CVD (chemical vapor deposition) coating furnace tail gas treatment device

Abstract

The utility model discloses a CVD (Chemical Vapor Deposition) coating furnace tail gas treatment device, and relates to the technical field of tail gas treatment. The CVD coating furnace tail gas treatment device comprises secondary combustion equipment, a waste heat recovery structure, a chemical absorption purification tower, a spray tower and solid particle filtering equipment, and the output end of the secondary combustion equipment is fixedly connected with a gas outlet pipe; the waste heat recovery structure comprises a water tank, a first-stage spiral pipe, a second-stage spiral pipe and a heat exchange pipe, the first-stage spiral pipe is arranged on the outer side of the secondary combustion equipment in a sleeving mode, and the heat exchange pipe is arranged between the secondary combustion equipment and the chemical absorption purification tower and is in an S shape. According to the tail gas treatment device, tail gas is sequentially subjected to a plurality of treatment links such as secondary combustion, chemical absorption and purification, spray washing and solid particle filtration, so that comprehensive purification of the tail gas is realized from decomposition of harmful components to removal of residual pollutants to interception of solid particles, and emission is ensured to reach the standard.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, and in particular to an exhaust gas treatment device for a CVD coating furnace. Background Technology

[0002] CVD coating technology, a core process in industries such as cemented carbide, semiconductors, and photovoltaics, involves the chemical reaction of gaseous substances at high temperatures, resulting in the deposition of a high-performance coating on the substrate surface. However, this process generates exhaust gases containing a large amount of harmful components. If these exhaust gases are emitted directly without effective treatment, they will not only cause serious pollution to the atmospheric environment but also endanger human health.

[0003] A search revealed that Chinese Patent No. CN221492027U discloses a CVD coating furnace exhaust gas treatment device, including a water ring pump. The inlet end of the water ring pump is fixedly connected to an inlet pipe, and the outlet end of the water ring pump is fixedly connected to a first conduit. The end of the first conduit away from the water ring pump is fixedly connected to a front exhaust fan, and the outlet end of the front exhaust fan is fixedly connected to a third conduit. The end of the third conduit away from the front exhaust fan is fixedly connected to a scrubbing tower.

[0004] The above-mentioned patents also have the following problems when used:

[0005] 1. The exhaust gas of the CVD coating furnace is generated in a high-temperature environment. The above-mentioned patent is not convenient for the effective utilization of the heat energy in the exhaust gas, resulting in energy waste and increased costs.

[0006] 2. It is inconvenient to clean the filter components. After long-term operation, the filter components become clogged, affecting the purification efficiency. Utility Model Content

[0007] The purpose of this invention is to provide a CVD coating furnace exhaust gas treatment device, which solves the technical problems mentioned in the background art.

[0008] To achieve the above objectives, this utility model provides the following technical solution: a CVD coating furnace tail gas treatment device, comprising a secondary combustion device, a waste heat recovery structure, a chemical absorption purification tower, a spray tower, and a solid particle filtration device, wherein the output end of the secondary combustion device is fixedly connected to an outlet pipe;

[0009] The waste heat recovery structure includes a water tank, a primary spiral tube, a secondary spiral tube, and a heat exchange tube. The primary spiral tube is sleeved on the outside of the secondary combustion equipment. A heat exchange tube is installed between the secondary combustion equipment and the chemical absorption and purification tower. The heat exchange tube is S-shaped. A secondary spiral tube is wound around the outer wall of the heat exchange tube. One end of the primary spiral tube and the secondary spiral tube is fixedly connected to the inner wall of the water tank. A water pump is installed inside the water tank. The water pump drives the cooling medium to circulate between the primary spiral tube, the secondary spiral tube, and the water tank.

[0010] The end of the gas outlet pipe furthest from the secondary combustion equipment is connected to the heat exchange pipe, and an inlet pipe is provided on one side of the chemical absorption purification tower, with one end of the inlet pipe connected to the heat exchange pipe.

[0011] The chemical absorption purification tower and the spray tower are connected by a connecting pipe.

[0012] Preferably, the secondary combustion equipment, waste heat recovery structure, chemical absorption and purification tower, spray tower, and solid particle filtration equipment are arranged sequentially from left to right.

