Constant-temperature and stable-speed developing testing device
By using a dual-stage heat-conducting cavity and a spray gun design with a combination of materials, active control of the developer temperature is achieved, solving the problem of insufficient or excessive development caused by developer temperature fluctuations, and improving the stability and data accuracy of development tests.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- FUJIAN YOUDA ENVIRONMENTAL PROTECTION MATERIAL CO LTD
- Filing Date
- 2025-05-07
- Publication Date
- 2026-04-17
AI Technical Summary
During the production of developer, temperature fluctuations can lead to insufficient or excessive development, resulting in increased rates of residual adhesive or pattern collapse defects, which can affect data accuracy.
The spray gun adopts a dual-stage heat-conducting cavity structure, combined with a nozzle design made of metal and ceramic materials. It achieves active temperature control through heating and cooling tanks, and uses temperature sensors and controllers to achieve rapid temperature compensation, avoiding temperature rise at the hot end after heating stops.
It effectively reduces temperature fluctuations, improves the stability and uniformity of development tests, reduces the rate of residual adhesive or pattern collapse defects, and improves data accuracy.
Smart Images
Figure CN224137266U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a testing device, and more particularly to a constant temperature and steady speed developing testing device. Background Technology
[0002] In the semiconductor manufacturing field, photolithography is a core process that determines chip integration and performance. Photoresist, as a key material in photolithography, transfers the mask pattern onto the wafer surface through exposure and development. During the development stage, the selective dissolution of the developed solution transforms the exposed pattern into a physical structure.
[0003] Therefore, product performance testing is required during the production of developer. The wafer is simulated by a spray head. Temperature fluctuations can easily occur when the developer passes through the spray head. Temperature fluctuations of ±2℃ may lead to insufficient or excessive development, and the defect rate of residual glue or pattern collapse may increase by 50% to 100%, thus affecting the accuracy of the data.
[0004] Therefore, the purpose of this case is to provide a constant temperature and steady speed developing test device to reduce temperature fluctuations and improve spray uniformity by rotating at a constant speed, thereby improving the stability of the test. Utility Model Content
[0005] This invention provides a constant temperature and stable speed development test device, which can effectively solve the problem of poor stability in development testing.
[0006] This utility model is implemented as follows:
[0007] A constant temperature and steady speed developing test device includes: a frame, on the surface of which a spray tank and a sprayer are provided, and on the side of the frame a solution tank is provided, the solution tank being connected to the sprayer via a pipe. The sprayer includes a base mounted on the surface of the frame, a rotating driver mounted on the surface of the base, the driver being connected to a linkage arm and a push rod, the driver rotating to drive the linkage arm to reciprocate the push rod, a jetting device mounted on one side of the push rod, the jetting device being connected to a pump body inside the solution tank via a pipe, and a rotating frame provided in the middle of the spray tank.
[0008] The jetting device includes a bracket connected to a push rod, a spray gun is provided on the surface of the bracket, and a sliding hot end is provided on the surface of the spray gun.
[0009] As a further improvement, the spray gun includes a first cavity and a second cavity. The first cavity and the second cavity are fixedly connected and their inner cavities are connected. The first cavity is provided with a heating groove, which is nested with a hot end. The surface of the second cavity is provided with a controller, which is connected to the bracket of the hot end. An inlet pipe is provided on the side of the second cavity, and the inlet pipe is connected to the inner cavity of the second cavity.
[0010] As a further improvement, the surface of the second cavity is provided with a cooling groove, the outer diameter of which is consistent with the outer diameter of the first cavity.
[0011] As a further improvement, a nozzle is provided at the bottom of the first cavity, and the nozzle is threadedly connected to the first cavity.
[0012] As a further improvement, the first cavity is made of metal.
[0013] As a further improvement, the cooling tank is made of ceramic material and is bonded and fixed to the heating tank.
[0014] As a further improvement, the hot end includes a hot ring nested in the heating groove. A limiting collar is provided at the bottom of the hot ring, and the limiting collar is tightly fitted with the heating groove. A heating coil is provided inside the hot ring, and the heating coil is connected to the internal control circuit of the frame through a wire. A connecting rod is installed on the surface of the hot ring, and the connecting rod is connected to the controller through a synchronous frame fixed on the surface.
[0015] As a further improvement, the controller is a linear motor that raises and lowers the hot end via a thread.
[0016] As a further improvement, a transparent protective cover is also provided on the top of the rack.
