Element content analysis device based on X-ray photoelectron spectroscopy

Abstract

The utility model discloses an element content analysis device based on X-ray photoelectron spectroscopy, and relates to the technical field of element content analysis, the element content analysis device comprises a base and an operation box arranged on the top surface of the base, and high-vacuum electron tubes are arranged outside the operation box and the base through extension plates; the extension plate is connected to the outer wall of the high-vacuum electronic tube in a sleeving mode, a sealing window is formed in the outer wall of the side, opposite to the high-vacuum electronic tube, of the operation box, a sample chamber is further formed in the operation box, and a sample and a detector are arranged in the sample chamber. A data visualization module and a data management module which are electrically connected with the detector are arranged on the outer wall of the operation box, and an air pump is further arranged on the top face of the operation box. According to the utility model, the element content of each layer is analyzed through the X-ray photoelectron spectroscopy, so that the variation trend of the element content in the material along with the depth can be obtained, and the distribution condition of the elements in the nano material can be comprehensively mastered.

Description

Technical Field

[0001] This utility model relates to the field of elemental content analysis technology, specifically to an elemental content analysis device based on X-ray photoelectron spectroscopy. Background Technology

[0002] Modern science and technology are developing rapidly, making breakthroughs in many fields such as materials science, quantum physics, and electronic technology. Research in disciplines such as materials science, chemistry, biomedicine, and environmental science is becoming increasingly in-depth, and the requirements for analyzing the microstructure and elemental composition of materials are becoming higher and higher.

[0003] Traditional elemental analysis methods, such as chemical titration, atomic absorption spectrometry, and inductively coupled plasma atomic emission spectrometry, have certain limitations in dealing with complex material systems, trace element analysis, and element valence state analysis. They have limited sensitivity for trace element detection, rely on the experience of experimental personnel, and are cumbersome.

[0004] To address these issues, we designed an elemental analysis device based on X-ray photoelectron spectroscopy. Utility Model Content

[0005] The purpose of this invention is to provide an elemental content analysis device based on X-ray photoelectron spectroscopy to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention provides an elemental content analysis device based on X-ray photoelectron spectroscopy, comprising a base and an operation box disposed on the top surface of the base. A high-vacuum electron tube is disposed outside the operation box and the base via an extension plate. The extension plate is sleeved on the outer wall of the high-vacuum electron tube. A sealed window is provided on the outer wall of the operation box on the side opposite to the high-vacuum electron tube. A sample chamber is also provided on the operation box, and a sample and a detector are disposed in the sample chamber. A data visualization module and a data management module electrically connected to the detector are disposed on the outer wall of the operation box. An air pump is also disposed on the top surface of the operation box.

[0007] Furthermore, the inner bottom wall of the sample chamber is provided with a sliding groove, a slider is slidably connected in the sliding groove, the other end of the slider is connected to a bottom block, a vessel is placed on the bottom block, and the sample is placed on the vessel.

[0008] Furthermore, a universal ball is rotatably connected inside the base block, a rubber pad is connected to the surface of the universal ball, a connecting rod is connected to one end of the universal ball away from the base block, and the other end of the connecting rod is connected to the bottom wall of the vessel.

[0009] Furthermore, the top surface of the control box is provided with an air extraction port, the top surface of the control box is connected to a connecting plate, the bottom surface of the connecting plate is open, the top surface of the connecting plate is connected to a top plate, and the air extraction end of the air pump extends through the outer wall of the connecting plate into the connecting plate.

[0010] Furthermore, the control box is equipped with a baffle, and a sealing gasket is connected to the outer wall of the baffle.

[0011] Furthermore, a handle is connected to the outer wall of the baffle, and the surface of the handle is provided with anti-slip texture.

[0012] Furthermore, a power supply box is connected to the outer wall of the base, and the power supply box is electrically connected to the data visualization module, the data management module, and the detector.

[0013] Furthermore, the baffle is provided with a hinge, and the baffle and the control box are connected by the hinge.

[0014] The beneficial effects of this invention are as follows: Starting the power supply and air pump inside the apparatus extracts the air from the operating chamber, creating a vacuum. X-rays are generated in the high-vacuum electron tube and irradiate the sample chamber through a sealed window, generating photoelectrons. An energy analyzer and detector are installed in the sample chamber. The photoelectrons strike the detector, and the generated electrical signal is amplified and processed, then converted into a digital signal. The quantity and energy information of the photoelectrons are recorded. The information detected by the detector is sent to the data visualization module and data management module to form images and data. By analyzing the elemental content of each layer using X-ray photoelectron spectroscopy, the changing trend of elemental content within the material with depth can be obtained. This helps to comprehensively understand the distribution of elements in nanomaterials, reducing reliance on manual operation by experimental personnel, and making the process convenient and accurate.

