Wet process processing equipment and pushing structure of magnetic fixture thereof
By controlling the clamping kinetic energy of the magnetic clamp through a two-stage clamping method, the problem of substrate cracking or breaking during the clamping process is solved, thus achieving safe clamping of the substrate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- AMPOC FAR EAST CO LTD
- Filing Date
- 2025-04-16
- Publication Date
- 2026-04-24
AI Technical Summary
The magnetic clamps in existing wet processing equipment have excessive kinetic energy during the clamping process, which can easily cause fragile substrates such as glass substrates to be cracked or broken, especially at their fragile edges.
A two-stage clamping method is adopted. First, the magnetic clamp is controlled in a half-open and half-clamped state. Then, in the second stage, magnetic adsorption is used to complete the clamping, reducing the clamping kinetic energy.
It effectively avoids the cracking or shattering of the substrate, especially glass substrates, and improves the safety of the substrate by reducing the clamping kinetic energy.
Smart Images
Figure CN224158301U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a structure for opening and closing magnetic clamps in wet processing, and in particular to a wet processing equipment and its magnetic clamping push structure. Background Technology
[0002] For wet processing equipment that performs wet processing on upright substrates, the substrate to be processed is usually held upright by magnetic clamps to facilitate the transport of the suspended substrate along a predetermined transport path, and the wet processing is performed on the substrate along the transport path.
[0003] However, magnetic clamps mainly use magnets at their clamping ends to utilize the principle that magnets can magnetically attract each other, allowing the clamping ends, which are originally in a fully open state, to be instantly clamped into a closed state due to the attraction of opposite magnetism between the two magnets. The clamping kinetic energy from fully open to closed is relatively large. For more fragile substrates, such as glass substrates, this can cause the substrate to be cracked or broken, which has long been criticized. Moreover, the magnetic clamps are clamped at the more fragile edge of the substrate, making it even more prone to cracking or breaking. Utility Model Content
[0004] The purpose of this utility model is to provide a wet process equipment and its magnetic clamping device with a pushing structure, which mainly enables the magnetic clamping device to perform clamping in two stages, thereby reducing the clamping kinetic energy of the magnetic clamping device and achieving the effect of avoiding cracking or crushing the substrate.
[0005] To achieve the above objectives, this utility model provides a pushing structure for a magnetic clamp, which is driven by a pair of driving units to control the opening and closing of at least one magnetic clamp. The magnetic clamp has a magnetic holding end and a third end. The pushing structure includes: a pair of bases connected and driven by each of the driving units to move relative to each other, each base having at least one mounting portion corresponding to the at least one magnetic clamp; and a pair of protrusion assemblies respectively disposed on the pair of bases, each protrusion assembly including at least one first protrusion and at least one second protrusion. A protrusion corresponding to the magnetic clamping end of the magnetic clamp is protruding from the setting portion of each base, and at least one second protrusion corresponding to the other end of the magnetic clamp is protruding from the setting portion of each base; wherein, each driving unit drives each base to move together with each protrusion assembly, the first protrusion of each protrusion assembly pushes the magnetic clamping end to clamp and close relative to each other so that the other end can open from a closed position to a fully open position, and the second protrusion of each protrusion assembly blocks the other end between the closed position and the fully open position.
[0006] Optionally, the number of the setting portions is set to be multiple, including at least one odd portion and at least one even portion, and each of the bump components protrudes from the odd portion or the even portion of each of the bases.
[0007] Optionally, it also includes two positioning components, each of which includes two positioning elements, the two positioning elements of each positioning component being moved closer to each other to enclose each other.
[0008] Optionally, each of the positioning elements of each positioning assembly has a fork portion facing each other, and the forks of each positioning element are closed by interleaving each other.
