Wafer boat carrying device for narrow space

Abstract

The utility model discloses a boat carrying device for narrow space, which comprises a cross-shaped moving mechanism, bearing parts and a detection mechanism, the bearing parts are arranged in pairs and used for bearing boats, and the bearing parts and the cross-shaped moving mechanism in pairs are connected and located on the same side of the boats. The bearing part can be driven by the cross-shaped moving mechanism to move in the vertical direction and the first direction of the horizontal plane so as to reach the carrying position. The detection mechanism comprises a position detection assembly arranged on the bearing piece, and the position detection assembly is used for detecting whether the bearing piece is aligned with the carrying position in the vertical direction or not. The carrying device saves space, can be applied to a narrow space, and meanwhile can align at the wafer boat and carry the wafer boat accurately.

Description

TECHNICAL FIELD

[0001] The utility model relates to the carrying equipment technical field for crystal boat, especially the crystal boat carrying device for narrow space. BACKGROUND

[0002] The battery piece needs to pass through many processes in the processing process, and some processes need the crystal boat as the carrier to hold the battery piece. The weight of the crystal boat is big, and if manually carrying, it is time-consuming and laborious, therefore the carrying mechanism is usually used to carry the crystal boat now. The carrying mechanism usually uses the clamping mode to clamp the crystal boat, that is, two clamping pieces are relatively moved to clamp the crystal boat, but the carrying mechanism needs the space to be big, and in some narrow space or special place, the carrying mechanism of the clamping mode cannot be used. SUMMARY

[0003] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide the crystal boat carrying device for narrow space, saves the space, can be applied in narrow space, and can be aligned with the crystal boat and accurately carry the crystal boat.

[0004] In order to achieve the above purpose, the utility model adopts the technical scheme that the crystal boat carrying device for narrow space includes:

[0005] Cross moving mechanism;

[0006] The carrying piece is arranged in pairs and is used to carry the crystal boat, the pair of carrying pieces and the cross moving mechanism are connected and are located at the same side of the crystal boat, and the carrying piece can be moved along the vertical direction and the first direction of the horizontal plane under the driving of the cross moving mechanism to reach the carrying position.

[0007] Detection mechanism, the detection mechanism includes the position detection assembly arranged on the carrying piece, and the position detection assembly is used to detect whether the carrying piece is aligned with the carrying position in the vertical direction.

[0008] The utility model has the advantages of:

[0009] The carrying piece is located at the same side of the crystal boat, at this time, the crystal boat is no longer placed and grabbed by clamping on both sides, but the pair of carrying pieces are moved along the same direction and inserted into the carrying position. Compared with clamping on both sides, the moving distance of the carrying piece on the same side in the first direction is small, and the carrying of the crystal boat in the narrow space can be satisfied.

[0010] The position detection assembly is arranged, so that the carrying piece is inserted into the carrying position to carry the crystal boat only after being aligned with the carrying position in the vertical direction, and the damage of the crystal boat or the carrying piece is avoided when the carrying piece is offset in the vertical direction but continues to carry the crystal boat.

[0011] Further, the carrier extends along a first direction, and the carrier comprises a carrier block, and the carrier block is provided with a positioning groove downward from an upper end thereof for embedding a lug portion of the wafer boat. The sidewall of the positioning groove limits the lug portion in the first direction, effectively avoiding the wafer boat from shaking in the first direction, and improving the stability of the carrier block when carrying the wafer boat.

[0012] The two sides of the positioning groove in the first direction are inclined surfaces with opposite inclined directions, and the two inclined surfaces are close to each other from top to bottom. The inclined surfaces are arranged to facilitate the lug portion to enter the positioning groove, and to guide the lug portion, so that the wafer boat can be guided even if it has a slight deviation due to the cooperation of the inclined surfaces and the inclined structure.

[0013] Further, the position detection assembly comprises a distance sensor, and the distance sensor is located on a side of the carrier block facing the wafer boat in the first direction.

[0014] Further, the carrier further comprises a fixing plate, and the carrier block and the distance sensor are fixed on the fixing plate. The fixing plate is used to fix the carrier block and the distance sensor, so that they move synchronously.

[0015] Further, the detection mechanism further comprises a position detection member, and the position detection member is used to detect whether the positioning groove carries the lug portion of the wafer boat.

[0016] The detection member comprises micro switches arranged at two ends of the positioning groove in the first direction, and the switch plungers of the micro switches extend upward out of the groove bottom of the positioning groove.

