Device for testing friction force of pressure film

Abstract

The utility model discloses a device for testing friction force of a pressure film, which belongs to the technical field of pressure film detection structures and comprises a base, a tension meter, a clamping component, a support block, a gravity block and a control component, the tension meter is slidably connected onto the base, the end of the tension meter is connected with the clamping component, one end of a pressure film adhesive tape is clamped by the end of the clamping component, and the gravity block is connected with the support block. The supporting block is placed on the base, the gravity block is limited at the top of the supporting block, the other end of the pressure film adhesive tape is limited between the supporting block and the gravity block, the control assembly controls the tension meter to move to drive the pressure film adhesive tape to be pulled out from the position between the supporting block and the gravity block, and therefore the friction force of the pressure film adhesive tape is tested. The device can directly measure the friction force of the pressure film, is simple and convenient to operate, and is accurate and reliable in measurement result.

Description

Technical Field

[0001] This utility model relates to the field of pressure membrane detection structure technology, and in particular to a device for testing the friction force of a pressure membrane. Background Technology

[0002] In the semiconductor chip manufacturing industry, polishing wafers with a grinding head is one of the key processes. The pressure diaphragm, as a crucial component in the grinding head that directly contacts the wafer, directly affects the polishing effect. By controlling the adsorption and unloading of the pressure diaphragm on the wafer through the grinding head assembly, the wafer is rubbed against the polishing pad, achieving the purpose of polishing.

[0003] The pressure diaphragm controls its contact with the wafer through gas adsorption and unloading, and its surface roughness is a key indicator, which can be measured by a roughness tester. However, in actual production, pressure diaphragms with the same roughness can vary in polishing effect and service life. Research has found that the friction between the pressure diaphragm and the wafer is another key factor, but there is a lack of equipment on the market to directly measure the friction of the pressure diaphragm.

[0004] Therefore, those skilled in the art urgently need to provide a device that can accurately test the frictional force of a pressure membrane and directly measure the frictional force of the pressure membrane. Utility Model Content

[0005] The purpose of this invention is to provide a device for testing the frictional force of a pressure membrane, which can directly measure the frictional force of the pressure membrane, and is easy to operate and provides accurate and reliable measurement results.

[0006] To achieve the above objectives, this utility model provides a device for testing the friction of a pressure diaphragm, comprising a base, a force gauge, a clamping assembly, a support block, a gravity block, and a control assembly. The force gauge is slidably connected to the base, and the clamping assembly is connected to one end of the force gauge. The clamping assembly clamps one end of the pressure diaphragm strip. The support block is placed on the base, and the gravity block is positioned at the top of the support block. The other end of the pressure diaphragm strip is positioned between the support block and the gravity block. The control assembly controls the movement of the force gauge to pull the pressure diaphragm strip out from between the support block and the gravity block, thereby testing the friction of the pressure diaphragm strip.

[0007] Preferably, the base is provided with a groove, and the bottom of the support block is placed in the groove.

[0008] Preferably, the top of the support block is provided with a second groove, the bottom of the gravity block is provided with a protrusion, the middle of the second groove is provided with slots on both sides, the protrusion and the slots are matched, and a pressure membrane strip is sandwiched between the protrusion and the second groove.

[0009] Preferably, the control component includes a controller, a motor, a slide rail, a slider, a screw, and a moving block. The controller, motor, and slide rail are connected to the base. The output end of the motor is driven by a gearbox, and the output end of the gearbox is driven by a screw. A moving block is fixedly connected to the side of the force gauge, and the moving block is threadedly connected to the screw. A slider is fixedly connected to the bottom of the force gauge, and the slider is slidably connected to the slide rail. The controller is electrically connected to the motor.

[0010] Preferably, the clamping assembly includes a first clamp body, a second clamp body, a second screw, and a knob. The first clamp body has a through hole, the second clamp body has a threaded hole, the second screw passes through the through hole and the threaded hole, and the second screw is rotatably connected to the first clamp body and threadedly connected to the second clamp body.

[0011] A knob is fixedly connected to one end of the screw two, and the knob abuts against the outer wall of the clamp body one.

[0012] The second clip is located on top of the first clip, and the left end of the second clip is slidably connected to the left end of the first clip. The right ends of the first clip and the right ends of the second clip are clamping ends, which clamp the pressure membrane strip.

[0013] Preferably, the end face of the tension gauge is fixedly connected to one end of the connecting post, and the other end of the connecting post is fixedly connected to the left end of the clamp component.

[0014] Preferably, the screw is fitted with a spring, one end of which is fixedly connected to the inner side of the first clamp body, and the other end of which is fixedly connected to the inner side of the second clamp body.

[0015] Preferably, the pressure diaphragm strip is elongated.

[0016] The advantages and positive effects of this utility model are as follows:

[0017] 1. The control components enable automated movement of the tension gauge, reducing human error and improving measurement accuracy.

