MPCVD equipment parameter acquisition equipment

Abstract

The utility model relates to an MPCVD equipment parameter acquisition device, which belongs to the technical field of data acquisition, and comprises an equipment box and a control module, an installation box is slidably installed in the equipment box, an installation structure is arranged between the control module and the installation box, the installation structure comprises a clamping plate fixedly installed on the surface of the opposite side of the control module, and the clamping plate is fixedly installed on the surface of the opposite side of the control module. Arc-shaped clamping grooves are formed in the surfaces of the clamping plates, two fixing plates are fixedly mounted in the mounting box, and grooves are formed in the upper surfaces of the fixing plates. According to the parameter acquisition equipment for the MPCVD equipment, connection and quick disassembly between the control module and the fixed plate can be realized through mutual matching of the clamping plate and the clamping groove as well as the clamping column and the arc-shaped clamping groove, so that when a certain control module fails, the equipment does not need to be integrally replaced or tedious disassembly is not needed, and only the control module needs to be conveniently taken down from the mounting box; therefore, the maintenance time is greatly shortened, the maintenance cost is reduced, and the use efficiency and the economic benefit of the equipment are improved.

Description

Technical Field

[0001] This utility model relates to the field of data acquisition technology, specifically to an MPCVD equipment parameter acquisition device. Background Technology

[0002] MPCVD equipment, or microwave plasma chemical vapor deposition equipment, is an important device for preparing high-quality, high-purity crystal materials. MPCVD equipment parameter acquisition equipment is a specialized system or device used to monitor, record, and analyze key parameters during the operation of MPCVD equipment.

[0003] In traditional MPCVD equipment parameter acquisition devices, the sensor module, data acquisition card module, and communication module are tightly integrated. When any one of these modules fails, the entire device often needs to be replaced or a complex disassembly operation is required to troubleshoot and repair the problem, which increases maintenance time and cost. Therefore, a new MPCVD equipment parameter acquisition device is proposed to solve the above problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an MPCVD equipment parameter acquisition device that is easy to maintain and solves the problem that the sensor module, data acquisition card module, and communication module are tightly integrated in existing parameter acquisition devices, making maintenance and upgrades inconvenient.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an MPCVD equipment parameter acquisition device, comprising an equipment box and a control module, wherein an installation box is slidably installed inside the equipment box, and an installation structure is provided between the control module and the installation box;

[0006] The installation structure includes a card plate fixedly installed on the opposite side of the control module. The card plate has an arc-shaped slot on its surface. Two fixing plates are fixedly installed inside the installation box. The upper surface of the fixing plate has a groove, and the inner surface of the groove has a slot. Two locking posts are provided in the slot. A sliding locking component is provided between the device box and the installation box. An elastic component is provided between the slot and the locking post.

[0007] Furthermore, a controller is fixedly installed on the top of the device box, and a connection port is provided on the surface of the control module.

[0008] Furthermore, there are two arc-shaped slots, which are located on the upper surface and the lower surface of the card plate, respectively.

[0009] Furthermore, the grooves and slots are located on opposite sides of the two fixing plates, and there are multiple grooves and slots on each fixing plate.

[0010] Furthermore, the sliding locking assembly includes a magnetic frame fixedly installed on one side surface of the device box, a magnetic plate fixedly installed on one side surface of the mounting box, a limit groove opened on each opposite side surface inside the device box, and a limit slider inserted into the limit groove fixedly installed on each opposite side surface of the mounting box.

[0011] Furthermore, the elastic component includes a top spring fixedly installed on the surface of the card post, and an installation groove is provided inside the card slot, with one end of the top spring fixedly installed in the installation groove.

[0012] Furthermore, there are two locking posts, which are respectively distributed on the top and bottom surfaces inside the slot. The number of top springs and mounting slots is the same as the number of locking posts.

[0013] Furthermore, the card post is adapted to the arc-shaped card slot, the card plate is adapted to the card slot, and the internal dimension of the groove is larger than the external dimension of the card plate.

[0014] Furthermore, four fixing blocks are fixedly installed on the surface of the device box, and fixing holes are opened on the surface of the fixing blocks. Two of the fixing blocks are distributed on the opposite side of the surface of the device box.

