High-precision three-dimensional tomography device based on FIB-SEM double-beam system

Abstract

The high-precision three-dimensional tomography device based on the FIB-SEM double-beam system comprises a machine box and a scanning electron microscope, a walking mechanism is fixedly installed on the top of the machine box, and the walking mechanism is at least used for rotary motion of the scanning electron microscope; a rotary motor is arranged above the walking mechanism and is at least used for the rotary motion of the scanning electron microscope; a telescopic arm assembly is mounted above the rotary motor and is at least used for adjusting the horizontal position of the scanning electron microscope; a lifting mechanism is fixedly installed at one end of the telescopic arm assembly. The angle adjusting mechanism can adjust the pitching angle of the scanning electron microscope, the height of the scanning electron microscope is adjusted through the lifting mechanism, the horizontal position of the scanning electron microscope is adjusted through the telescopic arm assembly, and the rotary motor can drive the scanning electron microscope to rotate. The walking mechanism can enable the scanning electron microscope to rotate around the storage table, and all-directional scanning of the circuit board on the storage table is achieved.

Description

Technical Field

[0001] This utility model relates to the field of scanning device technology, specifically to a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system. Background Technology

[0002] The SEM / FIB dual-beam setup enables real-time, high-resolution observation; the FIB focused ion beam is widely used in semiconductors, optoelectronics, and metallic materials, and is indispensable, especially in the semiconductor industry.

[0003] Chip repair involves cutting or severing circuits under a microscope using an ion beam.

[0004] Sample preparation involves slicing the material into thin sections for scanning electron microscopy failure observation.

[0005] Nano-engraving is the process of carving micro- and nano-scale patterns onto the surface of a material.

[0006] The aforementioned circuit board processing technology is inseparable from SEM (Scanning Electron Microscope) / FIB dual-beam equipment.

[0007] Current SEM / FIB dual-beam equipment for scanning circuit boards to detect manufacturing defects still has some problems. The limited movement of the SEM results in low scanning efficiency, and the restricted movement also significantly reduces the scanning quality. Therefore, there is an urgent need to design a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system to solve these problems. Utility Model Content

[0008] The purpose of this invention is to provide a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system to address the aforementioned shortcomings in the prior art.

[0009] To achieve the above objectives, this utility model provides the following technical solution:

[0010] A high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system includes a chassis and a scanning electron microscope. A traveling mechanism is fixedly installed on the top of the chassis, and the traveling mechanism is used for at least the rotational movement of the scanning electron microscope.

[0011] A rotary motor is mounted above the walking mechanism, and the rotary motor is used for at least the rotational movement of the scanning electron microscope.

[0012] A telescopic arm assembly is mounted above the rotary motor, and the telescopic arm assembly is used at least for adjusting the horizontal position of the scanning electron microscope;

[0013] A lifting mechanism is fixedly installed at one end of the telescopic arm assembly, and the lifting mechanism is used at least for adjusting the vertical position of the scanning electron microscope;

[0014] An angle adjustment mechanism is provided on one side of the lifting mechanism, and the angle adjustment mechanism is used at least for adjusting the pitch angle of the scanning electron microscope.

[0015] A storage platform is fixedly installed on the top of the chassis. Several clamps are provided on the outer wall of the top of the storage platform, and a circuit board fixed by the clamps is installed on the top of the storage platform.

[0016] Furthermore, a housing is fixedly installed on the top of the chassis, and the housing is fitted over the outside of the scanning device;

[0017] The front of the housing is provided with a guide groove, and the two sides of the front of the housing are provided with sliding doors. The inner sidewall of the sliding door is provided with a guide bar that is slidably inserted into the guide groove.

[0018] Furthermore, the front of the chassis is provided with a door panel, and the door panel is provided with a finger groove.

[0019] Furthermore, the walking mechanism includes a geared rail fixedly installed on the outer wall of the top of the chassis, and a slide rail is provided on the inner side of the geared rail;

[0020] A slide saddle is slidably mounted on the slide rail. A motor mounting bracket is fixedly mounted on one side of the slide saddle. A motor is fixedly connected to the motor mounting bracket. A traveling gear is driven to the output shaft of the motor. The traveling gear meshes with the inner wall of one side of the gear rail.

[0021] A connecting rod is fixedly installed at the bottom of the rotary motor, and the rotary motor is fixed to the motor mounting bracket through the connecting rod.

[0022] Furthermore, the telescopic arm assembly includes a multi-stage telescopic rod, and a motor is provided at one end of the multi-stage telescopic rod.

