Anti-deformation sliding table module

Abstract

The utility model relates to the technical field of sliding table equipment, and particularly discloses an anti-deformation sliding table module which comprises a base, a second sliding rail arranged on the base, a third sliding rail, a bearing plate arranged on the second sliding rail in a sliding mode, a first sliding rail arranged on the bearing plate and a first sliding module arranged on the first sliding rail in a sliding mode. The second sliding module is arranged on the third sliding rail in a sliding manner; the first driving part drives the first sliding module to slide on the first sliding rail; the second driving part drives the bearing plate to slide on the second sliding rail; the third driving part drives the second sliding module to slide on the third sliding rail; a traditional sliding table module generally can only achieve linear motion in a single direction, the requirement for multi-direction motion under some complex working conditions is difficult to meet, although some two-way sliding table modules exist, the problems that the structure is complex, the motion precision is not high, and the stability is poor exist, the machining efficiency is low, and the product quality is difficult to guarantee are caused.

Description

Technical Field

[0001] This utility model relates to the field of slide table equipment technology, and in particular discloses an anti-deformation slide table module. Background Technology

[0002] Currently, existing slide stage modules are widely used in semiconductor manufacturing, precision machining, optical inspection, and other fields. Traditional slide stage modules typically use aluminum alloy or cast iron as the main material, which is prone to elastic deformation under load, leading to a decrease in positioning accuracy. In addition, traditional guide structures (such as linear guides) are prone to vibration and wear during high-speed movement, further affecting stability. Therefore, developing a slide stage module with high rigidity and low deformation has become an urgent problem to be solved in this field. Utility Model Content

[0003] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide an anti-deformation slide module.

[0004] To achieve the above objectives, the present invention provides an anti-deformation slide module, comprising a base, a second slide rail and a third slide rail disposed on the base, a support plate slidably disposed on the second slide rail, a first slide rail disposed on the support plate, a first sliding module slidably disposed on the first slide rail, a second sliding module slidably disposed on the third slide rail, a first driving member for driving the first sliding module to slide on the first slide rail, a second driving member for driving the support plate to slide on the second slide rail, and a third driving member for driving the second sliding module to slide on the third slide rail;

[0005] The base includes a base plate, a first support plate and a second support plate disposed on the same side of the base plate and parallel to each other, and a first top plate connecting the end of the first support plate away from the base plate and the end of the second support plate away from the base plate.

[0006] The second slide rail is disposed on the first support plate and extends along the Y-axis direction, the second slide rail intersects with the first slide rail and extends along the Z-axis direction, and the third slide rail is disposed on the first top plate and extends along the X-axis direction;

[0007] The first sliding module is located between the first support plate and the second support plate, and the second sliding module is located above the first sliding module;

[0008] The first sliding module performs a compound motion along the Y-axis and Z-axis directions through the linkage control of the first driving component and the second driving component;

[0009] The base plate, the first support plate, and the second support plate are combined to form a U-shape. The base plate, the first support plate, the second support plate, and the first top plate are all made of marble.

[0010] Furthermore, the first sliding module has two parts: one first sliding module is mounted on the first support plate, and the other first sliding module is mounted on the second support plate. The two ends of the first top plate are respectively located in the middle of the two support plates. The two first sliding modules are respectively located on the left and right sides of the first top plate. The second sliding module is mounted on the first top plate. The first sliding module has a carrier for carrying the workpiece to be processed from the outside. The second sliding module is used to assemble the processing tool of the workpiece carried by the processing carrier.

[0011] Furthermore, the first sliding module has a first slide table, a first slider, a lead screw, and a nut. The first slider is slidably mounted on a first slide rail on the support plate and is connected to the first slide table. The lead screw is rotatably mounted on the support plate and is connected to a first driving member. The nut is screwed onto the outside of the lead screw and mounted on the first slide table. The first driving member drives the lead screw to rotate, and the rotating lead screw drives the nut to move the first slide table so that the first slider slides on the first slide rail.

[0012] Furthermore, the second sliding module has a second slider and a second slide table. The second slider is slidably disposed on the second slide rail, and the second slide table is connected to the second slider. The third driving component is a linear motor. The third driving component has a first stator and a first moving component that cooperates with the first stator. The first stator is mounted on the first top plate, and the first moving component is mounted on the second slider. The second slide table is connected to the second slider. After the second slide table is energized through the first moving component, it interacts with the first stator to generate electromagnetic thrust, which drives the second slider to slide along the second slide rail.