[0015] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0016] 1. The parameter acquisition device of this MPCVD equipment can realize the connection and quick disassembly between the control module and the fixed plate through the cooperation of the card plate and card slot, as well as the card column and arc-shaped card slot. This makes it convenient to remove the control module from the mounting box without replacing the entire equipment or disassembling it in case of a failure of a certain control module. This allows for targeted repair or replacement of the faulty module, greatly shortening the maintenance time, reducing maintenance costs, and improving the efficiency and economic benefits of the equipment.

[0017] 2. The MPCVD equipment parameter acquisition device can quickly and stably lock the mounting box in the equipment box through the magnetic attraction of the magnetic frame and magnetic plate, preventing it from sliding accidentally; the cooperation of the limit slider and the limit groove ensures the linearity and stability of the mounting box sliding, avoiding deviation or shaking, facilitating the sliding operation of the mounting box, and making it easy to install, remove or adjust the position of the control module when needed. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the internal structure of the mounting box of this utility model;

[0020] Figure 3 This is a schematic diagram showing the position of the limiting groove in the structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the surface of the structural control module of this utility model;

[0022] Figure 5 This is a cross-sectional view of the structural fixing plate of this utility model.

[0023] In the diagram: 1. Equipment box; 2. Control module; 3. Mounting box; 4. Card plate; 5. Arc-shaped card slot; 6. Fixing plate; 7. Groove; 8. Card slot; 9. Card post; 10. Controller; 11. Connection port; 12. Magnetic frame; 13. Magnetic plate; 14. Limiting slide groove; 15. Limiting slider; 16. Top spring; 17. Mounting groove; 18. Fixing block; 19. Fixing hole. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1 to 5 This embodiment of an MPCVD equipment parameter acquisition device includes an equipment box 1 and a control module 2. An installation box 3 is slidably installed inside the equipment box 1. An installation structure is provided between the control module 2 and the installation box 3. The installation structure includes a card plate 4 fixedly installed on the surface opposite to the control module 2. An arc-shaped card groove 5 is opened on the surface of the card plate 4. Two fixing plates 6 are fixedly installed inside the installation box 3. A groove 7 is opened on the upper surface of the fixing plate 6. A card groove 8 is opened on the inner surface of the groove 7. Two card posts 9 are provided in the card groove 8.

[0026] It should be noted that a controller 10 is fixedly installed on the top of the device box 1, and a connection port 11 is provided on the surface of the control module 2.

[0027] It is understood that the controller 10 is fixedly installed on the top of the device box 1, the control module 2 has a connection port 11 on its surface, the groove 7 and the slot 8 are located on the opposite side of the two fixed plates 6, and there are multiple grooves 7 and slots 8 on each fixed plate 6.

[0028] A sliding locking assembly is provided between the device box 1 and the mounting box 3. The sliding locking assembly includes a magnetic frame 12 fixedly installed on one side surface of the device box 1, a magnetic plate 13 fixedly installed on one side surface of the mounting box 3, a limit groove 14 opened on the opposite side surface inside the device box 1, and a limit slider 15 inserted into the limit groove 14 fixedly installed on the opposite side surface of the mounting box 3.

[0029] An elastic component is provided between the slot 8 and the post 9. The elastic component includes a top spring 16 fixedly installed on the surface of the post 9. An installation groove 17 is provided inside the slot 8, and one end of the top spring 16 is fixedly installed in the installation groove 17.

[0030] There are two locking posts 9, which are located on the top and bottom surfaces of the slot 8, respectively. The number of top springs 16 and mounting slots 17 is the same as the number of locking posts 9.

[0031] It should be noted that the card post 9 is adapted to the arc-shaped card groove 5, the card plate 4 is adapted to the card groove 8, and the internal dimension of the groove 7 is larger than the external dimension of the card plate 4.

[0032] It is understandable that four fixing blocks 18 are fixedly installed on the surface of the equipment box 1. Fixing holes 19 are opened on the surface of the fixing blocks 18, and two fixing blocks 18 are distributed on the opposite side of the surface of the equipment box 1.