[0023] Furthermore, the lifting mechanism includes a sleeve fixed to one end of the multi-stage telescopic rod, and a drive gear is installed inside the sleeve via a support shaft. A motor connected to the drive gear is provided on one side of the sleeve.

[0024] A guide rod is fixedly installed on one side of the outer wall of the sleeve, and a sleeve is slidably engaged on the guide rod. A rack is meshed with one side of the drive gear.

[0025] Furthermore, the angle adjustment mechanism includes a clamping arm, and the rack and the ferrule are both fixedly connected to the outer wall of one side of the clamping arm;

[0026] The scanning electron microscope is rotatably mounted inside the clamping arm, and a motor for driving the scanning electron microscope to rotate is provided on one side of the clamping arm.

[0027] In the above technical solution, the high-precision three-dimensional tomographic scanning device based on the FIB-SEM dual-beam system provided by this utility model has the following advantages:

[0028] (1) The angle adjustment mechanism can adjust the pitch angle of the scanning electron microscope, the lifting mechanism can adjust the height of the scanning electron microscope, the telescopic arm assembly can adjust the horizontal position of the scanning electron microscope, the rotary motor can drive the scanning electron microscope to rotate, and the walking mechanism can make the scanning electron microscope rotate around the storage stage to realize the all-round scanning of the circuit board on the storage stage.

[0029] (2) At the same time, the angle adjustment mechanism, lifting mechanism, telescopic arm assembly, rotary motor and walking mechanism can drive the scanning electron microscope to run independently and realize the corresponding adjustment, or they can move synchronously to realize multi-angle and range adjustment of the scanning electron microscope. By utilizing the efficient and fast operation of multiple movements, the scanning electron microscope can be adjusted to multiple shooting angles, thereby improving the accuracy of circuit board scanning, reducing the product inspection omission rate, and improving the effect of using the scanning electron microscope to scan circuit boards. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0031] Figure 1 This is a three-dimensional structural view of an embodiment of a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system according to the present invention.

[0032] Figure 2 This is a schematic diagram of the cross-sectional structure of the outer shell of an embodiment of a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system according to this utility model.

[0033] Figure 3 This is a schematic diagram of the structure of a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system, with the outer shell removed, according to an embodiment of this utility model.

[0034] Figure 4 This is a schematic diagram of the walking mechanism and telescopic arm assembly provided in an embodiment of a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system according to this utility model.

[0035] Figure 5 This is a schematic diagram of the lifting mechanism and angle adjustment mechanism provided in an embodiment of a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system according to this utility model.

[0036] 1. Chassis; 11. Door panel; 2. Outer shell; 21. Guide groove; 22. Sliding door; 3. Traveling mechanism; 31. Gear rail; 32. Slide rail; 33. Slide saddle; 34. Motor mounting bracket; 35. Motor 1; 36. Traveling gear; 4. Rotary motor; 5. Telescopic arm assembly; 51. Motor 2; 52. Multi-stage telescopic rod; 6. Lifting mechanism; 61. Sleeve; 62. Drive gear; 63. Motor 3; 64. Guide rod; 65. Sleeve; 66. Rack; 7. Angle adjustment mechanism; 71. Clamping arm; 72. Motor 4; 73. Scanning electron microscope; 8. Storage platform; 9. Fixture; 10. Circuit board. Detailed Implementation

[0037] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0038] like Figures 1-5 As shown in the figure, this utility model provides a high-precision three-dimensional tomographic scanning device based on a FIB-SEM dual-beam system, including a chassis 1 and a scanning electron microscope 73. A traveling mechanism 3 is fixedly installed on the top of the chassis 1, and the traveling mechanism 3 is used for at least the rotational movement of the scanning electron microscope 73. A rotary motor 4 is installed above the traveling mechanism 3, and the rotary motor 4 is used for at least the rotational movement of the scanning electron microscope 73. A telescopic arm assembly 5 is installed above the rotary motor 4, and the telescopic arm assembly 5 is used for at least the horizontal position adjustment of the scanning electron microscope 73. A lifting mechanism 6 is fixedly installed at one end of the telescopic arm assembly 5, and the lifting mechanism 6 is used for at least the vertical position adjustment of the scanning electron microscope 73. An angle adjustment mechanism 7 is provided on one side of the lifting mechanism 6, and the angle adjustment mechanism 7 is used for at least the pitch angle adjustment of the scanning electron microscope 73. A storage platform 8 is fixedly installed on the top of the chassis 1, and several clamps 9 are provided on the outer wall of the top of the storage platform 8. A circuit board 10 fixed by the clamps 9 is installed above the storage platform 8.