[0015] The beneficial effects of this invention are as follows: The vessel is equipped with a universal ball, allowing it to tilt in different directions. The bottom block slides within the sample chamber via a slider, facilitating adjustments to the vessel's position and improving the accuracy of the analytical testing. The device comprehensively understands the material composition and structure by analyzing the elemental content and valence state changes of nanomaterials using X-ray photoelectron spectroscopy combined with argon ion sputtering. It predicts material failure and provides early warning by analyzing the valence state trends of sputtered nanomaterials and high-performance polymer materials. By analyzing the valence state trends of elements from the surface to a depth of several micrometers in high-performance polymer materials, changes in internal structure and chemical properties can be detected before significant macroscopic failure occurs. Alternating ion depth sputtering exfoliation and X-ray analysis are used to study nanomaterials and high-performance polymer materials in depth, providing a comprehensive understanding of the material's compositional distribution. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the baffle in this utility model;

[0018] Figure 3 This is a schematic diagram of the sample chamber structure in this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the vessel in this utility model;

[0020] Figure 5 for Figure 3 Enlarged view of point A in the middle.

[0021] In the diagram: 1. Base; 2. High-vacuum electron tube; 3. Extension plate; 4. Power supply box; 5. Operation box; 501. Sample chamber; 502. Sealed window; 503. Slide groove; 504. Slider; 6. Connecting plate; 7. Air pump; 8. Data visualization module; 9. Data management module; 10. Top plate; 11. Baffle; 12. Handle; 13. Detector; 14. Vessel; 15. Connecting rod; 16. Omnidirectional ball; 17. Base block. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1 as well as Figure 3 The present invention provides a technical solution: an element content analysis device based on X-ray photoelectron spectroscopy, including a base 1 and an operation box 5 disposed on the top surface of the base 1, and a high vacuum electron tube 2 disposed outside the operation box 5 and the base 1 through an extension plate 3;

[0024] An extension plate 3 is fitted onto the outer wall of the high-vacuum electron tube 2. A sealed window 502 is provided on the outer wall of the operating box 5 opposite to the high-vacuum electron tube 2. The sealed window 502 is treated with special sealing materials and processes; since this is existing technology, it will not be described in detail. This ensures effective isolation between the internal environment of the operating box 5 and the working environment of the high-vacuum electron tube 2, while allowing X-rays generated by the high-vacuum electron tube 2 to pass smoothly into the operating box 5 and act on the sample. The operating box 5 also has a sample chamber 501, which contains the sample and a detector 13. The detector 13 is used to capture the photoelectron signals generated after the sample is excited by X-rays. The detector 13 has high sensitivity and high precision, accurately detecting photoelectrons of different energies and converting these optical signals into electrical signals for subsequent processing and analysis. The outer wall of the operating box 5 is equipped with a data visualization module 8 and a data management module 9, which are electrically connected to the detector 13. The data visualization module 8 is mainly responsible for presenting the data collected and processed by the detector 13 to the operator in an intuitive and easy-to-understand manner. It typically uses a display screen and related software programs to show key information such as the content and valence state of each element in the sample in the form of charts and curves, making it convenient for operators to quickly understand the analysis results. The data management module 9 is responsible for storing, organizing and managing the data generated throughout the analysis process. It can perform data backup, retrieval and analysis operations to ensure data security and traceability. An air pump 7 is also installed on the top surface of the operation box 5.

[0025] In practice, when testing the sample, the staff first places the sample in the container 14, then closes the baffle 11, starts the power supply and air pump 7 in the container 14, and extracts the air from the operating box 5 to create a vacuum. X-rays are generated in the high-vacuum electron tube 2 and irradiate the sample chamber 501 through the sealed window 502, generating photoelectrons. The sample chamber 501 is equipped with an energy analyzer structure and a detector 13. The photoelectrons are incident on the detector 13, and the generated electrical signal is amplified and processed, then converted into a digital signal. The number and energy information of the photoelectrons are recorded. The information detected by the detector 13 is sent to the data visualization module 8 and the data management module 9 to form images and data. By analyzing the elemental content of each layer through X-ray photoelectron spectroscopy, the trend of elemental content changes with depth inside the material can be obtained, which helps to fully understand the distribution of elements in nanomaterials, reduces the dependence on manual operation by experimental personnel, and makes the process convenient and accurate.