[0009] This utility model also provides a wet processing equipment, configured with multiple drive units. The wet processing equipment includes: a carrier comprising a frame, an upper crossbar, and a lower crossbar, the upper crossbar and the lower crossbar spanning the frame and each being provided with at least one magnetic clamp, each magnetic clamp having a magnetic holding end and an other end; and two pushing structures respectively configured corresponding to the upper crossbar and the lower crossbar, each pushing structure comprising: a pair of bases connected to the drive units and driven by the drive units to move relative to each other, each base having at least one setting portion corresponding to the at least one magnetic clamp; and a pair of protrusion assemblies respectively. Each of the protrusion components, disposed on the pair of bases, includes at least one first protrusion and at least one second protrusion. Each of the at least one first protrusion protrudes from the magnetic clamping end of the magnetic clamp on the mounting portion of the base, and each of the at least one second protrusion protrudes from the other end of the magnetic clamp on the mounting portion of the base. The driving unit drives the base to move together with the protrusion components. The first protrusion of each protrusion component pushes the magnetic clamping end to clamp and close, allowing the other end to open from a closed position to a fully open position. The second protrusion of each protrusion component blocks the other end between the closed position and the fully open position.
[0010] Optionally, the magnetic clamps are configured in multiples, and the setting positions are also configured in multiples, including at least one odd-numbered position and at least one even-numbered position, with each of the protrusion components protruding from the odd-numbered position or the even-numbered position of each of the bases.
[0011] Optionally, the pushing structure corresponding to the lower crossbar also includes two positioning components. The two ends of the lower crossbar are suspended within the frame, and the lower crossbar has two positioning segments adjacent to the two ends. Each positioning component includes two positioning elements, and the two positioning elements of each positioning component restrain each positioning segment relative to each other by moving closer to each other.
[0012] Optionally, each of the positioning components has a fork portion facing each other, and the forks of each positioning component enclose and bind the positioning segment of the lower crossbar by interleaving each other.
[0013] Optionally, each of the pushing structures further includes multiple translation units, each of the translation units driving each of the positioning elements to translate.
[0014] Compared with the prior art, the present invention has the following advantages: by dividing the clamping of the magnetic clamp into two stages, the first stage controls the magnetic clamp to be in a half-open and half-clamped state, and the second stage controls the magnetic clamp to start clamping the substrate from the half-open and half-clamped state. In this way, the clamping kinetic energy of the magnetic clamp can be reduced, thereby achieving the effect of avoiding cracking or crushing the substrate. Attached Figure Description
[0015] Figure 1 This is a partial front view of the wet process equipment (without a suspended carrier) of this utility model.
[0016] Figure 2 This utility model is based on Figure 1 A three-dimensional schematic diagram of the two propulsion structures.
[0017] Figure 3 This is a front view schematic diagram of the carrier in the wet process equipment of this utility model (with the substrate already clamped).
[0018] Figure 4 This is a partial front view schematic diagram of the wet process equipment (with the carrier already suspended) of this utility model.
[0019] Figure 5 This utility model is based on Figure 4 A schematic diagram of the upper push structure in the diagram, viewed from above.
[0020] Figure 6 This utility model is based on Figure 4 A schematic diagram of the lower push structure in the diagram, viewed from above.
[0021] Figure 7 This utility model is based on Figure 4 A cross-sectional view from the side.
[0022] Figure 8 This utility model is based on Figure 7 A magnified view of a portion of the image.
[0023] Figure 9 This utility model is based on Figure 4 Another cross-sectional view from the side.
[0024] Figure 10This is a top view of the positioning component in this utility model after positioning.
[0025] Figure 11 This is a cross-sectional view of the lifting unit in this utility model before it rises.
[0026] Figure 12 This is a cross-sectional view of the lifting unit in this utility model after it has been raised.
[0027] Figure 13 This is a side view of the wet processing equipment (with the carrier already suspended) before the push structure moves.
[0028] Figure 14 This utility model is based on Figure 13 A schematic diagram of the upper push structure in the diagram, viewed from above.
[0029] Figure 15 This utility model is based on Figure 13 A schematic diagram of the lower push structure in the diagram, viewed from above.
[0030] Figure 16 This is a side view of the upper pushing structure of this utility model after it has been pushed.
[0031] Figure 17 This is a side view of the lower pushing structure of this utility model after it has been pushed.