[0033] It should be noted that the controller 10 in this embodiment is used to control and manage the entire device; the connection port 11 on the surface of the control module 2 facilitates connection and data transmission with the controller 10 or other devices.

[0034] The working principle of the above embodiments is as follows:

[0035] During installation, the card plate 4 is inserted into the slot 8 through the groove 7. When the card plate 4 is inserted into the slot 8, the card plate 4 presses the card post 9, and the card post 9 compresses the top spring 16 and moves into the mounting groove 17. When the card plate 4 moves to the position corresponding to the arc-shaped slot 5 and the card post 9, the top spring 16 resets and pushes the card post 9 into the arc-shaped slot 5, realizing the snap-fit ​​fixation between the control module 2 and the mounting box 3. When the mounting box 3 slides into the equipment box 1 to the appropriate position, the magnetic frame 12 and the magnetic plate 13 attract each other to achieve preliminary positioning and fixation, preventing the mounting box 3 from shaking randomly in the equipment box 1. When the control module 2 malfunctions, simply slide the mounting box 3 out of the equipment box 1, and then slide the control module 2 and the card plate 4 so that the card post 9 disengages from the arc-shaped slot 5, and the control module 2 can be removed from the mounting box 3.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An MPCVD equipment parameter acquisition device, comprising an equipment box (1) and a control module (2), a mounting box (3) is slidably installed inside the equipment box (1), characterized in that: An installation structure is provided between the control module (2) and the mounting box (3); The installation structure includes a card plate (4) fixedly installed on the opposite side of the control module (2). The card plate (4) has an arc-shaped slot (5) on its surface. The installation box (3) has two fixed plates (6) fixedly installed inside. The upper surface of the fixed plate (6) has a groove (7). The inner surface of the groove (7) has a slot (8). The slot (8) has two locking posts (9). The device box (1) and the installation box (3) are provided with a sliding locking component. The slot (8) and the locking post (9) are provided with an elastic component.

2. The MPCVD apparatus parameter acquisition device according to claim 1, characterized in that: The device box (1) is fixedly mounted with a controller (10) on the top, and the control module (2) is provided with a connection port (11) on its surface.

3. The MPCVD apparatus parameter acquisition device according to claim 1, characterized in that: The number of the arc-shaped slots (5) is two, and the two arc-shaped slots (5) are located on the upper surface and the surface of the card plate (4), respectively.

4. The MPCVD apparatus parameter acquisition device according to claim 1, characterized in that: The groove (7) and slot (8) are located on opposite sides of the two fixing plates (6), and there are multiple grooves (7) and slots (8) on each fixing plate (6).

5. The apparatus according to claim 1, wherein: The sliding locking assembly includes a magnetic frame (12) fixedly installed on one side surface of the device box (1), a magnetic plate (13) fixedly installed on one side surface of the mounting box (3), a limiting groove (14) is opened on the opposite side surface inside the device box (1), and a limiting slider (15) inserted into the limiting groove (14) is fixedly installed on the opposite side surface of the mounting box (3).

6. The MPCVD apparatus parameter acquisition device according to claim 1, characterized in that: The elastic component includes a top spring (16) fixedly installed on the surface of the card post (9), and an installation groove (17) is provided inside the card slot (8). One end of the top spring (16) is fixedly installed in the installation groove (17).

7. The apparatus according to claim 6, wherein: The number of the locking pins (9) is two, and the two locking pins (9) are respectively distributed on the top surface and bottom surface inside the locking groove (8). The number of the top spring (16) and the mounting groove (17) is the same as the number of locking pins (9).

8. The apparatus according to claim 1, wherein: The card post (9) is adapted to the arc-shaped card groove (5), the card plate (4) is adapted to the card groove (8), and the internal dimension of the groove (7) is larger than the external dimension of the card plate (4).

9. The apparatus according to claim 1, wherein: The device box (1) has four fixing blocks (18) fixedly installed on its surface. The fixing blocks (18) have fixing holes (19) on their surfaces. Two of the fixing blocks (18) are distributed on opposite sides of the device box (1).

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