[0039] In this embodiment, a chassis 1 and a scanning electron microscope 73 are included. The scanning electron microscope 73 scans and detects defects on the circuit board and transmits the data to a computer display screen.

[0040] Specifically, the front of the chassis 1 is provided with a door panel 11, and the door panel 11 is provided with a finger groove.

[0041] In this embodiment, a traveling mechanism 3 is fixedly installed on the top of the chassis 1. The traveling mechanism 3 is used at least for the rotational movement of the scanning electron microscope 73.

[0042] Specifically, the walking mechanism 3 includes a gear rail 31 fixedly installed on the top outer wall of the housing 1, and a slide rail 32 is provided on the inner side of the gear rail 31. The gear rail 31 and the slide rail 32 are an integral structure, and the height of the gear rail 31 is higher than that of the slide rail 32.

[0043] Specifically, a slide saddle 33 is slidably mounted on the slide rail 32, a motor mounting bracket 34 is fixedly mounted on one side of the slide saddle 33, a motor 35 is fixedly connected to the motor mounting bracket 34, a travel gear 36 is drivenly connected to the output shaft of the motor 35, and the travel gear 36 meshes with the inner wall of one side of the gear rail 31.

[0044] The motor 35 is started, which drives the traveling gear 36 to rotate. The traveling gear 36 meshes with the toothed rail 31, so the traveling gear 36 moves along the inner surface of the toothed rail 31. At the same time, the slide saddle 33 slides on the slide rail 32, which plays a guiding role and ensures the stability of the movement of the traveling gear 36. It can drive the scanning electron microscope 73 above to rotate along the toothed rail 31.

[0045] In this embodiment, a rotary motor 4 is installed above the walking mechanism 3, and the rotary motor 4 is used at least for the rotational movement of the scanning electron microscope 73.

[0046] Specifically, a connecting rod is fixedly installed at the bottom of the rotary motor 4, and the rotary motor 4 is fixed to the motor mounting bracket 34 through the connecting rod. When the rotary motor 4 is started, it can drive the scanning electron microscope 73 to rotate.

[0047] In this embodiment, a telescopic arm assembly 5 is installed above the rotary motor 4. The telescopic arm assembly 5 is used at least for adjusting the horizontal position of the scanning electron microscope 73.

[0048] Specifically, the telescopic arm assembly 5 includes a multi-stage telescopic rod 52. One end of the multi-stage telescopic rod 52 is equipped with a second motor 51. Activating the second motor 51 can drive the multi-stage telescopic rod 52 to extend and retract, thereby driving the scanning electron microscope 73 to move linearly in the horizontal direction and adjusting the horizontal position of the scanning electron microscope 73.

[0049] In this embodiment, a lifting mechanism 6 is fixedly installed at one end of the telescopic arm assembly 5. The lifting mechanism 6 is used at least for adjusting the vertical position of the scanning electron microscope 73.

[0050] Specifically, the lifting mechanism 6 includes a sleeve 61 fixed to one end of the multi-stage telescopic rod 52. Inside the sleeve 61, a drive gear 62 is installed via a support shaft. On one side of the sleeve 61, a motor 63 connected to the drive gear 62 is provided. When the motor 63 is started, it drives the drive gear 62 to rotate.

[0051] Specifically, a guide rod 64 is fixedly installed on one outer wall of the sleeve 61, and a sleeve 65 is slidably engaged on the guide rod 64. A rack 66 is meshed with one side of the drive gear 62. The rotation of the drive gear 62 drives the rack 66 to move up and down. At the same time, the sleeve 65 slides on the guide rod 64 to guide the movement. The lifting mechanism 6 drives the scanning electron microscope 73 to move up and down, so as to move the scanning electron microscope 73 closer to and further away from the circuit board 10.

[0052] In this embodiment, an angle adjustment mechanism 7 is provided on one side of the lifting mechanism 6. The angle adjustment mechanism 7 is used at least for adjusting the pitch angle of the scanning electron microscope 73.

[0053] Specifically, the angle adjustment mechanism 7 includes a clamping arm 71, a rack 66, and a ferrule 65, all of which are fixedly connected to the outer wall of one side of the clamping arm 71.

[0054] Specifically, the scanning electron microscope 73 is rotatably mounted inside the clamping arm 71. A motor 72 for driving the scanning electron microscope 73 to rotate is provided on one side of the clamping arm 71. When the motor 72 is started, the scanning electron microscope 73 can be rotated, thereby adjusting the pitch angle of the scanning electron microscope 73 to achieve the best angle for imaging and scanning of the circuit board 10.

