Microscopic optical system and microscope objective

Abstract

The utility model discloses a microscopic optical system and a microscopic objective lens, and relates to the technical field of microscopic optical systems.The microscopic optical objective lens is provided with an entrance pupil side and an exit pupil side which are correspondingly arranged along the direction of an optical axis; the microscopic optical system comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens which are sequentially arranged from an entrance pupil side to an exit pupil side. By means of the arrangement, the microscopic optical system with the design wave band of 560-640 nm can be obtained, the axial color difference is smaller than 1.5 micrometers, the vertical axis color difference is smaller than 0.5 micrometer, the theoretical limit resolution can reach 1.2 micrometers, better balance can be achieved between the long working distance and the large numerical aperture, meanwhile, the imaging resolution and the view field range are considered, and the requirement for high-precision microscopic imaging is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to microscopic optical system technical field, especially a kind of microscopic optical system and microscopic objective lens. BACKGROUND

[0002] In recent years, with the growing demand for high-precision microscopic imaging in scientific research, industrial detection and biomedical fields, microscopic objective lens technology has developed rapidly. In the microscope optical system, the objective lens is the core component, and its performance directly determines the imaging quality, resolution and practicability.

[0003] High numerical aperture objective lens is widely used in biological research and semiconductor detection fields. Higher NA can provide higher resolution and stronger light collection capability, suitable for observing microstructure.

[0004] Long working distance objective lens has also been widely used in industrial detection, especially in cases where it is necessary to avoid sample surface obstructions or protective covers. Such objective lenses usually sacrifice numerical aperture for longer working distance, resulting in relatively low resolution and imaging quality.

[0005] However, there are certain difficulties in simultaneously considering both large numerical aperture and long working distance. SUMMARY

[0006] The main purpose of the utility model is to provide a kind of microscopic optical system and microscopic objective lens, to improve the existing microscopic objective lens structure difficult to balance long working distance and large numerical aperture, and difficult to meet the demand of high-precision microscopic imaging.

[0007] To achieve the above purpose, the utility model provides a microscopic optical system, which has an entrance pupil side and an exit pupil side arranged along the optical axis direction. The microscopic optical system includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens arranged in order from the entrance pupil side to the exit pupil side.

[0008] Wherein, the focal length of the microscopic optical system is fw, the focal length of the first lens is f1, the focal length of the second lens is f2, the focal length of the third lens is f3, the focal length of the fourth lens is f4, the focal length of the fifth lens is f5, the focal length of the sixth lens is f6, and the focal length of the seventh lens is f7. The microscopic optical system satisfies the following conditions:

[0009] fw=10mm; and -6mm≤f1≤-4mm; and 5mm≤f2≤7mm; and -11mm≤f3≤-9mm; and 19mm≤f4≤23mm; and -19mm≤f5≤-17mm; and 16mm≤f6≤19mm; and 22mm≤f7≤26mm.

[0010] In an embodiment, the first lens has a negative power, and the entrance pupil side of the first lens is a concave surface, and the exit pupil side is a concave surface

[0011] The second lens has a positive power, and the entrance pupil side of the second lens is a concave surface, and the exit pupil side is a convex surface

[0012] The third lens has a negative power, and the entrance pupil side of the third lens is a concave surface, and the exit pupil side is a convex surface

[0013] The fourth lens has a positive power, and the entrance pupil side of the fourth lens is a concave surface, and the exit pupil side is a convex surface

[0014] The fifth lens has a negative power, and the entrance pupil side of the fifth lens is a convex surface, and the exit pupil side is a concave surface

[0015] The sixth lens has a positive power, and the entrance pupil side of the sixth lens is a convex surface, and the exit pupil side is a convex surface

[0016] The seventh lens has a positive power, and the entrance pupil side of the seventh lens is a convex surface, and the exit pupil side is a concave surface

[0017] In an embodiment, the second lens and the third lens are glued together

[0018] The fifth lens and the sixth lens are glued together

[0019] In an embodiment, the entrance pupil diameter of the microscopic optical system is φ1, and φ1≤6.0mm.