[0032] Figure 18 This is a side view of the upper pushing structure of this utility model after it has been retracted and clamped.
[0033] Figure 19 This is a side view of the lower pushing structure of this utility model after it has been retracted and clamped.
[0034] In the picture:
[0035] 100a: Pushing structure; 100b: Pushing structure; 1: Base; 11: Setting position; 111: Odd-numbered position; 112: Even-numbered position;
[0036] 2: Protrusion assembly; 21: First protrusion; 22: Second protrusion; 3: Positioning assembly; 31: Positioning element; 311: Fork opening;
[0037] 4: Support frame; 800: Carrier; 8: Frame; 81: Hanger; 9: Magnetic clamp; 91: Clamping plate; 911: Magnetic clamping end;
[0038] 912: Other end; H: Suspension spring; L1: Upper crossbar; L2: Lower crossbar; L21: Positioning section; M1: Drive unit;
[0039] M2: Translation unit; M3: Lifting unit; P1: Closed position; P2: Fully open position; S: Base plate; T: Conveying unit. Detailed Implementation
[0040] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.
[0041] This utility model provides a wet process processing equipment and its magnetic clamping push structure, such as... Figure 4 As shown, the wet processing equipment of this invention mainly suspends a carrier 800 holding a substrate S on a conveying unit T, and performs wet processing on the substrate S held on the carrier 800 during the conveying process of the conveying unit T. The substrate S held by this invention can be any substrate, and is particularly suitable for glass substrates that can be used for semiconductor packaging.
[0042] like Figures 1 to 8 As shown, the wet processing equipment of this utility model is equipped with multiple drive units M1 and includes: two push structures 100a and 100b and the aforementioned carrier 800.
[0043] The carrier 800 includes a frame 8, an upper crossbar L1, and a lower crossbar L2, which are spaced apart and span across each other within the frame 8. The frame 8 is equipped with a hanger 81, and the carrier 800 is suspended from the conveying unit T and conveyed by the conveying unit T using the hanger 81. At least one magnetic clamp 9 is provided on both the upper crossbar L1 and the lower crossbar L2. The number of magnetic clamps 9 on the upper or lower crossbars L1 and L2 can be one, a pair, multiple, or multiple pairs. As shown in the figure, multiple pairs are illustrated, but for simplicity, only one pair will be used as an example below. The magnetic clamp 9 has a magnetic holding end 911 and an opposite end 912. The magnetic holding end 911 is equipped with a magnetic element (e.g., a magnet, element symbol not shown). Therefore, when the magnetic holding ends 911 are brought close together to a suitable distance, they can magnetically attract each other using the magnetic element, thereby completing the clamping.
[0044] Two pushing structures 100a and 100b, for example, can be an upper pushing structure 100a and a lower pushing structure 100b (but this utility model is not limited to this), which are respectively configured to correspond to the upper crossbar L1 and the lower crossbar L2. Each pushing structure 100a (or 100b) includes a pair of bases 1 spaced apart from each other and a pair of protrusion assemblies 2 spaced apart from each other. Specifically, the pushing structure 100a is suspended in the wet processing equipment by a portion of the drive unit M1; a support frame 4 is provided at the bottom of the wet processing equipment, and the pushing structure 100b is located at the bottom of the wet processing equipment by another portion of the drive unit M1 being mounted on the support frame 4.
[0045] Two pairs of bases 1 are located on two opposite sides of the carrier 800 and are connected to the aforementioned two drive units M1. Each drive unit M1 can drive the bases 1 to move closer to or further away from each other. On one of the opposite surfaces (without component symbols) of the two bases 1 facing each other, at least one setting part 11 is arranged corresponding to the magnetic clamp 9. In other words, the number of setting parts 11 is basically corresponding to the magnetic clamp 9, and there can be one or more of them. As shown in the figure, there are multiple parts that are not arranged in pairs (details will be described later). For the sake of simplicity, one example will be used for explanation below.