[0055] In this embodiment, a storage platform 8 is fixedly installed on the top of the chassis 1, and a plurality of clamps 9 are provided on the outer wall of the top of the storage platform 8. A circuit board 10 fixed by the clamps 9 is installed above the storage platform 8.

[0056] In this embodiment, a housing 2 is fixedly installed on the top of the chassis 1, and the housing 2 is fitted over the outside of the scanning device;

[0057] Specifically, the front of the outer casing 2 is provided with a guide groove 21, and the two sides of the front of the outer casing 2 are provided with sliding doors 22. The inner side wall of the sliding door 22 is provided with a guide bar that slides into the guide groove 21. The operator can open and close the sliding door 22 by holding the handle, which facilitates the loading and unloading of the circuit board 10 for testing.

[0058] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-precision three-dimensional tomography device based on a FIB-SEM dual-beam system, comprising a cabinet (1) and a scanning electron microscope (73), characterized in that, A traveling mechanism (3) is fixedly installed on the top of the chassis (1), and the traveling mechanism (3) is used at least for the rotational movement of the scanning electron microscope (73); A rotary motor (4) is mounted above the walking mechanism (3), and the rotary motor (4) is used at least for the rotational movement of the scanning electron microscope (73); A telescopic arm assembly (5) is mounted above the rotary motor (4), and the telescopic arm assembly (5) is used at least for adjusting the horizontal position of the scanning electron microscope (73); A lifting mechanism (6) is fixedly installed at one end of the telescopic arm assembly (5), and the lifting mechanism (6) is used at least for adjusting the vertical position of the scanning electron microscope (73); An angle adjustment mechanism (7) is provided on one side of the lifting mechanism (6), and the angle adjustment mechanism (7) is used at least for adjusting the pitch angle of the scanning electron microscope (73); A storage platform (8) is fixedly installed on the top of the chassis (1). Several clamps (9) are provided on the outer wall of the top of the storage platform (8). A circuit board (10) fixed by the clamps (9) is installed above the storage platform (8).

2. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 1, characterized in that The top of the chassis (1) is fixedly installed with a shell (2), which is fitted over the outside of the scanning device; The front of the outer shell (2) is provided with a guide groove (21), and the two sides of the front of the outer shell (2) are provided with sliding doors (22). The inner side wall of the sliding door (22) is provided with a guide bar that is slidably inserted into the guide groove (21).

3. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 1, characterized in that, The front of the chassis (1) is provided with a door panel (11), and the door panel (11) is provided with a finger groove.

4. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 1, characterized in that, The walking mechanism (3) includes a toothed rail (31) fixedly installed on the top outer wall of the chassis (1), and a slide rail (32) is provided on the inner side of the toothed rail (31); A saddle (33) is slidably mounted on the slide rail (32). A motor mounting bracket (34) is fixedly mounted on one side of the saddle (33). A motor (35) is fixedly connected to the motor mounting bracket (34). A traveling gear (36) is drivenly connected to the output shaft of the motor (35). The traveling gear (36) meshes with the inner wall of one side of the gear rail (31). A connecting rod is fixedly provided at the bottom of the rotary motor (4), and the rotary motor (4) is fixed on the motor mounting bracket (34) through the connecting rod.

5. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 1, characterized in that, The telescopic arm assembly (5) includes a multi-stage telescopic rod (52), and a motor (51) is provided at one end of the multi-stage telescopic rod (52).

6. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 5, characterized in that The lifting mechanism (6) includes a sleeve (61) fixed to one end of the multi-stage telescopic rod (52). The sleeve (61) is equipped with a drive gear (62) through a support shaft. A motor (63) connected to the drive gear (62) is provided on one side of the sleeve (61). A guide rod (64) is fixedly installed on one side of the outer wall of the sleeve (61), and a sleeve (65) is slidably engaged on the guide rod (64). A rack (66) is meshed with one side of the drive gear (62).

7. The high-precision three-dimensional tomography device based on a FIB-SEM dual beam system according to claim 6, characterized in that The angle adjustment mechanism (7) includes a clamping arm (71), and the rack (66) and the sleeve (65) are both fixedly connected to the outer wall of one side of the clamping arm (71); The scanning electron microscope (73) is rotatably arranged inside the clamping arm (71), and one side of the clamping arm (71) is provided with a motor four (72) for driving the scanning electron microscope (73) to rotate.

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