[0017] When the positioning groove moves to a position aligned with the lug portion in the first direction, the lug portion will contact the switch plungers and trigger the micro switches, and all the micro switches generate signals. Only when all the micro switches in the positioning groove generate signals, it means that the carrier moves to the position in the first direction.

[0018] Further, the cross-moving mechanism comprises a horizontal moving assembly, a lifting assembly, and a connecting frame, the lifting assembly and the horizontal moving assembly are connected and reciprocate along the first direction under the driving of the horizontal moving assembly, the connecting frame is connected with the lifting assembly and reciprocates along a vertical direction under the driving of the lifting assembly, and the carrier is fixed on the connecting frame.

[0019] Further, the horizontal moving assembly comprises a rack, a horizontal moving drive, a gear, and a horizontal moving frame, the horizontal moving drive is fixed on the horizontal moving frame and can drive the gear to rotate, and the gear is engaged with the rack fixed on the support and extending along the first direction.

[0020] Further, the lifting assembly comprises a lifting driver, a screw rod and a lifting frame, the lifting driver is fixed on the horizontal moving frame and drives the screw rod to rotate, and the lifting frame is in threaded connection with the screw rod.

[0021] Further, the connecting frames are arranged at intervals in the second direction of the horizontal plane, and at least one bearing member is fixed on each connecting frame.

[0022] Further, the lifting assembly further comprises a detection part for detecting whether the lifting frame is lifted to position, the detection part comprises a plurality of light barriers fixed on the horizontal moving frame and arranged at intervals in the vertical direction, and a light shield is fixed on the lifting frame. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a three-dimensional structure schematic view of the embodiment of the utility model;

[0024] Figure 2 It is a three-dimensional structure schematic view and a local enlarged view of the bearing member in the embodiment of the utility model;

[0025] Figure 3 It is a side view of the embodiment of the utility model;

[0026] Figure 4 It is another angle three-dimensional structure schematic view of the embodiment of the utility model;

[0027] Figure 5 It is a three-dimensional structure schematic view of the crystal boat in the embodiment of the utility model.

[0028] In the drawing:

[0029] 1, crystal boat; 11, hanging ear; 12, placing part;

[0030] 2, cross moving mechanism;

[0031] 21, horizontal moving assembly; 211, horizontal moving frame; 2111, horizontal part; 2112, vertical part; 212, horizontal moving driver; 213, gear; 22, lifting assembly; 221, lifting driver; 222, screw rod; 223, lifting frame; 23, connecting frame; 24, light barrier;

[0032] 3, bearing member;

[0033] 31, bearing block; 311, positioning groove; 3111, inclined surface; 32, fixed plate;

[0034] 4, detection mechanism;

[0035] 41, distance sensor; 42, micro switch; 421, switch pressure bar. DETAILED DESCRIPTION

[0036] The advantages and features of the present application will be more apparent from the following detailed description of preferred embodiments of the present application, taken in conjunction with the accompanying drawings, in which:

[0037] The present application is a wafer boat carrying device for narrow space, which is used for carrying wafer boat 1. The wafer boat 1 is placed on a placing rack (not shown in the figure). As shown in the figure, the wafer boat 1 includes two hanging ears 11 and two placing parts 12. The placing part 12 and the hanging ear 11 have a gap in the vertical direction (Z direction). This gap is the carrying position. When the wafer boat 1 is placed on the placing rack, the two hanging ears 11 are arranged in the second direction (X direction) of the horizontal plane. Figure 5 When the carrying device bearing 3 is inserted into the gap, it reaches the carrying position.

[0038] As shown in the figure, the wafer boat carrying device for narrow space includes a cross-moving mechanism 2 and a bearing 3. The cross-moving mechanism 2 is used to drive the bearing 3 to move in the first direction (Y direction) of the horizontal plane and the vertical direction (Z direction) in a cross shape. Figure 1 Figure 3 As shown in the figure, the wafer boat carrying device for narrow space includes a cross-moving mechanism 2 and a bearing 3. The cross-moving mechanism 2 is used to drive the bearing 3 to move in the first direction (Y direction) of the horizontal plane and the vertical direction (Z direction) in a cross shape.

[0039] The bearing 3 is arranged in pairs and is used to carry the wafer boat 1. One pair of bearings 3 carries two hanging ears 11 of one wafer boat 1 respectively. All the bearings 3 are connected with the cross-moving mechanism 2, and all the bearings 3 are located on the same side of the wafer boat 1. The bearing 3 can reach the carrying position under the driving of the cross-moving mechanism 2, that is, the bearing 3 is moved into the gap between the hanging ear 11 and the placing part 12.