[0046] Two protrusion components 2 are respectively disposed on the aforementioned opposing surfaces of the two bases 1. Each protrusion component 2 includes at least one first protrusion 21 and at least one second protrusion 22, wherein the first protrusion 21 of each protrusion component 2 protrudes from the mounting portion 11 of each base 1 corresponding to the magnetic clamping end 911, and the second protrusion 22 of each protrusion component 2 protrudes from the mounting portion 11 of each base 1 corresponding to the other end 912.
[0047] In this way, such as Figures 4 to 8 and paired Figure 11 as well as Figures 14 to 17 As shown, when multiple drive units M1 drive the two push structures 100a and 100b to move respectively, the two bases 1 of push structure 100a and the two bases 1 of push structure 100b will move closer to each other along with the protrusion assemblies 2. After the movement, the first protrusion 21 of the two protrusion assemblies 2 of push structure 100a (100b) will push the magnetic clamping end 911 to clamp and close relative to each other, so that the other end 912 can open from a closed position P1 to a fully open position P2 (see...). Figure 8 and Figure 18 As for the second protrusion 22 of the two protrusion assemblies 2 of the pushing structure 100a (100b), it blocks the other end 912 between the closed position P1 and the fully open position P2. This allows the magnetic clamping end 911 and the other end 912 of the magnetic clamp 9 to... Figure 16As shown, both are kept in a half-open, half-clamped state. In this embodiment, it means that the magnetic clamps 9 on the upper crossbar L1 and the lower crossbar L2 are kept in a half-open, half-clamped state after being pushed. The "fully open" in the "fully open position P2" means that the magnetic clamping end 911 or the other end 912 is fully opened to the end.
[0048] Next, as Figure 18 and Figure 19 As shown, when the multiple driving units M1 drive the two pushing structures 100a and 100b to retract from the magnetic clamps 9 on the upper crossbar L1 and the lower crossbar L2 respectively, since the second protrusion 22, which was originally blocking the movement path of the other end 912 from the closed position P1 to the fully open position P2, has retracted and no longer blocks, the magnetic clamping end 911 can close and clamp the substrate S by using the magnetic attraction of the aforementioned magnetic elements to each other, while the other end 912 is opened to the fully open position P2.
[0049] In this way, the present invention can use the pushing structures 100a and 100b to control the magnetic clamp 9 to clamp and release the substrate S. Since the magnetic clamp 9 adopts a two-stage clamping method, that is, in the first stage, the magnetic clamping end 911 of the magnetic clamp 9 is in a half-clamped state (that is, the entire magnetic clamp 9 is in a half-open and half-clamped state). The magnetic clamp 9 can only use the magnetic clamping end 911 to clamp the substrate S by magnetic attraction in the second stage. In other words, the movement distance of the magnetic clamping end 911 from the half-clamped state in the first stage to the fully clamped state in the second stage is necessarily shorter than the movement distance of the magnetic clamp 9 from the fully open state to the fully clamped state without using the pushing structures 100a and 100b of the present invention (the movement distance can be reduced by half). Therefore, the clamping kinetic energy of the magnetic clamping end 911 can be weakened accordingly, thereby achieving the effect of avoiding cracking or breaking the substrate S (such as a glass substrate).
[0050] It should be noted that if the aforementioned vehicle 800 is configured with such a feature on frame 8... Figure 3 When a pair of suspension springs H are shown, the two ends of the lower crossbar L2 will cross over the lower ends of the two suspension springs H, causing wobbling. Therefore, in order for the magnetic clamp 9 on the lower crossbar L2 to accurately clamp the lower edge of the substrate S, as shown... Figure 2 , Figure 6 , Figures 9 to 11 as well as Figure 15 As shown, the push structure 100b of this utility model also includes two positioning components 3, and the lower crossbar L2 is as follows: Figure 3 It also has two positioning segments L21 adjacent to its two ends.
[0051] The two positioning components 3 are driven by multiple translation units M2. Each translation unit M2 is disposed on the aforementioned support frame 4 and drives each positioning component 3 to move closer to or further away from each other.