[0026] See Figure 3 as well as Figure 5As shown, a groove 503 is provided on the inner bottom wall of the sample chamber 501. A slider 504 is slidably connected in the groove 503. The other end of the slider 504 is connected to a base block 17. A container 14 is placed on the base block 17, and the sample is placed on the container 14. A universal ball 16 is rotatably connected in the base block 17. A rubber pad is attached to the surface of the universal ball 16. The rubber pad has good flexibility and friction. On the one hand, it can effectively protect the universal ball 16 and prevent it from being damaged by friction during rotation. On the other hand, the rubber pad increases the friction with surrounding components, making the universal ball more flexible and responsive. After being adjusted to a specific angle, the ball 16 can remain relatively stable, preventing it from rotating arbitrarily due to external interference. The end of the ball 16 away from the base block 17 is connected to a connecting rod 15, and the other end of the connecting rod 15 is connected to the bottom wall of the vessel 14. The operator can move the vessel 14 horizontally by moving the slider 504 in the groove 503. At the same time, with the help of the rotation of the ball 16, the vessel 14 can be finely adjusted at multiple angles so that the sample can reach the optimal analysis position in the sample chamber 501 to better receive X-ray irradiation.

[0027] In practice, the vessel 14 is also equipped with a universal ball 16, which allows the vessel 14 to be tilted in different directions. The base block 17 slides in the sample chamber 501 via the slider 504, which facilitates the adjustment of the position of the vessel 14 and makes the device more accurate during analysis and testing.

[0028] See Figure 2 as well as Figure 4 The top surface of the control box 5 has an air extraction port, and a connecting plate 6 is connected to the top surface of the control box 5. The bottom surface of the connecting plate 6 is open, and a top plate 10 is connected to the top surface of the connecting plate 6. The air extraction end of the air pump 7 extends through the outer wall of the connecting plate 6 and into the connecting plate 6. The connecting plate 6 and the control box 5 are fixed and sealed with bolts and sealant. The tightening force of the bolts is strictly controlled to ensure a stable connection between the connecting plate 6 and the control box 5; the sealant fills the gap between the two to prevent gas leakage at the connection. Special attention was paid to the sealing between the air pump 7 and the outer wall of the connecting plate 6 when installing the air extraction end. A double seal of sealing sleeve and sealant is used to ensure that no gas leaks from the connection during the air extraction process. The air pump 7 extracts gas from the operating chamber 5 through its suction end, which then passes through the connecting plate 6, thereby regulating the gas pressure inside the operating chamber 5 and creating suitable environmental conditions for sample analysis. The operating chamber 5 is equipped with a baffle 11, and a sealing gasket is connected to the outer wall of the baffle 11. The top surface of the operating chamber 5 has an air extraction port, and the top surface of the operating chamber 5 is connected to the connecting plate 6. The bottom surface of the connecting plate 6 is open, and the top surface of the connecting plate 6 is connected to a top plate 10. The suction end of the air pump 7 extends through the outer wall of the connecting plate 6 and into the connecting plate 6. The baffle 11 on the operating chamber 5 and the sealing gasket on the outer wall of the baffle 11 effectively prevent gas leakage or external impurities from entering the operating chamber 5.

[0029] See Figure 2 A handle 12 is connected to the outer wall of the baffle 11. The surface of the handle 12 is provided with anti-slip texture, which can effectively increase the friction between the hand and the handle 12. A hinge is provided on the baffle 11, and the baffle 11 and the operation box 5 are connected by the hinge, so that the baffle 11 can fit tightly with the operation box 5 in the closed state to achieve a good sealing effect; while in the open state, the baffle 11 can be stably held at a specific angle, which is convenient for operators to perform sample placement, equipment maintenance and other operations.

[0030] See Figure 1 A power supply box 4 is connected to the outer wall of the base 1. The power supply box 4 is electrically connected to the data visualization module 8, the data management module 9, and the detector 13. The power supply box 4 achieves electrical connection with the data visualization module 8, the data management module 9, and the detector 13 through careful wiring. When connecting the data visualization module 8, the power cable is led out from inside the power supply box 4 and laid along specific cable trays on the base 1 and the operation box 5 to avoid the cables being exposed and causing safety hazards and possible signal interference. These cables are connected to the data visualization module 8 through specially designed interfaces, which are insulated and secured. Since this is existing technology, it will not be described in detail in this manual and is not shown in the figures.