[0013] Preferably, the solid particle filtration equipment includes a filter box, a lower air inlet branch pipe, an upper air inlet branch pipe, an electric valve, a partition plate, a clamping plate, a filter screen structure, a discharge pipe, and a flow meter. The lower air inlet branch pipe and the upper air inlet branch pipe are fixedly connected to one outer wall of the filter box. The bottom end of the upper air inlet branch pipe is connected to the lower air inlet branch pipe, and one end of the lower air inlet branch pipe is connected to a spray tower. An electric valve is fixedly connected to the outer walls of both the lower and upper air inlet branch pipes. A partition plate is fixedly connected to the inner wall of the filter box, dividing the filter box into an upper filtration chamber and a lower filtration chamber. Filter screen structures are movably connected to the upper and lower inner walls of the filter box. Discharge pipes are fixedly connected to the inner walls of both the upper and lower filtration chambers, and a flow meter is installed inside the discharge pipe.

[0014] Preferably, the upper and lower outer walls of the partition plate are fixedly connected with clamping plates, and the outer wall of the filter structure is clamped to the inner wall of the clamping plates.

[0015] Preferably, the filter structure includes a filter screen, a mounting frame, and a carrying plate. The filter screen is snapped into the inner wall of the mounting frame, and a carrying plate is provided on the top of the mounting frame. Strip-shaped movable grooves are provided on the upper and lower outer walls of the filter box, and the width of the carrying plate is greater than the width of the strip-shaped movable grooves.

[0016] Preferably, a controller is fixedly connected to the front outer wall of the filter box, and the controller is electrically connected to the electric valve and the flow meter.

[0017] Compared with related technologies, the CVD coating furnace exhaust gas treatment device provided by this utility model has the following beneficial effects:

[0018] 1. This utility model provides a CVD coating furnace exhaust gas treatment device. The exhaust gas undergoes multiple treatment stages, including secondary combustion, chemical absorption purification, spray washing, and solid particle filtration. From decomposing harmful components to removing residual pollutants, and then intercepting solid particles, the exhaust gas is fully purified to ensure that emissions meet standards.

[0019] 2. This utility model provides a CVD coating furnace exhaust gas treatment device, which uses a waste heat recovery structure composed of a primary spiral tube and a secondary spiral tube to perform dual recovery of heat generated by secondary combustion. The cooling medium circulates to achieve efficient heat utilization and reduce energy waste.

[0020] 3. This utility model provides a CVD coating furnace exhaust gas treatment device. The solid particle filtration equipment adopts an upper and lower double-layer filtration structure. When the upper filter screen is clogged, it can automatically switch to the lower filtration layer to ensure continuous operation of the equipment. At the same time, the filter screen structure is easy to disassemble and clean. With the design of the carrying plate and the locking plate, maintenance can be completed without stopping the machine. The operation is simple and improves the efficiency of equipment use. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of this utility model;

[0022] Figure 2 This is a side view of the structure of this utility model;

[0023] Figure 3 This is a schematic diagram of the waste heat recovery structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the solid particle filtration device of this utility model;

[0025] Figure 5 This is a partial structural diagram of the solid particle filtration device of this utility model.

[0026] In the diagram: 1. Secondary combustion equipment; 2. Gas outlet pipe; 3. Waste heat recovery structure; 301. Water tank; 302. Primary spiral tube; 303. Secondary spiral tube; 304. Heat exchange tube; 4. Chemical absorption and purification tower; 5. Gas inlet pipe; 6. Spray tower; 7. Connecting pipe; 8. Solid particle filtration equipment; 801. Filter box; 802. Lower gas inlet branch pipe; 803. Upper gas inlet branch pipe; 804. Electric valve; 805. Partition plate; 806. Fastening plate; 807. Filter screen structure; 808. Discharge pipe; 809. Flow meter. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0028] Example 1:

[0029] Please see Figures 1-3 This utility model provides a technical solution: a CVD coating furnace tail gas treatment device, including a secondary combustion device 1, a waste heat recovery structure 3, a chemical absorption purification tower 4, a spray tower 6, and a solid particle filtration device 8. The output end of the secondary combustion device 1 is fixedly connected to an outlet pipe 2.