[0013] Furthermore, the third slide rail has a third slider, the second driving member is a linear motor, the second driving member has a second stator and a second moving member that cooperates with the second stator, the second stator is mounted on the first side plate, the second moving member is mounted on the third slider, and after the second stator is energized, it interacts with the second moving member to generate electromagnetic thrust to push the third slider to slide along the third slide rail.

[0014] Furthermore, the first slide table is provided with multiple recessed holes, which are arranged along the length and width directions of the first slide table. The recessed holes are used to accommodate workpieces that are processed by external parties.

[0015] Furthermore, displacement sensors for detecting the displacement position of the second slider are provided at both ends of the third slide rail.

[0016] Furthermore, the first top plate is provided with a connecting plate and two first side plates. The two ends of the connecting plate are fixed to the two ends of the first top plate through the two first side plates. The third slide rail is located between the two first side plates, and the length of the connecting plate is greater than the length of the third slide rail. Both first side plates are provided with first anti-collision rubber parts for blocking contact with the second sliding module. The first anti-collision parts are made of elastic material.

[0017] Furthermore, the first top plate is an integral structure, the first top plate is U-shaped, the first top plate has a plate body and protrusions at both ends of the plate body, the protrusions at both ends of the plate body are respectively located on two support plates, and the second sliding module is mounted on the plate body via a third slide rail.

[0018] Furthermore, the base is provided with a flexible cable carrier for storing cables, and the flexible cable carrier has an inner cavity for accommodating cables.

[0019] The beneficial effects of this utility model are:

[0020] (1) The slide module of this utility model adopts a U-shaped base structure made of marble, which consists of a base plate, a support plate and a first top plate. Marble has high rigidity, low expansion coefficient and corrosion resistance, effectively reducing deformation caused by changes in ambient temperature and mechanical stress. The base plate and the support plate form a stable support system, and the first top plate connects to the top of the support plate to form a closed frame structure, which enhances the overall rigidity. Each slide rail is orthogonally distributed along the X / Y / Z axes. With the help of high-precision linear guide rails and a drive system, multi-axis linkage composite motion can be realized, ensuring the flatness of the worktable and the stability of the motion trajectory during the processing.

[0021] (2) Through the coordinated control of the first and second driving components, the first sliding module can achieve synchronous composite motion in the Y and Z axes, and together with the independent motion of the second sliding module in the X axis, a three-dimensional spatial motion system is formed. This design breaks through the limitations of traditional single-axis slides and can meet the needs of complex surface machining and multi-station synchronous operation.

[0022] (3) Both the second sliding module and the third slide rail are driven by linear motors, which have advantages such as fast response speed, high positioning accuracy and no backlash compared with traditional screw drives. The moving part and the stator of the linear motor directly interact to generate thrust, eliminating the lag and wear problems caused by the mechanical transmission chain. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of an anti-deformation slide module structure according to the present invention;

[0024] Figure 2 This is a schematic diagram of the base structure of this utility model;

[0025] Figure 3This is a schematic diagram of the first slide module structure of this utility model;

[0026] Figure 4 This is a schematic diagram of the second slide module structure of this utility model;

[0027] Figure 5 This is a schematic diagram of the third driving component of this utility model;

[0028] Figure 6 This is a schematic diagram of the first driving component of this utility model.

[0029] The reference numerals in the attached drawings include: 1. Base; 2. First slide rail; 3. Second slide rail; 4. Third slide rail; 5. First sliding module; 6. Second sliding module; 7. Second driving component; 8. Third driving component; 9. Bearing plate; 11. Base plate; 12. First support plate; 13. Second support plate; 14. First top plate; 21. First slide table; 22. First slider; 23. Lead screw; 24. Nut; 31. Second slide table; 32. Second slider; 33. First stator; 34. First moving component; 35. Second stator; 36. Second moving component; 41. Third slider; 42. Displacement sensor; 51. Connecting plate; 52. First side plate; 61. Flexible drag chain; 62. First anti-collision rubber component; 63. Recessed hole. Detailed Implementation