[0031] It should be noted that the above devices comprehensively understand the composition and structure of nanomaterials by combining X-ray photoelectron spectroscopy with argon ion sputtering analysis of elemental content and valence state changes. By analyzing the valence state trends of sputtered nanomaterials and high-performance polymer materials, material failure can be predicted and early warnings can be given. By analyzing the valence state trends of elements from the surface to a depth of several micrometers in high-performance polymer materials, changes in internal structure and chemical properties can be detected before obvious macroscopic failure occurs. The alternating use of ion depth sputtering exfoliation and X-ray analysis allows for in-depth study of the deep composition distribution of nanomaterials and high-performance polymer materials. Alternating ion depth sputtering exfoliation and X-ray analysis enables precise analysis of the composition at different depths from the surface to the interior of the material.

[0032] Working principle: When testing a sample, the operator first places the sample in the container 14, then closes the baffle 11, and starts the power supply and air pump 7 inside the container 14 to evacuate the air from the operating chamber 5, creating a vacuum. X-rays are generated in the high-vacuum electron tube 2 and irradiate the sample chamber 501 through the sealed window 502, generating photoelectrons. The sample chamber 501 is equipped with an energy analyzer structure and a detector 13. The photoelectrons are incident on the detector 13, and the generated electrical signal is amplified and processed, then converted into a digital signal. The number and energy information of the photoelectrons are recorded and transmitted through the detector 13. The detected information is sent to the data visualization module 8 and the data management module 9 to form images and data. The elemental content of each layer can be analyzed by X-ray photoelectron spectroscopy to obtain the trend of elemental content changes with depth inside the material. This helps to fully understand the distribution of elements in nanomaterials, reduces the reliance on manual operation by experimental personnel, and makes the process convenient and accurate. The vessel 14 is also equipped with a universal ball 16, which can tilt the vessel 14 in different directions. The bottom block 17 slides in the sample chamber 501 via the slider 504, which makes it easy to adjust the position of the vessel 14 and make the device more accurate during analysis and testing.

[0033] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An elemental content analysis device based on X-ray photoelectron spectroscopy, comprising a base (1) and an operation box (5) disposed on the top surface of the base (1), wherein a high-vacuum electron tube (2) is disposed outside the operation box (5) and the base (1) via an extension plate (3). Its characteristics are: The extension plate (3) is sleeved on the outer wall of the high vacuum electron tube (2). A sealing window (502) is provided on the outer wall of the operation box (5) opposite to the high vacuum electron tube (2). A sample chamber (501) is also provided on the operation box (5). A sample and a detector (13) are provided in the sample chamber (501). A data visualization module (8) and a data management module (9) electrically connected to the detector (13) are provided on the outer wall of the operation box (5). An air pump (7) is also provided on the top surface of the operation box (5).

2. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 1, characterized in that: The inner bottom wall of the sample chamber (501) is provided with a groove (503), and a slider (504) is slidably connected in the groove (503). The other end of the slider (504) is connected to a bottom block (17), and a vessel (14) is provided on the bottom block (17). The sample is placed on the vessel (14).

3. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 2, characterized in that: A universal ball (16) is rotatably connected inside the base block (17). A rubber pad is connected to the surface of the universal ball (16). A connecting rod (15) is connected to one end of the universal ball (16) away from the base block (17). The other end of the connecting rod (15) is connected to the bottom wall of the vessel (14).

4. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 3, characterized in that: The top surface of the operation box (5) is provided with an air extraction port. The top surface of the operation box (5) is connected to a connecting plate (6). The bottom surface of the connecting plate (6) is open. The top surface of the connecting plate (6) is connected to a top plate (10). The air extraction end of the air pump (7) extends through the outer wall of the connecting plate (6) into the connecting plate (6).

5. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 4, characterized in that: The operation box (5) is provided with a baffle (11), and a sealing gasket is connected to the outer wall of the baffle (11).

6. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 5, characterized in that: A handle (12) is connected to the outer wall of the baffle (11), and the surface of the handle (12) is provided with anti-slip texture.

7. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 6, characterized in that: A power supply box (4) is connected to the outer wall of the base (1), and the power supply box (4) is electrically connected to the data visualization module (8), the data management module (9) and the detector (13).

8. The elemental content analysis device based on X-ray photoelectron spectroscopy as described in claim 7, characterized in that: The baffle (11) is provided with a hinge, and the baffle (11) and the operation box (5) are connected by the hinge.

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