[0030] The waste heat recovery structure 3 includes a water tank 301, a primary spiral tube 302, a secondary spiral tube 303, and a heat exchange tube 304. The primary spiral tube 302 is sleeved on the outside of the secondary combustion equipment 1. A heat exchange tube 304 is provided between the secondary combustion equipment 1 and the chemical absorption and purification tower 4. The heat exchange tube 304 is S-shaped. The secondary spiral tube 303 is wound around the outer wall of the heat exchange tube 304. One end of the primary spiral tube 302 and the secondary spiral tube 303 is fixedly connected to the inner wall of the water tank 301. A water pump is provided inside the water tank 301. The water pump drives the cooling medium to circulate between the primary spiral tube 302, the secondary spiral tube 303, and the water tank 301.

[0031] The end of the gas outlet pipe 2 away from the secondary combustion device 1 is connected to the heat exchange pipe 304. An inlet pipe 5 is provided on one side of the chemical absorption purification tower 4, and one end of the inlet pipe 5 is connected to the heat exchange pipe 304.

[0032] The chemical absorption purification tower 4 and the spray tower 6 are connected by a connecting pipe 7.

[0033] The secondary combustion equipment 1, waste heat recovery structure 3, chemical absorption and purification tower 4, spray tower 6, and solid particle filtration equipment 8 are arranged sequentially from left to right.

[0034] In this embodiment, the exhaust gas generated by the CVD coating furnace is first passed into the secondary combustion device 1 for high-temperature combustion, which decomposes the combustible components and harmful organic matter in the exhaust gas. The heat generated during combustion is recovered through the waste heat recovery structure 3. The exhaust gas after waste heat recovery enters the chemical absorption purification tower 4 through the air inlet pipe 5. Inside the chemical absorption purification tower 4, the exhaust gas comes into full contact with a specific absorbent liquid, and the acidic gases, harmful gases and other pollutants in the exhaust gas are absorbed by chemical reaction, thus initially purifying the exhaust gas.

[0035] The exhaust gas, after being treated by the chemical absorption purification tower 4, enters the spray tower 6 through the connecting pipe 7 to further remove residual pollutants in the exhaust gas, thus achieving secondary purification of the exhaust gas.

[0036] The exhaust gas discharged from the spray tower 6 enters the solid particle filter 8. The exhaust gas can enter the filter box 801 through the lower air inlet branch pipe 802 or the upper air inlet branch pipe 803. Under normal circumstances, the exhaust gas enters the upper filter chamber through the upper air inlet branch pipe 803 and intercepts solid particles through the upper filter screen structure 807. When the upper filter screen is blocked, causing the air flow rate to decrease, the flow meter 809 monitors and provides feedback. The controller controls the electric valve 804 of the upper air inlet branch pipe 803 to close and the electric valve 804 of the lower air inlet branch pipe 802 to open. The exhaust gas is then switched to the lower filter chamber for filtration. The filter screen structure 807 is fixed by a clamping plate 806 and can be easily disassembled and cleaned with a carrying handle. It can be quickly reinstalled after cleaning to ensure filtration efficiency. The setting of the upper and lower filter structures ensures that the operation of the equipment is not affected by the operation of the filter screen structure 807. The exhaust gas after being treated by the solid particle filter 8 is discharged from the device through the discharge pipe 808.

[0037] Example 2:

[0038] This embodiment is a further optimization of Embodiment 1. Based on Embodiment 1, as follows: Figures 1-5 As shown, the solid particle filtration device 8 includes a filter box 801, a lower air inlet branch pipe 802, an upper air inlet branch pipe 803, an electric valve 804, a partition plate 805, a clamping plate 806, a filter screen structure 807, an exhaust pipe 808, and a flow meter 809. The lower air inlet branch pipe 802 and the upper air inlet branch pipe 803 are fixedly connected to one side of the outer wall of the filter box 801. The bottom end of the upper air inlet branch pipe 803 is connected to the lower air inlet branch pipe 802, and one end of the lower air inlet branch pipe 802 is connected to the spray nozzle. Tower 6 is connected. Electric valves 804 are fixedly connected to the outer walls of the lower air inlet branch pipe 802 and the upper air inlet branch pipe 803. A partition plate 805 is fixedly connected to the inner wall of the filter box 801, which divides the filter box 801 into an upper filter chamber and a lower filter chamber. Filter screen structures 807 are movably connected to the inner walls of both the upper and lower sides of the filter box 801. Discharge pipes 808 are fixedly connected to the inner walls of both the upper and lower filter chambers. A flow meter 809 is installed in the discharge pipe 808.

