Jacket type reaction kettle
By setting a jacket outside the reactor for indirect heating, the problems of uneven temperature and low temperature control accuracy inside the reactor are solved, achieving rapid and uniform heating and cooling, and improving preparation efficiency and product accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2026-04-10
AI Technical Summary
Existing reaction vessels are prone to localized overheating during the heating of chemical solutions in wafer fabrication processes. This results in slow heating rates, uneven temperatures, and low temperature control accuracy, leading to reduced efficiency in chemical solution preparation.
A jacketed reactor is adopted, which indirectly heats the materials inside the reactor by installing a jacket outside the reactor body and injecting a heat carrier into the jacket. The jacketed heating method is used for heating and cooling, thereby improving temperature uniformity and temperature control accuracy.
It enables rapid and uniform heating and cooling of materials inside the reactor, avoids local overheating, improves preparation efficiency and product accuracy, and reduces experimental costs.
Smart Images
Figure CN224100694U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of reaction kettle, especially a jacketed reaction kettle. BACKGROUND
[0002] Reaction kettle is a container with physical or chemical reaction, which realizes the functions of heating, evaporation, cooling and low-speed mixing required by process.
[0003] In the process of chemical liquid used in the production of wafers, the existing reaction kettle heating generally adopts direct internal heating, which is easy to cause the situation of local high temperature in the kettle body, slow heating speed, uneven temperature, reduced temperature control precision, and low efficiency of chemical liquid preparation. UTILITY MODEL CONTENT
[0004] The utility model solves the technical problem to provide a jacketed reaction kettle.
[0005] In order to solve the above technical problem, the technical scheme of the utility model is as follows: a jacketed reaction kettle, the innovation point of which is that it comprises a kettle body and a jacket sleeved on the lateral side of the kettle body;
[0006] The kettle body is vertically arranged, and the bottom thereof is provided with a liquid outlet, and the upper portion thereof is further provided with a cleaning port, a feeding port, a thermometer port, a standby port, a chlorine gas port, a nitrogen gas port, a DI inlet port, a pH meter port, a liquid level meter port and an exhaust port;
[0007] The jacket is provided with a jacket inlet at the upper portion and a jacket outlet and a blowdown port at the bottom;
[0008] A part of DI water in the DI water tank is heated by the online heater and then enters the kettle body from the DI inlet, another part of DI water is connected with the cleaning port, and the remaining part of DI water is heated by the heater and then enters the jacket from the jacket inlet, and the jacket outlet is connected with the DI water tank;
[0009] The chlorine water tank is connected with the chlorine gas port;
[0010] The nitrogen tank is connected with the nitrogen gas port;
[0011] A spin dryer is connected with the liquid outlet;
[0012] The exhaust port is provided with an exhaust pipeline, the thermometer port is provided with a thermometer, the pH meter port is provided with a pH meter, and the liquid level meter port is provided with a liquid level meter.
[0013] Further, the kettle body is arranged on a support, the support comprises a plurality of vertical columns and a flat plate at the top end of the vertical columns, and a channel for accommodating the kettle body and the jacket is arranged in the middle of the flat plate.
[0014] Further, it further includes a stirring device, the stirring device includes a stirring motor, a stirring shaft and a stirring paddle, the top center of the kettle body is provided with a center opening, a cover plate is fixed outside the center opening, the top of the stirring shaft extends out of the cover plate and is connected with the output end of the stirring motor, the bottom of the stirring shaft extends into the inside of the kettle body and is fixedly installed with the stirring paddle.
[0015] Further, the kettle body is also provided with two lifting lugs, and the kettle body is hoisted and transferred through the lifting lugs.
[0016] Further, the kettle body top is also provided with a sight port, and the kettle body bottom is also provided with a standby port.
[0017] Further, a plurality of weighing sensors are uniformly distributed between the kettle body bottom and the support, so that the mass of the liquid medicine added into the kettle body can be accurately known, and the product accuracy is improved.
[0018] Further, the kettle body inner wall is coated with a Teflon coating, which has the advantages of corrosion resistance, non-stickness, high temperature resistance, low temperature resistance and the like.
[0019] Further, the top end of the jacket extends to the height of two-thirds of the kettle body side wall, and the bottom end of the jacket extends to the circumferential side of the liquid outlet, so that the contact area of the jacket and the kettle body is increased to realize subsequent rapid heating and cooling.