[0030] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0031] Please see Figures 1 to 5 As shown, the present invention provides a deformation-resistant slide module, comprising a base 1, a second slide rail 3 and a third slide rail 4 disposed on the base 1, a support plate 9 slidably disposed on the second slide rail 3, a first slide rail 2 disposed on the support plate 9, a first sliding module 5 slidably disposed on the first slide rail 2, a second sliding module 6 slidably disposed on the third slide rail 4, a first driving member for driving the first sliding module 5 to slide on the first slide rail 2, a second driving member 7 for driving the support plate 9 to slide on the second slide rail 3, and a third driving member 8 for driving the second sliding module 6 to slide on the third slide rail 4;

[0032] The base 1 includes a base plate 11, a first support plate 12 and a second support plate 13 disposed on the same side of the base plate 11 and parallel to each other, and a first top plate 14 connecting the end of the first support plate 12 away from the base plate 11 and the end of the second support plate 13 away from the base plate 11.

[0033] The second slide rail 3 is disposed on the first support plate 12 and extends along the Y-axis direction. The second slide rail 3 intersects with the first slide rail 2 and extends along the Z-axis direction. The third slide rail 4 is disposed on the first top plate 14 and extends along the X-axis direction.

[0034] The first sliding module 5 is located between the first support plate 12 and the second support plate 13, and the second sliding module 6 is located above the first sliding module 5;

[0035] The first sliding module 5 performs compound motion along the Y-axis and Z-axis directions through the linkage control of the first driving member and the second driving member 7;

[0036] The base plate 11, the first support plate 12, and the second support plate 13 are combined to form a U-shape. The base plate 11, the first support plate 12, the second support plate 13, and the first top plate 14 are all made of marble.

[0037] In practical use, the base 1 of this resistant variable slide module is made of marble and consists of a base plate 11, a first support plate 12, a second support plate 13, and a first top plate 14. The base plate 11, the first support plate 12, and the second support plate 13 are combined to form a U-shaped structure, which inherently possesses high stability. Marble material has high hardness and is not easily deformed, effectively resisting deformation caused by external factors such as temperature changes and mechanical vibrations. During long-term use, it maintains the relative positional accuracy of each slide rail, ensuring the motion accuracy of the first sliding module 5 and the second sliding module 6, thereby guaranteeing the working stability and reliability of the entire slide module, making it suitable for work scenarios with high precision requirements. The first sliding module 5, through the linkage control of the first drive component and the second drive component 7, can perform compound movements along the Y and Z axes, while the second sliding module 6 can slide on the third slide rail 4 extending along the X axis. This multi-axis motion design allows the slide module to achieve complex motion trajectories in three-dimensional space. In practical applications, such as machining and electronic assembly, it enables diverse processing and operations on workpieces of different shapes and sizes, greatly improving processing flexibility and adaptability, and meeting the needs of more complex tasks.

[0038] Specifically, there are two first sliding modules 5. One first sliding module 5 is mounted on the first support plate 12, and the other first sliding module 5 is mounted on the second support plate 13. The two ends of the first top plate 14 are respectively located in the middle of the two support plates. The two first sliding modules 5 are respectively located on the left and right sides of the first top plate 14. The second sliding module 6 is mounted on the first top plate 14. The first sliding module 5 has a carrier for carrying the workpiece to be processed from the outside. The second sliding module 6 is used to assemble the processing tool of the workpiece carried by the processing carrier.

[0039] In actual use, the module adopts a symmetrical layout of two first sliding modules 5, which are respectively installed on the first support plate 12 and the second support plate 13, and can simultaneously support two workpieces to be processed. The second sliding module 6 is installed in the middle of the first top plate 14, and its processing tool can move along the X-axis to process the workpieces on the left and right sides in sequence. This design realizes synchronous operation of dual stations, significantly shortening the processing cycle of a single piece. The two first sliding modules 5 are symmetrically distributed on both sides of the first top plate 14, forming a stable triangular support system with the first top plate 14. When the second sliding module 6 moves in the X-axis direction, the first sliding modules 5 on both sides offset part of the inertial force through the symmetrical layout, reducing the vibration and deformation of the whole machine.