[0018] 2. The groove design of the base and support block increases stability. The concave and convex structure of the support block and gravity block is solid and can limit the pressure membrane strip, ensuring stable position during testing.

[0019] 3. The clamping assembly controls the clamping end via a knob and screw, thus clamping the pressure diaphragm strip. It is simple to operate and facilitates the installation and fixing of the pressure diaphragm strip.

[0020] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a device for testing the frictional force of a pressure diaphragm according to the present invention;

[0022] Figure 2 This is a side view of a device for testing the frictional force of a pressure diaphragm according to the present invention;

[0023] Figure 3 This is a schematic diagram of the clamping component structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the support block and gravity block of this utility model;

[0025] Figure 5 This is a schematic diagram of the support block structure of this utility model;

[0026] Figure 6 This is a schematic diagram of the gravity block structure of this utility model;

[0027] Figure 7 This is a schematic diagram of the base structure of this utility model.

[0028] Figure Labels

[0029] 1. Base; 101. Groove 1; 2. Force gauge; 3. Pressure diaphragm strip; 4. Support block; 401. Groove 2; 5. Gravity block; 501. Protrusion; 6. Slide rail; 7. Slider; 8. Controller; 9. Motor; 10. Screw 1; 11. Moving block; 12. Clamping assembly; 121. Clamp detachment 1; 122. Clamp detachment 2; 123. Spring; 124. Screw 2; 125. Knob; 126. Connecting post. Detailed Implementation

[0030] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] In this application, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit the scope of this application.

[0032] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0033] like Figure 1-7 As shown, an apparatus for testing the friction of a pressure diaphragm includes a base 1, a force gauge 2, a clamping assembly 12, a support block 4, a gravity block 5, and a control assembly. The force gauge 2 is slidably connected to the base 1. The clamping assembly 12 is connected to one end of the force gauge 2. The clamping assembly 12 clamps one end of a pressure diaphragm strip 3. The support block 4 is placed on the base 1, and the gravity block 5 is positioned on top of the support block 4. The other end of the pressure diaphragm strip 3 is positioned between the support block 4 and the gravity block 5. The control assembly controls the movement of the force gauge 2 to pull the pressure diaphragm strip 3 out from between the support block 4 and the gravity block 5, thereby testing the friction of the pressure diaphragm strip 3.

[0034] The base 1 has a groove 101, and the bottom of the support block 4 is placed in the groove 101.

[0035] The top of the support block 4 is provided with a second groove 401, and the bottom of the gravity block 5 is provided with a protrusion 501. The middle of the second groove 401 has slots on both sides, and the protrusion 501 matches the slots. The support block 4 limits the gravity block 5 through the slots, preventing the gravity block 5 from moving horizontally relative to the support block 4. A pressure diaphragm strip 3 is sandwiched between the protrusion 501 and the second groove 401.

[0036] The control assembly includes a controller 8, a motor 9, a slide rail 6, a slider 7, a screw 10, and a moving block 11. The controller 8, motor 9, and slide rail 6 are connected to the base 1. A gearbox is driven to the output end of the motor 9, and the screw 10 is driven to the output end of the gearbox. The moving block 11 is fixedly connected to the side of the force gauge 2, and the moving block 11 is threadedly connected to the screw 10. The slider 7 is fixedly connected to the bottom of the force gauge 2, and the slider 7 is slidably connected to the slide rail 6. The controller 8 is electrically connected to the motor 9.

[0037] Specifically, the gearbox can regulate the rotational speed of screw 10, thereby adjusting the speed at which the pressure diaphragm strip 3 is pulled out.

[0038] The clamping assembly 12 includes a first clamp body 121, a second clamp body 122, a second screw 124, and a knob 125. The first clamp body 121 has a through hole, and the second clamp body 122 has a threaded hole. The second screw 124 passes through the through hole and the threaded hole, and is rotatably connected to the first clamp body 121 and threadedly connected to the second clamp body 122.

[0039] A knob 125 is fixedly connected to one end of the screw 124, and the knob 125 abuts against the outer wall of the clip 121.

[0040] Clip part 2 122 is located on top of clip part 1 121. The left end of clip part 2 122 is slidably connected to the left end of clip part 1 121. The right ends of clip part 1 121 and clip part 2 122 are clamping ends, which clamp the pressure membrane strip 3.

[0041] The end face of the tension gauge 2 is fixedly connected to one end of the connecting post 126, and the other end of the connecting post 126 is fixedly connected to the left end of the clip body 121.

[0042] The screw 124 is fitted with a spring 123. One end of the spring 123 is fixedly connected to the inner side of the clip 121, and the other end of the spring 123 is fixedly connected to the inner side of the clip 122.

[0043] Specifically, turning knob 125 rotates screw 124, causing clamp 122 to move upward, thus increasing the gap between the clamping ends of clamp 121 and clamp 122, facilitating the insertion of the pressure diaphragm strip 3 into the clamping end. Turning knob 125 in the opposite direction rotates screw 124, causing clamp 122 to move downward, thus decreasing the gap between the clamping ends of clamp 121 and clamp 122, thereby clamping the pressure diaphragm strip 3.