[0020] In an embodiment, the effective field of view of the image side of the microscopic optical system is φ2, and φ2≤1mm.

[0021] In an embodiment, the working distance of the microscopic optical system is L1, and L1≤20mm.

[0022] In an embodiment, the total length of the optical system of the microscopic optical system is TTL, and TTL=21mm.

[0023] In an embodiment, the numerical aperture of the microscopic optical system is NA, and NA≤0.3.

[0024] In an embodiment, the image side of the microscopic optical system is A, and -0.1°≤A≤0.1°.

[0025] The utility model also proposes a kind of microscopic objective, comprising:

[0026] Barrel; and,

[0027] A microscopic optical system is disposed inside the microscope tube, and the microscopic optical system is as described above.

[0028] In the technical solution of this utility model, by rationally designing the first lens, second lens, third lens, fourth lens, fifth lens, sixth lens, and seventh lens, -6mm≤f1≤-4mm; and 5mm≤f2≤7mm; and -11mm≤f3≤-9mm; and 19mm≤f4≤23mm; and -19mm≤f5≤-17mm; and 16mm≤f6≤19mm; and 22mm≤f7≤26mm, so that fw=10mm. With this setting, a microscopic optical system with a design wavelength range of 560nm-640nm can be obtained, with axial chromatic aberration less than 1.5μm, transverse chromatic aberration less than 0.5μm, and a theoretical limiting resolution of 1.2μm. This achieves a better balance between long working distance and large numerical aperture, while also considering imaging resolution and field of view, meeting the requirements of high-precision microscopic imaging. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0030] Figure 1 A schematic diagram of the structure of an embodiment of the microscopic optical system provided by this utility model;

[0031] Figure 2 for Figure 1 MTF curve of a medium-sized microscopic optical system;

[0032] Figure 3 for Figure 1 Axial chromatic aberration curve of a medium-sized microscopic optical system;

[0033] Figure 4 for Figure 1 Transverse chromatic aberration curve of a medium-sized microscopic optical system;

[0034] Figure 5 for Figure 1 Image field curvature curve of a medium-sized microscopic optical system.

[0035] Explanation of icon numbers:

[0036] 100, Microscopic optical system; 1, First lens; 2, Second lens; 3, Third lens; 4, Fourth lens; 5, Fifth lens; 6, Sixth lens; 7, Seventh lens.

[0037] The purposes, functional features and advantages of the utility model will be further described with reference to the drawings in combination with embodiments. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0039] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0040] In addition, if the embodiments of the utility model involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one feature. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0041] The utility model provides a kind of microscopic optical system. It aims at improving the difficulty of balancing long working distance and large numerical aperture of existing microscopic objective lens structure, and difficult to meet the demand of high-precision microscopic imaging.

[0042] Please refer to Figure 1In an embodiment of the utility model, this micro optical system 100 has the corresponding setting of the entrance pupil side and the exit pupil side along the optical axis direction, the micro optical system 100 includes the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7 that are sequentially arranged from the entrance pupil side to the exit pupil side;

[0043] Wherein, the focal length of the micro optical system 100 is fw, the focal length of the first lens 1 is f1, the focal length of the second lens 2 is f2, the focal length of the third lens 3 is f3, the focal length of the fourth lens 4 is f4, the focal length of the fifth lens 5 is f5, the focal length of the sixth lens 6 is f6, the focal length of the seventh lens 7 is f7, and the micro optical system 100 satisfies the following conditions:

[0044] fw=10mm; and -6mm≤f1≤-4mm; and 5mm≤f2≤7mm; and -11mm≤f3≤-9mm; and 19mm≤f4≤23mm; and -19mm≤f5≤-17mm; and 16mm≤f6≤19mm; and 22mm≤f7≤26mm.

