical structure design, it effectively overcomes the shortcomings of existing technologies, providing higher positioning accuracy, flexible bidirectional motion, stable rotation control, and a simplified user interface, thereby improving overall work efficiency and system reliability. Utility Model Content

[0009] 1. Technical problems to be solved

[0010] In view of the problems existing in the prior art, the purpose of this utility model is to provide a micron-level stage based on a servo system, which can provide higher positioning accuracy, flexible bidirectional motion, stable rotation control and simplified operation interface, thereby improving overall work efficiency and system reliability.

[0011] 2. Technical Solution

[0012] To solve the above problems, the present invention adopts the following technical solution.

[0013] A micrometer-scale stage based on a servo system includes a housing, on which a rotating component is mounted, and a Y-axis motion component and an X-axis motion component are cross-mounted below the housing. An electrical control box is mounted on one side of the X-axis motion component.

[0014] Based on the above features, the rotating assembly includes a tray and a turntable mounted from top to bottom.

[0015] In some embodiments, a side plate is installed on the bottom of one side of the Y-axis motion assembly, the Y-axis motion assembly includes a base plate, and guide rails are symmetrically arranged on both sides of the base plate along the direction of the Y-axis motion assembly. A gear set is installed on the other side of the Y-axis motion assembly, and an angle sensor is installed on the gear set.

[0016] Based on the above features, a connecting plate is installed in the middle of the Y-axis motion assembly, a sliding plate is installed on the guide rail, and a guide groove is provided on the sliding plate.

[0017] In some embodiments, a motor is provided on one side of the rotating assembly, and the motor and the rotating assembly are in the same plane. A drive wheel and a driven wheel are provided inside the housing, and the drive wheel and the driven wheel are connected together by a belt.

[0018] Based on the above features, the drive wheel is driven by a motor, and the motor is coaxially connected to the drive wheel, and the rotating component is coaxially connected to the driven wheel.

[0019] 3. Beneficial effects

[0020] Compared with existing technologies, the advantages of this utility model are:

[0021] 1) The housing 101 provides strong physical support for the system, enabling all moving components to operate smoothly on the stage. Through high-precision mechanical connections (such as the connection between the tray 103 and the turntable 102) and precise slide rail design (such as the slide plate 12 and the guide rail 6), vibration and errors can be effectively avoided, ensuring the stability and reliability of the stage during long-term operation.

[0022] 2) The independent motion system for the X and Y axes, through cross-mounting and servo control, allows the stage to move flexibly and independently on two planes. This design enables the stage to be quickly adjusted to the required position during operation, improving overall work efficiency and reducing delays and errors caused by manual adjustments.

[0023] 3) The rotating assembly 1 adopts a belt drive system consisting of a motor 104, a drive wheel 105, and a driven wheel 107. The stable rotation of the turntable is achieved through the precise control of the servo motor. This drive system can achieve low-noise, smooth, and high-precision rotation control, making it particularly suitable for use in high-precision applications and ensuring the stability of the object during the rotation of the stage.

[0024] 4) Electrical control box 2 integrates the control functions of the entire system, enabling operators to make precise adjustments to the platform through a simple control interface. The electrical control system has a high degree of automation, reducing the complexity of manual operation, improving work efficiency, and making system operation simpler and more intuitive. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a micron-level stage based on a servo system according to this utility model;

[0026] Figure 2 This is a schematic diagram of the X / Y axis motion assembly of this utility model;

[0027] Figure 3 This is a schematic diagram of the first structure of the rotating component of this utility model;

[0028] Figure 4 This is a schematic diagram of the second structure of the rotating component of this utility model.

[0029] Explanation of the labels in the diagram:

[0030] 1. Rotating assembly; 101. Housing; 102. Turntable; 103. Support plate; 104. Motor; 105. Drive wheel; 106. Belt; 107. Driven wheel; 2. Electrical control box; 3. X-axis motion assembly; 4. Y-axis motion assembly; 5. Side plate; 6. Guide rail; 7. Base plate; 8. Gear set; 9. Angle sensor; 10. Servo motor; 11. Guide groove; 12. Slide plate; 13. Connecting plate. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0032] Example 1:

[0033] Please see Figures 1-4 A micron-level stage based on a servo system includes a housing 101, a rotating assembly 1 mounted on the housing 101, a Y-axis motion assembly and an X-axis motion assembly crosswise mounted below the housing 101, an electrical control box 2 mounted on one side of the X-axis motion assembly, and the rotating assembly 1 includes a tray 103 and a turntable 102 mounted from top to bottom.

[0034] In some embodiments, a side plate 5 is installed on the bottom of one side of the Y-axis motion assembly. The Y-axis motion assembly includes a base plate 7, and guide rails 6 are symmetrically arranged on both sides of the base plate 7 along the direction of the Y-axis motion assembly. A gear set 8 is installed on the other side of the Y-axis motion assembly, and an angle sensor is installed on the gear set 8. A connecting plate 13 is installed in the middle of the Y-axis motion assembly, and a slide plate 12 is installed on the guide rails 6. The slide plate 12 is provided with a guide groove 11.