[0044] The pressure diaphragm strip 3 is long and narrow, which makes it easy to position the pressure diaphragm strip 3 between the support block 4 and the gravity block 5.

[0045] The usage process of this utility model is as follows:

[0046] First, clamp the pressure diaphragm strip 3. Turn knob 125 to rotate screw 124, causing clamp part 122 to move upward, increasing the gap between the clamping ends of clamp part 121 and clamp part 122. Then, insert one end of the pressure diaphragm strip 3 into the clamping ends of clamp part 121 and clamp part 122. Next, turn knob 125 in the opposite direction, causing screw 124 to rotate in the opposite direction, causing clamp part 122 to move downward, decreasing the gap between the clamping ends of clamp part 121 and clamp part 122, thus clamping the pressure diaphragm strip 3.

[0047] Next, turn on the power switch of the tension gauge 2 and set it to peak value. Move the tension gauge 2 using the control component to move the pressure diaphragm strip 3 towards the support block 4, so that the other end of the pressure diaphragm strip 3 is placed on the groove 401 at the top of the support block 4. Then, place the gravity block 5 on top of the pressure diaphragm strip 3, thereby limiting the pressure diaphragm strip 3 between the support block 4 and the gravity block 5.

[0048] Then, the tension gauge 2 is moved by the control component. The controller 8 controls the motor 9 to work, the motor 9 drives the screw 10 to rotate, the screw 10 rotates and drives the moving block 11 to move, the moving block 11 drives the tension gauge 2 to move along the slide rail 6 away from the support block 4, so that the pressure diaphragm strip 3 can be pulled out from between the support block 4 and the gravity block 5.

[0049] The moment the pressure diaphragm strip 3 is fully pulled out, the traction force reaches its maximum value. This maximum value is the peak data displayed on the force gauge 2, which is the measured friction force value.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solution of this utility model, and these modifications or equivalent substitutions cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of this utility model.

Claims

1. An apparatus for testing the frictional force of a pressure membrane, characterized by: The device includes a base, a force gauge, a clamping assembly, a support block, a gravity block, and a control assembly. The force gauge is slidably connected to the base, and the clamping assembly is connected to one end of the force gauge. The clamping assembly clamps one end of a pressure diaphragm strip. The support block is placed on the base, and the gravity block is positioned at the top of the support block. The other end of the pressure diaphragm strip is positioned between the support block and the gravity block. The control assembly controls the movement of the force gauge to pull the pressure diaphragm strip out from between the support block and the gravity block, thereby testing the friction of the pressure diaphragm strip.

2. A device for testing the frictional force of a pressure membrane according to claim 1, characterized in that: The base has a groove, and the bottom of the support block is placed in the groove.

3. A device for testing the frictional force of a pressure membrane according to claim 2, characterized in that: The top of the support block is provided with a second groove, the bottom of the gravity block is provided with a protrusion, and the middle of the second groove is provided with slots on both sides. The protrusion and the slots are matched, and a pressure membrane strip is sandwiched between the protrusion and the second groove.

4. The apparatus of claim 1, wherein: The control assembly includes a controller, a motor, a slide rail, a slider, a screw, and a moving block. The controller, motor, and slide rail are connected to the base. The output end of the motor is driven by a gearbox, and the output end of the gearbox is driven by a screw. A moving block is fixedly connected to the side of the force gauge, and the moving block is threadedly connected to the screw. A slider is fixedly connected to the bottom of the force gauge, and the slider is slidably connected to the slide rail. The controller is electrically connected to the motor.

5. The apparatus of claim 1, wherein: The clamping assembly includes a first clamp body, a second clamp body, a second screw, and a knob. The first clamp body has a through hole, the second clamp body has a threaded hole, the second screw passes through the through hole and the threaded hole, and the second screw is rotatably connected to the first clamp body and threadedly connected to the second clamp body. A knob is fixedly connected to one end of the screw two, and the knob abuts against the outer wall of the clamp body one. The second clip is located on top of the first clip, and the left end of the second clip is slidably connected to the left end of the first clip. The right ends of the first clip and the right ends of the second clip are clamping ends, which clamp the pressure membrane strip.

6. A device for testing the frictional force of a pressure membrane according to claim 5, characterized in that: The end face of the tension gauge is fixedly connected to one end of the connecting post, and the other end of the connecting post is fixedly connected to the left end of the clamp component.

7. A device for testing the frictional force of a pressure membrane according to claim 6, characterized in that: The screw is fitted with a spring. One end of the spring is fixedly connected to the inner side of the first clamp body, and the other end of the spring is fixedly connected to the inner side of the second clamp body.

8. A device for testing the frictional force of a pressure membrane according to claim 7, characterized in that: The pressure diaphragm strip is long and narrow.

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