[0045] In the technical scheme of the utility model, the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7 are reasonably designed, -6mm≤f1≤-4mm; and 5mm≤f2≤7mm; and -11mm≤f3≤-9mm; and 19mm≤f4≤23mm; and -19mm≤f5≤-17mm; and 16mm≤f6≤19mm; and 22mm≤f7≤26mm, so that fw=10mm. By such setting, the micro optical system 100 with the design waveband of 560nm-640nm can be obtained, and the axial chromatic aberration is less than 1.5μm, the off-axis chromatic aberration is less than 0.5μm, and the theoretical limit resolution can reach 1.2μm, so that a better balance between long working distance and large numerical aperture can be realized, and the imaging resolution and field range are considered at the same time, and the demand of high-precision microscopic imaging is met.

[0046] It should be noted that the utility model is not limited to the specific numerical value of the focal length of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7, for example, in an embodiment of the utility model, the focal length f1 of the first lens 1 can be set to -6mm, -5.9mm, -5.8mm, -5.7mm, -5.6mm, -5.5mm, -5.4mm, -5.3mm, -5.2mm, -5.1mm, -5mm, -4.9mm, -4.8mm, -4.7mm, -4.6mm, -4.5mm, -4.4mm, -4.3mm, -4.2mm, -4.1mm, -4mm……

[0047] The focal length f2 of the second lens 2 can be set to 5mm, 5.1mm, 5.2mm, 5.3mm, 5.4mm, 5.5mm, 5.6mm, 5.7mm, 5.8mm, 5.9mm, 6mm, 6.1mm, 6.2mm, 6.3mm, 6.4mm, 6.5mm, 6.6mm, 6.7mm, 6.8mm, 6.9mm, 7mm……

[0048] The focal length f3 of the third lens 3 can be set to -11mm, -10.9mm, -10.8mm, -10.7mm, -10.6mm, -10.5mm, -10.4mm, -10.3mm, -10.2mm, -10.1mm, -10mm, -9.9mm, -9.8mm, -9.7mm, -9.6mm, -9.5mm, -9.4mm, -9.3mm, -9.2mm, -9.1mm, -9mm……

[0049] The focal length f4 of the fourth lens 4 can be set to 19mm, 19.1mm, 19.2mm, 19.3mm, 19.4mm, 19.5mm, 19.6mm, 19.7mm, 19.8mm, 19.9mm, 20mm, 20.1mm, 20.2mm, 20.3mm, 20.4mm, 20.5mm, 20.6mm, 20.7mm, 20.8mm, 20.9mm, 21mm, 21.1mm, 21.2mm, 21.3mm, 21.4mm, 21.5mm, 21.6mm, 21.7mm, 21.8mm, 21.9mm, 22mm, 22.1mm, 22.2mm, 22.3mm, 22.4mm, 22.5mm, 22.6mm, 22.7mm, 22.8mm, 22.9mm, 23mm……

[0050] The focal length f5 of the fifth lens 5 can be set to -19mm, -18.9mm, -18.8mm, -18.7mm, -18.6mm, -18.5mm, -18.4mm, -18.3mm, -18.2mm, -18.1mm, -18mm, -17.9mm, -17.8mm, -17.7mm, -17.6mm, -17.5mm, -17.4mm, -17.3mm, -17.2mm, -17.1mm, -17mm…

[0051] The focal length f6 of the sixth lens 6 can be set to 16mm, 16.1mm, 16.2mm, 16.3mm, 16.4mm, 16.5mm, 16.6mm, 16.7mm, 16.8mm, 16.9mm, 17mm, 17.1mm, 17.2mm, 17.3mm, 17.4mm, 17.5mm, 17.6mm, 17.7mm, 17.8mm, 17.9mm, 18mm, 18.1mm, 18.2mm, 18.3mm, 18.4mm, 18.5mm, 18.6mm, 18.7mm, 18.8mm, 18.9mm, 19mm…

