Box cover clamping mechanism

Abstract

The utility model relates to the technical field of semiconductors, in particular to a box cover clamping mechanism. Comprising an opening and closing frame, an adsorption assembly and a positioning assembly which are installed on the opening and closing frame, an in-place detection assembly which is installed on the opening and closing frame and is used for detecting whether a box cover to be clamped is located at a required position, and a detection part which is installed on the opening and closing frame and is used for detecting wafers in a wafer box. According to the utility model, the box cover can be smoothly clamped, wafer detection is realized, occupied space is saved, large-size substrates can be conveniently loaded, the substrate loading range is expanded, and the loading quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a lid clamping mechanism. Background Technology

[0002] The wafer opener is mainly used in the wafer manufacturing and packaging process to open and close the sealed wafer boxes (such as FOUP and SMIF) to ensure the safe transport of wafers in a cleanroom environment. It automatically opens and closes the wafer box lid using mechanical or pneumatic devices, maintaining a seal during the opening and closing process to prevent external contaminants from entering, ensuring accurate docking of the wafer box with the equipment, and avoiding wafer damage.

[0003] Existing mainstream wafer openers employ two independent drive mechanisms to automatically open and close the wafer cassette lid and to perform wafer inspection using mapping. This results in both the mapping and opening mechanisms using independent supports, which occupy internal space within the FOUP. This is not conducive to loading and transporting larger substrates, limits the transfer size of the substrate, and affects the loading quality. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a lid clamping mechanism that can smoothly clamp lids, enable wafer inspection, save space, facilitate the loading of larger substrates, increase the substrate loading range, and improve loading quality.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a box cover clamping mechanism, including an opening and closing frame, an adsorption component and a positioning component installed on the opening and closing frame, an in-situ detection component installed on the opening and closing frame for detecting whether the box cover to be clamped is in the required position, and a detection component installed on the opening and closing frame for detecting the wafer in the wafer box.

[0007] When wafer inspection is required, the wafer cassette is positioned, and an external device moves the opening and closing frame toward the opening of the wafer cassette until the in-place inspection component determines that the cover to be clamped is in the required position. The positioning component is adapted to the positioning hole on the cover to be clamped, and the suction component is used to suction the cover to be clamped, so that the cover to be clamped is relatively fixed with the opening and closing frame. The external device moves the opening and closing frame away from the wafer cassette, so that the opening of the wafer cassette is exposed. The inspection component inspects the wafer inside the wafer cassette. A lifting device moves the external device up and down, so that the inspection component inspects the wafer in the vertical direction.

[0008] The opening and closing frame is also equipped with a locking mechanism, which is used to lock the box cover to be clamped to the opening and closing frame.

[0009] The locking mechanism comprises a locking member rotatably connected to the opening and closing frame, and a locking driving unit hingedly connected to the locking member, and a mounting end of the locking driving unit is hingedly connected to the opening and closing frame, the locking member is provided with a locking part, the locking driving unit drives the locking member to rotate so that the locking part rotates synchronously, and the locking part has an alignment state and a locking state during rotation;

[0010] When the box cover to be clamped needs to be clamped, the wafer box is positioned, an external device drives the opening and closing frame to move to the opening side of the wafer box, the locking driving unit makes the locking part be in the alignment state, the in-position detection assembly determines that the box cover to be clamped is located at the required position, the locking part is inserted into the recess cavity matched with the wafer box, and the locking driving unit makes the locking part be in the locking state, so that the box cover to be clamped and the opening and closing frame are locked.

[0011] The in-position detection assembly comprises an in-position mounting seat mounted on the opening and closing frame, an in-position detection rod slidingly connected to the opening and closing frame, a reset component connected between the in-position mounting seat and the in-position detection rod, and a photoelectric switch mounted on the in-position mounting seat, and the in-position detection rod corresponds to the photoelectric switch.

[0012] When the box cover to be clamped moves to the required position of the opening and closing frame, the in-position detection rod is pressed to move to the in-position mounting seat, the reset component is compressed, the in-position detection rod blocks the photoelectric switch, and the photoelectric switch is triggered by the box cover to be clamped.

[0013] When the box cover to be clamped is separated from the opening and closing frame, the in-position detection rod is reset to the initial position under the elastic force of the reset component.

[0014] The opening and closing frame is provided with a positioning hole, and the in-position detection rod is arranged in the positioning hole.

[0015] An anti-falling hole is arranged at an inner end of the positioning hole, the in-position detection rod is provided with an anti-falling part matched with the anti-falling hole, and the diameter of the anti-falling hole is greater than that of the positioning hole.