[0040] Specifically, the first sliding module 5 has a first slide table 21, a first slider 22, a lead screw 23, and a nut 24. The first slider 22 is slidably disposed on the first slide rail 2 on the support plate 9. The first slider 22 is connected to the first slide table 21. The lead screw 23 is rotatably disposed on the support plate 9. The lead screw 23 is connected to the first driving member. The nut 24 is screwed onto the outside of the lead screw 23 and disposed on the first slide table 21. The first driving member drives the lead screw 23 to rotate. The rotating lead screw 23 drives the nut 24 to drive the first slide table 21 so that the first slider 22 slides on the first slide rail 2.

[0041] In practical applications, the lead screw 23-nut 24 transmission has a large contact area, allowing it to withstand greater axial loads, far exceeding those of linear motor drive modules of the same specifications. When the first drive component is de-energized, the friction between the lead screw 23 and nut 24 creates a self-locking effect, preventing the slide from shifting due to gravity or external impact. This characteristic is particularly important in vertical motion scenarios, such as in suspended machining platforms, where even a sudden power outage can keep the slide in a fixed position, preventing workpieces from falling or equipment damage.

[0042] Specifically, the second sliding module 6 has a second slider 32 and a second slide table 31. The second slider 32 is slidably disposed on the second slide rail 3. The second slide table 31 is connected to the second slider 32. The third driving member 8 is a linear motor. The third driving member 8 has a first stator 33 and a first mover 34 that cooperates with the first stator 33. The first stator 33 is mounted on the first top plate 14. The first mover 34 is mounted on the second slider 32. The second slide table 31 is connected to the second slider 32. After the second slide table 31 is energized through the first mover 34, it interacts with the first stator 33 to generate electromagnetic thrust, which drives the second slider 32 to slide along the second slide rail 3.

[0043] In practical use, the second sliding module 6, driven by a linear motor, generates an electromagnetic thrust through the interaction between the first moving element 34 and the first stator 33 after the first moving element 34 is energized. This directly drives the second slider 32 to slide on the second slide rail 3, eliminating the intermediate links in traditional mechanical transmission. This direct drive method enables the second sliding module 6 to achieve high-speed movement and high acceleration, allowing it to quickly reach the designated position and significantly shortening non-processing time. The linear motor drive has extremely high positioning accuracy and repeatability. Because there are no gaps or wear issues caused by intermediate transmission links, the electromagnetic force between the first moving element 34 and the second stator 33 can be precisely controlled, allowing the second slider 32 to accurately stop at the target position.

[0044] Specifically, the third slide rail 4 has a third slider 41, the second drive member 7 is a linear motor, the second drive member 7 has a second stator 35 and a second mover 36 that works in conjunction with the second stator 35, the second stator 35 is mounted on the first side plate 52, and the second mover 36 is mounted on the third slider 41. When the second stator 35 is energized, it interacts with the second mover 36 to generate an electromagnetic thrust that pushes the third slider 41 to slide along the third slide rail 4.

[0045] In practical use, a linear motor is used as the second driving component 7 to drive the third slider 41 to slide on the third slide rail 4, achieving high-speed motion. The direct drive method of the linear motor avoids the gap and elastic deformation problems existing in traditional mechanical transmission. The electromagnetic thrust can quickly respond to the drive signal, allowing the third slider 41 to reach a high speed in a short time, and the stability during operation is excellent. The sliding cavity structure formed by the third slider 41, the support plate 9, and the first sliding module 5 is compact and occupies little space. This design makes the entire slide module more concise in structure, which is conducive to the overall layout and integration of the equipment. At the same time, the second stator 35 of the linear motor is mounted on the first side plate 52, and the second moving part 36 is mounted on the third slider 41 by fasteners. This modular installation method facilitates the assembly and disassembly of the equipment, and facilitates subsequent maintenance and upgrades. For some production workshops with limited space or automated production lines that require multiple devices to work together, this compact and easy-to-integrate design has great advantages.

[0046] Specifically, the first slide 21 is provided with a plurality of recesses 63, which are arranged along the length and width of the first slide 21. The recesses 63 are used to accommodate workpieces that are externally processed.

[0047] In practical use, the array of recessed holes 63 on the first slide 21 provides a precise mechanical positioning reference for the workpiece. The recessed holes 63 are arranged in a matrix along the length and width directions, and by engaging with the bosses or locating pins on the bottom surface of the workpiece, a repeatability accuracy of ±0.05mm can be achieved. This design eliminates the subjective errors of traditional manual positioning, and is particularly suitable for complex workpieces requiring multi-process machining, ensuring positional consistency between processes and reducing the scrap rate caused by positioning deviations.

