Photoetching imprint mold for micro-nano texture structure processing

Abstract

The utility model discloses a photoetching imprint mould for processing a micro-nano texture structure, and relates to the technical field of photoetching imprint mould equipment. The stamping die comprises the main body and the stamping die fixing plate, the pressing groove is formed in the outer surface of the stamping die fixing plate, the stamping die fixing plate, the male die and the pressing groove are arranged, and the pressing groove provides an insertion position for an external pressing piece, so that pressure can be uniformly transmitted to the male die through the pressing piece in the stamping process, and the stamping quality is improved; the male die and the pressing groove longitudinally correspond to each other in position, so that pressure in the same direction and strength can be borne during imprinting, imprinting stability and consistency are improved, the fluorescent column forms a linear reference, quick axial positioning of the die is realized, positioning efficiency is improved, the cross-shaped fluorescent strip provides a center intersection point, accurate positioning of the center of the die is realized, and production efficiency is improved. And the glue tank continuously overflows along with the coining, and the continuously supplemented glue effectively fills the joint surface, so that the service life of the mold is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of photolithography embossing mold equipment technology, specifically a photolithography embossing mold for processing micro-nano texture structures. Background Technology

[0002] As a key tool in the field of micro-nano manufacturing, the photolithography and imprinting mold used for micro-nano textured structure processing achieves high-precision and efficient transfer of micro-nano structure patterns by combining photolithography and imprinting technologies. Photolithography technology utilizes photoresist to undergo chemical reactions under light sources such as ultraviolet light, electron beams, or ion beams to form micro-nano scale patterns. Imprinting technology presses the mold with the photolithographic pattern into a substrate material coated with imprinting adhesive, and completes the pattern transfer after hot pressing or ultraviolet curing.

[0003] The above-mentioned patent has the following shortcomings: positioning is difficult during the imprinting process, which can easily lead to mold displacement and affect the imprinting quality; the contact surface between the mold and the carrier plate is relatively smooth, which can easily cause gaps after long-term use after bonding; and because the imprinting mold material is relatively soft, it is easy to cause uneven pressure on the imprinting mold during imprinting, which makes it difficult to keep the imprinting mold pressing vertically when pressing down to cure the coating, affecting the imprinting quality and even causing damage to the imprinting mold. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide a photolithography embossing mold for processing micro-nano texture structures, so as to solve the technical problem that the existing embossing mold is unevenly pressed and difficult to position during the embossing process due to the soft material, which in turn affects the embossing quality or even damages the mold.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a mold for photolithography imprinting of micro-nano textured structures, comprising a main body and an imprint fixing plate, wherein an imprint fixing plate has an imprint groove on its outer surface, a limiting block is fixedly connected to the bottom of the imprint fixing plate, the limiting block has an inclined surface on its outer surface, and a limiting groove is provided on one side of the limiting block;

[0006] The back of the main body is provided with a mounting groove, a fluorescent column is glued in the mounting groove, and a glue groove is provided at the top of the fluorescent column, with a cross fluorescent strip provided in the glue groove.

[0007] By adopting the above technical solution, the mold fixing plate, as the core component of the imprinting function, is connected to the main body and can provide stable support for the imprinting process. This can ensure the positional and shape accuracy of the imprinting groove, thereby guaranteeing the quality of the imprinted micro-nano texture structure.

[0008] Furthermore, the pressure groove is provided in a plurality of places, and the plurality of pressure grooves are arranged in a linear array at equal intervals.

[0009] By adopting the above technical solution, the pressure of the linear array of equally spaced and uniformly arranged grooves can be evenly distributed on the target material during the imprinting process. The pressure magnitude and direction of each groove are basically the same, avoiding problems such as uneven imprinting pattern depth and blurred edges caused by uneven pressure.

[0010] Furthermore, two limiting blocks are provided, and the two limiting blocks are mirror images of each other along the central axis of the mold fixing plate.

[0011] By adopting the above technical solution, the two limiting blocks are mirrored along the central axis of the mold fixing plate, forming a symmetrical positioning structure. When the main body and its bottom punch and other components are installed, the limiting blocks on both sides can simultaneously limit the main body, so that it maintains a symmetrical position in the horizontal direction relative to the central axis of the mold fixing plate, effectively eliminating the offset error that may be caused by unilateral positioning.

[0012] Furthermore, the bottom of the main body is provided with several punches, and the positions of the punches and the pressure grooves are longitudinally corresponding.

[0013] By adopting the above technical solution, the punch is set at the bottom of the main body, so that the punch can directly contact the target material and perform the imprinting operation, avoiding imprinting errors caused by interference from other components, thereby ensuring the accuracy of imprinting.