[0017] The beneficial effects of this utility model are: the improved device uses a dual-stage heat-conducting cavity consisting of a second cavity and a first cavity to transport liquid, and actively heats the liquid through the hot end. When the threshold is reached, the controller acts quickly, avoiding the continuous temperature rise of the hot end after heating stops. It can quickly separate during control. The dual-material structure of the first cavity and the second cavity can heat and keep warm through different heat conduction effects when separated, thus improving thermal efficiency. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the structure of a constant temperature and steady speed developing test device according to the present invention.
[0020] Figure 2 This is a schematic diagram of the structure of the sprayer of this utility model.
[0021] Figure 3 This is a schematic diagram of the jetting device of this utility model.
[0022] Figure 4 This is a schematic diagram of the structure of the spray gun of this utility model.
[0023] Figure 5 This is a schematic diagram of the hot end of this utility model.
[0024] The attached figures are labeled as follows:
[0025] 1. Sprayer; 2. Protective cover; 3. Frame; 4. Spray tank; 5. Solution tank; 6. Rotating frame;
[0026] 11. Base; 12. Driver; 13. Linkage arm; 14. Push rod; 15. Jet device;
[0027] 151. Spray gun; 152. Hot end; 153. Support;
[0028] 511. Nozzle; 512. First cavity; 513. Heating tank; 514. Second cavity; 515. Cooling tank; 516. Controller; 517. Inlet pipe;
[0029] 521. Synchronizer frame; 522. Connecting rod; 523. Heating coil; 524. Heating coil; 525. Limiting collar. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.
[0031] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0032] In the current development process, product performance testing is required. The wafer is simulated using a spray head. Temperature fluctuations are common as the developer passes through the spray head; a fluctuation of ±2℃ can lead to underdevelopment or overdevelopment, increasing residual resist or pattern collapse defect rates by 50% to 100%, thus affecting data accuracy. Therefore, to address these issues, this paper proposes the following technical solution:
[0033] Reference Figures 1-5 As shown, a constant temperature and steady speed developing test device includes: a frame 3, a spray tank 4 and a sprayer 1 are provided on the surface of the frame 3, a solution tank 5 is provided on the side of the frame 3, and the solution tank 5 is connected to the sprayer 1 through a pipe. The sprayer 1 includes a base 11 installed on the surface of the frame 3, a rotating driver 12 is installed on the surface of the base 11, the driver 12 is connected to a linkage arm 13 and a push rod 14, the driver 12 rotates to drive the linkage arm 13 to make the push rod 14 reciprocate, a jetting device 15 is installed on one side of the push rod 14, the jetting device 15 is connected to the pump body inside the solution tank 5 through a pipe, and a rotating frame is provided in the middle of the spray tank.
[0034] The jetting device 15 includes a bracket 153 connected to the push rod 14, a spray gun 151 is provided on the surface of the bracket 153, and a sliding hot end 152 is provided on the surface of the spray gun 151.
[0035] In this embodiment, the structure of the device includes a frame 3, a spray tank 4 is provided on the surface of the frame 3, and a rotating frame 6 is provided inside the spray tank 4 to make the spraying more uniform. At the same time, the developing solution can flow out through the bottom to be recovered. There is also a sprayer 1 on the surface of the frame 3 for reciprocating spraying. A solution tank 5 is provided on the side of the frame 3 and is connected to the sprayer 1 by a pipe. A water pump is installed inside the solution tank 5 to transport the preheated developing solution in the solution tank 5 to the sprayer 1.
[0036] The structure of the sprayer 1 includes a base 11 fixed on the surface of the frame 3, a driver 12 is provided on the base 11, and a linkage arm 13 is provided on the main shaft of the driver 12. The linkage arm 13 is connected to the driver 12 and the push rod 14 respectively. When the driver 12 rotates, it drives the arm of the linkage arm 13 to rotate, causing the push rod 14 at the front end to reciprocate, so as to uniformly spray the wafer surface. The spray device 15 is fixed at the front end of the push rod 14.
[0037] To address the issue of temperature fluctuations during the conveying process, the jet device 15 has been improved with temperature compensation features.
[0038] The specific spray gun 151 includes a spray gun 151 and a hot end 152. The hot end 152 is used for heating and temperature compensation. During the heating and temperature rise process, it is difficult to control the range to reach the threshold by relying solely on software control. Therefore, this device further optimizes the spray gun 151.