[0035] In some embodiments, a motor 104 is provided on one side of the rotating assembly 1, and the motor 104 and the rotating assembly 1 are in the same plane. A drive wheel 105 and a driven wheel 107 are provided inside the housing 101, and the drive wheel 105 and the driven wheel 107 are connected together by a belt 106. The drive wheel 105 is driven by the motor 104, and the motor 104 and the drive wheel 105 are coaxially connected. The rotating assembly 1 and the driven wheel 107 are coaxially connected.

[0036] Working Principle: One of the core components of the stage is the housing 101, which provides physical support for the entire system. The housing design ensures that all moving parts can operate smoothly within it. A rotating assembly 1 is mounted on the housing, which achieves rotational movement through the cooperation of a support plate 103 and a turntable 102. The support plate 103 is located above the rotating assembly, and its main function is to support the object on the stage. A high-precision mechanical connection between the support plate 103 and the turntable 102 ensures the stability of the object. The turntable-support connection provides a stable platform during rotation. The turntable is precisely controlled by the rotational power generated by the drive system. The rotating assembly 1 is equipped with a motor 104, which is coaxially connected to the turntable 102, directly providing rotational drive. The drive wheel 105 and driven wheel 107 connected by a belt 106 allow the rotating assembly to rotate under precise control. The motor transmits power through the belt drive system, ensuring smooth and high-precision rotation of the turntable.

[0037] The positioning accuracy and range of motion of the stage mainly depend on the X-axis and Y-axis motion components. The combination of these two motion components enables high-precision linear motion of the stage.

[0038] The Y-axis motion assembly consists of a series of key components that ensure the precise movement of the stage in the Y-axis direction: The base plate 7 serves as the fundamental support platform for the Y-axis motion assembly, through which other components are connected. Guide rails 6 on both sides of the base plate ensure smooth linear motion. The guide rails 6 provide stable support in the Y-axis direction, while the slide plate 12 slides along the guide rails, ensuring precise displacement in the Y-axis direction. Guide grooves 11 on the slide plate further aid in smooth movement. The gear set 8 provides mechanical motion drive and is equipped with an angle sensor for real-time monitoring of the Y-axis motion accuracy. The angle sensor accurately reflects angle changes, ensuring the system maintains micron-level precision during adjustments.

[0039] The X-axis motion assembly is similar to the Y-axis assembly, but its movement is along a horizontal plane. The cross-mounting of the X-axis and Y-axis assemblies allows the stage to move independently on both planes, thus achieving precise control at any position.

[0040] The electrical control box 2 is located on the side of the housing and is connected to the X-axis motion assembly. The control box is responsible for the electrical control of the entire stage system and manages the working status of each moving component. Through the cooperation of servo motors and sensors, the stage can achieve extremely high-precision positioning and motion control. The servo motor 104 receives commands through the electrical control box 2 and provides the necessary torque and speed according to system requirements to drive the rotary and motion assemblies. The rotary assembly, X-axis assembly, Y-axis assembly, and electrical control work together to enable the stage to perform positioning and adjustment tasks within a micrometer-level accuracy range.

[0041] The above description is merely a preferred embodiment of this utility model; however, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be included within the protection scope of this utility model.

Claims

1. A micro stage based on a servo system, comprising a housing (101), characterized in that: The shell (101) is provided with a rotating assembly (1), the lower cross of the shell (101) is provided with a Y-axis movement assembly (4) and an X-axis movement assembly (3), one side of the X-axis movement assembly (3) is provided with an electrical control box (2).

2. The micrometer stage based on a servo system according to claim 1, characterized in that: The rotating assembly (1) comprises a tray (103) and a rotating disc (102) installed from top to bottom.

3. The micrometer stage based on a servo system according to claim 1, characterized in that: One side of the Y-axis movement assembly (4) is provided with a side plate (5), the Y-axis movement assembly (4) comprises a bottom plate (7), the bottom plate (7) is provided with a guide rail (6) on both sides along the direction of the Y-axis movement assembly (4), the other side of the Y-axis movement assembly (4) is provided with a gear set (8), the gear set (8) is provided with an angle sensor (9).

4. The micro-stage based on a servo system according to claim 3, characterized in that: The middle of the Y-axis movement assembly (4) is provided with a connecting plate (13), the guide rail (6) is provided with a sliding plate (12), the sliding plate (12) is provided with a guide groove (11).

5. The micrometer stage based on a servo system according to claim 1, characterized in that: One side of the rotating assembly (1) is provided with a motor (104), the motor (104) is in the same plane with the rotating assembly (1), the shell (101) is provided with a driving wheel (105) and a driven wheel (107), the driving wheel (105) and the driven wheel (107) are connected together through a belt (106).

6. A micro-stage based on a servo system according to claim 5, characterized in that: The driving wheel (105) is driven by the motor (104), the motor (104) is coaxially connected with the driving wheel (105), the rotating assembly (1) is coaxially connected with the driven wheel (107).

Images