[0052] The focal length of the seventh lens 7 can be set to 22mm, 22.1mm, 22.2mm, 22.3mm, 22.4mm, 22.5mm, 22.6mm, 22.7mm, 22.8mm, 22.9mm, 23mm, 23.1mm, 23.2mm, 23.3mm, 23.4mm, 23.5mm, 23.6mm, 23.7mm, 23.8mm, 23.9mm, 24mm, 24.1mm, 24.2mm, 24.3mm, 24.4mm, 24.5mm, 24.6mm, 24.7mm, 24.8mm, 24.9mm, 25mm, 25.1mm, 25.2mm, 25.3mm, 25.4mm, 25.5mm, 25.6mm, 25.7mm, 25.8mm, 25.9mm, 26mm…

[0053] It is conceivable that in other embodiments of the utility model, the focal length of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7 can also be set to other values, as long as they are within the corresponding value range, and the utility model does not limit this.

[0054] Further, in order to reduce the machining cost of the microscopic optical system 100, in a further embodiment of the utility model, the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7 are all arranged as spherical lenses, so arranged, the spherical lenses are easy to machine, can ensure low machining cost, have low assembly sensitivity and improve the yield of finished products.

[0055] Further, in order to reduce the machining cost of the microscopic optical system 100, in a further embodiment of the utility model, the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7 are all arranged as spherical lenses, so arranged, the spherical lenses are easy to machine, can ensure low machining cost, have low assembly sensitivity and improve the yield of finished products.

[0056] It can be understood that, in the utility model, the focal power of the first lens 1 is negative, the focal power of the second lens 2 is positive, the focal power of the third lens 3 is negative, the focal power of the fourth lens 4 is positive, the focal power of the fifth lens 5 is negative, the focal power of the sixth lens 6 is positive, and the focal power of the seventh lens 7 is positive. So arranged, the focal powers of the multiple lenses are reasonably matched to ensure the imaging quality of the microscopic optical system 100.

[0057] Of course, the utility model is not limited to the specific shape of the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6 and the seventh lens 7. In an embodiment of the utility model, the entrance pupil side of the first lens 1 is concave, and the exit pupil side is concave. The entrance pupil side of the second lens 2 is concave, and the exit pupil side is convex. The entrance pupil side of the third lens 3 is concave, and the exit pupil side is convex. The entrance pupil side of the fourth lens 4 is concave, and the exit pupil side is convex. The entrance pupil side of the fifth lens 5 is convex, and the exit pupil side is concave. The entrance pupil side of the sixth lens 6 is convex, and the exit pupil side is convex. The entrance pupil side of the seventh lens 7 is convex, and the exit pupil side is concave.

[0058] Further, in an embodiment of the utility model, the second lens 2 and the third lens 3 are connected by cementing, so arranged, the chromatic aberration of the zoom lens can be better corrected, and the cementing connection can also reduce the loss of light energy and increase the imaging clarity. Therefore, the cementing member is reasonably used to improve the image quality of the optical system.

[0059] In another embodiment of the utility model, the fifth lens 5 and the sixth lens 6 are glued connection, so set up, also can better correct the chromatic aberration of zoom lens, to reduce the light energy loss, increase the imaging definition, therefore, reasonable use glue joint, let optical component improve optical system image quality.

[0060] Specifically, in the embodiment, the second lens 2 and the third lens 3 are glued connection, and the fifth lens 5 and the sixth lens 6 are glued connection.

[0061] The entrance pupil diameter of the microscopic optical system 100 is φ1, and φ1≤6.0mm. By setting up in this way, more light can be irradiated on the first lens 1, so that the observation result is more clear.

[0062] Also need to be explained is that the utility model also does not limit the specific value of the entrance pupil diameter, for example, in the utility model, the value of the entrance pupil diameter can be set to 6mm, 5.9mm, 5.8mm, 5.7mm, 5.6mm, 5.5mm, 5.4mm, 5.3mm, 5.2mm, 5.1mm…… When actually setting up, only need to ensure that the observation result can be clearly observed.