[0016] The in-position mounting seat comprises an in-position mounting part and an in-position connecting part connected to the in-position mounting part, and the in-position connecting part, the in-position mounting part and the opening and closing frame are locked by a locking member.

[0017] The in-position detection rod is provided with a guide part, the in-position mounting part is provided with a guide hole matched with the guide part, the photoelectric switch is mounted on the in-position connecting part, and when the in-position detection rod is pressed by the box cover to be clamped, the guide part slides in the guide hole, so that the guide part is arranged in the photoelectric switch.

[0018] One end of the reset component is connected to the guide part, and the other end of the reset component acts on the in-position mounting part.

[0019] The opening and closing frame is provided with a containing space, and one end of the locking driving unit extends into the containing space.

[0020] The locking member comprises a locking rotating part rotatably connected to the opening and closing frame, a locking driving part hingedly connected to the locking rotating part, and a locking part provided on the locking rotating part.

[0021] The locking driving part is provided with an inner receiving space and an outer receiving space, one end of the locking rotating part extends into the inner receiving space, and one end of the locking driving unit extends into the outer receiving space.

[0022] The locking part is in a strip structure.

[0023] The adsorption assembly comprises a plurality of suction cups which are symmetrically distributed in the circumferential direction of the opening and closing frame.

[0024] The utility model discloses the beneficial effects of:

[0025] The box cover can be successfully clamped, wafer detection is realized, space occupation is saved, a larger size substrate is conveniently loaded, the loading range of the substrate is improved, and the loading quality is improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a three-dimensional structure diagram of the box cover clamping mechanism.

[0027] Figure 2 It is an installation structure diagram of the opening and closing frame and the locking mechanism.

[0028] Figure 3 It is an explosion diagram of the opening and closing frame and the locking mechanism.

[0029] Figure 4 It is an installation structure explosion diagram of the in-place detection assembly and the opening and closing frame.

[0030] Figure 5 It is a sectional view of the installation structure of the in-place detection assembly and the opening and closing frame.

[0031] 1, opening and closing frame; 101, positioning hole; 102, anti-dropping hole; 103, containing space;

[0032] 2, adsorption assembly; 3, positioning assembly;

[0033] 4, in-place detection assembly;

[0034] 41, in-place mounting seat;

[0035] 411, in-place mounting part; 4111, guide hole; 412, in-place connecting part;

[0036] 42, position detecting lever; 421, anti-dropping portion; 422, guide portion;

[0037] 43, reset member; 44, photoelectric switch;

[0038] 5, detecting member;

[0039] 61, locking member; 601, locking portion;

[0040] 611, locking rotation portion; 612, locking driving portion;

[0041] 6121, inner receiving space; 6122, outer receiving space;

[0042] 62, locking driving unit. DETAILED DESCRIPTION

[0043] For the convenience of the understanding of the skilled in the art, the present application will be further described below in conjunction with the embodiments and the drawings. The specific embodiments of the present application will be described below, and it should be noted that, in the specific description of these embodiments, the present specification cannot possibly describe all the features of the actual embodiments in detail for the sake of concise and brief description.

[0044] Reference Figures 1 to 5As shown, the utility model provides a box cover clamping mechanism, including open and close frame 1, install in open and close frame 1's adsorption subassembly 2 and positioning assembly 3, install in open and close frame 1 and be used for detecting whether the box cover to be clamped is located at the required position in situ detection subassembly 4 and install in open and close frame 1 and be used for detecting the detection component 5 of wafer box inside wafer, when practical application, external equipment is horizontal module, adopts screw rod motor module, oil cylinder or electric cylinder, lifting equipment adopts screw rod motor module, oil cylinder or electric cylinder, when needing to carry out wafer detection, the wafer box is positioned and loaded, adopts external equipment and drives open and close frame 1 to move to the opening side of wafer box, until in situ detection subassembly 4 determines that the box cover to be clamped is located at the required position, adopts positioning assembly 3 and adapts the positioning hole 101 on the box cover to be clamped, adopts adsorption subassembly 2 and adsorbs the box cover to be clamped, to make the box cover to be clamped and open and close frame 1 relative fixed, external equipment drives open and close frame 1 and moves away from wafer box, makes wafer box opening place expose, facilitate smooth clamping box cover, detection component 5 detects the wafer in wafer box, adopts lifting equipment and drives external equipment to move up and down, to make detection component 5 along the up and down direction and detect wafer, detection component 5 is wafer detection sensor, facilitate to the defect detection, size detection, alignment and positioning detection and surface topography analysis etc. of wafer, facilitate to identify the scratch, particle, pollution etc. of wafer surface defect, prevent defective product and enter subsequent process, facilitate to accurately measure the thickness, diameter, flatness etc. of wafer size, ensure to meet the specification, facilitate to ensure that wafer and mask accurately align in photolithography etc. process, improve pattern transfer precision, facilitate to detect surface roughness, film thickness etc. topography characteristics, ensure process consistency, through installing detection component 5 in open and close frame 1, adopts a drive mechanism, for example, external equipment, connects it with same lifting mechanism, can smoothly realize box cover clamping and wafer detection, compact structure arrangement, save space occupation, facilitate to load larger size substrate, improve substrate loading range, improve loading quality.