[0052] Each positioning component 3 includes two positioning members 31 spaced apart from each other. The two positioning members 31 of each positioning component 3 are positioned to restrain the positioning segments L21 of the lower crossbar L2 by moving closer to each other, thereby fixing the lower crossbar L2 and preventing it from wobbling. Specifically, the positioning member 31 may be a fork (not marked) or an object with forks (neither marked). Each positioning member 31 of each positioning component 3 has a fork portion 311 facing each other. The fork portions 311 of each positioning member 31 are interleaved (see...). Figure 11 and Figure 15 The two fork sections 311, after being closed together, form a cross-sectional shape corresponding to the positioning section L21 (e.g., circular, as shown in the image). Figure 11 (As shown).
[0053] like Figures 1 to 8 As shown, in order to alternately clamp so that the liquid sprayed during the wet process can also be sprayed onto the position where the magnetic clamp 9 is clamped on the substrate S, the number of the aforementioned magnetic clamp 9 on the upper crossbar L1 and the lower crossbar L2 can be one pair or at least two pairs. The number of the aforementioned setting parts 11 is also set to be multiple (at least two), including at least one odd-numbered part 111 and at least one even-numbered part 112. Each bump assembly 2 of each push structure 100a (100b) is only protruded on the odd-numbered part 111 or the even-numbered part 112 of each base 1. In this embodiment, the example of only protruding on the even-numbered part 112 of each base 1 is described, while the odd-numbered part 111 is in an empty state.
[0054] In this way, the push structures 100a and 100b can first control the magnetic clamps 9 relative to the even-numbered portions 112 to clamp and release the substrate S. Then, the carrier 800 is moved laterally a short distance relative to the push structures 100a and 100b by the transport unit T, so that the magnetic clamps 9 relative to the odd-numbered portions 111 are moved to the space between the two protrusion assemblies 2 of the push structures 100a and 100b, so that the push structures 100a and 100b can control the magnetic clamps 9 relative to the odd-numbered portions 111 to clamp and release the substrate S.
[0055] This allows the liquid sprayed during the wet process to be sprayed onto the entire substrate S without leaving any unsprayed areas, through alternating clamping.
[0056] It should be noted that, as Figure 8 , Figure 16 and Figure 18As shown, the aforementioned magnetic clamp 9 includes two clamping plates 91 rotatably connected to each other. Each clamping plate 91 is a straight and flat plate, so the outer sides of the two clamping plates 91 are both straight and flat. The inner sides (adjacent sides) of the two clamping plates 91 each have a protruding semicircle (not indicated). The two semicircles are rotatably overlapped and connected to each other. In order to keep the magnetic clamp 9 in the aforementioned half-open and half-closed state in the first stage, the degree of protrusion of the first protrusion 21 and the second protrusion 22 of each protrusion assembly 2 (located on the two opposite sides of the magnetic clamp 9) can be the same, or one protrusion can be slightly protruding while the other protrusion can be slightly retracted, and the degree of slight protrusion and slight retraction can be equal. This utility model does not limit this, as long as the magnetic clamp 9 can be kept in the half-open and half-closed state in the first stage.
[0057] In addition, such as Figure 2 , Figure 9 , Figures 11 to 13 , Figure 17 and Figure 19 As shown, the wet process processing equipment of this utility model may further include a lifting unit M3. The lifting unit M3 is disposed at the bottom of the wet process processing equipment and drives the aforementioned support frame 4 to rise and fall, so as to drive the push structure 100b to rise to the magnetic clamp 9 corresponding to the lower crossbar L2.
[0058] In summary, the wet processing equipment and its magnetic clamping push structure of this utility model can indeed achieve the expected use purpose and effect, and can solve the shortcomings of the prior art. Therefore, a patent utility model is proposed.
[0059] The above-described embodiments are merely preferred embodiments provided to fully illustrate the present utility model, and the protection scope of the present utility model is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present utility model, or reasonable combinations of solutions from various embodiments, are all within the protection scope of the present utility model.