[0048] Specifically, the third slide rail 4 is provided with displacement sensors 42 at both ends for detecting the displacement position of the second slider 32.

[0049] In actual use, the displacement sensors 42 at both ends of the third slide rail 4 monitor the position information of the second slider 32 in real time. When the second sliding module 6 moves in the X-axis direction, the sensors feed back the position data to the control system, forming a closed-loop control. For example, in the process of precision laser cutting, the system can dynamically compensate for mechanical deformation and thermal expansion errors based on sensor data, ensuring that the cutting path deviation is less than ±5μm. This design breaks through the limitations of traditional limit switches, not only accurately controlling the end point of the stroke, but also providing continuous position feedback throughout the entire stroke range, making it particularly suitable for processing tasks that require frequent starts and stops or multi-segment trajectory interpolation.

[0050] Specifically, the first top plate 14 is provided with a connecting plate 51 and two first side plates 52. The two ends of the connecting plate 51 are fixed to the two ends of the first top plate 14 through the two first side plates 52. The third slide rail 4 is located between the two first side plates 52, and the length of the connecting plate 51 is greater than the length of the third slide rail 4. Both first side plates 52 are provided with a first anti-collision rubber part 62 for blocking the second sliding module 6. The first anti-collision part is made of elastic material.

[0051] In actual use, the elastic anti-collision rubber component on the first side plate 52, together with the displacement sensor 42 and the electrical braking system, constitute a three-level protection system. When the second sliding module 6 overtravels, the rubber component absorbs more than 80% of the impact energy through elastic deformation, and the contact stress drops from 50MPa in a rigid collision to below 5MPa. The rubber component is made of polyurethane material with a Shore hardness of 80A, which can withstand more than 100,000 impacts without failure.

[0052] Specifically, the first top plate 14 is an integral structure. The first top plate 14 is U-shaped and has a plate body and protrusions at both ends of the plate body. The protrusions at both ends of the plate body are located on two support plates respectively. The second sliding module 6 is mounted on the plate body via the third slide rail 4.

[0053] In actual use, the first top plate 14 adopts an integrated U-shaped structure, with the plate body and the protrusions at both ends forming a continuous rigid support system. This design increases the bending strength of the top plate by 40% compared to the traditional spliced ​​structure. The protrusions at both ends of the plate body are embedded in the middle of the support plate, forming a three-point support, which effectively disperses the overturning moment generated when the second sliding module 6 moves.

[0054] Specifically, the base 1 is provided with a flexible cable carrier 61 for storing cables, and the flexible cable carrier has an inner cavity for accommodating cables.

[0055] In practical use, the flexible cable chain 61 adopts a modular design, allowing for quick disassembly and expansion. When a section of cable needs to be replaced, the faulty cable can be pulled out individually simply by loosening the chain link latch, without the need for complete cable disassembly, thus shortening maintenance time. The internal partition structure of the flexible cable chain 61 supports the layered arrangement of different types of cables, and rapid identification is achieved through a color-coding and labeling system.

[0056] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A deformation-resistant skid module, characterized by: Includes a base (1), a second slide rail (3) and a third slide rail (4) disposed on the base (1), a support plate (9) slidably disposed on the second slide rail (3), a first slide rail (2) disposed on the support plate (9), a first sliding module (5) slidably disposed on the first slide rail (2), a second sliding module (6) slidably disposed on the third slide rail (4), a first driving member for driving the first sliding module (5) to slide on the first slide rail (2), a second driving member (7) for driving the support plate (9) to slide on the second slide rail (3), and a third driving member (8) for driving the second sliding module (6) to slide on the third slide rail (4); The base (1) includes a base plate (11), a first support plate (12) and a second support plate (13) located on the same side of the base plate (11) and parallel to each other, and a first top plate (14) connecting the end of the first support plate (12) away from the base plate (11) and the end of the second support plate (13) away from the base plate (11). The second slide rail (3) is disposed on the first support plate (12) and extends along the Y-axis direction. The second slide rail (3) intersects with the first slide rail (2) and extends along the Z-axis direction. The third slide rail (4) is disposed on the first top plate (14) and extends along the X-axis direction. The first sliding module (5) is located between the first support plate (12) and the second support plate (13), and the second sliding module (6) is located above the first sliding module (5); The first sliding module (5) performs compound motion along the Y-axis and Z-axis directions through the linkage control of the first driving member and the second driving member (7); The base plate (11), the first support plate (12), and the second support plate (13) are combined to form a U-shape. The base plate (11), the first support plate (12), the second support plate (13), and the first top plate (14) are all made of marble.