[0040] When the carrying device takes the wafer boat 1 on the placing rack, the cross-moving mechanism 2 first drives the bearing 3 to move downward until the bearing 3 is at the same height position as the carrying position. At this time, the bearing 3 is located on one side of the wafer boat 1 in the first direction. Then the cross-moving mechanism 2 drives the bearing 3 to move in the first direction to make the bearing 3 inserted into the carrying position. At this time, when the bearing 3 moves upward, it can lift the wafer boat 1 upward to make the wafer boat 1 and the placing rack separate.

[0041] In the present embodiment, the bearing 3 is located on the same side of the wafer boat 1. At this time, the wafer boat 1 no longer uses the placing and grabbing of the two sides, but the pair of bearings 3 moves in the same direction and is inserted into the carrying position. Compared with the two sides clamping, the bearing 3 located on the same side has a smaller moving distance in the first direction, which can meet the carrying of the wafer boat 1 in the narrow space.

[0042] As shown in the figure, the wafer boat carrying device for narrow space includes a cross-moving mechanism 2 and a bearing 3. The cross-moving mechanism 2 is used to drive the bearing 3 to move in the first direction (Y direction) of the horizontal plane and the vertical direction (Z direction) in a cross shape. Figure 2 ​As shown, the carrier 3 extends along the first direction, and the carrier 3 includes a carrier block 31, the carrier block 31 is provided with a positioning groove 311 downward from an upper end face thereof, and the lug 11 of the wafer boat 1 is partially embedded in the positioning groove 311. In contrast to the planar contact, the positioning groove 311 is provided to allow the lug 11 to be partially embedded in the positioning groove 311, and the side wall of the positioning groove 311 limits the lug 11 in the first direction, effectively avoiding the wafer boat 1 from shaking in the first direction, and improving the stability of the carrier block 31 when carrying the wafer boat 1.

[0043] Referring to the accompanying drawings Figure 2 As shown, the two side faces of the positioning groove 311 in the first direction are inclined faces 3111 with opposite inclined directions, and the two inclined faces 3111 are close to each other from top to bottom. The part of the lug 11 embedded in the positioning groove 311 includes an inclined structure matched with the inclined face 3111. The inclined face 3111 is provided at the opening of the positioning groove 311 to form an expansion, which on the one hand facilitates the lug 11 to enter the positioning groove 311, and on the other hand uses the inclined face 3111 to guide the lug 11 (i.e. the wafer boat 1), so that even if the wafer boat 1 has a slight deviation, the wafer boat 1 can be guided due to the cooperation of the inclined face 3111 and the inclined structure.

[0044] The carrier 3 must be aligned with the carrying position in the vertical direction before it can be moved along the first direction to be inserted into the first position, otherwise the carrier 3 will have a deviation in the vertical direction and cannot be inserted into the carrying position for carrying the wafer boat 1. Meanwhile, when the carrier 3 deviates upward, continuing to move along the first direction to approach the wafer boat 1 will collide with the wafer boat 1, causing damage to the wafer boat 1 and the carrier 3; when the carrier 3 deviates downward, continuing to move along the first direction to approach the wafer boat 1 will collide with the rack, causing damage to the carrier 3.

[0045] Therefore, in one embodiment, the wafer boat 1 carrying device further includes a detection mechanism 4, and the detection mechanism 4 includes a position detection assembly arranged on the carrier 3, and the position detection assembly is used to detect whether the carrier 3 is aligned with the carrying position in the vertical direction, at this time the carrier 3 has not been inserted into the carrying position.

[0046] The position detection assembly includes a distance sensor 41, and the distance sensor 41 is located on the side of the carrier block 31 facing the wafer boat 1 in the first direction, i.e. in front of the carrier 3 when moving in the first direction.

[0047] Because the carrying position is a gap open at both ends in the first direction, when the carrying block 31 is aligned with the carrying position in the up-down direction, the distance sensor 41 has no signal, at this time the cross-moving mechanism 2 can continue to drive the carrying member 3 to move in the first direction to insert the carrying position. When the carrying block 31 is offset upward, the distance sensor 41 will generate a signal aligned with the wafer boat 1, and when the carrying block 31 is offset downward, the distance sensor 41 will generate a signal aligned with the placing member, and the cross-moving mechanism 2 will not continue to drive the carrying member 3 to move in the first direction, but drive the carrying member 3 to move up and down until it is aligned with the carrying position.

[0048] The position detection assembly detects the position of the carrying member 3 in the vertical direction, but the carrying member 3 also needs to be moved in place in the first direction before it can be lowered to hold the wafer boat 1. Therefore, the detection mechanism 4 also includes an in-place detection member for detecting whether the positioning groove 311 carries the hanging ear 11 of the wafer boat 1, that is, whether the carrying member 3 is moved in place in the first direction.