[0020] The utility model has the advantages that:
[0021] 1. In the utility model, a jacket is additionally arranged outside the kettle body, a heat carrier is injected into the jacket to indirectly heat the reaction materials in the kettle body, the closed jacket and the heat exchange heating mode have the advantages of fast heating, uniform temperature and high temperature control precision, can avoid the local overheating phenomenon of the conventional heating mode, reduce the occurrence of the risk conditions such as reaction material leakage and violent reaction, thereby realizing uniform heating and rapid cooling of the whole kettle body, meeting different requirements, improving the preparation efficiency and accuracy.
[0022] 2. The jacket type reaction kettle is suitable for various chemical reaction processes and can meet the complex process requirements such as heating, heat preservation and cooling in the reaction process. Meanwhile, the jacket type reaction kettle can be repeatedly used, can reduce the experimental cost and improve the experimental efficiency and economy.
[0023] 3. The reaction kettle is arranged on a support, the support includes a plurality of columns and a flat plate at the top end of the columns, a channel for accommodating the kettle body and the jacket is arranged in the middle of the flat plate, the installation stability of the reaction kettle is ensured, and a plurality of weighing sensors are uniformly distributed between the kettle body bottom and the support, so that the mass of the liquid medicine added into the kettle body can be accurately known, and the product accuracy is improved.
[0024] 4. The vessel body is also equipped with two lifting lugs, which are used to lift and transfer the vessel body.
[0025] 5. The inner wall of the vessel is coated with Teflon, which has the advantages of corrosion resistance, non-stick properties, and resistance to high and low temperatures.
[0026] 6. The top of the jacket extends to two-thirds of the height of the side wall of the vessel, and the bottom of the jacket extends to the periphery of the liquid outlet. This increases the contact area between the jacket and the vessel to achieve subsequent rapid heating and cooling. Attached Figure Description
[0027] Fig. 1 This is a cross-sectional view of the present invention.
[0028] Fig. 2 This is a top view of the present invention.
[0029] Fig. 3 This is a schematic diagram of the present invention. Detailed Implementation
[0030] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.
[0031] like Figs. 1-3 The jacketed reactor shown includes a reactor body 1 and a jacket 2 fitted around the reactor body 1.
[0032] The vessel body 1 is vertically arranged, and the inner wall of the vessel body 1 is coated with Teflon, which has the advantages of corrosion resistance, non-sticking, and high and low temperature resistance. The bottom of the vessel body 1 is provided with a liquid outlet 11, and it is also provided with a cleaning port 12, a feeding port 13, a thermometer port 14, a spare port 115, a chlorine port 16, a nitrogen port 17, a DI inlet 18, a pH meter port 19, a level gauge port 111, and an exhaust port 112.
[0033] The solid material tank is connected to the feeding port 13, through which solid materials are fed into the vessel body 1.
[0034] The vessel body 1 is also equipped with two lifting lugs 113, which are used to lift and transfer the vessel body 1.
[0035] The top of the vessel body 1 is also provided with two sight glass openings 114, and the bottom of the vessel body 1 is also provided with a spare opening 115.
[0036] The reactor body 1 is mounted on a support 3. The support 3 includes multiple columns 31 and a plate 32 at the top of the columns 31. The plate 32 has a channel in the middle that can accommodate the reactor body 1 and the jacket 2, ensuring the stability of the reactor installation.
[0037] A plurality of weighing sensors 4 are evenly distributed between the bottom of the kettle body 1 and the support 3, so that the mass of the liquid medicine added into the kettle body 1 can be accurately known, and the accuracy of the finished product is improved.
[0038] The top end of the jacket 2 extends to the height of two-thirds of the side wall of the kettle body 1, and the bottom end of the jacket 2 extends to the periphery of the liquid outlet 11, so that the contact area of the jacket 2 and the kettle body 1 is increased, and the subsequent rapid heating and cooling are realized.
[0039] The jacket 2 is provided with a jacket inlet 21 at the upper portion, and a jacket outlet 22 and a blowdown port 23 at the bottom.
[0040] The kettle body 1 is further provided with a stirring device 5, which comprises a stirring motor 51, a stirring shaft 52 and a stirring paddle 53.