[0039] The spray gun 151 includes a cooling groove 515 and a second cavity 514. The second cavity 514 adopts a ceramic structure to reduce heat transfer, and the cooling groove 515 is provided on the surface of the second cavity 514 that mates with the hot end 152 to reduce heat transfer. The surface of the first cavity 512 is provided with a spray nozzle 511 for spraying and a first cavity 512 that mates with the hot end 152. A heating coil 524 is provided inside the heating coil 523 of the hot end 152. The heating coil 524 is electrically heated. A limiting collar 525 is provided at the bottom of the heating coil 523 and nested with the heating groove 513 to improve heat transfer efficiency. The limiting collar 525 is also connected to the first cavity. 512 is made of metal, which has strong thermal conductivity. The heating coil 524 is equipped with a temperature sensor attached to the inner wall, which can monitor the temperature in real time. The temperature sensor works in conjunction with the controller 516 on the top of the second chamber 514. When the temperature is about to reach the threshold, the controller 516 rotates, which drives the top synchronous frame 521 to move. This causes the connecting rod 522 to drag the heating coil 523 to move as a whole. The spray gun 151 is fixed to the bracket 153, which will not cause interference to the hot end 152 during the movement. The inner cavity of the second chamber 514 is connected to the inner cavity of the first chamber 512. The solution tank 5 is connected to the inlet pipe 517 for the input of the developing solution.
[0040] The improved device uses a dual-stage heat-conducting cavity, consisting of a second cavity 514 and a first cavity 512, to transport liquids. It is actively heated by a hot end 152. When a threshold is reached, the controller 516 acts quickly to prevent the hot end 152 from continuing to rise in temperature after heating stops. It can also quickly separate during control. The dual-material structure of the first cavity 512 and the second cavity 514 allows for heating and insulation through different thermal conductivity effects during separation, thus improving thermal efficiency.
[0041] The above description only outlines the basic principles and preferred embodiments of this utility model. Those skilled in the art can make many changes and improvements based on the above description, and these changes and improvements should fall within the protection scope of this utility model.
[0042] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A thermostatic constant speed developing testing device, the structure of which comprises: A frame (3) is provided with a spray tank (4) and a sprayer (1) on its surface. A solution tank (5) is provided on the side of the frame (3). The solution tank (5) is connected to the sprayer (1) through a pipe. The sprayer (1) includes a base (11) installed on the surface of the frame (3). A rotating driver (12) is installed on the surface of the base (11). The driver (12) is connected to a linkage arm (13) and a push rod (14). The driver (12) rotates to drive the linkage arm (13) to make the push rod (14) reciprocate. A spray device (15) is installed on one side of the push rod (14). The spray device (15) is connected to the pump body inside the solution tank (5) through a pipe. A rotating frame (6) is provided in the middle of the spray tank (4). The jetting device (15) includes a bracket (153) connected to a push rod (14), a spray gun (151) is provided on the surface of the bracket (153), and a sliding hot end (152) is provided on the surface of the spray gun (151).
2. A thermostatic constant-speed developing test device according to claim 1, characterized in that: The spray gun (151) includes a first cavity (512) and a second cavity (514). The first cavity (512) and the second cavity (514) are fixedly connected and their inner cavities are connected. The first cavity (512) is provided with a heating groove (513), which is nested with the hot end (152). The surface of the second cavity (514) is provided with a controller (516), which is connected to the bracket of the hot end (152). The side of the second cavity (514) is provided with an inlet pipe (517), which is connected to the inner cavity of the second cavity (514).
3. A thermostatic constant-speed developing test device according to claim 2, characterized in that: The surface of the second cavity (514) is provided with a cooling groove (515), and the outer diameter of the cooling groove (515) is consistent with the outer diameter of the first cavity (512).
4. A thermostatic constant-speed developing test device according to claim 3, characterized in that: The bottom of the first cavity (512) is provided with a nozzle (511), and the nozzle (511) is threadedly connected to the first cavity (512).
5. A thermostatic constant-speed developing test device according to claim 3, characterized in that: The first cavity (512) is made of metal.
6. A thermostatic constant-speed developing test device according to claim 3, wherein: The cooling tank (515) is made of ceramic material and is bonded and fixed to the heating tank (513).
7. A thermostatic constant-speed developing test device according to claim 1, wherein: The hot end (152) includes a hot ring (523) nested in the heating groove (513). The bottom of the hot ring (523) is provided with a limiting collar (525), which is in close contact with the heating groove (513). The hot ring (523) is provided with a heating coil (524) inside. The heating coil (524) is connected to the internal control circuit of the frame (3) through a wire. A connecting rod (522) is installed on the surface of the hot ring (523). The connecting rod (522) is connected to the controller (516) through a synchronous frame (521) fixed on the surface.
8. A thermostatic constant-speed developing test device according to claim 7, characterized in that: The controller (516) is a linear motor that raises and lowers the hot end (152) via a thread.
9. A thermostatic constant-speed developing testing device according to claim 1, characterized in that: The top of the frame (3) is also provided with a transparent protective cover (2).