[0045] Reference Figure 2 , 3 As shown, in the embodiment, the open and close frame 1 is further provided with a locking mechanism, and the locking mechanism is used for locking the box cover to be clamped and the open and close frame 1. The locking mechanism comprises a locking piece 61 rotationally connected to the open and close frame 1 and a locking driving unit 62 hingedly connected to the locking piece 61 at an output end. The mounting end of the locking driving unit 62 is hingedly connected to the open and close frame 1. The locking piece 61 is provided with a locking portion 601. The locking driving unit 62 drives the locking piece 61 to rotate, so that the locking portion 601 rotates synchronously. The locking portion 601 has an alignment state and a locking state in the rotation process.

[0046] Reference Figure 2 , 3As shown, in actual application, the locking driving unit 62 adopts a pneumatic cylinder, an oil cylinder or an electric cylinder. When the to-be-clamped box cover needs to be clamped, the opening and closing frame 1 is moved to the opening side of the wafer box by an external device, the locking driving unit 62 makes the locking part 601 in the alignment state, the in-position detection assembly 4 determines that the to-be-clamped box cover is in the required position, the locking part 601 is inserted into the matching cavity in the wafer box, and the locking driving unit 62 makes the locking part 601 in the locking state, so as to lock the to-be-clamped box cover and the opening and closing frame 1.

[0047] Reference Figure 1 , 4 As shown, in the embodiment, the in-position detection assembly 4 includes an in-position mounting seat 41 mounted on the opening and closing frame 1, an in-position detection rod 42 slidingly connected to the opening and closing frame 1, a reset component 43 connected between the in-position mounting seat 41 and the in-position detection rod 42, and a photoelectric switch 44 mounted on the in-position mounting seat 41, and the in-position detection rod 42 corresponds to the photoelectric switch 44. In actual application, the reset component 43 is a spring, and the photoelectric switch 44 is a slot type photoelectric switch. When the in-position detection rod 42 moves to the required position, the in-position detection rod 42 blocks the transmitting end and the receiving end of the slot type photoelectric switch, so as to generate a corresponding signal to determine that the to-be-clamped box cover moves to the required position. When the to-be-clamped box cover moves to the required position of the opening and closing frame 1, the in-position detection rod 42 is pressed and moves to the in-position mounting seat 41, the reset component 43 is compressed, the in-position detection rod 42 blocks the photoelectric switch 44, and the photoelectric switch 44 is triggered by the to-be-clamped box cover. When the to-be-clamped box cover is separated from the opening and closing frame 1, the in-position detection rod 42 is reset to the initial position under the elastic force of the reset component 43. The position of the in-position detection rod 42 can repeatedly and accurately determine the position of the box cover, which is beneficial to quickly clamp the box cover.

[0048] Reference Figure 4 , 5 As shown, in the embodiment, the opening and closing frame 1 is provided with a positioning hole 101, and the in-position detection rod 42 is arranged in the positioning hole 101. An anti-falling hole 102 is arranged at the inner end of the positioning hole 101, the in-position detection rod 42 is provided with an anti-falling part 421 inserted into the anti-falling hole 102, and the diameter of the anti-falling hole 102 is greater than that of the positioning hole 101, so as to prevent the in-position detection rod 42 from falling off and improve the connection stability of the in-position detection rod 42.