[0063] Of course, in other embodiments of the utility model, the entrance pupil diameter can also be set to other values, as long as it is within the value range, and the utility model does not limit this.

[0064] It also needs to be explained that in another embodiment of the utility model, the effective field of view of the image of the microscopic optical system 100 is φ2, and φ2≤1mm. By setting up in this way, it is ensured that the microscopic optical system 100 can accurately and sufficiently display the measured object on the image plane of the microscopic optical system 100.

[0065] In an embodiment of the utility model, the working distance of the microscopic optical system 100 is L1, and L1≤20mm. By setting up in this way, the long working distance of the microscopic optical system 100 can be realized, so that the measurement accuracy of the microscopic optical system 100 is improved, and the risk of mutual interference with the measured object is reduced.

[0066] It can be understood that the utility model does not limit the specific value of the working distance of the microscopic optical system 100, for example, in an embodiment of the utility model, the specific value of the working distance of the microscopic optical system 100 can be set to 20mm, 19mm, 18mm, 17mm, 16mm, 15mm, 14mm, 13mm, 12mm, 11mm…… When actually setting up, it can be selected according to the demand.

[0067] Of course, in other embodiments of the present application, the working distance of the microscopic optical system 100 can also be set to other values, as long as it is within a certain range, and the present application does not limit it.

[0068] In another embodiment of the present application, the total optical length of the microscopic optical system 100 is TTL, TTL = 21mm. By setting it in this way, the length of the microscopic optical system 100 can be reduced, and the structure is compact, realizing the small volume effect of the microscopic optical system 100.

[0069] In another embodiment of the present application, the numerical aperture of the microscopic optical system 100 is NA, NA ≤ 0.3. It can be understood that such a setting can ensure the high resolution of the microscopic optical system 100, so that the microscopic optical system 100 can maintain high resolution while ensuring its working distance.

[0070] At the same time, the microscopic optical system 100 in the present application can maintain a large numerical aperture (NA) while achieving a longer working distance, thereby balancing the two characteristics of numerical aperture and working distance, and taking into account the high-precision imaging and complex operation requirements.

[0071] In addition, in other embodiments of the present application, the image side main wavelength of the microscopic optical system 100 is A, -0.1° ≤ A ≤ 0.1°.

[0072] In a specific embodiment of the present application, the entrance pupil side S2 of the first lens 1 is concave, and the exit pupil side S3 is concave; the entrance pupil side S4 of the second lens 2 is concave, and the exit pupil side S5 is convex; the entrance pupil side S5 of the third lens 3 is concave, and the exit pupil side S6 is convex; the entrance pupil side S7 of the fourth lens 4 is concave, and the exit pupil side S8 is convex; the entrance pupil side S9 of the fifth lens 5 is convex, and the exit pupil side S10 is concave; the entrance pupil side S10 of the sixth lens 6 is convex, and the exit pupil side S11 is convex; the entrance pupil side S12 of the seventh lens 7 is convex, and the exit pupil side S13 is concave.

[0073] It should be noted that in the present embodiment, the radius, center distance and refractive index of each type of lens in the microscopic optical system 100 are shown in Table 1 as follows:

[0074] Table 1

[0075] radius center distance refractive index object plane infinity 1 (stop) infinity 1.23 2 -6.58 1 2.00 3 25.83 0.8 4 -130.55 3.2 1.95 5 -5.52 3.0 2.00 6 -16.6 0.2 7 -81.03 3.3 1.56 8 -10.6 0.2 9 55.87 1 1.94 10 12.92 3.6 1.56 11 -38.62 0.2 12 13.42 2.8 1.59 13 234.10 20

[0076] Wherein, the unit of the radius is millimeter (mm), and the unit of the center distance is millimeter (mm).

[0077] It should be noted that in the embodiment, the MTF curve of the microscopic optical system 100 is as shown in the figure Figure 2 In the embodiment, the microscopic optical system 100 can always ensure a contrast of 550lp / mm greater than 0.3.