Claims
1. A pushing structure for a magnetic clamp, driven by a pair of driving units to control the opening and closing of at least one magnetic clamp, said magnetic clamp having a magnetic holding end and another end, characterized in that, The propulsion structure includes: A pair of bases, connected and driven by each of the said drive units to move relative to each other, each of the said bases having at least one mounting portion corresponding to at least one of the said magnetic clamps; and A pair of bump assemblies are respectively disposed on the pair of bases. Each bump assembly includes at least one first bump and at least one second bump. Each of the at least one first bumps is provided on the disposed portion of each of the bases, corresponding to the magnetic clamping end of the magnetic clamp. Each of the at least one second bumps is provided on the disposed portion of each of the bases, corresponding to the other end of the magnetic clamp. In this process, each of the driving units drives each of the bases to move together with each of the protrusion assemblies. The first protrusion of each of the protrusion assemblies pushes the magnetic clamping end to clamp and close relative to each other, so that the other end can open from a closed position to a fully open position. The second protrusion of each of the protrusion assemblies blocks the other end between the closed position and the fully open position.
2. The pushing structure of the magnetic clamp as described in claim 1, characterized in that, The number of the setting positions is set to be multiple, including at least one odd-numbered position and at least one even-numbered position, and each of the bump components protrudes from the odd-numbered position or the even-numbered position of each of the bases.
3. The pushing structure of the magnetic clamp as described in claim 1, characterized in that, It also includes two positioning components, each of which includes two positioning elements, the two positioning elements of each positioning component moving closer to each other to enclose each other.
4. The pushing structure of the magnetic clamp as described in claim 3, characterized in that, Each of the positioning components has a forked portion facing each other, and the forked portions of each positioning component are enclosed by interleaving each other.
5. A wet processing equipment, configured with multiple drive units, characterized in that, The wet processing equipment includes: A carrier comprising a frame, an upper crossbar, and a lower crossbar, the upper and lower crossbars spanning the frame and each equipped with at least one magnetic clamp, each magnetic clamp having a magnetic holding end and an other end; and Two pushing structures are respectively configured corresponding to the upper crossbar and the lower crossbar, and each pushing structure includes: A pair of bases, connected to and driven by the drive unit to move relative to each other, each base having at least one mounting portion corresponding to at least one of the magnetic clamps; and A pair of bump assemblies are respectively disposed on the pair of bases. Each bump assembly includes at least one first bump and at least one second bump. Each of the at least one first bumps is provided on the disposed portion of each of the bases, corresponding to the magnetic clamping end of the magnetic clamp. Each of the at least one second bumps is provided on the disposed portion of each of the bases, corresponding to the other end of the magnetic clamp. In this process, each of the driving units drives each of the bases to move together with each of the protrusion assemblies. The first protrusion of each of the protrusion assemblies pushes the magnetic clamping end to clamp and close relative to each other, so that the other end can open from a closed position to a fully open position. The second protrusion of each of the protrusion assemblies blocks the other end between the closed position and the fully open position.
6. The wet processing equipment as described in claim 5, characterized in that, The magnetic clamps are configured in multiples, and the setting positions are also configured in multiples, including at least one odd-numbered position and at least one even-numbered position. Each of the protrusion components protrudes from the odd-numbered position or the even-numbered position of each of the bases.
7. The wet processing equipment as described in claim 5, characterized in that, The pushing structure corresponding to the lower crossbar also includes two positioning components. The two ends of the lower crossbar are suspended within the frame, and the lower crossbar has two positioning segments adjacent to the two ends. Each positioning component includes two positioning elements, and the two positioning elements of each positioning component restrain each positioning segment relative to each other by moving closer to each other.
8. The wet processing equipment as described in claim 7, characterized in that, Each of the positioning components has a forked portion facing each other, and the forked portions of each positioning component enclose and bind the positioning segment of the lower crossbar by interleaving each other.
9. The wet processing equipment as described in claim 7, characterized in that, Each of the pushing structures further includes multiple translation units, each of which drives the positioning element to translate.