[0049] Reference Figure 4 , 5As shown, in the embodiment, the in-place mounting seat 41 comprises an in-place mounting portion 411 and an in-place connecting portion 412 connected with the in-place mounting portion 411, the in-place connecting portion 412, the in-place mounting portion 411 and the opening and closing frame 1 are locked by locking members, the locking members are bolts, the in-place connecting portion 412 and the in-place mounting portion 411 are convenient to mount and dismount; the in-place detection rod 42 is provided with a guide portion 422, the in-place mounting portion 411 is provided with a guide hole 4111 matched with the guide portion 422, the photoelectric switch 44 is mounted on the in-place connecting portion 412, when the in-place detection rod 42 is pressed by the to-be-clamped box cover, the guide portion 422 is driven to slide in the guide hole 4111, so that the guide portion 422 is arranged in the photoelectric switch 44, which is convenient to smoothly guide the movement of the in-place detection rod 42, when the to-be-clamped box cover is located at the required position, the guide portion 422 shields the emitting end and the receiving end of the photoelectric switch 44, triggers the photoelectric switch 44 to generate a corresponding signal, so as to accurately determine the position of the to-be-clamped box cover, whether the to-be-clamped box cover is located at the required position is determined by the position of the in-place detection rod 42; one end of the reset component 43 is connected with the guide portion 422, the other end of the reset component 43 acts on the in-place mounting portion 411, specifically, the other end of the reset component 43 is not connected with the in-place mounting portion 411 through a structure, when the reset component 43 is subjected to external force, the reset component 43 is pressed by the in-place mounting portion 411 and the guide portion 422, so that the reset component 43 is compressed; after the in-place mounting portion 411 and the in-place connecting portion 412 are dismounted from the opening and closing frame 1, the reset component 43 is directly connected with the in-place mounting portion 411, which is convenient to dismount.

[0050] Reference Figure 3 As shown, in the embodiment, the opening and closing frame 1 is provided with a containing space 103, one end of the locking driving unit 62 extends into the containing space 103, the space occupation between the opening and closing frame 1 and the locking driving unit 62 in the front and back directions is shortened, and the structural arrangement is compact.

[0051] Reference Figure 3As shown, in the embodiment, the locking member 61 comprises a locking rotating part 611 rotatably connected to the opening and closing frame 1 and a locking driving part 612 hingedly connected to the locking rotating part 611, the locking part 601 is arranged on the locking rotating part 611, the locking driving unit 62 is drivingly connected with the locking driving part 612, the locking driving unit 62 drives the locking driving part 612 to rotate around the locking rotating part 611 so as to rotate the locking part 601, specifically, the distance between the two ends of the locking driving part 612 is greater than the diameter of the locking rotating part 611, which facilitates to increase the torque of the locking rotating part 611 and is beneficial to smoothly drive the locking part 601 to rotate; the locking driving part 612 is provided with an inner receiving space 6121 and an outer receiving space 6122, one end of the locking rotating part 611 extends into the inner receiving space 6121, and one end of the locking driving unit 62 extends into the outer receiving space 6122, so that the structure arrangement is compact and the space occupation is saved.

[0052] Reference Figure 1 As shown, in the embodiment, the adsorption assembly 2 comprises a plurality of suction cups which are symmetrically distributed in the circumferential direction of the opening and closing frame 1, and the positioning assembly 3 is a plurality of positioning pins which are matched with the hole positions on the box cover; in actual application, the suction cups act on the side surface of the box cover, the positioning pins are accurately positioned on the box cover, the suction cups are connected with the vacuum generator, and the box cover is adsorbed through negative pressure, so as to stabilize the relative position between the box cover and the opening and closing frame 1 and facilitate to stabilize the transmission of the box cover.

[0053] The above is only the preferred embodiment of the utility model, and does not limit the utility model in any form, although the utility model discloses the above preferred embodiment, however, it is not used to limit the utility model, any person skilled in the art, without departing from the technical scheme of the utility model, when utilizing the disclosed technical content makes some changes or modifications as equivalent embodiments of equivalent changes, but as long as it does not depart from the technical scheme of the utility model, according to the utility model technology refers to any simple modification, equivalent change and modification of the above embodiment, which belongs to the range of the technical scheme of the utility model.

Claims

1. A cassette cover gripping mechanism characterized by comprising: The utility model relates to a kind of wafer detection device, including open-close frame (1), install adsorption assembly (2) and positioning assembly (3) of open-close frame (1), install in position detection assembly (4) for detecting whether the cover to be clamped is located at the required position in open-close frame (1) and install detection component (5) for detecting wafer in wafer box in open-close frame (1); When wafer detection is needed, wafer box is positioned, open-close frame (1) is driven to move to the opening side of wafer box by external equipment, until in position detection assembly (4) determines that the cover to be clamped is located at the required position, positioning assembly (3) is used to adapt to the positioning hole (101) on the cover to be clamped, adsorption assembly (2) is used to adsorb the cover to be clamped, so that the cover to be clamped is relatively fixed with open-close frame (1), external equipment drives open-close frame (1) to move away from wafer box, so that wafer box opening is exposed, detection component (5) detects wafer inside wafer box, external equipment is driven to move up and down by lifting equipment, so that detection component (5) detects wafer along up and down direction.