[0049] Referring to the accompanying drawings Figure 2 As shown, the detection member includes micro switches 42 arranged at both ends of the positioning groove 311 in the first direction, and the switch pressure rods 421 of the micro switches 42 extend upward out of the groove bottom of the positioning groove 311. When the positioning groove 311 is moved in the first direction to a position aligned with the hanging ear 11, the hanging ear 11 will contact the switch pressure rod 421 and trigger the micro switch 42, and all the micro switches 42 generate a signal, so that the cross-moving mechanism 2 can continue to drive the carrying member 3 to move upward to hold the wafer boat 1.

[0050] A pair of micro switches 42 on the carrying member 3 are distributed in a square shape, and when any one of the micro switches 42 does not trigger a signal by the hanging ear 11, it indicates that the positioning groove 311 is not aligned with the hanging ear 11, at this time the cross-moving mechanism 2 will not drive the carrying member 3 to move upward.

[0051] The carrying block 31 is provided with a placing groove, and the shell of the micro switch 42 is embedded in the placing groove.

[0052] The carrying member 3 further includes a fixed plate 32, and the carrying block 31 and the distance sensor 41 are fixed on the fixed plate 32, and the fixed plate 32 is connected with the cross-driving mechanism, and the carrying block 31 and the detection mechanism 4 move synchronously.

[0053] Referring to the accompanying drawings Figure 2As shown, the cross-moving mechanism 2 comprises a horizontal-moving assembly 21, a lifting assembly 22 and a connecting frame 23, the lifting assembly 22 and the horizontal-moving assembly 21 are connected and reciprocate along a first direction under the driving of the horizontal-moving assembly 21, the connecting frame 23 is connected with the lifting assembly 22 and reciprocates along a vertical direction under the driving of the lifting assembly 22, and the carrier 3 is fixed on the connecting frame 23. The horizontal-moving assembly 21 and the lifting assembly 22 cooperate to realize the linear reciprocation of the connecting frame 23 and the carrier 3 along the first direction and the vertical direction.

[0054] Referring to the drawings Figure 4 As shown, the horizontal-moving assembly 21 comprises a rack, a horizontal-moving driving member 212, a gear 213 and a horizontal-moving frame 211, the horizontal-moving driving member 212 is fixed on the horizontal-moving frame 211 and can drive the gear 213 to rotate, and the gear 213 is engaged with the rack fixed on the support and extending along the first direction. The support is fixed on the ground or in the air, and the rack is fixed and immovable, when the horizontal-moving driving member 212 drives the gear 213 to rotate, the gear 213 drives the horizontal-moving frame to move along the rack.

[0055] The gear 213 is provided with two, and one driving member drives the two gears 213 to rotate synchronously through a transmission assembly. The transmission assembly is a gear transmission.

[0056] The horizontal-moving frame 211 comprises a horizontal part 2111 and a vertical part 2112, and the horizontal-moving driving member 212 is fixed on the horizontal part 2111. A roller is further arranged on the horizontal part 2111, and the roller can travel along the support to guide the horizontal movement of the horizontal-moving frame 211.

[0057] The lifting assembly 22 comprises a lifting driving member 221, a screw rod 222 and a lifting frame 223, the lifting driving member 221 is fixed on the horizontal-moving frame 211 and drives the screw rod 222 to rotate, the lifting frame 223 is threadedly connected with the screw rod 222, and the connecting frame 23 is fixed on the lifting frame 223. The screw rod 222 is rotationally connected with the vertical part 2112 and vertically arranged, and when the lifting driving member 221 drives the screw rod 222 to rotate forward and reversely, the lifting frame 223 ascends and descends along the screw rod 222.

[0058] In order to improve the stability of the lifting of the lifting frame 223, a guide rail is further arranged on the vertical part 2112, and a sliding block capable of sliding along the guide rail is fixed on the lifting frame 223.

[0059] In an embodiment, in addition to the rotation number setting of the lifting driving member 221, in order to more accurately know the lifting height of the carrier 3, the lifting assembly 22 further comprises a detection part for detecting whether the lifting frame 223 is lifted to the position.

[0060] The detection part comprises the light barrier sensor 24 and the light shield. The light barrier sensor 24 is fixed on the horizontal moving frame 211 and is arranged in the vertical direction. The light shield is fixed on the lifting frame 223. When the light shield blocks the light barrier of the light barrier sensor 24, it indicates that the abutting part is lifted to the position, and at this time, the lifting driving part 221 stops working.