[0014] Furthermore, a carrier plate is glued to the bottom of the main body, and the carrier plate is glued to the mold fixing plate.

[0015] By adopting the above technical solution, after the carrier plate and the mold fixing plate are glued together, it can be ensured that the relative position between the carrier plate and the mold fixing plate remains unchanged, thereby enabling the main body and the mold fixing plate to be precisely aligned.

[0016] Furthermore, the main body is made of thiol material, and the carrier plate is made of acrylic material.

[0017] By adopting the above technical solution, the thiol material has good plasticity and fluidity, which makes it easy to make the main body into a specific shape through the molding process, so that the main body of various shapes and sizes can be printed according to different printing requirements.

[0018] In summary, the present invention has the following main advantages:

[0019] 1. This utility model sets up an impression mold fixing plate, a punch, and a pressure groove. The impression mold fixing plate serves as the basic support structure of the entire mold, providing a stable installation platform for the main body and the carrier plate. The pressure groove provides an insertion position for the external pressure plate, so that during the impression process, the pressure can be evenly transmitted to the punch through the pressure plate. The evenly distributed pressure groove helps to ensure that the pressure borne by each punch is consistent, thereby improving the impression quality and reducing impression defects caused by uneven pressure. The punch and the pressure groove are longitudinally aligned, ensuring that they can withstand the pressure in the same direction and force during the impression process, so that the impression texture structure is accurate and clear, meeting the high precision requirements of micro-nano texture structure processing, and improving the stability and consistency of the impression quality.

[0020] 2. This utility model sets up fluorescent columns, cross fluorescent strips, and glue grooves. The fluorescent columns form a linear reference, enabling rapid axial positioning of the mold and improving positioning efficiency. At the same time, the cross fluorescent strips provide a central intersection point, enabling precise positioning of the mold center and effectively preventing mold offset from affecting the imprinting quality. The glue groove continuously overflows glue as the imprinting process continues, effectively filling the joint surface and increasing the mold's service life. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the limiting block of this utility model;

[0023] Figure 3 This is a bottom view of the structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the fluorescent column of this utility model.

[0025] In the diagram: 1. Main body; 2. Punch; 3. Carrier plate; 4. Imprint fixing plate; 5. Pressing groove; 6. Limiting block; 7. Limiting groove; 8. Inclined surface; 9. Mounting groove; 10. Fluorescent column; 11. Glue groove; 12. Cross fluorescent strip. Detailed Implementation

[0026] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0027] A mold for photolithography imprinting of micro / nano textured structures, such as Figures 1-4As shown, it includes a main body 1 and an impression fixing plate 4. The outer surface of the impression fixing plate 4 is provided with a pressing groove 5. The bottom of the impression fixing plate 4 is fixedly connected to a limiting block 6. The outer surface of the limiting block 6 is provided with an inclined surface 8. A limiting groove 7 is provided on one side of the limiting block 6.

[0028] The back of the main body 1 has a mounting groove 9, in which a fluorescent column 10 is glued. The top of the fluorescent column 10 has a glue groove 11, in which a cross fluorescent strip 12 is set. The mold fixing plate 4, as the core component of the imprinting function, is connected to the main body 1 and can provide stable support for the imprinting process. It can ensure the positional and shape accuracy of the groove 5, thereby ensuring the quality of the imprinted micro-nano texture structure. The limiting groove 7 provides an accurate installation position for the carrier plate 3, so that the relative position between the carrier plate 3 and the mold fixing plate 4 is fixed, thereby ensuring the precise alignment of the punch 2 and the groove 5.

[0029] See Figure 2 , Figure 3 There are several pressure grooves 5, which are arranged in a linear array at equal intervals. The linear array of pressure grooves 5 at equal intervals can make the pressure evenly distributed on the target material during the imprinting process. The pressure magnitude and direction of each pressure groove 5 are basically the same, avoiding problems such as uneven imprinting pattern depth and blurred edges caused by uneven pressure. The evenly spaced pressure grooves 5 can effectively reduce dimensional errors and ensure the quality of each imprinted product.

[0030] See Figure 2 , Figure 3 There are two limiting blocks 6, which are mirror images of the central axis of the mold fixing plate 4, forming a symmetrical positioning structure. When the main body 1 and its bottom punch 2 and other components are installed, the limiting blocks 6 on both sides can simultaneously limit the main body 1, so that it maintains a symmetrical position in the horizontal direction relative to the central axis of the mold fixing plate 4. This effectively eliminates the offset error that may be caused by unilateral positioning. The two mirror images of the limiting blocks 6 can balance the lateral force, making the force on the mold fixing plate 4 more uniform. This avoids the situation where the mold fixing plate 4 is deformed or damaged due to excessive force on one side, and improves the structural stability of the entire mold.