[0039] The upper and lower outer walls of the partition plate 805 are fixedly connected with the retaining plate 806, and the outer wall of the filter structure 807 is engaged with the inner wall of the retaining plate 806.

[0040] The filter structure 807 includes a filter screen, a mounting frame, and a carrying plate. The filter screen is snapped into the inner wall of the mounting frame, and a carrying plate is provided on the top of the mounting frame. The upper and lower outer walls of the filter box 801 are provided with strip-shaped movable grooves, and the width of the carrying plate is greater than the width of the strip-shaped movable grooves.

[0041] The front outer wall of the filter box 801 is fixedly connected to a controller, which is electrically connected to the electric valve 804 and the flow meter 809.

[0042] In this embodiment, the exhaust gas generated by the CVD coating furnace is first passed into the secondary combustion device 1 for high-temperature combustion, which decomposes the combustible components and harmful organic matter in the exhaust gas. During the combustion process, the primary spiral tube 302 wrapped around the outside of the secondary combustion device 1 is driven by a water pump to circulate the cooling medium and absorb the heat generated by the combustion. At the same time, the high-temperature exhaust gas discharged from the secondary combustion device 1 enters the S-shaped heat exchange tube 304 through the exhaust pipe 2. The secondary spiral tube 303 wrapped around its outer wall further recovers the waste heat of the exhaust gas. The cooling medium circulates between the primary spiral tube 302, the secondary spiral tube 303 and the water tank 301 to achieve efficient heat recovery for use in other process steps or energy reuse.

[0043] Working principle: The exhaust gas generated by the CVD coating furnace is first passed into the secondary combustion device 1 for high-temperature combustion, which decomposes the combustible components and harmful organic matter in the exhaust gas. During the combustion process, the primary spiral tube 302 wrapped around the outside of the secondary combustion device 1 is driven by a water pump to circulate the cooling medium and absorb the heat generated by the combustion. At the same time, the high-temperature exhaust gas discharged from the secondary combustion device 1 enters the S-shaped heat exchange tube 304 through the exhaust pipe 2. The secondary spiral tube 303 wrapped around its outer wall further recovers the waste heat of the exhaust gas. The cooling medium circulates between the primary spiral tube 302, the secondary spiral tube 303 and the water tank 301 to achieve efficient heat recovery for use in other process links or energy reuse.

[0044] The exhaust gas after waste heat recovery enters the chemical absorption and purification tower 4 through the inlet pipe 5. Inside the chemical absorption and purification tower 4, the exhaust gas comes into full contact with a specific absorbent liquid, and uses chemical reaction to absorb pollutants such as acidic gases and harmful gases in the exhaust gas, thus initially purifying the exhaust gas.

[0045] The exhaust gas treated by the chemical absorption purification tower 4 enters the spray tower 6 through the connecting pipe 7. In the spray tower 6, multiple spray heads spray washing liquid downwards, which comes into full contact with the rising exhaust gas, further removing the residual pollutants in the exhaust gas and realizing the secondary purification of the exhaust gas.

[0046] The exhaust gas discharged from the spray tower 6 enters the solid particle filter 8. The exhaust gas can enter the filter box 801 through the lower air inlet branch pipe 802 or the upper air inlet branch pipe 803. Under normal circumstances, the exhaust gas enters the upper filter chamber through the upper air inlet branch pipe 803 and intercepts solid particles through the upper filter screen structure 807. When the upper filter screen is blocked, causing the air flow rate to decrease, the flow meter 809 monitors and provides feedback. The controller controls the electric valve 804 of the upper air inlet branch pipe 803 to close and the electric valve 804 of the lower air inlet branch pipe 802 to open. The exhaust gas is then switched to the lower filter chamber for filtration. The filter screen structure 807 is fixed by a clamping plate 806 and can be easily disassembled and cleaned with a carrying handle. It can be quickly reinstalled after cleaning to ensure filtration efficiency. The setting of the upper and lower filter structures ensures that the operation of the equipment is not affected by the operation of the filter screen structure 807. The exhaust gas after being treated by the solid particle filter 8 is discharged from the device through the discharge pipe 808.