[0061] The connecting frames 23 are arranged in the second direction of the horizontal plane. Each connecting frame 23 is L-shaped and is fixed with at least one bearing part 3. The connecting frames 23 are not arranged as an integral structure, but are arranged at intervals, thereby saving materials and avoiding that the lifting frame 223 bears too large downward force.

[0062] For example, the connecting frames 23 are arranged at three intervals. The middle connecting frame 23 is fixed with two bearing parts 3, and the other two connecting frames 23 are respectively fixed with one bearing part 3. At this time, the wafer boat 1 carrying mechanism can carry two wafer boats 1 at the same time.

[0063] The specific working process of the embodiment is as follows: when the carrying device takes out the wafer boat 1 on the placing frame, the lifting assembly 22 first drives the bearing part 3 to move downward until the bearing part 3 is at the same height position as the carrying position. At this time, the distance sensor 41 does not send a signal, and the bearing part 3 is located on one side of the wafer boat 1 in the first direction. Then, the translation assembly drives the bearing part 3 to move in the first direction to allow the bearing part 3 to be inserted into the carrying position. At this time, the four micro switches 42 on the bearing part 3 are all triggered to send a signal. The lifting assembly 22 drives the bearing part 3 to move upward to lift the wafer boat 1 upward to separate the wafer boat 1 from the placing frame for carrying the wafer boat 1.

[0064] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A crystal boat handling device for tight spaces, characterized by: The utility model relates to a wafer carrier conveying device, which comprises: a cross-moving mechanism; a carrier arranged in pairs and used for carrying the wafer boat, the pair of carriers and the cross-moving mechanism being connected and located at the same side of the wafer boat, the carrier being movable along a vertical direction and a first direction of a horizontal plane under the driving of the cross-moving mechanism to reach a conveying position; a detection mechanism comprising a position detection assembly arranged on the carrier, the position detection assembly being used for detecting whether the carrier is aligned with the conveying position in the vertical direction.

2. The pod handling apparatus of claim 1, wherein: The carrier extends along the first direction and comprises a carrier block, the carrier block being provided with a positioning groove for embedding a lug portion of the wafer boat from an upper end thereof, the positioning groove being provided with two inclined surfaces with opposite inclined directions at two sides in the first direction, and the two inclined surfaces being close to each other from top to bottom.

3. The pod handling apparatus of claim 2, wherein: The position detection assembly comprises a distance sensor, the distance sensor being located at a side of the carrier block facing the wafer boat in the first direction.

4. The pod handling apparatus of claim 3, wherein: The carrier further comprises a fixing plate, and the carrier block and the distance sensor are fixed on the fixing plate.

5. The pod handling apparatus of claim 2, wherein: The detection mechanism further comprises a position detection member, the position detection member being used for detecting whether the positioning groove carries the lug of the wafer boat. The detection member comprises microswitches arranged at two ends of the positioning groove in the first direction, and switch pressing rods of the microswitches extend upward out of a groove bottom of the positioning groove.

6. The pod handling apparatus of any of claims 1-5, wherein: The cross-moving mechanism comprises a horizontal moving assembly, a lifting assembly and a connecting frame, the lifting assembly and the horizontal moving assembly are connected and reciprocally movable along the first direction under the driving of the horizontal moving assembly, the connecting frame is connected with the lifting assembly and reciprocally movable along a vertical direction under the driving of the lifting assembly, and the carrier is fixed on the connecting frame.

7. The pod handling apparatus of claim 6, wherein: The horizontal moving assembly comprises a rack, a horizontal moving driving member, a gear and a horizontal moving frame, the horizontal moving driving member is fixed on the horizontal moving frame and can drive the gear to rotate, and the gear is engaged with the rack fixed on a support and extending along the first direction.

8. The pod handling apparatus of claim 7, wherein: The lifting assembly comprises a lifting driving member, a screw rod and a lifting frame, the lifting driving member is fixed on the horizontal moving frame and drives the screw rod to rotate, the lifting frame is threadedly connected with the screw rod, and the connecting frame is fixed on the lifting frame.

9. The wafer boat handling device of claim 6, wherein: The connecting frame is arranged at intervals along a second direction of the horizontal plane, and each connecting frame is fixed with at least one carrier.

10. The pod handling apparatus of claim 8, wherein: The lifting assembly further comprises a detection part for detecting whether the lifting frame is lifted to a position, the detection part comprises a plurality of light barriers fixed on the horizontal moving frame and arranged at intervals along the vertical direction, and a light shielding plate is fixed on the lifting frame.

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