[0041] A part of the DI water in the DI water tank is heated by the online heater 9 and then enters the kettle body 1 through the DI inlet 18, another part of the DI water is connected with the cleaning port 12, and the remaining part of the DI water is heated by the heater 10 and then enters the jacket 2 through the jacket inlet 21, and the jacket outlet 22 is connected with the DI water tank.
[0042] The chlorine water tank 6 is connected with the chlorine gas port 16.
[0043] The nitrogen tank 7 is connected with the nitrogen port 17.
[0044] A spin dryer 8 is connected with the liquid outlet 11.
[0045] An exhaust pipe is installed on the exhaust port 112, a thermometer is installed on the thermometer port 14, a pH meter is installed on the pH meter port 19, and a liquid level meter is installed on the liquid level meter port 111.
[0046] In the utility model, by adding a jacket 2 outside the kettle body 1, the jacket 2 is injected with a heat carrier to realize indirect heating of the reaction materials in the kettle body 1, the heating mode of the closed jacket and the heat exchange has the advantages of fast heating, uniform temperature and high temperature control precision, can avoid the local overheating phenomenon of the conventional heating mode, reduce the occurrence of the risk conditions such as the leakage of the reaction materials and the violent reaction, so that the kettle body 1 is uniformly heated and rapidly cooled, different requirements can be met, and the preparation efficiency and accuracy are improved.
[0047] The jacket 2 type reaction kettle is suitable for various chemical reaction processes and can meet the complex process requirements such as heating, heat preservation and cooling in the reaction process.
[0048] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the present application has been disclosed as above with a preferred embodiment, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content to obtain equivalent embodiments with equivalent changes, without departing from the technical solution of the present application. Any modification, equivalent change and modification of the above embodiments, which does not depart from the technical solution of the present application, and which is based on the technical essence of the present application, still belongs to the scope of the technical solution of the present application.
Claims
1. A jacketed reaction vessel, characterized by: The kettle body and the jacket set in the kettle body side; The kettle body is vertically arranged, and the bottom is provided with a liquid outlet, and the top is further provided with a cleaning port, a feeding port, a thermometer port, a standby port, a chlorine port, a nitrogen port, a DI inlet, a pH meter port, a liquid level meter port and an exhaust port; The upper part of the jacket is provided with a jacket inlet, and the bottom of the jacket is provided with a jacket outlet and a blowdown port; A part of the DI water in the DI water tank is heated by the online heater and then enters the kettle body from the DI inlet, another part of the DI water is connected with the cleaning port, and the remaining part of the DI water is heated by the heater and then enters the inside of the jacket from the jacket inlet, and the jacket outlet is connected with the DI water tank; The chlorine water tank is connected with the chlorine port; The nitrogen tank is connected with the nitrogen port; A spin dryer is connected with the liquid outlet; The exhaust port is installed with an exhaust pipe, the thermometer port is installed with a thermometer, the pH meter port is installed with a pH meter, and the liquid level meter port is installed with a liquid level meter.
2. The jacketed reactor of claim 1, wherein: The kettle body is arranged on a support, the support includes a plurality of columns and a flat plate at the top of the columns, and a passage is arranged in the middle of the flat plate to accommodate the kettle body and the jacket.
3. The jacketed reaction vessel of claim 2, wherein: Further comprising a stirring device, the stirring device includes a stirring motor, a stirring shaft and a stirring paddle, the top center of the kettle body is provided with a center opening, and a sealing plate is fixed outside the center opening, the top of the stirring shaft extends out of the sealing plate and is connected with the output end of the stirring motor, and the bottom of the stirring shaft extends into the inside of the kettle body and is fixedly installed with the stirring paddle.
4. The jacketed reactor of claim 1, wherein: The kettle body is further provided with two lifting lugs.
5. The jacketed reaction vessel of claim 1, wherein: The kettle body top is further provided with a sight port, and the kettle body bottom is further provided with a standby port.
6. The jacketed reaction vessel of claim 2, wherein: The kettle body bottom and the support are further uniformly distributed with a plurality of weighing sensors.
7. The jacketed reaction vessel of claim 1, wherein: The inner wall of the kettle body is coated with a Teflon coating.
8. The jacketed reaction vessel of claim 1, wherein: The top end of the jacket extends to two-thirds of the height of the kettle body side wall, and the bottom end of the jacket extends to the periphery of the liquid outlet.