[0078] It should also be noted that in the embodiment, the axial chromatic aberration curve of the microscopic optical system 100 is as shown in the figure Figure 3 The sagittal chromatic aberration curve of the microscopic optical system 100 is as shown in the figure Figure 4 The image field curvature curve of the microscopic optical system 100 is as shown in the figure Figure 5

[0079] The utility model also proposes a kind of microscopic objective, the microscopic objective includes lens barrel and microscopic optical system 100, the microscopic optical system 100 is located in the lens barrel, and the specific structure of this microscopic optical system 100 refers to above-mentioned embodiment, since the present microscopic objective has adopted all technical solutions of above-mentioned all embodiments, at least have all beneficial effects brought by the technical scheme of above-mentioned embodiment, here no longer repeat.

[0080] It can be understood that in the utility model, the microscopic objective is matched with 200mm standard focal length barrel lens, and 20X magnification effect can be realized, so as to be able to meet the precise imaging demand under different application scenarios.

[0081] The above is only exemplary embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation made by using the utility model specification and drawing contents, or direct / indirect application in other related technical fields is included in the patent protection range of the utility model.​

Claims

1. A microscopic optical system, characterized by, The microscopic optical system has an entrance pupil side and an exit pupil side arranged correspondingly along the optical axis direction, and comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens and a seventh lens arranged in sequence from the entrance pupil side to the exit pupil side; Wherein, the focal length of the microscopic optical system is fw, the focal length of the first lens is f1, the focal length of the second lens is f2, the focal length of the third lens is f3, the focal length of the fourth lens is f4, the focal length of the fifth lens is f5, the focal length of the sixth lens is f6, and the focal length of the seventh lens is f7, and the microscopic optical system satisfies the following conditions: fw=10mm; and -6mm≤f1≤-4mm; and 5mm≤f2≤7mm; and -11mm≤f3≤-9mm; and 19mm≤f4≤23mm; and -19mm≤f5≤-17mm; and 16mm≤f6≤19mm; and 22mm≤f7≤26mm.

2. The micro-optical system of claim 1, wherein The power of the first lens is negative, and the entrance pupil side surface of the first lens is concave, and the exit pupil side surface is concave The power of the second lens is positive, and the entrance pupil side surface of the second lens is concave, and the exit pupil side surface is convex; The power of the third lens is negative, and the entrance pupil side surface of the third lens is concave, and the exit pupil side surface is convex; The power of the fourth lens is positive, and the entrance pupil side surface of the fourth lens is concave, and the exit pupil side surface is convex; The power of the fifth lens is negative, and the entrance pupil side surface of the fifth lens is convex, and the exit pupil side surface is concave; The power of the sixth lens is positive, and the entrance pupil side surface of the sixth lens is convex, and the exit pupil side surface is convex; The power of the seventh lens is positive, and the entrance pupil side surface of the seventh lens is convex, and the exit pupil side surface is concave.

3. The micro-optical system of claim 2, wherein The second lens and the third lens are glued together; The fifth lens and the sixth lens are glued together.

4. The micro-optical system of claim 1, wherein The entrance pupil diameter of the microscopic optical system is φ1, and φ1≤6.0mm.

5. The micro-optical system of claim 1, wherein The effective field of view on the image side of the microscopic optical system is φ2, and φ2≤1mm.

6. The micro-optical system of claim 1, wherein The working distance of the microscopic optical system is L1, and L1≤20mm.

7. The micro-optical system of claim 1, wherein The total optical length of the microscopic optical system is TTL, and TTL=21mm.

8. The micro-optical system of claim 1, wherein The numerical aperture of the microscopic optical system is NA, and NA≤0.

3.

9. The micro-optical system of claim 1, wherein The telecentricity of the image side main wavelength of the microscopic optical system is A, and -0.1°≤A≤0.1°.

10. A microscope objective, characterized in that The microscopic objective lens comprises: a lens barrel; and a microscopic optical system arranged in the lens barrel, wherein the microscopic optical system is as claimed in any one of claims 1-9.

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