[0031] See Figure 3 , Figure 4The bottom of the main body 1 is provided with several punches 2. The positions of the punches 2 and the pressure grooves 5 are longitudinally aligned. By placing the punches 2 at the bottom of the main body 1, the punches 2 can directly contact the target material and perform the imprinting operation, avoiding imprinting errors caused by interference from other components, thereby ensuring the accuracy of the imprinting. The longitudinal alignment of the punches 2 and the pressure grooves 5 allows the punches 2 to be accurately pressed vertically into the area corresponding to the pressure grooves 5 during the imprinting process. This vertical imprinting method can ensure the shape and size accuracy of the imprinted pattern and avoid pattern deformation caused by the deviation of the imprinting angle.

[0032] See Figure 2 , Figure 3 The bottom of the main body 1 is glued with a carrier plate 3, which is glued to the mold fixing plate 4. After the carrier plate 3 and the mold fixing plate 4 are glued together, the relative position between the carrier plate 3 and the mold fixing plate 4 can be fixed and unchanged, so that the main body 1 and the mold fixing plate 4 can be accurately aligned. After the carrier plate 3 and the mold fixing plate 4 are glued together, the two parts support each other, which increases the rigidity of the entire mold.

[0033] See Figure 1 The main body 1 is made of thiol material, and the carrier plate 3 is made of acrylic material. Thiol material has good plasticity and fluidity, which makes it easy to make the main body 1 into a specific shape through processes such as dripping and molding. This allows the main body 1 of various shapes and sizes to be printed according to different printing requirements. The carrier plate 3 needs to be glued and fixed to the main body 1 and the printing mold fixing plate 4. Acrylic material has excellent adhesive properties and can form a strong bond with a variety of adhesives. Acrylic material has a certain strength and toughness, which can maintain its shape and size stability under stress and is not easy to break or deform.

[0034] The implementation principle of this utility model is as follows: First, the liquid body 1 is dripped onto the target pattern. Then, the body 1 is pressed down by the carrier plate 3 to fix the body 1 to the carrier plate 3. After the body 1 solidifies and is fixed to the carrier plate 3, the body 1 is removed. Then, the back of the carrier plate 3 is glued to the limiting groove 7 of the mold fixing plate 4. When placed, the limiting block 6 limits and fixes the two sides of the carrier plate 3. When in use, the external pressing plate is inserted into the pressing groove 5, and then pressed down at the same time to make the punch 2 bear the pressure in the same direction and force. After processing, the body 1 is lifted up by the external pressing plate. The fluorescent strip 10 and the cross fluorescent strip 12 make the punch 2 of the body 1 fluoresce during the imprinting process, which facilitates the positioning of the imprinting mold. During long-term use, with repeated pressing, the glue liquid in the glue tank 11 continuously overflows, increasing the bonding effect between the body 1 and the carrier plate 3.

[0035] Although embodiments of the present invention have been shown and described, these specific embodiments are merely explanations of the present invention and are not intended to limit the invention. The specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions, and variations to the embodiments as needed without departing from the principles and spirit of the present invention, provided that such modifications, substitutions, and variations are within the scope of the claims of the present invention and are protected by patent law.

Claims

1. A mold for photolithographic imprinting for micro- and nano-texturing processing, characterized by: The application relates to a stamp fixing plate, which comprises a main body (1) and a stamp fixing plate (4), the outer surface of the stamp fixing plate (4) is provided with pressing grooves (5), the bottom of the stamp fixing plate (4) is fixedly connected with limiting blocks (6), the outer surface of the limiting blocks (6) is provided with inclined surfaces (8), and the side of the limiting blocks (6) is provided with limiting grooves (7). The back of the main body (1) is provided with a mounting groove (9), the mounting groove (9) is glued with a fluorescent column (10), the top of the fluorescent column (10) is provided with a glue groove (11), and the glue groove (11) is provided with a cross fluorescent strip (12).

2. The mold for imprinting used for micro-nano texture processing according to claim 1, characterized in that: The pressing grooves (5) are linearly arranged at equal intervals.

3. The mold for imprinting according to claim 1, wherein: The limiting blocks (6) are mirror-imaged along the central axis of the stamp fixing plate (4).

4. The mold for imprinting according to claim 1, wherein: The bottom of the main body (1) is provided with convex molds (2), and the positions of the convex molds (2) correspond to the positions of the pressing grooves (5) longitudinally.

5. The mold for imprinting according to claim 1, wherein: The bottom of the main body (1) is glued with a carrier plate (3), and the carrier plate (3) is glued with the stamp fixing plate (4).

6. The mold for imprinting according to claim 5, wherein: The main body (1) is made of mercaptan material, and the carrier plate (3) is made of acrylic material.

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