2. The deformation-resistant slide module of claim 1, wherein: The first sliding module (5) has two parts. One first sliding module (5) is installed on the first support plate (12), and the other first sliding module (5) is installed on the second support plate (13). The two ends of the first top plate (14) are respectively located in the middle of the two support plates. The two first sliding modules (5) are respectively located on the left and right sides of the first top plate (14). The second sliding module (6) is installed on the first top plate (14). The first sliding module (5) has a carrier for carrying the workpiece to be processed from the outside. The second sliding module (6) is used to assemble the processing tool of the workpiece carried by the processing carrier.

3. The deformation-resistant slide module of claim 1, wherein: The first sliding module (5) has a first slide table (21), a first slider (22), a lead screw (23), and a nut (24). The first slider (22) is slidably mounted on the first slide rail (2) on the support plate (9). The first slider (22) is connected to the first slide table (21). The lead screw (23) is rotatably mounted on the support plate (9). The lead screw (23) is connected to the first driving member. The nut (24) is screwed onto the outside of the lead screw (23) and mounted on the first slide table (21). The first driving member drives the lead screw (23) to rotate. The rotating lead screw (23) drives the nut (24) to drive the first slide table (21) so that the first slider (22) slides on the first slide rail (2).

4. The deformation-resistant slide module of claim 1, wherein: The second sliding module (6) has a second slider (32) and a second slide table (31). The second slider (32) is slidably disposed on the second slide rail (3). The second slide table (31) is connected to the second slider (32). The third driving member (8) is a linear motor. The third driving member (8) has a first stator (33) and a first moving member (34) that works in conjunction with the first stator (33). The first stator (33) is mounted on the first top plate (14). The first moving member (34) is mounted on the second slider (32). The second slide table (31) is connected to the second slider (32). After the second slide table (31) is energized through the first moving member (34), it interacts with the first stator (33) to generate electromagnetic thrust, which drives the second slider (32) to slide along the second slide rail (3).

5. The deformation-resistant slide module of claim 4, wherein: The third slide rail (4) has a third slider (41). The second drive member (7) is a linear motor. The second drive member (7) has a second stator (35) and a second mover (36) that works in conjunction with the second stator (35). The second stator (35) is mounted on the first side plate (52). The second mover (36) is mounted on the third slider (41). When the second stator (35) is energized, it interacts with the second mover (36) to generate an electromagnetic thrust that pushes the third slider (41) to slide along the third slide rail (4).

6. The deformation-resistant slide module of claim 3, wherein: The first slide (21) is provided with a plurality of recesses (63), which are arranged along the length and width of the first slide (21). The recesses (63) are used to accommodate workpieces that are processed by external parties.

7. The deformation-resistant slide module of claim 4, wherein: The third slide rail (4) is provided with displacement sensors (42) at both ends for detecting the displacement position of the second slider (32).

8. The deformation-resistant slide module of claim 2, wherein: The first top plate (14) is provided with a connecting plate (51) and two first side plates (52). The two ends of the connecting plate (51) are fixed to the two ends of the first top plate (14) through the two first side plates (52). The third slide rail (4) is located between the two first side plates (52), and the length of the connecting plate (51) is greater than the length of the third slide rail (4). The two first side plates (52) are each provided with a first anti-collision rubber part (62) for blocking the second sliding module (6). The first anti-collision part is made of elastic material.

9. The deformation-resistant slide module of claim 1, wherein: The first top plate (14) is an integral structure. The first top plate (14) is U-shaped. The first top plate (14) has a plate body and protrusions at both ends of the plate body. The protrusions at both ends of the plate body are located on two support plates respectively. The second sliding module (6) is set on the plate body via the third slide rail (4).

10. The deformation-resistant slide module of claim 1, wherein: The base (1) is provided with a flexible cable carrier (61) for storing cables, and the flexible cable carrier (61) has an inner cavity for accommodating cables.

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