[0047] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A CVD coating furnace tail gas treatment device, comprising a secondary combustion device (1), a waste heat recovery structure (3), a chemical absorption purification tower (4), a spray tower (6), a solid particle filtering device (8), characterized in that: The output end of the secondary combustion device (1) is fixedly connected to the gas outlet pipe (2); The waste heat recovery structure (3) includes a water tank (301), a primary spiral tube (302), a secondary spiral tube (303), and a heat exchange tube (304). The primary spiral tube (302) is sleeved on the outside of the secondary combustion device (1). A heat exchange tube (304) is provided between the secondary combustion device (1) and the chemical absorption purification tower (4). The heat exchange tube (304) is S-shaped. A secondary spiral tube (303) is wound around the outer wall of the heat exchange tube (304). One end of the primary spiral tube (302) and the secondary spiral tube (303) is fixedly connected to the inner wall of the water tank (301). A water pump is provided inside the water tank (301). The water pump drives the cooling medium to circulate between the primary spiral tube (302), the secondary spiral tube (303), and the water tank (301). The end of the outlet pipe (2) away from the secondary combustion device (1) is connected to the heat exchange pipe (304). An inlet pipe (5) is provided on one side of the chemical absorption purification tower (4), and one end of the inlet pipe (5) is connected to the heat exchange pipe (304). The chemical absorption purification tower (4) and the spray tower (6) are connected by a connecting pipe (7).

2. A CVD coating furnace exhaust treatment apparatus according to claim 1, characterized in that: The secondary combustion device (1), waste heat recovery structure (3), chemical absorption and purification tower (4), spray tower (6), and solid particle filtration device (8) are arranged sequentially from left to right.

3. The CVD coating furnace exhaust treatment device of claim 1, wherein: The solid particle filtration device (8) includes a filter box (801), a lower air inlet branch pipe (802), an upper air inlet branch pipe (803), an electric valve (804), a partition plate (805), a clamping plate (806), a filter screen structure (807), an exhaust pipe (808), and a flow meter (809). The lower air inlet branch pipe (802) and the upper air inlet branch pipe (803) are fixedly connected to one side of the outer wall of the filter box (801). The bottom end of the upper air inlet branch pipe (803) is connected to the lower air inlet branch pipe (802), and one end of the lower air inlet branch pipe (802) is connected to the spray nozzle. The tower (6) is connected, and electric valves (804) are fixedly connected to the outer walls of the lower air inlet branch pipe (802) and the upper air inlet branch pipe (803). A partition plate (805) is fixedly connected to the inner wall of the filter box (801). The partition plate (805) divides the filter box (801) into an upper filter chamber and a lower filter chamber. Filter screen structures (807) are movably connected to the inner walls of the upper and lower sides of the filter box (801). A discharge pipe (808) is fixedly connected to the inner walls of the upper filter chamber and the lower filter chamber. A flow meter (809) is installed in the discharge pipe (808).

4. A CVD coating furnace exhaust treatment apparatus according to claim 3, characterized in that: The upper and lower outer walls of the partition plate (805) are fixedly connected with clamping plates (806), and the outer wall of the filter structure (807) is clamped to the inner wall of the clamping plate (806).

5. A CVD coating furnace exhaust treatment apparatus according to claim 4, characterized in that: The filter structure (807) includes a filter, a mounting frame, and a carrying plate. The filter is snapped into the inner wall of the mounting frame, and a carrying plate is provided on the top of the mounting frame. The upper and lower outer walls of the filter box (801) are provided with strip-shaped movable grooves, and the width of the carrying plate is greater than the width of the strip-shaped movable grooves.

6. A CVD coating furnace exhaust treatment apparatus according to claim 5, characterized in that: A controller is fixedly connected to the front outer wall of the filter box (801), and the controller is electrically connected to the electric valve (804) and the flow meter (809).

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