2. The magazine cover gripping mechanism of claim 1, wherein The open-close frame (1) is also provided with a locking mechanism for locking the cover to be clamped with the open-close frame (1); The locking mechanism comprises a locking member (61) rotatably connected to the open-close frame (1) and a locking driving unit (62) hingedly connected to the locking member (61) at an output end, the mounting end of the locking driving unit (62) is hingedly connected to the open-close frame (1), the locking member (61) is provided with a locking portion (601), the locking driving unit (62) drives the locking member (61) to rotate, so that the locking portion (601) rotates synchronously, the locking portion (601) has an alignment state and a locking state during rotation; When the cover to be clamped is needed to be clamped, wafer box is positioned, open-close frame (1) is driven to move to the opening side of wafer box by external equipment, the locking driving unit (62) makes the locking portion (601) be in the alignment state, the in position detection assembly (4) determines that the cover to be clamped is located at the required position, the locking portion (601) is inserted into the cavity adapted thereto in the wafer box, the locking driving unit (62) makes the locking portion (601) be in the locking state, so as to lock the cover to be clamped with the open-close frame (1).

3. The magazine cover gripping mechanism of claim 1, wherein The in position detection assembly (4) comprises an in position mounting seat (41) mounted on the open-close frame (1), an in position detection rod (42) slidingly connected to the open-close frame (1), a reset component (43) connected between the in position mounting seat (41) and the in position detection rod (42), and a photoelectric switch (44) mounted on the in position mounting seat (41), the in position detection rod (42) corresponds to the photoelectric switch (44); When the cover to be clamped moves to the required position relative to the open-close frame (1), the in position detection rod (42) is pressed to move to the in position mounting seat (41), the reset component (43) is compressed, the in position detection rod (42) blocks the photoelectric switch (44), so that the photoelectric switch (44) is triggered by the cover to be clamped; When the cover to be clamped is separated from the open-close frame (1), the in position detection rod (42) is reset to the initial position under the elastic force of the reset component (43).

4. The magazine cover gripping mechanism of claim 3, wherein The opening and closing frame (1) is provided with a positioning hole (101), and the in-place detection rod (42) is arranged in the positioning hole (101). An inner end of the positioning hole (101) is provided with an anti-falling hole (102), the in-place detection rod (42) is provided with an anti-falling part (421) matched with the anti-falling hole (102), and a diameter of the anti-falling hole (102) is greater than that of the positioning hole (101).

5. The magazine cover gripping mechanism of claim 4, wherein The in-place mounting seat (41) comprises an in-place mounting part (411) and an in-place connecting part (412) connected with the in-place mounting part (411), and the in-place connecting part (412), the in-place mounting part (411) and the opening and closing frame (1) are locked by a locking part. The in-place detection rod (42) is provided with a guide part (422), the in-place mounting part (411) is provided with a guide hole (4111) matched with the guide part (422), the photoelectric switch (44) is mounted on the in-place connecting part (412), and when the in-place detection rod (42) is pressed by the to-be-clamped box cover, the guide part (422) slides in the guide hole (4111), so that the guide part (422) is arranged in the photoelectric switch (44). One end of the reset part (43) is connected with the guide part (422), and the other end of the reset part (43) acts on the in-place mounting part (411).

6. The magazine cover gripping mechanism of claim 2, wherein The opening and closing frame (1) is provided with a containing space (103), and one end of the locking driving unit (62) extends into the containing space (103).

7. The magazine cover gripping mechanism of claim 2, wherein The locking part (61) comprises a locking rotating part (611) rotatably connected with the opening and closing frame (1) and a locking driving part (612) hingedly connected with the locking rotating part (611), the locking part (601) is arranged on the locking rotating part (611), the locking driving unit (62) is drivingly connected with the locking driving part (612), and the locking driving unit (62) drives the locking driving part (612) to rotate around the locking rotating part (611), so that the locking part (601) rotates. The locking driving part (612) is provided with an inner receiving space (6121) and an outer receiving space (6122), one end of the locking rotating part (611) extends into the inner receiving space (6121), and one end of the locking driving unit (62) extends into the outer receiving space (6122).

8. The magazine cover gripping mechanism of claim 2, wherein The locking part (601) is in a strip structure.

9. The magazine cover gripping mechanism of claim 1, wherein The adsorption assembly (2) comprises a plurality of suction cups, and the suction cups are symmetrically distributed in the circumferential direction of the opening and closing frame (1).

Images